Quantitative atom‐probe field‐ion microscopy (APFIM), x‐ray photoelectron spectroscopy (XPS), and qualitative secondary ion mass spectrometry (SIMS) have been applied in a phenomenological study of the modification in surface composition of copper–nickel targets by low energy ion sputtering. In agreement with the bulk of previously reported studies, XPS and SIMS data suggest the preferential loss of copper. APFIM data have revealed that the immediate surface layers remain unchanged in composition while a nickel‐enriched layer is found immediately subsurface. This result is in accord with recent studies using ion scattering spectroscopy.
Skip Nav Destination
Research Article| November 01 1982
A study of the sputtering of copper–nickel using a combination of techniques
Michael P. Thomas;
Michael P. Thomas, Brian Ralph; A study of the sputtering of copper–nickel using a combination of techniques. J. Vac. Sci. Technol. 1 November 1982; 21 (4): 986–993. https://doi.org/10.1116/1.571879
Download citation file:
Don't already have an account? Register
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Could not validate captcha. Please try again.