In 1983, the two journals, Journal of Vacuum Science and Technology A and B were launched when the original Journal of Vacuum Science and Technology was split.

JVSTB is devoted to publishing reports of original research, letters, and review articles on microelectronics and nanotechnology. The scope includes, but is not limited to, the following topics:

• Compound semiconductor electronics and optoelectronics
• Devices for energy conversion and storage;
• Dielectrics in micro- and nanoelectronics
• Dye-sensitized and other excitonic solar cells
• Graphene, carbon nanotubes, and fullerenes: materials & devices
• Group IV semiconductor microelectronics
• Lithography
• Microelectromechanical and nanoelectromechanical systems and devices (MEMS & NEMS)
• Nanometer science and technology
• Nanostructured materials and devices including 2D-materials, nanowires, nanoparticles, and quantum dots
• Organic and molecular electronics
• Photovoltaics based on nanostructured materials
• Plasmonics
• Spintronics and magnetic devices
• Vacuum nanoelectronics, vacuum measurements, and vacuum science and technology

JVSTB - Journal Impact Factor

2023 Journal Citation Reports® (Clarivate, 2024)*:

* Data from the 2023 Journal Citation Reports^® Science Edition (Clarivate, 2024).

ISSN

The international standard serial number (ISSN) for JVST B is 2166-2746 for the printed edition and the electronic ISSN
(E-ISSN) is 2166-2754 for the online edition.
The CODEN is JVTBD9.