Presented here are results of x-ray photoelectron spectroscopy(XPS) on multilayers of metal-sulfide binaries ZnS,SnS2, and Cu2S grown by atomic layer deposition(ALD) on Si substrates, and of Cu2ZnSnS4 (CZTS) formed upon 450 °C annealing of the parent multilayer ZnS/SnS2/Cu2S. Survey and detailed spectral analysis of the multilayer ZnS/SnS2/Cu2S are presented step-wise, as each layer was sequentially added by ALD. The set of data is finalized with spectra of the resulting alloy CZTS. XPSanalyses indicate significant mixing between SnS2 and Cu2S, which favors CZTS formation within the ALD approach.
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