Skip Nav Destination

Issues

Select Year

Issue

Volume 41, Issue 2

March 2023

All Issues

Cover Image

Cover Image

ISSN 2166-2746

EISSN 2166-2754

In this Issue

ARTICLES
Perspectives

ARTICLES

Electronic and Optoelectronic Materials, Devices and Processing

Electron transport mechanisms in amorphous zinc oxysulfide thin films

Masato Tsuchii; Zhen Chen; Yasushi Hirose; Tetsuya Hasegawa

J. Vac. Sci. Technol. B 41, 022201 (2023) https://doi.org/10.1116/5.0104988

Abstract

View articletitled, Electron transport mechanisms in amorphous zinc oxysulfide thin films

Supplementary Material

Open the PDF for in another window

Fabrication of plasmonic Au nanostructures on dielectric supports using 10 keV electron beam lithography and tests for SERS biodetection

In Special Collection: Papers from the 65th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication (EIPBN 2022)

Haseeb Ahmed; Min Wu; Maria Stepanova

J. Vac. Sci. Technol. B 41, 022202 (2023) https://doi.org/10.1116/6.0002108

Abstract

View articletitled, Fabrication of plasmonic Au nanostructures on dielectric supports using 10 keV electron beam lithography and tests for SERS biodetection

Supplementary Material

Open the PDF for in another window

Temperature dependence of the infrared dielectric function and the direct bandgap of InSb from 80 to 725 K

In Special Collection: Honoring Dr. Gary McGuire’s Research and Leadership as Editor of the Journal of Vacuum Science & Technology for Three Decades

Melissa Rivero Arias; Carlos A. Armenta; Carola Emminger; Cesy M. Zamarripa; Nuwanjula S. Samarasingha; Jaden R. Love; Sonam Yadav; Stefan Zollner

J. Vac. Sci. Technol. B 41, 022203 (2023) https://doi.org/10.1116/6.0002326

Abstract

View articletitled, Temperature dependence of the infrared dielectric function and the direct bandgap of InSb from 80 to 725 K

Supplementary Material

Open the PDF for in another window

Characterization of pulsed laser deposited La₂O₂S:Eu³⁺ thin films and effect of coating with graphene oxide layers

In Special Collection: Honoring Dr. Gary McGuire’s Research and Leadership as Editor of the Journal of Vacuum Science & Technology for Three Decades

Boitumelo C. Tladi; Hendrik C. Swart; Robin E. Kroon

J. Vac. Sci. Technol. B 41, 022204 (2023) https://doi.org/10.1116/6.0002266

Abstract

View articletitled, Characterization of pulsed laser deposited La2O2S:Eu3+ thin films and effect of coating with graphene oxide layers

Open the PDF for in another window

Improvement of electrical characteristics of flexible AZO/Ag/Cu/AZO transparent conductive films by Cu deposition

Atsushi Nitta; Yuuki Uwatoko; Teppei Nagata; Yukio Yoshimura

J. Vac. Sci. Technol. B 41, 022205 (2023) https://doi.org/10.1116/6.0002389

Abstract

View articletitled, Improvement of electrical characteristics of flexible AZO/Ag/Cu/AZO transparent conductive films by Cu deposition

Open the PDF for in another window

Physical vapor deposition of Yb-doped Cs₂AgSbBr₆ films

In Special Collection: Honoring Dr. Gary McGuire’s Research and Leadership as Editor of the Journal of Vacuum Science & Technology for Three Decades

Yukun Liu; Minh N. Tran; Iver J. Cleveland; Eray S. Aydil

J. Vac. Sci. Technol. B 41, 022206 (2023) https://doi.org/10.1116/6.0002475

Abstract

View articletitled, Physical vapor deposition of Yb-doped Cs2AgSbBr6 films

Supplementary Material

Open the PDF for in another window

CHORUS

Thermal sensing capability and current–voltage–temperature characteristics in Pt/n-GaP/Al/Ti Schottky diodes

Hasan Efeoǧlu; Abdulmecit Turut

J. Vac. Sci. Technol. B 41, 022207 (2023) https://doi.org/10.1116/6.0002411

Abstract

View articletitled, Thermal sensing capability and current–voltage–temperature characteristics in Pt/n-GaP/Al/Ti Schottky diodes

Open the PDF for in another window

Understanding plasma enhanced chemical vapor deposition mechanisms in tetraethoxysilane-based plasma

Hu Li; Koichi Ishii; Shun Sasaki; Mao Kamiyama; Akinori Oda; Kazuki Denpoh

J. Vac. Sci. Technol. B 41, 022208 (2023) https://doi.org/10.1116/6.0002409

Abstract

View articletitled, Understanding plasma enhanced chemical vapor deposition mechanisms in tetraethoxysilane-based plasma

Supplementary Material

Open the PDF for in another window

Lithography

Evaluation of quality of thick photoresist film by acoustic resonant imaging technique

Hyelin Kim; Hironori Tohmyoh

J. Vac. Sci. Technol. B 41, 022601 (2023) https://doi.org/10.1116/6.0002459

Abstract

View articletitled, Evaluation of quality of thick photoresist film by acoustic resonant imaging technique

Open the PDF for in another window

Nanoscale Science and Technology

Computational study of mechanical stresses in a cell interacting with micromechanical cues and microfabrication of such cues in Nervous system-on-Chips

In Special Collection: Papers from the 65th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication (EIPBN 2022)

Rahman Sabahi-Kaviani; Daan van Boekel; Regina Luttge

J. Vac. Sci. Technol. B 41, 022801 (2023) https://doi.org/10.1116/6.0002291

Abstract

View articletitled, Computational study of mechanical stresses in a cell interacting with micromechanical cues and microfabrication of such cues in Nervous system-on-Chips

Supplementary Material

Open the PDF for in another window

Roll-to-roll reactive ion etching of large-area nanostructure arrays in Si: Process development, characterization, and optimization

Ziam Ghaznavi; Nicholas Butcher; Dragan Djurdjanovic; S. V. Sreenivasan

J. Vac. Sci. Technol. B 41, 022802 (2023) https://doi.org/10.1116/6.0002261

Abstract

View articletitled, Roll-to-roll reactive ion etching of large-area nanostructure arrays in Si: Process development, characterization, and optimization

Supplementary Material

Open the PDF for in another window

CHORUS

Field emitter electrostatics: Efficient improved simulation technique for highly precise calculation of field enhancement factors

In Special Collection: Vacuum Nanoelectronics

Fernando F. Dall’Agnol; Thiago A. de Assis; Richard G. Forbes

J. Vac. Sci. Technol. B 41, 022803 (2023) https://doi.org/10.1116/6.0002317

Abstract

View articletitled, Field emitter electrostatics: Efficient improved simulation technique for highly precise calculation of field enhancement factors

Open the PDF for in another window

Chemical and electrical modifications of few-layer graphene films via sub-10 keV electron beam irradiation

In Special Collection: Papers from the 65th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication (EIPBN 2022)

Karla Moyano; Carlos Reinoso; Steven Núñez; Beatriz Pérez; Cristian Santacruz; César Costa; Esteban Irribarra

J. Vac. Sci. Technol. B 41, 022804 (2023) https://doi.org/10.1116/6.0002123

Abstract

View articletitled, Chemical and electrical modifications of few-layer graphene films via sub-10 keV electron beam irradiation

Open the PDF for in another window

Gap distance dependence on field emission at the nanogap between silicon cleavage surfaces

Yuki Akura; Masaki Shimofuri; Amit Banerjee; Jun Hirotani; Toshiyuki Tsuchiya

J. Vac. Sci. Technol. B 41, 022805 (2023) https://doi.org/10.1116/6.0002456

Abstract

View articletitled, Gap distance dependence on field emission at the nanogap between silicon cleavage surfaces

Open the PDF for in another window

Thickness dependent field emission study of LaB₆ coated Si nanowire arrays

In Special Collection: Vacuum Nanoelectronics

Amol Deore; Krishna Jagtap; Onkar Bhorade; Angela Vella; Mahendra More

J. Vac. Sci. Technol. B 41, 022806 (2023) https://doi.org/10.1116/6.0002464

Abstract

View articletitled, Thickness dependent field emission study of LaB6 coated Si nanowire arrays

Supplementary Material

Open the PDF for in another window

MEMS and NEMS

Fabrication of ultrahigh aspect ratio Si nanopillar and nanocone arrays

Aixi Pan; Medhat Samaan; Zheng Yan; Wenhan Hu; Bo Cui

J. Vac. Sci. Technol. B 41, 023001 (2023) https://doi.org/10.1116/6.0002276

Abstract

View articletitled, Fabrication of ultrahigh aspect ratio Si nanopillar and nanocone arrays

Open the PDF for in another window

High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining

Roghayeh Nikbakht; Xitong Xie; Arnaud Weck; Raphael St-Gelais

J. Vac. Sci. Technol. B 41, 023002 (2023) https://doi.org/10.1116/5.0124150

Abstract

View articletitled, High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining

Open the PDF for in another window

Microelectronic and Nanoelectronic Devices

Demonstration of a silicon gated field emitter array based low frequency Colpitts oscillator at 400 °C

In Special Collection: Vacuum Nanoelectronics

Ranajoy Bhattacharya; Robert Hay; Mason Cannon; Nedeljko Karaulac; Girish Rughoobur; Akintunde Ibitayo Akinwande; Jim Browning

J. Vac. Sci. Technol. B 41, 023201 (2023) https://doi.org/10.1116/6.0002272

Abstract

View articletitled, Demonstration of a silicon gated field emitter array based low frequency Colpitts oscillator at 400 °C

Supplementary Material

Open the PDF for in another window

Novel technique to control the focal spot size using carbon nanotube based cold cathode electron beam (C-beam) architecture

In Special Collection: Vacuum Nanoelectronics

Ketan Bhotkar; Yi Yin Yu; Jaydip Sawant; Ravindra Patil; Kyu Chang Park

J. Vac. Sci. Technol. B 41, 023202 (2023) https://doi.org/10.1116/6.0002285

Abstract

View articletitled, Novel technique to control the focal spot size using carbon nanotube based cold cathode electron beam (C-beam) architecture

Open the PDF for in another window

Fabrication of high quality X-ray source by gated vertically aligned carbon nanotube field emitters

In Special Collection: Vacuum Nanoelectronics

Yi Yin Yu; Kyu Chang Park

J. Vac. Sci. Technol. B 41, 023203 (2023) https://doi.org/10.1116/6.0002284

Abstract

View articletitled, Fabrication of high quality X-ray source by gated vertically aligned carbon nanotube field emitters

Open the PDF for in another window

Numerical simulations of heterojunction GaN nanopillar light emitting diodes

Zbigniew Lisik; Janusz Wozny; Ewa Raj; Jacek Podgorski

J. Vac. Sci. Technol. B 41, 023204 (2023) https://doi.org/10.1116/5.0121997

Abstract

View articletitled, Numerical simulations of heterojunction GaN nanopillar light emitting diodes

Open the PDF for in another window

Measurement and Characterization

All field emission experiments are noisy, … are any meaningful?

In Special Collection: Vacuum Nanoelectronics

Anthony Ayari; Pascal Vincent; Sorin Perisanu; Philippe Poncharal; Stephen T. Purcell

J. Vac. Sci. Technol. B 41, 024001 (2023) https://doi.org/10.1116/6.0002338

Abstract

View articletitled, All field emission experiments are noisy, … are any meaningful?

Open the PDF for in another window

In situ electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires

Lucas B. Spejo; José L. Arrieta-Concha; Marcos V. Puydinger dos Santos; Angélica D. Barros; José A. Diniz; Renato A. Minamisawa

J. Vac. Sci. Technol. B 41, 024002 (2023) https://doi.org/10.1116/6.0002246

Abstract

View articletitled, In situ electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires

Supplementary Material

Open the PDF for in another window

Restoration of the original depth distribution from experimental SIMS profile using the depth resolution function in framework of RMR model

In Special Collection: Secondary Ion Mass Spectrometry (SIMS)

Yu. Kudriavtsev; R. Asomoza; K. D. Moiseev

J. Vac. Sci. Technol. B 41, 024003 (2023) https://doi.org/10.1116/6.0002302

Abstract

View articletitled, Restoration of the original depth distribution from experimental SIMS profile using the depth resolution function in framework of RMR model

Open the PDF for in another window

Vacuum Measurement and Technology

Ultra high vacuum beam pipe of the Einstein Telescope project: Challenges and perspectives

In Special Collection: XXV AIV Conference - Materials, Interfaces, and Processes in Industrial and Basic Research Applications (2022)

Aniello Grado; Emanuele Tofani; Marco Angelucci; Roberto Cimino; Julien Gargiulo; Fedor Getman; Andrea Liedl; Luca Limatola; Vito Mennella; Antonio Pasqualetti; Fulvio Ricci; Daniel Sentenac; Luisa Spallino

J. Vac. Sci. Technol. B 41, 024201 (2023) https://doi.org/10.1116/6.0002323

Abstract

View articletitled, Ultra high vacuum beam pipe of the Einstein Telescope project: Challenges and perspectives

Open the PDF for in another window

Effects of the temperature of a protic ionic liquid on ion beam production by vacuum electrospray

Yukio Fujiwara

J. Vac. Sci. Technol. B 41, 024202 (2023) https://doi.org/10.1116/6.0002403

Abstract

View articletitled, Effects of the temperature of a protic ionic liquid on ion beam production by vacuum electrospray

Supplementary Material

Open the PDF for in another window

Perspectives

Proposal that interpretation of field emission current–voltage characteristics should be treated as a specialized form of electrical engineering

In Special Collection: Vacuum Nanoelectronics

Richard G. Forbes

J. Vac. Sci. Technol. B 41, 028501 (2023) https://doi.org/10.1116/6.0002478

Abstract

View articletitled, Proposal that interpretation of field emission current–voltage characteristics should be treated as a specialized form of electrical engineering

Open the PDF for in another window

Submit your article

Sign up for alerts

RSS

Current Issue RSS Feed

Open Issues RSS Feed

Most Read
Most Cited

Future of plasma etching for microelectronics: Challenges and opportunities

Gottlieb S. Oehrlein, Stephan M. Brandstadter, et al.

Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications

Haochen Zhao, Suho Park, et al.

Filtering the beam from an ionic liquid ion source

Alexander C. G. Storey, Aydin Sabouri, et al.

Issues

Cover Image

ARTICLES

Electronic and Optoelectronic Materials, Devices and Processing

Lithography

Nanoscale Science and Technology

MEMS and NEMS

Microelectronic and Nanoelectronic Devices

Measurement and Characterization

Vacuum Measurement and Technology

Perspectives

RSS

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

This Feature Is Available To Subscribers Only