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Electronic structure of InSb (001), (110), and (111)B surfaces
Chemical mechanical planarization for Ta-based superconducting quantum devices
Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication
Letters
Effect of substrate rotation speed on AlGaN nanowire deep ultraviolet light-emitting diodes by molecular beam epitaxy
J. Vac. Sci. Technol. B 41, 030601 (2023)
https://doi.org/10.1116/6.0002494
Review Articles
Low temperature (<700 °C) SiO2 and Si-rich SiO2 films: Short review
J. Vac. Sci. Technol. B 41, 030801 (2023)
https://doi.org/10.1116/6.0002531
Radiation damage in GaN/AlGaN and SiC electronic and photonic devices
J. Vac. Sci. Technol. B 41, 030802 (2023)
https://doi.org/10.1116/6.0002628
Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?
In Special Collection:
Secondary Ion Mass Spectrometry (SIMS)
J. Vac. Sci. Technol. B 41, 030803 (2023)
https://doi.org/10.1116/6.0002466
ARTICLES
Electronic and Optoelectronic Materials, Devices and Processing
Self-alignment of whole wafers using patterning for capillary forces
J. Vac. Sci. Technol. B 41, 032203 (2023)
https://doi.org/10.1116/6.0002518
Color control of titanium nitride thin films
J. Vac. Sci. Technol. B 41, 032204 (2023)
https://doi.org/10.1116/6.0002511
Ohmic contact structures on β-Ga2O3 with n+ β-Ga2O3 pulsed laser deposition layers
J. Vac. Sci. Technol. B 41, 032205 (2023)
https://doi.org/10.1116/6.0002620
Nanoscale Science and Technology
Vacuum discharge analysis of CNT field cathode using a computerized field projector
In Special Collection:
Vacuum Nanoelectronics
J. Vac. Sci. Technol. B 41, 032801 (2023)
https://doi.org/10.1116/6.0002514
Study of process parameters and characteristics properties of W coatings deposited by rf plasma sputtering
J. Vac. Sci. Technol. B 41, 032802 (2023)
https://doi.org/10.1116/6.0002377
Effect of the kinetic energy on particle ejection process from carbon nanotubes bombarded by kilo-electron-volt C60
In Special Collection:
Secondary Ion Mass Spectrometry (SIMS)
J. Vac. Sci. Technol. B 41, 032803 (2023)
https://doi.org/10.1116/6.0002575
Field electron emission and field ion microscope images of layered material MoS2
J. Vac. Sci. Technol. B 41, 032804 (2023)
https://doi.org/10.1116/6.0002528
Joule heating of an emitter on the cathode surface by field electron emission current with an account of the nonisolation of the apex
In Special Collection:
Vacuum Nanoelectronics
J. Vac. Sci. Technol. B 41, 032805 (2023)
https://doi.org/10.1116/6.0002474
Impact of photovoltaic effect on performance enhancement of triboelectric nanogenerator for energy harvesting applications
J. Vac. Sci. Technol. B 41, 032806 (2023)
https://doi.org/10.1116/6.0002470
Sputtering produced by vacuum electrospray droplet ions with different sizes and charges
In Special Collection:
Secondary Ion Mass Spectrometry (SIMS)
J. Vac. Sci. Technol. B 41, 032807 (2023)
https://doi.org/10.1116/6.0002529
Electronic structure of InSb (001), (110), and (111)B surfaces
J. Vac. Sci. Technol. B 41, 032808 (2023)
https://doi.org/10.1116/6.0002606
Microelectronic and Nanoelectronic Devices
Development of 3D tomosynthesis technique for nondestructive technology application using vertically aligned carbon nanotube-based high-resolution cold cathode electron beam
In Special Collection:
Vacuum Nanoelectronics
J. Vac. Sci. Technol. B 41, 033201 (2023)
https://doi.org/10.1116/6.0002286
Chemical mechanical planarization for Ta-based superconducting quantum devices
J. Vac. Sci. Technol. B 41, 033202 (2023)
https://doi.org/10.1116/6.0002586
Plasmonics
Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication
J. Vac. Sci. Technol. B 41, 033601 (2023)
https://doi.org/10.1116/6.0002557
Measurement and Characterization
Atmospheric pressure plasma treatment of chitosan-acrylic acid blends
J. Vac. Sci. Technol. B 41, 034001 (2023)
https://doi.org/10.1116/6.0002335
In situ determination of sputtered Ni–Cu film composition from emission intensities
J. Vac. Sci. Technol. B 41, 034002 (2023)
https://doi.org/10.1116/6.0002480
Characterization of GaN structures for power electronics by secondary ion mass spectrometry and atomic force microscope approach
In Special Collection:
Secondary Ion Mass Spectrometry (SIMS)
J. Vac. Sci. Technol. B 41, 034003 (2023)
https://doi.org/10.1116/6.0002573
Diagnostics of target-cavity confined plasmas produced by nanosecond pulsed laser ablation of graphite
J. Vac. Sci. Technol. B 41, 034004 (2023)
https://doi.org/10.1116/6.0002500
Analysis of furnace contamination on superconducting radio frequency niobium using secondary-ion mass spectrometry
J. Vac. Sci. Technol. B 41, 034005 (2023)
https://doi.org/10.1116/6.0002624
Vacuum Measurement and Technology
Deposition and morphology of direct current plasma-polymerized aniline
J. Vac. Sci. Technol. B 41, 034201 (2023)
https://doi.org/10.1116/6.0002497
Design of a large nonevaporable getter pump for the full size ITER beam source prototype
J. Vac. Sci. Technol. B 41, 034202 (2023)
https://doi.org/10.1116/6.0002395
Electron transport in macroscopic borosilicate capillaries with bending angles of 90° and 360°
J. Vac. Sci. Technol. B 41, 034203 (2023)
https://doi.org/10.1116/6.0002281
Vacuum system of the Space Plasma Environment Research Facility
J. Vac. Sci. Technol. B 41, 034204 (2023)
https://doi.org/10.1116/6.0002566
