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Journal Articles

Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering

Akihiro Shimizu, Kazuhiro Fukada, Shinichi Endo

J. Vac. Sci. Technol. B 43, 023203 (2025)

https://doi.org/10.1116/6.0004239

Published: February 2025

View articletitled, Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering

Journal Articles

Measurement of field emission array current distributions by metal-coated CMOS image sensors

Mattias Hausladen, Andreas Schels, Philipp Buchner, Mathias Bartl, Ali Asgharzade, Simon Edler, Dominik Wohlfartsstätter, Michael Bachmann, Rupert Schreiner

J. Vac. Sci. Technol. B 42, 062209 (2024)

https://doi.org/10.1116/6.0004074

Published: November 2024

View articletitled, Measurement of field emission array current distributions by metal-coated CMOS image sensors

Journal Articles

Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask

Shiyang Li, Shuhu Huan, Tao Ren, Ying Liu, Yilin Hong, Shaojun Fu

J. Vac. Sci. Technol. B 42, 062603 (2024)

https://doi.org/10.1116/6.0003946

Published: November 2024

View articletitled, Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask

Journal Articles

Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning

Yasser Pordeli, Céline Steenge, Erwin J. W. Berenschot, Ray J. E. Hueting, Andrea Migliorini, Stuart S. P. Parkin, Niels R. Tas

J. Vac. Sci. Technol. B 42, 062805 (2024)

https://doi.org/10.1116/6.0004024

Published: November 2024

View articletitled, Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning

Journal Articles

Scalable fabrication approach and fill factor optimization for single pixel microlens arrays

Jens Bonitz, Christian Helke, Nils Dittmar, Sebastian Schermer, Micha Haase, Lutz Hofmann, Danny Reuter

J. Vac. Sci. Technol. B 42, 062203 (2024)

https://doi.org/10.1116/6.0004036

Published: October 2024

View articletitled, Scalable fabrication approach and fill factor optimization for single pixel microlens arrays

Journal Articles

Is the linear relationship between the slope and intercept observed in field emission S-K plots an artifact?

Anthony Ayari, Pascal Vincent, Sorin Perisanu, Philippe Poncharal, Stephen T. Purcell

J. Vac. Sci. Technol. B 42, 053201 (2024)

https://doi.org/10.1116/6.0003828

Published: August 2024

View articletitled, Is the linear relationship between the slope and intercept observed in field emission S-K plots an artifact?

Journal Articles

Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications

A. S. Stodolna, T. W. Mechielsen, P. van der Walle, C. Meekes, H. Lensen

J. Vac. Sci. Technol. B 42, 052601 (2024)

https://doi.org/10.1116/6.0003701

Published: August 2024

View articletitled, Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications

Journal Articles

Future of plasma etching for microelectronics: Challenges and opportunities

J. Vac. Sci. Technol. B 42, 041501 (2024)

https://doi.org/10.1116/6.0003579

Published: June 2024

View articletitled, Future of plasma etching for microelectronics: Challenges and opportunities

Journal Articles

Science challenges and research opportunities for plasma applications in microelectronics

David B. Graves, Catherine B. Labelle, Mark J. Kushner, Eray S. Aydil, Vincent M. Donnelly, Jane P. Chang, Peter Mayer, Lawrence Overzet, Steven Shannon, Shahid Rauf, David N. Ruzic

J. Vac. Sci. Technol. B 42, 042202 (2024)

https://doi.org/10.1116/6.0003531

Published: June 2024

View articletitled, Science challenges and research opportunities for plasma applications in microelectronics

Journal Articles

Monitoring of rapid thermal anneal with secondary ion mass spectrometry

Z. X. Jiang, A. Ravi, T. Breeden, K. Khmelnitskiy, A. Duncan, D. Huynh, S. Butler, B. Granados, D. Acker, J. Luebbe, D. Sieloff, S. Bolton, G. Prieto

J. Vac. Sci. Technol. B 42, 034007 (2024)

https://doi.org/10.1116/6.0003599

Published: May 2024

View articletitled, Monitoring of rapid thermal anneal with secondary ion mass spectrometry

Journal Articles

Novel surface wave technique for moderate-pressure plasma measurements

Shadhin Hussain, Matthew Goeckner

J. Vac. Sci. Technol. B 42, 034005 (2024)

https://doi.org/10.1116/6.0003331

Published: April 2024

View articletitled, Novel surface wave technique for moderate-pressure plasma measurements

Journal Articles

Planar microcoil arrays for in vitro cellular-level micromagnetic activation of neurons

Renata Saha, Onri J. Benally, Sadegh Faramarzi, Robert Bloom, Kai Wu, Denis Tonini, Maple Shiao, Susan A. Keirstead, Walter C. Low, Theoden I. Netoff, Jian-Ping Wang

J. Vac. Sci. Technol. B 42, 033001 (2024)

https://doi.org/10.1116/6.0003362

Published: April 2024

View articletitled, Planar microcoil arrays for in vitro cellular-level micromagnetic activation of neurons

Includes: Supplementary data

Journal Articles

New approach of local critical dimension uniformity improvement for via/contact hole etch with direct current superposition

Emilia W. Hirsch, Dominik Metzler, Peng Wang

J. Vac. Sci. Technol. B 42, 032208 (2024)

https://doi.org/10.1116/6.0003464

Published: April 2024

View articletitled, New approach of local critical dimension uniformity improvement for via/contact hole etch with direct current superposition

Journal Articles

Treatment and aging studies of GaAs(111)B substrates for van der Waals chalcogenide film growth

Mingyu Yu, Jiayang Wang, Sahani A. Iddawela, Molly McDonough, Jessica L. Thompson, Susan B. Sinnott, Danielle Reifsnyder Hickey, Stephanie Law

J. Vac. Sci. Technol. B 42, 033201 (2024)

https://doi.org/10.1116/6.0003470

Published: March 2024

View articletitled, Treatment and aging studies of GaAs(111)B substrates for van der Waals chalcogenide film growth

Includes: Supplementary data

Journal Articles

High sensitivity saliva-based biosensor in detection of breast cancer biomarkers: HER2 and CA15-3

Hsiao-Hsuan Wan, Haochen Zhu, Chao-Ching Chiang, Jian-Sian Li, Fan Ren, Cheng-Tse Tsai, Yu-Te Liao, Dan Neal, Josephine F. Esquivel-Upshaw, Stephen J. Pearton

J. Vac. Sci. Technol. B 42, 023202 (2024)

https://doi.org/10.1116/6.0003370

Published: February 2024

View articletitled, High sensitivity saliva-based biosensor in detection of breast cancer biomarkers: HER2 and CA15-3

Journal Articles

Evaluation of the pumping performance of combinations of Ti–Zr–V–Hf alloy nonevaporable getter coatings with different morphologies, activation protocols controlled at cryogenic temperatures

Paul Smith, Sam Lodge, Andrew Chew

J. Vac. Sci. Technol. B 42, 014202 (2024)

https://doi.org/10.1116/6.0003152

Published: January 2024

View articletitled, Evaluation of the pumping performance of combinations of Ti–Zr–V–Hf alloy nonevaporable getter coatings with different morphologies, activation protocols controlled at cryogenic temperatures

Journal Articles

Review on remote phonon scattering in transistors with metal-oxide-semiconductor structures adopting high-k gate dielectrics

Yuan Xiao Ma, Hui Su, Wing Man Tang, Pui To Lai

J. Vac. Sci. Technol. B 41, 060804 (2023)

https://doi.org/10.1116/5.0156557

Published: November 2023

View articletitled, Review on remote phonon scattering in transistors with metal-oxide-semiconductor structures adopting high-k gate dielectrics

Journal Articles

III–V semiconductor devices grown by metalorganic chemical vapor deposition—The development of the Swiss Army Knife for semiconductor epitaxial growth

Russell D. Dupuis

J. Vac. Sci. Technol. B 41, 060803 (2023)

https://doi.org/10.1116/6.0003062

Published: October 2023

View articletitled, III–V semiconductor devices grown by metalorganic chemical vapor deposition—The development of the Swiss Army Knife for semiconductor epitaxial growth

Journal Articles

Atomic-scale imaging and spectroscopy via scanning probe microscopy: An overview

Saima A. Sumaiya, Mehmet Z. Baykara

J. Vac. Sci. Technol. B 41, 060802 (2023)

https://doi.org/10.1116/6.0002889

Published: October 2023

View articletitled, Atomic-scale imaging and spectroscopy via scanning probe microscopy: An overview

Journal Articles

X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline

Kanta Yamamoto, Yuichi Utsumi, Ikuya Sakurai, Ikuo Okada, Kenji Hanada, Hidehiro Ishizawa, Masahiro Takeo, Taki Watanabe, Sho Amano, Satoru Suzuki, Koji Sumitomo, Akinobu Yamaguchi

J. Vac. Sci. Technol. B 41, 062602 (2023)

https://doi.org/10.1116/6.0003021

Published: October 2023

View articletitled, X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline

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Analysis of the adhesion structure between the cycloolefin polymer and the copper seed layer formed using medium-vacuum sputtering

Measurement of field emission array current distributions by metal-coated CMOS image sensors

Fabrication of double-grooved gratings using coplanar multibeam holographic lithography with a phase mask

Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning

Scalable fabrication approach and fill factor optimization for single pixel microlens arrays

Is the linear relationship between the slope and intercept observed in field emission S-K plots an artifact?

Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications

Future of plasma etching for microelectronics: Challenges and opportunities

Science challenges and research opportunities for plasma applications in microelectronics

Monitoring of rapid thermal anneal with secondary ion mass spectrometry

Novel surface wave technique for moderate-pressure plasma measurements

Planar microcoil arrays for in vitro cellular-level micromagnetic activation of neurons

New approach of local critical dimension uniformity improvement for via/contact hole etch with direct current superposition

Treatment and aging studies of GaAs(111)B substrates for van der Waals chalcogenide film growth

High sensitivity saliva-based biosensor in detection of breast cancer biomarkers: HER2 and CA15-3

Evaluation of the pumping performance of combinations of Ti–Zr–V–Hf alloy nonevaporable getter coatings with different morphologies, activation protocols controlled at cryogenic temperatures

Review on remote phonon scattering in transistors with metal-oxide-semiconductor structures adopting high-k gate dielectrics

III–V semiconductor devices grown by metalorganic chemical vapor deposition—The development of the Swiss Army Knife for semiconductor epitaxial growth

Atomic-scale imaging and spectroscopy via scanning probe microscopy: An overview

X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline

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