Skip Nav Destination

Available to Purchase

Open Access

Available to Purchase
Available to Purchase

Available to Purchase

Available to Purchase
Available to Purchase

Available to Purchase

Available to Purchase

Available to Purchase

Available to Purchase

Available to Purchase
Available to Purchase
Available to Purchase
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Date
Availability
1-20 of 39
Scilight
Close
Journal Articles
J. Vac. Sci. Technol. B 43, 044203 (2025)
Published: July 2025
Journal Articles
Is the linear relationship between the slope and intercept observed in field emission S-K plots an artifact?
J. Vac. Sci. Technol. B 42, 053201 (2024)
Published: August 2024
Journal Articles
Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications
J. Vac. Sci. Technol. B 42, 052601 (2024)
Published: August 2024
Journal Articles
Science challenges and research opportunities for plasma applications in microelectronics
David B. Graves, Catherine B. Labelle, Mark J. Kushner, Eray S. Aydil, Vincent M. Donnelly, Jane P. Chang, Peter Mayer, Lawrence Overzet, Steven Shannon, Shahid Rauf, David N. Ruzic
J. Vac. Sci. Technol. B 42, 042202 (2024)
Published: June 2024
Journal Articles
Z. X. Jiang, A. Ravi, T. Breeden, K. Khmelnitskiy, A. Duncan, D. Huynh, S. Butler, B. Granados, D. Acker, J. Luebbe, D. Sieloff, S. Bolton, G. Prieto
J. Vac. Sci. Technol. B 42, 034007 (2024)
Published: May 2024
Journal Articles
X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline
Kanta Yamamoto, Yuichi Utsumi, Ikuya Sakurai, Ikuo Okada, Kenji Hanada, Hidehiro Ishizawa, Masahiro Takeo, Taki Watanabe, Sho Amano, Satoru Suzuki, Koji Sumitomo, Akinobu Yamaguchi
J. Vac. Sci. Technol. B 41, 062602 (2023)
Published: October 2023
Journal Articles
J. Vac. Sci. Technol. B 41, 044005 (2023)
Published: June 2023
Journal Articles
Chemical and electrical modifications of few-layer graphene films via sub-10 keV electron beam irradiation
Karla Moyano, Carlos Reinoso, Steven Núñez, Beatriz Pérez, Cristian Santacruz, César Costa, Esteban Irribarra
J. Vac. Sci. Technol. B 41, 022804 (2023)
Published: March 2023
Journal Articles
In situ electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires
Lucas B. Spejo, José L. Arrieta-Concha, Marcos V. Puydinger dos Santos, Angélica D. Barros, José A. Diniz, Renato A. Minamisawa
J. Vac. Sci. Technol. B 41, 024002 (2023)
Published: March 2023
Includes: Supplementary data
Journal Articles
Evaluation of dry stored disposable sensor strip on rapid SARS-CoV-2 detection platform
Chao-Ching Chiang, Chan-Wen Chiu, Fan Ren, Cheng-Tse Tsai, Yu-Te Liao, Josephine F. Esquivel-Upshaw, Stephen J. Pearton
J. Vac. Sci. Technol. B 41, 012204 (2023)
Published: December 2022
Journal Articles
Pneumatic controlled nanosieve for efficient capture and release of nanoparticles
J. Vac. Sci. Technol. B 40, 063002 (2022)
Published: December 2022
Includes: Supplementary data
Journal Articles
Persistent iodine contamination resulting from thermal evaporation of inorganic perovskites
J. Vac. Sci. Technol. B 40, 060601 (2022)
Published: October 2022
Journal Articles
J. Vac. Sci. Technol. B 40, 052804 (2022)
Published: September 2022
Journal Articles
J. Vac. Sci. Technol. B 40, 053202 (2022)
Published: September 2022
Journal Articles
Application of deep-learning based techniques for automatic metrology on scanning and transmission electron microscopy images
J. Vac. Sci. Technol. B 40, 054003 (2022)
Published: September 2022
Journal Articles
AlGaN nanowire deep ultraviolet LEDs with polarization enhanced tunnel junction and p-AlGaN layer by molecular beam epitaxy
J. Vac. Sci. Technol. B 40, 050602 (2022)
Published: September 2022
Journal Articles
Molecular dynamics study of silicon atomic layer etching by chlorine gas and argon ions
J. Vac. Sci. Technol. B 40, 023205 (2022)
Published: February 2022
Includes: Supplementary data
Journal Articles
Lithographically patterned stretchable metallic microwiring on electrospun nanofiber mats
Yutika Badhe, Pedro E. Rocha-Flores, Walter E. Voit, David Remer, Lauren Costella, Alexandra Joshi-Imre
J. Vac. Sci. Technol. B 39, 062801 (2021)
Published: October 2021
Journal Articles
Planar figure-8 coils for ultra-focal and directional micromagnetic brain stimulation
J. Vac. Sci. Technol. B 39, 063202 (2021)
Published: October 2021
Journal Articles
Ranajoy Bhattacharya, Nedeljko Karaulac, Girish Rughoobur, Winston Chern, Akintunade Ibitayo Akinwande, Jim Browning
J. Vac. Sci. Technol. B 39, 033201 (2021)
Published: May 2021
1