The present investigation is devoted to the X-ray photoelectron spectroscopy (XPS) analysis of the main core levels (C 1s, O 1s, Dy 4d, Dy 3d) of a representative dysprosium(III) oxide thin film. The specimen was grown on Si(100) at 500 °C by metal organic chemical vapor deposition (MOCVD) starting from Dy((iPrN)2CNMe2)3 in an N2/O2 atmosphere. The above route yielded uniform and homogeneous nanostructured Dy2O3 films characterized by a remarkable reactivity towards atmospheric CO2 and H2O, resulting in the surface co-presence of dysprosium carbonates/bicarbonates and hydroxides. The most relevant spectral features are presented and discussed.
REFERENCES
1.
G. D.
Wilk
, R. M.
Wallace
, and J. M.
Anthony
, J. Appl. Phys.
89
, 5243
(2001
).2.
J.
Päiväsaari
, M.
Putkonen
, and L.
Niinistö
, Thin Solid Films
472
, 275
(2005
).3.
A. C.
Jones
, H. C.
Aspinall
, P. R.
Chalker
, R. J.
Potter
, K.
Kukli
, A.
Rahtu
, M.
Ritala
, and M.
Leskelä
, Mater. Sci. Eng. B
118
, 97
(2005
).4.
H. S.
Craft
, R.
Collazo
, Z.
Sitar
, and J. P.
Maria
, J. Vac. Sci. Technol., B
24
, 2105
(2006
).5.
S.
Jeon
and H.
Hwang
, J. Appl. Phys.
93
, 6393
(2003
).6.
R.
Thomas
, P.
Ehrhart
, M.
Roeckerath
, S.
van Elshocht
, E.
Rije
, M.
Luysberg
, M.
Boese
, J.
Schubert
, M.
Caymax
, and R.
Waser
, J. Electrochem. Soc.
154
, G147
(2007
).7.
A.
Milanov
, M.
Winter
, R. A.
Fischer
, and A.
Devi
, Inorg. Chem.
47
, 11405
(2008
).8.
Pattern No 022-0612 (JCPDS,
2004
).9.
A.
Devi
, W.
Rogge
, A.
Wohlfart
, F.
Hipler
, H. W.
Becker
, and R. A.
Fischer
, Chem. Vap. Deposition
6
, 245
(2000
).10.
D.
Briggs
and M. P.
Seah
, Practical Surface Analysis: Auger and X-ray Photoelectron Spectroscopy
(Wiley
, New York
, 1990
).11.
J. F.
Moulder
, W. F.
Stickle
, P. E.
Sobol
, and K. D.
Bomben
, Handbook of X-ray Photoelectron Spectroscopy
(Perkin Elmer Corporation
, Eden Prairie, MN
, 1992
).12.
D. D.
Sarma
and C. N. R.
Rao
, J. Electron Spectrosc. Relat. Phenom.
20
, 25
(1980
).13.
Y.
Uwamino
and T.
Ishizuka
, J. Electron Spectrosc. Relat. Phenom.
34
, 67
(1984
).14.
H.
Ogasawara
, A.
Kotani
, and B. T.
Thole
, Phys. Rev. B
50
, 12332
(1994
).15.
B. D.
Paladia
, W. C.
Lang
, P. R.
Norris
, L. M.
Watson
, and P. J.
Fabian
, Proc. Roy. Soc., Ser. A
354
, 269
(1977
).© 2006 American Vacuum Society.
2006
American Vacuum Society
You do not currently have access to this content.
