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Volume 41, Issue 1

January 2023

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ISSN 2166-2746

EISSN 2166-2754

In this Issue

Letters
ARTICLES

Letters

Reaching homogeneous field emission current from clusters of emitters with nonuniform heights

In Special Collection: Vacuum Nanoelectronics

Sergey V. Filippov; Fernando F. Dall’Agnol; Eugeni O. Popov; Anatoly G. Kolosko; Thiago A. de Assis

J. Vac. Sci. Technol. B 41, 010601 (2023) https://doi.org/10.1116/6.0002315

Abstract

View articletitled, Reaching homogeneous field emission current from clusters of emitters with nonuniform heights

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A novel thermionic crystal electron emission effect similar to Kikuchi lines

Victor Katsap

J. Vac. Sci. Technol. B 41, 010602 (2023) https://doi.org/10.1116/6.0002375

Abstract

View articletitled, A novel thermionic crystal electron emission effect similar to Kikuchi lines

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ARTICLES

Electronic and Optoelectronic Materials, Devices and Processing

Role of dose optimization in Ru atomic layer deposition for low resistivity films

Victor Wang; Michael Breeden; Nickolas Ashburn; Matthew Bergschneider; Jacob Spiegelman; Harsono Simka; Kyeongjae Cho; Andrew C. Kummel

J. Vac. Sci. Technol. B 41, 012201 (2023) https://doi.org/10.1116/6.0002153

Abstract

View articletitled, Role of dose optimization in Ru atomic layer deposition for low resistivity films

Supplementary Material

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Fabrication, and Direct Current and cryogenic analysis of SF₆-treated AlGaN/GaN Schottky barrier diodes

Quentin Fornasiero; Nicolas Defrance; Sylvie Lepilliet; Vanessa Avramovic; Yvon Cordier; Eric Frayssinet; Marie Lesecq; Nadir Idir; Jean-Claude De Jaeger

J. Vac. Sci. Technol. B 41, 012202 (2023) https://doi.org/10.1116/6.0002125

Abstract

View articletitled, Fabrication, and Direct Current and cryogenic analysis of SF6-treated AlGaN/GaN Schottky barrier diodes

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Large-area 1D selective emitter for thermophotovoltaic applications in the mid-infrared

Minsu Oh; Kevin Grossklaus; Thomas E. Vandervelde

J. Vac. Sci. Technol. B 41, 012203 (2023) https://doi.org/10.1116/6.0002198

Abstract

View articletitled, Large-area 1D selective emitter for thermophotovoltaic applications in the mid-infrared

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CHORUS

Evaluation of dry stored disposable sensor strip on rapid SARS-CoV-2 detection platform

In Special Collection: Honoring Dr. Gary McGuire’s Research and Leadership as Editor of the Journal of Vacuum Science & Technology for Three Decades

Chao-Ching Chiang; Chan-Wen Chiu; Fan Ren; Cheng-Tse Tsai; Yu-Te Liao; Josephine F. Esquivel-Upshaw; Stephen J. Pearton

J. Vac. Sci. Technol. B 41, 012204 (2023) https://doi.org/10.1116/6.0002293

Abstract

View articletitled, Evaluation of dry stored disposable sensor strip on rapid SARS-CoV-2 detection platform

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Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas

Dmitry Levko; Rochan R. Upadhyay; Kenta Suzuki; Laxminarayan L. Raja

J. Vac. Sci. Technol. B 41, 012205 (2023) https://doi.org/10.1116/6.0002236

Abstract

View articletitled, Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas

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Grain growth of Cu wires during Joule heat welding

Hironori Tohmyoh; Taiga Sakatoku

J. Vac. Sci. Technol. B 41, 012206 (2023) https://doi.org/10.1116/6.0002337

Abstract

View articletitled, Grain growth of Cu wires during Joule heat welding

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Observation of ground loop signals in GaN monolithically integrated devices

Xiao Ma; Hoi Wai Choi

J. Vac. Sci. Technol. B 41, 012207 (2023) https://doi.org/10.1116/6.0002245

Abstract

View articletitled, Observation of ground loop signals in GaN monolithically integrated devices

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Inelastic cotunneling in the Coulomb-blockade transport of donor-atom transistors

Pooja Yadav; Soumya Chakraborty; Daniel Moraru; Arup Samanta

J. Vac. Sci. Technol. B 41, 012208 (2023) https://doi.org/10.1116/5.0097509

Abstract

View articletitled, Inelastic cotunneling in the Coulomb-blockade transport of donor-atom transistors

Supplementary Material

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Lithography

Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography

In Special Collection: Papers from the 65th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication (EIPBN 2022)

Henock Demessie Yallew; Jana Jágerská; Martin M. Greve

J. Vac. Sci. Technol. B 41, 012601 (2023) https://doi.org/10.1116/6.0002187

Abstract

View articletitled, Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography

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Surface property control for 193 nm immersion resist by addition of Si compound

In Special Collection: Papers from the 65th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication (EIPBN 2022)

Chen Tang; Atsushi Sekiguchi; Yosuke Ohta; Yoshihiko Hirai; Masaaki Yasuda

J. Vac. Sci. Technol. B 41, 012602 (2023) https://doi.org/10.1116/6.0002128

Abstract

View articletitled, Surface property control for 193 nm immersion resist by addition of Si compound

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Measurements of ion fluxes in extreme ultraviolet-induced plasma of new EUV-beam-line 2 nanolithography research machine and their applications for optical component tests

J. van Veldhoven; C.-C. Wu; A. J. Storm; M. van Putten; J. R. Meijlink; A. G. Ushakov

J. Vac. Sci. Technol. B 41, 012603 (2023) https://doi.org/10.1116/6.0002132

Abstract

View articletitled, Measurements of ion fluxes in extreme ultraviolet-induced plasma of new EUV-beam-line 2 nanolithography research machine and their applications for optical component tests

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Effect of water vapor pressure on positive and negative tone electron-beam patterning of poly(methyl methacrylate)

In Special Collection: Papers from the 65th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication (EIPBN 2022)

Deepak Kumar; Krishnaroop Chaudhuri; Joseph W. Brill; Jonathan T. Pham; J. Todd Hastings

J. Vac. Sci. Technol. B 41, 012604 (2023) https://doi.org/10.1116/6.0002118

Abstract

View articletitled, Effect of water vapor pressure on positive and negative tone electron-beam patterning of poly(methyl methacrylate)

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CHORUS

Nanoscale Science and Technology

Processing of experimental current-voltage characteristics of single tip emitters taking into account the functional dependence of the emission area on the applied voltage

In Special Collection: Vacuum Nanoelectronics

Eugeni O. Popov; Sergey V. Filippov; Anatoly G. Kolosko

J. Vac. Sci. Technol. B 41, 012801 (2023) https://doi.org/10.1116/6.0002305

Abstract

View articletitled, Processing of experimental current-voltage characteristics of single tip emitters taking into account the functional dependence of the emission area on the applied voltage

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Spongy TiO₂ layers deposited by gig-lox sputtering processes: Contact angle measurements

In Special Collection: XXV AIV Conference - Materials, Interfaces, and Processes in Industrial and Basic Research Applications (2022)

C. Spampinato; S. Valastro; E. Smecca; V. Arena; G. Mannino; A. La Magna; C. Corsaro; F. Neri; E. Fazio; A. Alberti

J. Vac. Sci. Technol. B 41, 012802 (2023) https://doi.org/10.1116/6.0002225

Abstract

View articletitled, Spongy TiO2 layers deposited by gig-lox sputtering processes: Contact angle measurements

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On the charge density and potential near the surface of a field emitter

In Special Collection: Vacuum Nanoelectronics

C. J. Edgcombe

J. Vac. Sci. Technol. B 41, 012803 (2023) https://doi.org/10.1116/6.0002278

Abstract

View articletitled, On the charge density and potential near the surface of a field emitter

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Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices

In Special Collection: Papers from the 65th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication (EIPBN 2022)

Kaustubh Vyas; Kashif M. Awan; Ksenia Dolgaleva

J. Vac. Sci. Technol. B 41, 012804 (2023) https://doi.org/10.1116/6.0002167

Abstract

View articletitled, Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices

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Implementation of high-performance and high-yield nanoscale hafnium zirconium oxide based ferroelectric tunnel junction devices on 300 mm wafer platform

In Special Collection: Neuromorphic Materials, Devices, and Processing

Maximilian Liehr; Jubin Hazra; Karsten Beckmann; Vineetha Mukundan; Ioannis Alexandrou; Timothy Yeow; Joseph Race; Kandabara Tapily; Steven Consiglio; Santosh K. Kurinec; Alain C. Diebold; Nathaniel Cady

J. Vac. Sci. Technol. B 41, 012805 (2023) https://doi.org/10.1116/6.0002097

Abstract

View articletitled, Implementation of high-performance and high-yield nanoscale hafnium zirconium oxide based ferroelectric tunnel junction devices on 300 mm wafer platform

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Microelectronic and Nanoelectronic Devices

High sensitivity CIP2A detection for oral cancer using a rapid transistor-based biosensor module

In Special Collection: Honoring Dr. Gary McGuire’s Research and Leadership as Editor of the Journal of Vacuum Science & Technology for Three Decades

Minghan Xian; Jenna L. Stephany; Chan-Wen Chiu; Chao-Ching Chiang; Fan Ren; Cheng-Tse Tsai; Siang-Sin Shan; Yu-Te Liao; Josephine F. Esquivel-Upshaw; Stephen J. Pearton

J. Vac. Sci. Technol. B 41, 013201 (2023) https://doi.org/10.1116/6.0002175

Abstract

View articletitled, High sensitivity CIP2A detection for oral cancer using a rapid transistor-based biosensor module

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Close-packed silicon field emitter arrays with integrated anode fabricated by electron-beam lithography

In Special Collection: Vacuum Nanoelectronics

S. Ghotbi; S. Mohammadi

J. Vac. Sci. Technol. B 41, 013202 (2023) https://doi.org/10.1116/6.0002295

Abstract

View articletitled, Close-packed silicon field emitter arrays with integrated anode fabricated by electron-beam lithography

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Exploring electromechanical utility of GaAs interdigitated transducers; using finite-element-method-based parametric analysis and experimental comparison

Brian D. Rummel; Leonid Miroshnik; Andrew B. Li; Grant D. Heilman; Ganesh Balakrishnan; Talid Sinno; Sang M. Han

J. Vac. Sci. Technol. B 41, 013203 (2023) https://doi.org/10.1116/6.0002169

Abstract

View articletitled, Exploring electromechanical utility of GaAs interdigitated transducers; using finite-element-method-based parametric analysis and experimental comparison

Supplementary Material

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CHORUS

Measurement and Characterization

Bulk and surface chemical compositions and microstructure properties of CaF₂:Y³⁺ material

In Special Collection: Honoring Dr. Gary McGuire’s Research and Leadership as Editor of the Journal of Vacuum Science & Technology for Three Decades

Mubarak Y. A. Yagoub; Hendrik C. Swart; Elizabeth Coetsee

J. Vac. Sci. Technol. B 41, 014001 (2023) https://doi.org/10.1116/6.0002279

Abstract

View articletitled, Bulk and surface chemical compositions and microstructure properties of CaF2:Y3+ material

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Vacuum Measurement and Technology

System for interpolating work function for a cold-field emitter

In Special Collection: Vacuum Nanoelectronics

A. Bahm

J. Vac. Sci. Technol. B 41, 014201 (2023) https://doi.org/10.1116/6.0002283

Abstract

View articletitled, System for interpolating work function for a cold-field emitter

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Transmission conductance of a cylindrical tube with wall pumping

Hyeongrae Noh; Jeehoon Kim; Chongdo Park; Taekyun Ha

J. Vac. Sci. Technol. B 41, 014202 (2023) https://doi.org/10.1116/6.0002177

Abstract

View articletitled, Transmission conductance of a cylindrical tube with wall pumping

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Letters

Reaching homogeneous field emission current from clusters of emitters with nonuniform heights

A novel thermionic crystal electron emission effect similar to Kikuchi lines

ARTICLES

Electronic and Optoelectronic Materials, Devices and Processing

Role of dose optimization in Ru atomic layer deposition for low resistivity films

Fabrication, and Direct Current and cryogenic analysis of SF₆-treated AlGaN/GaN Schottky barrier diodes

Large-area 1D selective emitter for thermophotovoltaic applications in the mid-infrared

Evaluation of dry stored disposable sensor strip on rapid SARS-CoV-2 detection platform

Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas

Grain growth of Cu wires during Joule heat welding

Observation of ground loop signals in GaN monolithically integrated devices

Inelastic cotunneling in the Coulomb-blockade transport of donor-atom transistors

Lithography

Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography

Surface property control for 193 nm immersion resist by addition of Si compound

Measurements of ion fluxes in extreme ultraviolet-induced plasma of new EUV-beam-line 2 nanolithography research machine and their applications for optical component tests

Effect of water vapor pressure on positive and negative tone electron-beam patterning of poly(methyl methacrylate)

Nanoscale Science and Technology

Processing of experimental current-voltage characteristics of single tip emitters taking into account the functional dependence of the emission area on the applied voltage

Spongy TiO₂ layers deposited by gig-lox sputtering processes: Contact angle measurements

On the charge density and potential near the surface of a field emitter

Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices

Implementation of high-performance and high-yield nanoscale hafnium zirconium oxide based ferroelectric tunnel junction devices on 300 mm wafer platform

Microelectronic and Nanoelectronic Devices

High sensitivity CIP2A detection for oral cancer using a rapid transistor-based biosensor module

Close-packed silicon field emitter arrays with integrated anode fabricated by electron-beam lithography

Exploring electromechanical utility of GaAs interdigitated transducers; using finite-element-method-based parametric analysis and experimental comparison

Measurement and Characterization

Bulk and surface chemical compositions and microstructure properties of CaF₂:Y³⁺ material

Vacuum Measurement and Technology

System for interpolating work function for a cold-field emitter

Transmission conductance of a cylindrical tube with wall pumping

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Issues

Cover Image

Letters

ARTICLES

Electronic and Optoelectronic Materials, Devices and Processing

Lithography

Nanoscale Science and Technology

Microelectronic and Nanoelectronic Devices

Measurement and Characterization

Vacuum Measurement and Technology

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Resources

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pubs.aip.org

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