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March 1986
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
ISSN 0734-211X
EISSN 2327-9877
Impurity scattering limited momentum relaxation time in a quantum well wire
J. Vac. Sci. Technol. B 4, 453–458 (1986)
https://doi.org/10.1116/1.583403
Chemical sputtering of silicon by F+, Cl+, and Br+ ions: Reactive spot model for reactive ion etching
J. Vac. Sci. Technol. B 4, 459–467 (1986)
https://doi.org/10.1116/1.583404
Very low resistance Au/Ge/Ni/Ag based Ohmic contact formation to Al0.25/Ga0.75As/GaAs and Al0.48In0.52As/Ga0.47In0.53As heterostructures: A behavioral comparison
P. Zwicknagl; S. D. Mukherjee; P. M. Capani; H. Lee; H. T. Griem; L. Rathbun; J. D. Berry; W. L. Jones; L. F. Eastman
J. Vac. Sci. Technol. B 4, 476–484 (1986)
https://doi.org/10.1116/1.583406
A precise and automatic very large scale integrated circuit pattern linewidth measurement method using a scanning electron microscope
J. Vac. Sci. Technol. B 4, 493–499 (1986)
https://doi.org/10.1116/1.583408
Effect of Sn in plasma copolymerized methylmethacrylate and tetramethyltin resist on plasma development for x‐ray irradiation
J. Vac. Sci. Technol. B 4, 500–504 (1986)
https://doi.org/10.1116/1.583409
Reproducible temperature measurement of GaAs substrates during molecular beam epitaxial growth
J. Vac. Sci. Technol. B 4, 505–506 (1986)
https://doi.org/10.1116/1.583410
Observation of strong localization effects in (AlGa)As–GaAs two‐dimensional electron gas structures at low magnetic fields
J. Vac. Sci. Technol. B 4, 511–514 (1986)
https://doi.org/10.1116/1.583411
Summary Abstract: Growth and selected properties of GaAs layers and GaAs/(Al,Ga)As superlattices with the (211) orientation
J. Vac. Sci. Technol. B 4, 515–516 (1986)
https://doi.org/10.1116/1.583412
Segregated AlGaAs(110) grown by molecular beam epitaxy
J. Vac. Sci. Technol. B 4, 517–518 (1986)
https://doi.org/10.1116/1.583413
Summary Abstract: Si incorporation and segregation in Ga1−xAlxAs(100) films grown by molecular beam epitaxy
J. Vac. Sci. Technol. B 4, 519–520 (1986)
https://doi.org/10.1116/1.583414
Summary Abstract: State‐of‐the‐art AlGaAs alloys by antimony doping
J. Vac. Sci. Technol. B 4, 521–522 (1986)
https://doi.org/10.1116/1.583415
Summary Abstract: Optical properties of AlxGa1−xAs grown by molecular beam epitaxy
D. C. Reynolds; C. W. Litton; K. K. Bajaj; P. W. Yu; Jasprit Singh; P. J. Pearah; W. T. Masselink; T. Henderson; J. Klem; H. Morkoç
J. Vac. Sci. Technol. B 4, 523–524 (1986)
https://doi.org/10.1116/1.583416
Optical properties of GaAs/AlGaAs quantum wells grown by molecular beam epitaxy
J. Vac. Sci. Technol. B 4, 525–527 (1986)
https://doi.org/10.1116/1.583417
Lattice‐mismatched heteroepitaxial interface of GaAsySb1−y on GaAs substrates
J. Vac. Sci. Technol. B 4, 528–531 (1986)
https://doi.org/10.1116/1.583418
Summary Abstract: GaAs1−ySby growth by molecular beam epitaxy
J. Vac. Sci. Technol. B 4, 532–533 (1986)
https://doi.org/10.1116/1.583419
Summary Abstract: The influence of molecular beam epitaxy growth conditions on the Ga–Al–In–As ternary and quaternary systems
J. Vac. Sci. Technol. B 4, 534–535 (1986)
https://doi.org/10.1116/1.583420
The growth of high mobility InGaAs and InAlAs layers by molecular beam epitaxy
J. Vac. Sci. Technol. B 4, 536–538 (1986)
https://doi.org/10.1116/1.583421
Summary Abstract: Growth and characterization of an InAs–GaAs superlattice alloy
J. Vac. Sci. Technol. B 4, 539 (1986)
https://doi.org/10.1116/1.583422
Investigation of molecular beam epitaxial In0.53Ga0.47As regrown on liquid phase epitaxial In0.53Ga0.47As/InP
J. Vac. Sci. Technol. B 4, 540–542 (1986)
https://doi.org/10.1116/1.583423
Trapping mechanisms in device‐quality molecular beam epitaxial AlxGa1−xAs and GaAs–AlxGa1−xAs modulation doped heterostructures
J. Vac. Sci. Technol. B 4, 546–549 (1986)
https://doi.org/10.1116/1.583426
Summary Abstract: Deep levels in AlGaAs/GaAs modulation‐doped structures grown by molecular beam epitaxy
J. Vac. Sci. Technol. B 4, 550 (1986)
https://doi.org/10.1116/1.583427
Summary Abstract: A comparative study of photovoltaic and photoluminescence spectra of undoped GaAs–Al0.25Ga0.75As multiple quantum well structures grown by molecular beam epitaxy
P. W. Yu; D. C. Reynolds; K. K. Bajaj; C. W. Litton; Jasprit Singh; C. K. Peng; T. Henderson; H. Morkoç
J. Vac. Sci. Technol. B 4, 554–555 (1986)
https://doi.org/10.1116/1.583429
Summary Abstract: Composition of AlGaAs films grown by molecular beam epitaxy
J. Vac. Sci. Technol. B 4, 556–557 (1986)
https://doi.org/10.1116/1.583430
Arsenic‐induced intensity oscillations in reflection high‐energy electron diffraction measurements
J. Vac. Sci. Technol. B 4, 560–563 (1986)
https://doi.org/10.1116/1.583432
Elimination of flux transients in molecular beam epitaxy
J. Vac. Sci. Technol. B 4, 564–567 (1986)
https://doi.org/10.1116/1.583374
Material effects on the cracking efficiency of molecular beam epitaxy arsenic cracking furnaces
J. Vac. Sci. Technol. B 4, 568–570 (1986)
https://doi.org/10.1116/1.583375
An indium‐free mount for GaAs substrate heating during molecular beam epitaxial growth
J. Vac. Sci. Technol. B 4, 571–573 (1986)
https://doi.org/10.1116/1.583376
Molecular beam epitaxy of gallium arsenide using direct radiative substrate heating
J. Vac. Sci. Technol. B 4, 574–577 (1986)
https://doi.org/10.1116/1.583377
Lead calcium telluride grown by molecular beam epitaxy
J. Vac. Sci. Technol. B 4, 578–580 (1986)
https://doi.org/10.1116/1.583378
Summary Abstract: Growth of CdTe and HgCdTe by molecular beam epitaxy
J. Vac. Sci. Technol. B 4, 581–582 (1986)
https://doi.org/10.1116/1.583379
Summary Abstract: (100)‐oriented wide gap II–VI superlattices
L. A. Kolodziejski; R. L. Gunshor; R. Venkatasubramanian; T. C. Bonsett; R. Frohne; S. Datta; N. Otsuka; R. B. Bylsma; W. M. Becker; A. V. Nurmikko
J. Vac. Sci. Technol. B 4, 583–584 (1986)
https://doi.org/10.1116/1.583380
Molecular beam epitaxial growth and characterization of Cd1−xZnxTe, Hg1−xCdxTe, Hg1−xMnxTe, and Hg1−xZnxTe on GaAs(100)
J. Vac. Sci. Technol. B 4, 585–589 (1986)
https://doi.org/10.1116/1.583381
Reflection high‐energy electron diffraction intensity oscillation study of Ga desorption from molecular beam epitaxially grown AlxGa1−xAs
J. Vac. Sci. Technol. B 4, 594–597 (1986)
https://doi.org/10.1116/1.583383
Summary Abstract: Molecular beam epitaxial growth of InAsSb alloys and superlattices
J. Vac. Sci. Technol. B 4, 598–599 (1986)
https://doi.org/10.1116/1.583384
Summary Abstract: Controlled n‐type doping of GaSb
J. Vac. Sci. Technol. B 4, 601–602 (1986)
https://doi.org/10.1116/1.583386
Summary Abstract: Double heterostructure optoelectronic switching devices using molecular beam epitaxy
J. Vac. Sci. Technol. B 4, 603–604 (1986)
https://doi.org/10.1116/1.583387
Current–voltage characteristics of n‐AlGaAs/p‐GaAs heterojunction diodes
J. Vac. Sci. Technol. B 4, 605–608 (1986)
https://doi.org/10.1116/1.583388
Controlled growth of GaAs layers for monolithic hot electron transistors
J. Vac. Sci. Technol. B 4, 609–611 (1986)
https://doi.org/10.1116/1.583389
Novel self‐aligned gate AlxGa1−xAs/n‐GaAs superlattice modulation‐doped field‐effect transistors
J. K. Abrokwah; N. C. Cirillo, Jr.; D. Arch; R. R. Daniels; M. Hibbs‐Brenner; A. Fraasch; P. Vold; P. Joslyn
J. Vac. Sci. Technol. B 4, 615–617 (1986)
https://doi.org/10.1116/1.583391
Effect of epitaxial layer design on the microwave performance of high electron mobility transistors
J. Vac. Sci. Technol. B 4, 618–621 (1986)
https://doi.org/10.1116/1.583392
Heteroepitaxial molecular beam epitaxial InSb and room temperature operation of its metal‐insulator‐semiconductor field‐effect transistors
J. Vac. Sci. Technol. B 4, 622–624 (1986)
https://doi.org/10.1116/1.583393
Summary Abstract: Selective‐area epitaxy of GaAs through silicon dioxide windows by molecular beam epitaxy
J. Vac. Sci. Technol. B 4, 629–630 (1986)
https://doi.org/10.1116/1.583395
Summary Abstract: Strain effects in Cd1−xMnxTe–CdTe superlattices
J. Vac. Sci. Technol. B 4, 635–636 (1986)
https://doi.org/10.1116/1.583582
Structural and electrical properties of lattice‐matched Ca0.44Sr0.56F2/GaAs structures grown by molecular beam epitaxy
J. Vac. Sci. Technol. B 4, 637–640 (1986)
https://doi.org/10.1116/1.583583
Structural properties of GaAs on Si and Ge substrates
D. A. Neumann; Xiaomei Zhu; H. Zabel; T. Henderson; R. Fischer; W. T. Masselink; J. Klem; C. K. Peng; H. Morkoç
J. Vac. Sci. Technol. B 4, 642–644 (1986)
https://doi.org/10.1116/1.583585
Study of solid phase and molecular beam epitaxial cobalt silicide films on Si〈111〉 using electron energy loss spectroscopy
J. Vac. Sci. Technol. B 4, 645–648 (1986)
https://doi.org/10.1116/1.583586
Summary Abstract: Schottky barrier height measurements of type A and type B NiSi2 on Si
J. Vac. Sci. Technol. B 4, 649–650 (1986)
https://doi.org/10.1116/1.583587
Summary Abstract: Temperature dependence of the electron concentration and spatial distribution in n‐Al0.28Ga0.72As/GaAs heterostructures
J. Vac. Sci. Technol. B 4, 651–652 (1986)
https://doi.org/10.1116/1.583588
Summary Abstract: Aharonov–Bohm effect in a molecular beam epitaxially grown double quantum well
M. R. Melloch; S. Bandyopadhyay; S. Datta; R. Noren; M. S. Lundstrom; K. Tan; T. Dungan; R. G. Reifenberger; M. Vaziri
J. Vac. Sci. Technol. B 4, 653–654 (1986)
https://doi.org/10.1116/1.583589
Summary Abstract: Lateral p–n junction formation in GaAs molecular beam epitaxy by crystal‐plane dependent doping
J. Vac. Sci. Technol. B 4, 655 (1986)
https://doi.org/10.1116/1.583590
Anomalous I–V characteristics of semiconductor heterojunction diodes due to transmission resonance
J. Vac. Sci. Technol. B 4, 658–660 (1986)
https://doi.org/10.1116/1.583592
Summary Abstract: Ge/Si heterojunction Ohmic contacts formed by molecular beam epitaxy
J. Vac. Sci. Technol. B 4, 661 (1986)
https://doi.org/10.1116/1.583593
Future of plasma etching for microelectronics: Challenges and opportunities
Gottlieb S. Oehrlein, Stephan M. Brandstadter, et al.
Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications
A. S. Stodolna, T. W. Mechielsen, et al.
High-efficiency metalenses for zone-plate-array lithography
Henry I. Smith, Mark Mondol, et al.