Alternate method of measuring ion‐beam‐irradiated areas

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Brief Report| November 01 1982

A. S. Bhalla;

A. S. Bhalla

Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802

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L. L. Tongson

Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802

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PubMed

J. Vac. Sci. Technol. 21, 1039–1040 (1982)

https://doi.org/10.1116/1.571860

A decoration technique is suggested for measuring the shape and size of ion beam spots. The method is tested for ⁴He⁺ incident on Gd₂(MoO₄)₃.

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1982

American Vacuum Society

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