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Journal Articles

Is the linear relationship between the slope and intercept observed in field emission S-K plots an artifact?

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Anthony Ayari, Pascal Vincent, Sorin Perisanu, Philippe Poncharal, Stephen T. Purcell
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 053201 (2024)
https://doi.org/10.1116/6.0003828
Published: August 2024
View article titled, Is the linear relationship between the slope and intercept observed in field emission S-K plots an artifact?
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Journal Articles

Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications

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A. S. Stodolna, T. W. Mechielsen, P. van der Walle, C. Meekes, H. Lensen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052601 (2024)
https://doi.org/10.1116/6.0003701
Published: August 2024
View article titled, Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications
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Journal Articles

Science challenges and research opportunities for plasma applications in microelectronics

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David B. Graves, Catherine B. Labelle, Mark J. Kushner, Eray S. Aydil, Vincent M. Donnelly, Jane P. Chang, Peter Mayer, Lawrence Overzet, Steven Shannon, Shahid Rauf, David N. Ruzic
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042202 (2024)
https://doi.org/10.1116/6.0003531
Published: June 2024
View article titled, Science challenges and research opportunities for plasma applications in microelectronics
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Journal Articles

Monitoring of rapid thermal anneal with secondary ion mass spectrometry

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Z. X. Jiang, A. Ravi, T. Breeden, K. Khmelnitskiy, A. Duncan, D. Huynh, S. Butler, B. Granados, D. Acker, J. Luebbe, D. Sieloff, S. Bolton, G. Prieto
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034007 (2024)
https://doi.org/10.1116/6.0003599
Published: May 2024
View article titled, Monitoring of rapid thermal anneal with secondary ion mass spectrometry
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Journal Articles

X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline

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Kanta Yamamoto, Yuichi Utsumi, Ikuya Sakurai, Ikuo Okada, Kenji Hanada, Hidehiro Ishizawa, Masahiro Takeo, Taki Watanabe, Sho Amano, Satoru Suzuki, Koji Sumitomo, Akinobu Yamaguchi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062602 (2023)
https://doi.org/10.1116/6.0003021
Published: October 2023
View article titled, X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline
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Journal Articles

Rapid detection of radiation susceptible regions in electronics

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Sergei P. Stepanoff, Aman Haque, Fan Ren, Stephen Pearton, Douglas E. Wolfe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044005 (2023)
https://doi.org/10.1116/6.0002689
Published: June 2023
View article titled, Rapid detection of radiation susceptible regions in electronics
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Journal Articles

Chemical and electrical modifications of few-layer graphene films via sub-10 keV electron beam irradiation

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Karla Moyano, Carlos Reinoso, Steven Núñez, Beatriz Pérez, Cristian Santacruz, César Costa, Esteban Irribarra
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022804 (2023)
https://doi.org/10.1116/6.0002123
Published: March 2023
View article titled, Chemical and electrical modifications of few-layer graphene films via sub-10 keV electron beam irradiation
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Journal Articles

In situ electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires

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Lucas B. Spejo, José L. Arrieta-Concha, Marcos V. Puydinger dos Santos, Angélica D. Barros, José A. Diniz, Renato A. Minamisawa
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 024002 (2023)
https://doi.org/10.1116/6.0002246
Published: March 2023
View article titled, <em>In situ</em> electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires
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Includes: Supplementary data
Journal Articles

Evaluation of dry stored disposable sensor strip on rapid SARS-CoV-2 detection platform

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Chao-Ching Chiang, Chan-Wen Chiu, Fan Ren, Cheng-Tse Tsai, Yu-Te Liao, Josephine F. Esquivel-Upshaw, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012204 (2023)
https://doi.org/10.1116/6.0002293
Published: December 2022
View article titled, Evaluation of dry stored disposable sensor strip on rapid SARS-CoV-2 detection platform
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Journal Articles

Pneumatic controlled nanosieve for efficient capture and release of nanoparticles

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Animesh Nanaware, Taylor Kranbuhl, Jesus Ching, Janice S. Chen, Xinye Chen, Qingsong Tu, Ke Du
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 063002 (2022)
https://doi.org/10.1116/6.0002107
Published: December 2022
View article titled, Pneumatic controlled nanosieve for efficient capture and release of nanoparticles
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Includes: Supplementary data
Journal Articles

Persistent iodine contamination resulting from thermal evaporation of inorganic perovskites

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Quinn C. Burlingame, Alan B. Kaplan, Tianran Liu, Yueh-Lin Loo
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 060601 (2022)
https://doi.org/10.1116/6.0002174
Published: October 2022
View article titled, Persistent iodine contamination resulting from thermal evaporation of inorganic perovskites
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Journal Articles

Fabrication of microstructures on curved hydrogel substrates

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M. Chen, X. Ding, L. Que, X. Liang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 052804 (2022)
https://doi.org/10.1116/6.0002071
Published: September 2022
View article titled, Fabrication of microstructures on curved hydrogel substrates
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Journal Articles

Multiple connected artificial synapses based on electromigrated Au nanogaps

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Keita Sakai, Mamiko Yagi, Mitsuki Ito, Jun-ichi Shirakashi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 053202 (2022)
https://doi.org/10.1116/6.0002081
Published: September 2022
View article titled, Multiple connected artificial synapses based on electromigrated Au nanogaps
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Journal Articles

Application of deep-learning based techniques for automatic metrology on scanning and transmission electron microscopy images

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J. Baderot, M. Grould, D. Misra, N. Clément, A. Hallal, S. Martinez, J. Foucher
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 054003 (2022)
https://doi.org/10.1116/6.0001988
Published: September 2022
View article titled, Application of deep-learning based techniques for automatic metrology on scanning and transmission electron microscopy images
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Journal Articles

AlGaN nanowire deep ultraviolet LEDs with polarization enhanced tunnel junction and p-AlGaN layer by molecular beam epitaxy

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Mohammad Fazel Vafadar, Songrui Zhao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 050602 (2022)
https://doi.org/10.1116/6.0002037
Published: September 2022
View article titled, AlGaN nanowire deep ultraviolet LEDs with polarization enhanced tunnel junction and p-AlGaN layer by molecular beam epitaxy
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Journal Articles

Molecular dynamics study of silicon atomic layer etching by chlorine gas and argon ions

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Joseph R. Vella, David Humbird, David B. Graves
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 40, 023205 (2022)
https://doi.org/10.1116/6.0001681
Published: February 2022
View article titled, Molecular dynamics study of silicon atomic layer etching by chlorine gas and argon ions
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Includes: Supplementary data
Journal Articles

Planar figure-8 coils for ultra-focal and directional micromagnetic brain stimulation

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Hongbae Jeong, Jiangdong Deng, Giorgio Bonmassar
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 063202 (2021)
https://doi.org/10.1116/6.0001281
Published: October 2021
View article titled, Planar figure-8 coils for ultra-focal and directional micromagnetic brain stimulation
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Journal Articles

Lithographically patterned stretchable metallic microwiring on electrospun nanofiber mats

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Yutika Badhe, Pedro E. Rocha-Flores, Walter E. Voit, David Remer, Lauren Costella, Alexandra Joshi-Imre
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 062801 (2021)
https://doi.org/10.1116/6.0001279
Published: October 2021
View article titled, Lithographically patterned stretchable metallic microwiring on electrospun nanofiber mats
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Journal Articles

Ultraviolet light stimulated water desorption effect on emission performance of gated field emitter array

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Ranajoy Bhattacharya, Nedeljko Karaulac, Girish Rughoobur, Winston Chern, Akintunade Ibitayo Akinwande, Jim Browning
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 033201 (2021)
https://doi.org/10.1116/6.0001036
Published: May 2021
View article titled, Ultraviolet light stimulated water desorption effect on emission performance of gated field emitter array
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Journal Articles

Nanofabrication of silicon surfaces for reduced virus adhesion

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Ao Guo, Y. Carol Shieh, Ralu Divan, Rong R. Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 39, 012801 (2021)
https://doi.org/10.1116/6.0000548
Published: January 2021
View article titled, Nanofabrication of silicon surfaces for reduced virus adhesion
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Includes: Supplementary data