Real‐time parylene coating thickness measurement using optical reflectometry

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Letter| September 01 1982

H. Kim;

H. Kim

Laboratory for Laser Energetics, University of Rochester, Rochester, New York 14623

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T. Powers;

T. Powers

Laboratory for Laser Energetics, University of Rochester, Rochester, New York 14623

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J. Mason

Laboratory for Laser Energetics, University of Rochester, Rochester, New York 14623

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J. Vac. Sci. Technol. 21, 900–901 (1982)

https://doi.org/10.1116/1.571847

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