An o‐ring‐sealed rotary feedthrough for UHV applications

Pararas, A.; Ceyer, S. T.; Yates, J. T.

doi:10.1116/1.571857

Article navigation

Research Article| November 01 1982

An o‐ring‐sealed rotary feedthrough for UHV applications

A. Pararas;

A. Pararas

Surface Science Division, National Bureau of Standards, Washington, D. C. 20234

Search for other works by this author on:

This Site

PubMed

Google Scholar

S. T. Ceyer;

S. T. Ceyer

Surface Science Division, National Bureau of Standards, Washington, D. C. 20234

Search for other works by this author on:

This Site

PubMed

Google Scholar

J. T. Yates, Jr.

Surface Science Division, National Bureau of Standards, Washington, D. C. 20234

Search for other works by this author on:

This Site

PubMed

Google Scholar

J. Vac. Sci. Technol. 21, 1031 (1982)

https://doi.org/10.1116/1.571857

A differentially pumped o‐ring‐sealed rotary feedthrough for ultrahigh vacuum applications is described. Its simplified design results in a significant reduction of machining requirements, compared to previous designs.

This content is only available via PDF.

1982

American Vacuum Society

You do not currently have access to this content.

Don't already have an account? Register

You could not be signed in. Please check your credentials and make sure you have an active account and try again.

26 Views

7 Web of Science

8 Crossref

An o‐ring‐sealed rotary feedthrough for UHV applications

Citing articles via

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

An o‐ring‐sealed rotary feedthrough for UHV applications

Sign in

Sign In

Sign in via your Institution

Citing articles via

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

This Feature Is Available To Subscribers Only