A comprehensive empirical study of chromium-glass adhesion is described. The experimental matrix includes variations in cleaning procedures, substrates, and vacuum treatments. Particular attention is given to glow discharge ambients, including active and noble gases. The effect of substrate heating was also investigated. The dynamic peel adhesion test was used for comparison of adhesion strengths, and this technique is described. The study was directed toward finding a process compatible with high-throughput production techniques. Quantitative data are given that compare various deposition regimes, and results show a significantly improved chromium deposition process for this particular class of substrates. Some general comments are made regarding the adhesion mechanism and other related phenomena.
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January 1974
Research Article|
January 01 1974
Adhesion of chromium films to soda lime glass
Neil M. Poley;
Neil M. Poley
International Business Machines Corporation, System Development Division, Kingston, New York 12401
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Howard L. Whitaker
Howard L. Whitaker
International Business Machines Corporation, System Development Division, Kingston, New York 12401
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J. Vac. Sci. Technol. 11, 114–118 (1974)
Article history
Received:
August 13 1973
Citation
Neil M. Poley, Howard L. Whitaker; Adhesion of chromium films to soda lime glass. J. Vac. Sci. Technol. 1 January 1974; 11 (1): 114–118. https://doi.org/10.1116/1.1318538
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