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Journal Articles

Constant period line gratings as a metric for patterning fidelity in electron beam lithography

Editor’s Pick
C. R. Fasano, F. Cruz Aguirre, C. T. DeRoo, K. Hoadley, J. A. B. Termini
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 064001 (2024)
https://doi.org/10.1116/6.0003958
Published: October 2024
View article titled, Constant period line gratings as a metric for patterning fidelity in electron beam lithography
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Journal Articles

Aperiodic multilayer masks for M3D mitigation in high- and hyper-NA extreme ultraviolet lithography

Editor’s Pick
W. Ethan Maguire, Bruce W. Smith
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 062601 (2024)
https://doi.org/10.1116/6.0003927
Published: September 2024
View article titled, Aperiodic multilayer masks for M3D mitigation in high- and hyper-NA extreme ultraviolet lithography
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Journal Articles

Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates

Editor’s Pick
B. Claflin, G. J. Grzybowski, S. Zollner, B. R. Rogers, T. A. Cooper, D. C. Look
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052204 (2024)
https://doi.org/10.1116/6.0003689
Published: August 2024
View article titled, Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates
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Journal Articles

Effects of athermal carrier injection on Co-60 gamma-ray damage in SiC merged-PiN Schottky diodes

Editor’s Pick
Jian-Sian Li, Chao-Ching Chiang, Hsiao-Hsuan Wan, Sergei P. Stepanoff, Fan Ren, Aman Haque, Douglas Wolfe, S. J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052203 (2024)
https://doi.org/10.1116/6.0003819
Published: August 2024
View article titled, Effects of athermal carrier injection on Co-60 gamma-ray damage in SiC merged-PiN Schottky diodes
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Journal Articles

Study of selected mild steels for application in vacuum systems of future gravitational wave detectors

Editor’s Pick
Carlo Scarcia, Giuseppe Bregliozzi, Paolo Chiggiato, Alice Ingrid Michet, Ana Teresa Perez Fontenla, Martino Rimoldi, Mauro Taborelli, Ivo Wevers
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 054202 (2024)
https://doi.org/10.1116/6.0003820
Published: August 2024
View article titled, Study of selected mild steels for application in vacuum systems of future gravitational wave detectors
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Journal Articles

Study on geometry-dependent n+-InGaN regrowth via MOCVD for AlN/GaN ohmic contact application

Editor’s Pick
Yu-Xi Zhou, Jie-Jie Zhu, Jing-Shu Guo, Ling-Jie Qin, Bo-Wen Zhang, Meng-Di Li, Ming-Chen Zhang, Xiao-Hua Ma
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052201 (2024)
https://doi.org/10.1116/6.0003690
Published: August 2024
View article titled, Study on geometry-dependent n<sup>+</sup>-InGaN regrowth via MOCVD for AlN/GaN ohmic contact application
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Journal Articles

Honeycomb-shaped vertically aligned carbon nanotubes decorated with molybdenum trioxide as an electrochemical sensor for glucose

Editor’s Pick
Lei Hu, Yu-Chiao Huang, Yung-Jui Huang, Pao-Hung Lin, Huan-Chun Wang, Kuei-Yi Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 044005 (2024)
https://doi.org/10.1116/6.0003677
Published: July 2024
View article titled, Honeycomb-shaped vertically aligned carbon nanotubes decorated with molybdenum trioxide as an electrochemical sensor for glucose
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Journal Articles

Development of aspect ratio trapping growth of GeSn on Si for midwave infrared applications

Editor’s Pick
Hryhorii Stanchu, Grey Abernathy, Joshua Grant, Fernando M. de Oliveira, Yuriy I. Mazur, Jifeng Liu, Wei Du, Baohua Li, Gregory J. Salamo, Shui-Qing Yu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042802 (2024)
https://doi.org/10.1116/6.0003734
Published: July 2024
View article titled, Development of aspect ratio trapping growth of GeSn on Si for midwave infrared applications
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Journal Articles

Compositional dependence of direct transition energies in SixGe1−x−ySny alloys lattice-matched to Ge/GaAs

Editor’s Pick
Phoebe M. Pearce, Sheau Wei Ong, Andrew D. Johnson, Eng Soon Tok, Nicholas J. Ekins-Daukes
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042206 (2024)
https://doi.org/10.1116/6.0003737
Published: June 2024
View article titled, Compositional dependence of direct transition energies in Si<sub><em>x</em></sub>Ge<sub>1−<em>x</em>−<em>y</em></sub>Sn<sub><em>y</em></sub> alloys lattice-matched to Ge/GaAs
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Journal Articles

Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications

Editor’s Pick
Haochen Zhao, Suho Park, Guangyang Lin, Yuying Zhang, Tuofu Zhama, Chandan Samanta, Lorry Chang, Xiaofeng Zhu, Xu Feng, Kevin O. Díaz-Aponte, Lin Cong, Yuping Zeng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042205 (2024)
https://doi.org/10.1116/6.0003561
Published: June 2024
View article titled, Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications
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Includes: Supplementary data
Journal Articles

Effect of inductively coupled plasma etch on the interface barrier behavior of (001) β-Ga2O3 Schottky barrier diode

Editor’s Pick
Hoon-Ki Lee, V. Janardhanam, Woojin Chang, Kyujun Cho, Chel-Jong Choi, Jae Kyoung Mun
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042204 (2024)
https://doi.org/10.1116/6.0003608
Published: June 2024
View article titled, Effect of inductively coupled plasma etch on the interface barrier behavior of (001) <em>β</em>-Ga<sub>2</sub>O<sub>3</sub> Schottky barrier diode
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Journal Articles

Generation of broadband optical chaos at mid-infrared wavelength with an interband cascade laser

Editor’s Pick
O. Spitz, Y. B. Shuai, S. Zhao, P. Didier, D. A. Díaz-Thomas, A. N. Baranov, L. Cerutti, D. Rontani, J. Wu, F. Grillot
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032213 (2024)
https://doi.org/10.1116/6.0003572
Published: May 2024
View article titled, Generation of broadband optical chaos at mid-infrared wavelength with an interband cascade laser
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Journal Articles

Temperature-induced degradation of GaN HEMT: An in situ heating study

Editor’s Pick
Md Abu Jafar Rasel, Di Zhang, Aiping Chen, Melonie Thomas, Stephen D. House, Winson Kuo, John Watt, Ahmad Islam, Nicholas Glavin, M. Smyth, Aman Haque, Douglas E. Wolfe, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032209 (2024)
https://doi.org/10.1116/6.0003490
Published: April 2024
View article titled, Temperature-induced degradation of GaN HEMT: An <em>in situ</em> heating study
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Includes: Supplementary data
Journal Articles

Phase-shifted counterpropagating atmospheric pressure plasma jets: Characterization and interaction with materials

Editor’s Pick
Michael J. Johnson, Gabriel H. Brown, David R. Boris, Tzvetelina B. Petrova, Scott G. Walton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034004 (2024)
https://doi.org/10.1116/6.0003485
Published: April 2024
View article titled, Phase-shifted counterpropagating atmospheric pressure plasma jets: Characterization and interaction with materials
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Journal Articles

Plasma confinement by an optoelectronic system

Editor’s Pick
Ryuta Tsukazaki (塚嵜 琉太), Haruhiro Naito (内藤 陽大), Hisashi Koga (古賀 永), Akito Fukuda (福田 旺土), Naoki Kato (加藤 直樹), Takayuki Watanabe (渡辺 貴之), Susumu Takabayashi (鷹林 将)
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034201 (2024)
https://doi.org/10.1116/6.0003520
Published: April 2024
View article titled, Plasma confinement by an optoelectronic system
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Includes: Supplementary data
Journal Articles

Effects of ion implantation with arsenic and boron in germanium-tin layers

Editor’s Pick
Sylvester Amoah, Hryhorii Stanchu, Grey Abernathy, Serhii Kryvyi, Fernando M. De Oliveira, Yuriy I. Mazur, Shangda Li, Shang Liu, Jifeng Liu, Wei Du, Baohua Li, Gregory Salamo, Shui-Qing Yu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034002 (2024)
https://doi.org/10.1116/6.0003565
Published: April 2024
View article titled, Effects of ion implantation with arsenic and boron in germanium-tin layers
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Includes: Supplementary data
Journal Articles

Temperature-dependent morphology and composition of ultra-thin GeSn epilayers prepared by remote plasma enhanced chemical vapor deposition

Editor’s Pick
Jiechao Jiang, Nonso Martin Chetuya, Efstathios I. Meletis, Joseph H. Ngai, Gordon J. Grzybowski, Bruce Claflin
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034001 (2024)
https://doi.org/10.1116/6.0003445
Published: March 2024
View article titled, Temperature-dependent morphology and composition of ultra-thin GeSn epilayers prepared by remote plasma enhanced chemical vapor deposition
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Journal Articles

Stable and low loss oxide layer on α-Ta (110) film for superconducting qubits

Editor’s Pick
Zengqian Ding, Boyi Zhou, Tao Wang, Lina Yang, Yanfu Wu, Xiao Cai, Kanglin Xiong, Jiagui Feng
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022209 (2024)
https://doi.org/10.1116/6.0003368
Published: February 2024
View article titled, Stable and low loss oxide layer on α-Ta (110) film for superconducting qubits
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Includes: Supplementary data
Journal Articles

Continuous wave interband cascade lasers near 13 μm

Editor’s Pick
Yixuan Shen, Rui Q. Yang, S. D. Hawkins, A. J. Muhowski
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022206 (2024)
https://doi.org/10.1116/6.0003365
Published: February 2024
View article titled, Continuous wave interband cascade lasers near 13 <em>μ</em>m
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Journal Articles

Room temperature inductively coupled plasma etching of InP with Cl2 mixtures using SiO2 and photoresist masks

Editor’s Pick
Qingyue Li, Claire Deeb, Hélène Debregeas, Jean-Luc Pelouard
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 022205 (2024)
https://doi.org/10.1116/6.0003295
Published: February 2024
View article titled, Room temperature inductively coupled plasma etching of InP with Cl<sub>2</sub> mixtures using SiO<sub>2</sub> and photoresist masks
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