The principal core level XPS spectra of hafnium and hafnium nitride (HfN0.9) samples are presented comparatively. The hafnium nitride thin film has been grown by 3 keV nitrogen implantation up to saturation of metallic hafnium.

Topics
Thin films, Nitrides, Transition metals, X-ray photoelectron spectroscopy
2.
Spectra, version 6. R. Unwin. User Manual (1993).
© 2005 American Vacuum Society.
2005
American Vacuum Society

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