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Atomic Layer Deposition (ALD) (125)
Gallium Oxide Materials and Devices (79)
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE (67)
Special Topic Collection on Atomic Layer Deposition (ALD) (54)
2019 Special Collection on Atomic Layer Deposition (ALD) (44)
Atomic Layer Etching (ALE) (40)
Vacuum Nanoelectronics (40)
2018 Special Collection on Atomic Layer Deposition (ALD) (36)
Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (36)
Functional Coatings (35)

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