Epitaxial polycrystalline films were formed by vacuum evaporation onto (100) cleavage faces of NaCl at 200 °C under high vacuum conditions. The epitaxial relationships are given as follows: complex with average . Transmission electron microscopy and diffraction were used to study the structure and microstructure of these films. Their polycrystalline nature was inferred from the spot electron diffraction patterns. These showed that, two or more sets of epitaxial crystallites were oriented at certain definite angles relative to each other. Electron microscope dark field observations confirmed this interpretation. The complex electron diffraction patterns obtained from individual films were interpreted in terms of an extraordinary amount of double diffraction taking place at the edges between the various sets of crystallites.
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January 1970
Research Article|
January 01 1970
Epitaxial Polycrystalline Films
R. W. Vook;
R. W. Vook
Metallurgical Research Laboratories, Syracuse University, Syracuse, New York 13210
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M. Bujor
M. Bujor
Metallurgical Research Laboratories, Syracuse University, Syracuse, New York 13210
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J. Vac. Sci. Technol. 7, 115–117 (1970)
Article history
Received:
August 01 1969
Citation
R. W. Vook, M. Bujor; Epitaxial Polycrystalline Films. J. Vac. Sci. Technol. 1 January 1970; 7 (1): 115–117. https://doi.org/10.1116/1.1315765
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