1-20 of 159
Editor’s Pick
Close
Save search
Follow your search
Access your saved searches in your account
Close Modal
Sort by
Journal Articles

Investigation of tetrakis(ethylmethylamido)hafnium adsorption mechanism in initial growth of atomic layer deposited-HfO2 thin films on H-/OH-terminated Si (100) surfaces

Jihye Park, Minji Jeong, Young Joon Cho, Kyung Joong Kim, Truong Ba Tai, Hyeyoung Shin, Jong Chul Lim, Hyo Sik Chang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062801 (2023)
https://doi.org/10.1116/6.0002920
Published: September 2023
View article titled, Investigation of tetrakis(ethylmethylamido)hafnium adsorption mechanism in initial growth of atomic layer deposited-HfO<sub>2</sub> thin films on H-/OH-terminated Si (100) surfaces
Open the PDF for Investigation of tetrakis(ethylmethylamido)hafnium adsorption mechanism in initial growth of atomic layer deposited-HfO<sub>2</sub> thin films on H-/OH-terminated Si (100) surfaces in another window
Includes: Supplementary data
Journal Articles

Design and large-scale nanofabrication of plasmonic solar light absorbers

M. Serra González, M. Keil, R. Deshpande, S. Kadkhodazadeh, N. Okulova, R. J. Taboryski
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 063601 (2023)
https://doi.org/10.1116/6.0002998
Published: September 2023
View article titled, Design and large-scale nanofabrication of plasmonic solar light absorbers
Open the PDF for Design and large-scale nanofabrication of plasmonic solar light absorbers in another window
Includes: Supplementary data
Journal Articles

Exploring oxide-nitride-oxide scalloping behavior with small gap structure and chemical analysis after fluorocarbon or hydrofluorocarbon plasma processing

Sang-Jin Chung, Pingshan Luan, Minjoon Park, Andrew Metz, Gottlieb S. Oehrlein
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062201 (2023)
https://doi.org/10.1116/6.0002868
Published: September 2023
View article titled, Exploring oxide-nitride-oxide scalloping behavior with small gap structure and chemical analysis after fluorocarbon or hydrofluorocarbon plasma processing
Open the PDF for Exploring oxide-nitride-oxide scalloping behavior with small gap structure and chemical analysis after fluorocarbon or hydrofluorocarbon plasma processing in another window
Includes: Supplementary data
Journal Articles

Top electrode dependence of the write-once-read-many-times resistance switching in BiFeO3 films

Yajun Fu, Wei Tang, Jin Wang, Linhong Cao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052207 (2023)
https://doi.org/10.1116/6.0002946
Published: September 2023
View article titled, Top electrode dependence of the write-once-read-many-times resistance switching in BiFeO<sub>3</sub> films
Open the PDF for Top electrode dependence of the write-once-read-many-times resistance switching in BiFeO<sub>3</sub> films in another window
Journal Articles

Interpolation and difference optimized machine learning model for accurate prediction of silicon etching depth with small sample dataset

Ye Yang, Yang Xu
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052602 (2023)
https://doi.org/10.1116/6.0002823
Published: August 2023
View article titled, Interpolation and difference optimized machine learning model for accurate prediction of silicon etching depth with small sample dataset
Open the PDF for Interpolation and difference optimized machine learning model for accurate prediction of silicon etching depth with small sample dataset in another window
Includes: Supplementary data
Journal Articles

Plasma-induced energy band evolution for two-dimensional heterogeneous anti-ambipolar transistors

Simran Shahi, Asma Ahmed, Ruizhe Yang, Anthony Cabanillas, Anindita Chakravarty, Maomao Liu, Hemendra Nath Jaiswal, Yu Fu, Yutong Guo, Satyajeetsinh Shaileshsin Jadeja, Hariharan Murugesan, Anthony Butler, Chu Te Chen, Joel Muhigirwa, Mohamed Enaitalla, Jun Liu, Fei Yao, Huamin Li
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 053202 (2023)
https://doi.org/10.1116/6.0002888
Published: August 2023
View article titled, Plasma-induced energy band evolution for two-dimensional heterogeneous anti-ambipolar transistors
Open the PDF for Plasma-induced energy band evolution for two-dimensional heterogeneous anti-ambipolar transistors in another window
Includes: Supplementary data
Journal Articles

Strong-field electron emission from gold needle tips

Jonas Heimerl, Stefan Meier, Adrian Kirchner, Tobias Weitz, Peter Hommelhoff
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052803 (2023)
https://doi.org/10.1116/6.0002916
Published: August 2023
View article titled, Strong-field electron emission from gold needle tips
Open the PDF for Strong-field electron emission from gold needle tips in another window
Journal Articles

Electrochemical imaging correlated to hydrogen evolution reaction on transition metal dichalcogenide, WS2

Akichika Kumatani, Hiroto Ogawa, Takahiko Endo, Yu Kobayashi, Jana Lustikova, Hiroki Ida, Yasufumi Takahashi, Tomokazu Matsue, Yasumitsu Miyata, Hitoshi Shiku
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052401 (2023)
https://doi.org/10.1116/6.0002706
Published: August 2023
View article titled, Electrochemical imaging correlated to hydrogen evolution reaction on transition metal dichalcogenide, WS<sub>2</sub>
Open the PDF for Electrochemical imaging correlated to hydrogen evolution reaction on transition metal dichalcogenide, WS<sub>2</sub> in another window
Journal Articles

Measuring and understanding the nanomechanical properties of halide perovskites and their correlation to structure—A perspective

Irit Rosenhek-Goldian, David Cahen, Sidney R. Cohen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 058501 (2023)
https://doi.org/10.1116/6.0002794
Published: August 2023
View article titled, Measuring and understanding the nanomechanical properties of halide perovskites and their correlation to structure—A perspective
Open the PDF for Measuring and understanding the nanomechanical properties of halide perovskites and their correlation to structure—A perspective in another window
Journal Articles

Coaxial ion source: Pressure dependence of gas flow and field ion emission

D. Bedrane, A. Houël, A. Delobbe, M. Lagaize, Ph. Dumas, S. Veesler, E. Salançon
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042808 (2023)
https://doi.org/10.1116/6.0002795
Published: July 2023
View article titled, Coaxial ion source: Pressure dependence of gas flow and field ion emission
Open the PDF for Coaxial ion source: Pressure dependence of gas flow and field ion emission in another window
Journal Articles

High-quality GeSn thin-film resonant cavities for short-wave infrared applications

Jheng-Ying Wu, Yu-Fu Wang, Chia-You Liu, Shin-Chun Kuo, Tzu-Hsuan Chen, Jiun-Yun Li, Chin-Ya Huang, Chien-Hao Liu, Jung-Yen Yang, Chun-Chieh Chang, Tzu-Hsuan Chang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042202 (2023)
https://doi.org/10.1116/6.0002525
Published: June 2023
View article titled, High-quality GeSn thin-film resonant cavities for short-wave infrared applications
Open the PDF for High-quality GeSn thin-film resonant cavities for short-wave infrared applications in another window
Includes: Supplementary data
Journal Articles

Noise reduction and peak detection in x-ray diffraction data by linear and nonlinear methods

Long V. Le, Jeroen A. Deijkers, Young D. Kim, Haydn N. G. Wadley, David E. Aspnes
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044004 (2023)
https://doi.org/10.1116/6.0002526
Published: June 2023
View article titled, Noise reduction and peak detection in x-ray diffraction data by linear and nonlinear methods
Open the PDF for Noise reduction and peak detection in x-ray diffraction data by linear and nonlinear methods in another window
Includes: Supplementary data
Journal Articles

Defect formation in InGaAs/AlSb/InAs memory devices

Aurelia Trevisan, Peter D. Hodgson, Dominic Lane, Manus Hayne, Paul M. Koenraad
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044001 (2023)
https://doi.org/10.1116/6.0002677
Published: May 2023
View article titled, Defect formation in InGaAs/AlSb/InAs memory devices
Open the PDF for Defect formation in InGaAs/AlSb/InAs memory devices in another window
Journal Articles

Electronic structure of InSb (001), (110), and (111)B surfaces

Jason T. Dong, Hadass S. Inbar, Mihir Pendharkar, Teun A. J. van Schijndel, Elliot C. Young, Connor P. Dempsey, Christopher J. Palmstrøm
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 032808 (2023)
https://doi.org/10.1116/6.0002606
Published: May 2023
View article titled, Electronic structure of InSb (001), (110), and (111)B surfaces
Open the PDF for Electronic structure of InSb (001), (110), and (111)B surfaces in another window
Includes: Supplementary data
Journal Articles

Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication

Chen Zhu, Edward C. Kinzel
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 033601 (2023)
https://doi.org/10.1116/6.0002557
Published: May 2023
View article titled, Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication
Open the PDF for Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication in another window
Journal Articles

Chemical mechanical planarization for Ta-based superconducting quantum devices

Ekta Bhatia, Soumen Kar, Jakub Nalaskowski, Tuan Vo, Stephen Olson, Hunter Frost, John Mucci, Brian Martinick, Pui Yee Hung, Ilyssa Wells, Sandra Schujman, Satyavolu S. Papa Rao
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 033202 (2023)
https://doi.org/10.1116/6.0002586
Published: April 2023
View article titled, Chemical mechanical planarization for Ta-based superconducting quantum devices
Open the PDF for Chemical mechanical planarization for Ta-based superconducting quantum devices in another window
Journal Articles

Fabrication of high quality X-ray source by gated vertically aligned carbon nanotube field emitters

Yi Yin Yu, Kyu Chang Park
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 023203 (2023)
https://doi.org/10.1116/6.0002284
Published: March 2023
View article titled, Fabrication of high quality X-ray source by gated vertically aligned carbon nanotube field emitters
Open the PDF for Fabrication of high quality X-ray source by gated vertically aligned carbon nanotube field emitters in another window
Journal Articles

Temperature dependence of the infrared dielectric function and the direct bandgap of InSb from 80 to 725 K

Melissa Rivero Arias, Carlos A. Armenta, Carola Emminger, Cesy M. Zamarripa, Nuwanjula S. Samarasingha, Jaden R. Love, Sonam Yadav, Stefan Zollner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022203 (2023)
https://doi.org/10.1116/6.0002326
Published: February 2023
View article titled, Temperature dependence of the infrared dielectric function and the direct bandgap of InSb from 80 to 725 K
Open the PDF for Temperature dependence of the infrared dielectric function and the direct bandgap of InSb from 80 to 725 K in another window
Includes: Supplementary data
Journal Articles

Fabrication of plasmonic Au nanostructures on dielectric supports using 10 keV electron beam lithography and tests for SERS biodetection

Haseeb Ahmed, Min Wu, Maria Stepanova
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 022202 (2023)
https://doi.org/10.1116/6.0002108
Published: February 2023
View article titled, Fabrication of plasmonic Au nanostructures on dielectric supports using 10 keV electron beam lithography and tests for SERS biodetection
Open the PDF for Fabrication of plasmonic Au nanostructures on dielectric supports using 10 keV electron beam lithography and tests for SERS biodetection in another window
Includes: Supplementary data
Journal Articles

Measurements of ion fluxes in extreme ultraviolet-induced plasma of new EUV-beam-line 2 nanolithography research machine and their applications for optical component tests

J. van Veldhoven, C.-C. Wu, A. J. Storm, M. van Putten, J. R. Meijlink, A. G. Ushakov
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 012603 (2023)
https://doi.org/10.1116/6.0002132
Published: January 2023
View article titled, Measurements of ion fluxes in extreme ultraviolet-induced plasma of new EUV-beam-line 2 nanolithography research machine and their applications for optical component tests
Open the PDF for Measurements of ion fluxes in extreme ultraviolet-induced plasma of new EUV-beam-line 2 nanolithography research machine and their applications for optical component tests in another window