An o‐ring‐sealed rotary feedthrough for UHV applications

Pararas, A.; Ceyer, S. T.; Yates, J. T.

doi:10.1116/1.571857

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Research Article| November 01 1982

An o‐ring‐sealed rotary feedthrough for UHV applications

A. Pararas;

A. Pararas

Surface Science Division, National Bureau of Standards, Washington, D. C. 20234

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S. T. Ceyer;

S. T. Ceyer

Surface Science Division, National Bureau of Standards, Washington, D. C. 20234

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J. T. Yates, Jr.

Surface Science Division, National Bureau of Standards, Washington, D. C. 20234

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J. Vac. Sci. Technol. 21, 1031 (1982)

https://doi.org/10.1116/1.571857

A differentially pumped o‐ring‐sealed rotary feedthrough for ultrahigh vacuum applications is described. Its simplified design results in a significant reduction of machining requirements, compared to previous designs.

1982

American Vacuum Society

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An o‐ring‐sealed rotary feedthrough for UHV applications

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