A technique is presented for insitu measurements of contrast curves for electron beam vaporizable resists. Using a 1/2 nm diam beam of 100 keV electrons, we have etched lines, holes and patterns in NaCl crystals at the 2 nm size scale. Troughs about 1.5 nm wide on 4.5 nm centers and 2 nm diam holes have been etched completely through NaCl crystals more than 30 nm thick.

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