Expressions are obtained for the outflow pattern from the orifices of a gas manifold in the molecular flow regime. The example considered in detail is a section of tubing with identical holes equally spaced along the tube. The manifold is characterized by k, the number of holes, and n, a conductance ratio. Example of outflow patterns for various values of n and k are given. The quantity kn−1/2 emerges as a figure of merit for uniform discharge. A simple experiment supports the usefulness of the model used.
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Research Article| November 01 1982
Guidelines for construction of low‐pressure gas manifolds
T. C. Paulick; Guidelines for construction of low‐pressure gas manifolds. J. Vac. Sci. Technol. 1 November 1982; 21 (4): 1032–1036. https://doi.org/10.1116/1.571858
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