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Strain-tuned optical properties of bilayer silicon at midinfrared wavelengths
In situ plasma pin-up clean process for backside bevel polymer removal, defect reduction, and queue time relaxation
Excitonic effects in the optical absorption of gapless semiconductor α-tin near the direct bandgap
Widely tunable single-mode interband cascade lasers based on V-coupled cavities and dependence on design parameters
Room temperature inductively coupled plasma etching of InP with Cl2 mixtures using SiO2 and photoresist masks
Continuous wave interband cascade lasers near 13 μm
Stable and low loss oxide layer on α-Ta (110) film for superconducting qubits
High sensitivity saliva-based biosensor in detection of breast cancer biomarkers: HER2 and CA15-3
ARTICLES
Electronic and Optoelectronic Materials, Devices and Processing
Strain-tuned optical properties of bilayer silicon at midinfrared wavelengths
In Special Collection:
Mid-Infrared Optoelectronic Materials and Devices
J. Vac. Sci. Technol. B 42, 022201 (2024)
https://doi.org/10.1116/6.0003202
In situ plasma pin-up clean process for backside bevel polymer removal, defect reduction, and queue time relaxation
In Special Collection:
CHIPS: Future of Semiconductor Processing and Devices
J. Vac. Sci. Technol. B 42, 022202 (2024)
https://doi.org/10.1116/6.0003300
Excitonic effects in the optical absorption of gapless semiconductor α-tin near the direct bandgap
In Special Collection:
Developing SiGeSn Technology: Materials and Devices
J. Vac. Sci. Technol. B 42, 022203 (2024)
https://doi.org/10.1116/6.0003278
Widely tunable single-mode interband cascade lasers based on V-coupled cavities and dependence on design parameters
In Special Collection:
Mid-Infrared Optoelectronic Materials and Devices
J. Vac. Sci. Technol. B 42, 022204 (2024)
https://doi.org/10.1116/6.0003376
Room temperature inductively coupled plasma etching of InP with Cl2 mixtures using SiO2 and photoresist masks
J. Vac. Sci. Technol. B 42, 022205 (2024)
https://doi.org/10.1116/6.0003295
Continuous wave interband cascade lasers near 13 μm
In Special Collection:
Mid-Infrared Optoelectronic Materials and Devices
J. Vac. Sci. Technol. B 42, 022206 (2024)
https://doi.org/10.1116/6.0003365
Impact of electrical aging on x-ray image quality and dose rate with vertically aligned carbon nanotube based cold cathode electron beam (C-beam)
In Special Collection:
Vacuum Nanoelectronics
J. Vac. Sci. Technol. B 42, 022207 (2024)
https://doi.org/10.1116/6.0003391
High current field emission from Si nanowires on pillar structures
In Special Collection:
Vacuum Nanoelectronics
J. Vac. Sci. Technol. B 42, 022208 (2024)
https://doi.org/10.1116/6.0003384
Stable and low loss oxide layer on α-Ta (110) film for superconducting qubits
J. Vac. Sci. Technol. B 42, 022209 (2024)
https://doi.org/10.1116/6.0003368
Mid-infrared emission of germanium-tin films produced by sputtering
In Special Collection:
Mid-Infrared Optoelectronic Materials and Devices
J. Vac. Sci. Technol. B 42, 022210 (2024)
https://doi.org/10.1116/6.0003237
Improved optical and electrical response by glancing angle synthesized Al2O3 nanorod array device
J. Vac. Sci. Technol. B 42, 022211 (2024)
https://doi.org/10.1116/6.0003416
Modeling and control of L-type network impedance matching for semiconductor plasma etch
J. Vac. Sci. Technol. B 42, 022212 (2024)
https://doi.org/10.1116/6.0003444
Sodium adsorption on nanometer-thick TiO2 channel thin-film transistors for enhanced drain currents
J. Vac. Sci. Technol. B 42, 022213 (2024)
https://doi.org/10.1116/6.0003217
Nanoscale Science and Technology
Large-area fabrication of nanometer-scale features on GaN using e-beam lithography
J. Vac. Sci. Technol. B 42, 022801 (2024)
https://doi.org/10.1116/6.0003270
Field emission characterization of field-aligned carbon nanotubes synthesized in an environmental transmission electron microscope
J. Vac. Sci. Technol. B 42, 022802 (2024)
https://doi.org/10.1116/6.0003413
MEMS and NEMS
Integrated silicon electron source for high vacuum microelectromechanical system devices
In Special Collection:
Vacuum Nanoelectronics
J. Vac. Sci. Technol. B 42, 023001 (2024)
https://doi.org/10.1116/6.0003385
Fabrication of slanted gratings by using glancing angle deposition
J. Vac. Sci. Technol. B 42, 023002 (2024)
https://doi.org/10.1116/6.0003479
Microelectronic and Nanoelectronic Devices
Investigation of silicon-on-insulator back-gate nano vacuum channel transistor array
In Special Collection:
Vacuum Nanoelectronics
J. Vac. Sci. Technol. B 42, 023201 (2024)
https://doi.org/10.1116/6.0003346
High sensitivity saliva-based biosensor in detection of breast cancer biomarkers: HER2 and CA15-3
J. Vac. Sci. Technol. B 42, 023202 (2024)
https://doi.org/10.1116/6.0003370
Organic Electronic and Optoelectronic Devices
Performance evaluation of atomic layer deposited TiO2/TiN nanolaminates used as infrared photodetectors
J. Vac. Sci. Technol. B 42, 023401 (2024)
https://doi.org/10.1116/6.0003139
Measurement and Characterization
Thermal analysis of implanter source head in radio-frequency inductively coupled plasma
J. Vac. Sci. Technol. B 42, 024001 (2024)
https://doi.org/10.1116/6.0003060
Comparing the properties and growth of graphene on electrolytic and rolled Cu foils by chemical vapor deposition
J. Vac. Sci. Technol. B 42, 024002 (2024)
https://doi.org/10.1116/6.0002893
Low power silicon evaporation source—Construction, performances, and applications
J. Vac. Sci. Technol. B 42, 024003 (2024)
https://doi.org/10.1116/6.0003284
Low-temperature electrical properties and barrier inhomogeneities in ITO/β-Ga2O3 Schottky diode
J. Vac. Sci. Technol. B 42, 024004 (2024)
https://doi.org/10.1116/6.0003401
