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Issues
September 1986
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
ISSN 0734-211X
EISSN 2327-9877
Growth of silicon homoepitaxial thin films by ultrahigh vacuum ion beam sputter deposition
J. Vac. Sci. Technol. B 4, 1153–1158 (1986)
https://doi.org/10.1116/1.583475
Characterization of defects introduced during dc magnetron sputter deposition of Ti–W on n‐Si
J. Vac. Sci. Technol. B 4, 1168–1174 (1986)
https://doi.org/10.1116/1.583477
Barrier effect of selective chemical vapor deposited tungsten films
J. Vac. Sci. Technol. B 4, 1175–1179 (1986)
https://doi.org/10.1116/1.583478
Zero step coverage using a nozzle jet expansion deposition technique
J. Vac. Sci. Technol. B 4, 1180–1181 (1986)
https://doi.org/10.1116/1.583479
Deposition properties of silicon films formed from silane in a vertical‐flow reactor
J. Vac. Sci. Technol. B 4, 1182–1186 (1986)
https://doi.org/10.1116/1.583480
Topographical limitations to the metallization of very large scale integrated structures by bias sputtering: Experiments and computer simulations
J. Vac. Sci. Technol. B 4, 1192–1194 (1986)
https://doi.org/10.1116/1.583482
Chemical etching of GaAs and InP by chlorine: The thermodynamically predicted dependence on Cl2 pressure and temperature
J. Vac. Sci. Technol. B 4, 1216–1226 (1986)
https://doi.org/10.1116/1.583485
The Cramer–Rao accuracy bound for optimum processing of the edge registration mark signal in electron beam lithography
J. Vac. Sci. Technol. B 4, 1243–1250 (1986)
https://doi.org/10.1116/1.583489
Spatially resolved x‐ray photoelectron spectroscopy studies for device‐type applications
J. Vac. Sci. Technol. B 4, 1256–1258 (1986)
https://doi.org/10.1116/1.583491
Improvement in resolution and reproducibility using the polymethylmethacrylate/polymethylacrylic acid bilayer system
J. Vac. Sci. Technol. B 4, 1259–1260 (1986)
https://doi.org/10.1116/1.583492
Future of plasma etching for microelectronics: Challenges and opportunities
Gottlieb S. Oehrlein, Stephan M. Brandstadter, et al.
Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications
Haochen Zhao, Suho Park, et al.
Heating of photocathode via field emission and radiofrequency pulsed heating: Implication toward breakdown
Ryo Shinohara, Soumendu Bagchi, et al.