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Using static linear response theory to describe field emission field enhancement and a field-induced insulator-conductor transition

In Special Collection: Vacuum Nanoelectronics

Caio P. de Castro; Thiago A. de Assis; Roberto Rivelino; Fernando de B. Mota; Caio M. C. de Castilho

J. Vac. Sci. Technol. B 39, 060601 (2021) https://doi.org/10.1116/6.0001550

Abstract

View articletitled, Using static linear response theory to describe field emission field enhancement and a field-induced insulator-conductor transition

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ARTICLES

Electronic and Optoelectronic Materials, Devices and Processing

Optoelectronic performance characterization of MoS₂ photodetectors for low frequency sensing applications

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Seungjun Ki; Mingze Chen; Xiaogan Liang

J. Vac. Sci. Technol. B 39, 062201 (2021) https://doi.org/10.1116/6.0001280

Abstract

View articletitled, Optoelectronic performance characterization of MoS2 photodetectors for low frequency sensing applications

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Multifractal wavefunctions of charge carriers in graphene with folded deformations, ripples, or uniaxial flexural modes: Analogies to the quantum Hall effect under random pseudomagnetic fields

In Special Collection: Strain Engineering of Nanophotonic Devices

Abdiel Espinosa-Champo; Gerardo G. Naumis

J. Vac. Sci. Technol. B 39, 062202 (2021) https://doi.org/10.1116/6.0001337

Abstract

View articletitled, Multifractal wavefunctions of charge carriers in graphene with folded deformations, ripples, or uniaxial flexural modes: Analogies to the quantum Hall effect under random pseudomagnetic fields

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Multiplexing implementation of rubbing-induced site-selective growth of MoS₂ feature arrays

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Mingze Chen; Seung Ki; Xiaogan Liang

J. Vac. Sci. Technol. B 39, 062203 (2021) https://doi.org/10.1116/6.0001268

Abstract

View articletitled, Multiplexing implementation of rubbing-induced site-selective growth of MoS2 feature arrays

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CHORUS

Modeling the effect of stochastic heating and surface chemistry in a pure CF₄ inductively coupled plasma

Dmitry Levko; Chandrasekhar Shukla; Laxminarayan L. Raja

J. Vac. Sci. Technol. B 39, 062204 (2021) https://doi.org/10.1116/6.0001293

Abstract

View articletitled, Modeling the effect of stochastic heating and surface chemistry in a pure CF4 inductively coupled plasma

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Postdeposition annealing effect on atomic-layer-deposited Al₂O₃ gate insulator on (001) β-Ga₂O₃

Atsushi Hiraiwa (平岩篤); Kiyotaka Horikawa (堀川清貴); Hiroshi Kawarada (川原田洋); Motohisa Kado (加渡幹尚); Katsunori Danno (旦野克典)

J. Vac. Sci. Technol. B 39, 062205 (2021) https://doi.org/10.1116/6.0001360

Abstract

View articletitled, Postdeposition annealing effect on atomic-layer-deposited Al2O3 gate insulator on (001) β-Ga2O3

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Surface wetting on micromilled and laser-etched aluminum with ion-beam postprocessing

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Kirill Misiiuk; Sam Lowrey; Richard Blaikie; Josselin Juras; Andrew Sommers; Jérôme Leveneur

J. Vac. Sci. Technol. B 39, 062206 (2021) https://doi.org/10.1116/6.0001282

Abstract

View articletitled, Surface wetting on micromilled and laser-etched aluminum with ion-beam postprocessing

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Enhancement of thermionic emission and conversion characteristics using polarization- and band-engineered n-type AlGaN/GaN cathodes

In Special Collection: Vacuum Nanoelectronics

Shigeya Kimura; Hisashi Yoshida; Hisao Miyazaki; Takuya Fujimoto; Akihisa Ogino

J. Vac. Sci. Technol. B 39, 062207 (2021) https://doi.org/10.1116/6.0001357

Abstract

View articletitled, Enhancement of thermionic emission and conversion characteristics using polarization- and band-engineered n-type AlGaN/GaN cathodes

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Stress reduction and wafer bow accommodation for the fabrication of thin film lithium niobate on oxidized silicon

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Karan Prabhakar; Ryan J. Patton; Ronald M. Reano

J. Vac. Sci. Technol. B 39, 062208 (2021) https://doi.org/10.1116/6.0001283

Abstract

View articletitled, Stress reduction and wafer bow accommodation for the fabrication of thin film lithium niobate on oxidized silicon

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CHORUS

Multiple electron beam generation from InGaN photocathode

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Daiki Sato; Haruka Shikano; Atsushi Koizumi; Tomohiro Nishitani; Yoshio Honda; Hiroshi Amano

J. Vac. Sci. Technol. B 39, 062209 (2021) https://doi.org/10.1116/6.0001272

Abstract

View articletitled, Multiple electron beam generation from InGaN photocathode

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Mechanism and solution of sharp defects in trench double-diffused metal-oxide semiconductor polysilicon recess etching

Wenwen Zhang; Yongzhi Fang; Renrui Huang; Wenming Zhu

J. Vac. Sci. Technol. B 39, 062210 (2021) https://doi.org/10.1116/6.0001395

Abstract

View articletitled, Mechanism and solution of sharp defects in trench double-diffused metal-oxide semiconductor polysilicon recess etching

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Diffusion coefficient of charge carriers in disordered semiconductors retaining a combination of exponential and Gaussian mobility-gap states: Application to amorphous selenium

Dilshad Hossain; M. Z. Kabir

J. Vac. Sci. Technol. B 39, 062211 (2021) https://doi.org/10.1116/6.0001516

Abstract

View articletitled, Diffusion coefficient of charge carriers in disordered semiconductors retaining a combination of exponential and Gaussian mobility-gap states: Application to amorphous selenium

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Maintaining atomically smooth GaAs surfaces after high-temperature processing for precise interdiffusion analysis and materials engineering

Leonid Miroshnik; Brian D. Rummel; Andrew B. Li; Ganesh Balakrishnan; Talid Sinno; Sang M. Han

J. Vac. Sci. Technol. B 39, 062212 (2021) https://doi.org/10.1116/6.0001399

Abstract

View articletitled, Maintaining atomically smooth GaAs surfaces after high-temperature processing for precise interdiffusion analysis and materials engineering

Supplementary Material

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CHORUS

Lithography

PHIDL: Python-based layout and geometry creation for nanolithography

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Adam N. McCaughan; Alexander N. Tait; Sonia M. Buckley; Dylan M. Oh; Jeffrey T. Chiles; Jeffrey M. Shainline; Sae Woo Nam

J. Vac. Sci. Technol. B 39, 062601 (2021) https://doi.org/10.1116/6.0001203

Abstract

View articletitled, PHIDL: Python-based layout and geometry creation for nanolithography

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Optimized ultraviolet grayscale process for high vertical resolution applied to spectral imagers

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Nadine Gerges; Camille Petit-Etienne; Marie Panabière; Jumana Boussey; Yann Ferrec; Cécile Gourgon

J. Vac. Sci. Technol. B 39, 062602 (2021) https://doi.org/10.1116/6.0001273

Abstract

View articletitled, Optimized ultraviolet grayscale process for high vertical resolution applied to spectral imagers

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Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser

Vineeth Sasidharan; Alexander Neumann; S. R. J. Brueck

J. Vac. Sci. Technol. B 39, 062603 (2021) https://doi.org/10.1116/6.0001377

Abstract

View articletitled, Diffraction-grating beam splitter, interferometric-lithography nanopatterning with a multilongitudinal-mode diode laser

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CHORUS

Identifying extreme ultraviolet lithography attenuated phase shifting mask absorber materials using effective media approximation modeling

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Rajiv Sejpal; Bruce Smith

J. Vac. Sci. Technol. B 39, 062604 (2021) https://doi.org/10.1116/6.0001298

Abstract

View articletitled, Identifying extreme ultraviolet lithography attenuated phase shifting mask absorber materials using effective media approximation modeling

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Multiple criteria optimization of electrostatic electron lenses using multiobjective genetic algorithms

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Neda Hesam Mahmoudi Nezhad; Mohamad Ghaffarian Niasar; Ali Mohammadi Gheidari; Pieter Kruit; Cornelis Wouter Hagen

J. Vac. Sci. Technol. B 39, 062605 (2021) https://doi.org/10.1116/6.0001274

Abstract

View articletitled, Multiple criteria optimization of electrostatic electron lenses using multiobjective genetic algorithms

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Nanoscale Science and Technology

Lithographically patterned stretchable metallic microwiring on electrospun nanofiber mats

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Yutika Badhe; Pedro E. Rocha-Flores; Walter E. Voit; David Remer; Lauren Costella; Alexandra Joshi-Imre

J. Vac. Sci. Technol. B 39, 062801 (2021) https://doi.org/10.1116/6.0001279

Abstract

View articletitled, Lithographically patterned stretchable metallic microwiring on electrospun nanofiber mats

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CHORUS

Influence of structure and composition of diamond-like nanocomposite coatings on cell viability

Alexander S. Grenadyorov; Andrey A. Solovyev; Konstantin V. Oskomov; Tuhin S. Santra; Pallavi Gupta; Dmitriy S. Korneev

J. Vac. Sci. Technol. B 39, 062802 (2021) https://doi.org/10.1116/6.0001263

Abstract

View articletitled, Influence of structure and composition of diamond-like nanocomposite coatings on cell viability

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Intermetallic compound formation inhibiting electromigration-based micro/nanowire growth

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Yasuhiro Kimura; Yang Ju

J. Vac. Sci. Technol. B 39, 062803 (2021) https://doi.org/10.1116/6.0001271

Abstract

View articletitled, Intermetallic compound formation inhibiting electromigration-based micro/nanowire growth

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100 keV vacuum sealed field emission gun for high resolution electron microscopy

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Mohamed M. El-Gomati; Torquil Wells; Xiaoping Zha; Richard Sykes; Christopher J. Russo; Richard Henderson; Greg McMullan

J. Vac. Sci. Technol. B 39, 062804 (2021) https://doi.org/10.1116/6.0001275

Abstract

View articletitled, 100 keV vacuum sealed field emission gun for high resolution electron microscopy

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Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Mario Baum; Christoph Meinecke; Thomas Blaudeck; Christian Helke; Danny Reuter; Karla Hiller; Sascha Hermann; Stefan E. Schulz; Harald Kuhn

J. Vac. Sci. Technol. B 39, 062805 (2021) https://doi.org/10.1116/6.0001299

Abstract

View articletitled, Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research

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Diffusion of zirconium on the surface of Schottky electron sources

Soichiro Matsunaga; Aki Takei; Souichi Katagiri; Yusuke Sakai; Takashi Doi

J. Vac. Sci. Technol. B 39, 062806 (2021) https://doi.org/10.1116/6.0001381

Abstract

View articletitled, Diffusion of zirconium on the surface of Schottky electron sources

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Synthesis of NiS₂ nanomaterial as wide range pressure sensor

In Special Collection: Strain Engineering of Nanophotonic Devices

Zehui Peng; Jing Zhang; Zhong Ma; Shuai Lou; Yumeng Xue; Shancheng Yan

J. Vac. Sci. Technol. B 39, 062807 (2021) https://doi.org/10.1116/6.0001344

Abstract

View articletitled, Synthesis of NiS2 nanomaterial as wide range pressure sensor

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Incorporating photoemission into the theoretical unification of electron emission and space-charge limited current

In Special Collection: Vacuum Nanoelectronics

Sarah A. Lang; Adam M. Darr; Allen L. Garner

J. Vac. Sci. Technol. B 39, 062808 (2021) https://doi.org/10.1116/6.0001515

Abstract

View articletitled, Incorporating photoemission into the theoretical unification of electron emission and space-charge limited current

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Tensile-strained self-assembly of InGaAs on InAs(111)A

In Special Collection: Strain Engineering of Nanophotonic Devices

Kevin D. Vallejo; Trent A. Garrett; Carlos I. Cabrera; Baolai Liang; Kevin A. Grossklaus; Paul J. Simmonds

J. Vac. Sci. Technol. B 39, 062809 (2021) https://doi.org/10.1116/6.0001481

Abstract

View articletitled, Tensile-strained self-assembly of InGaAs on InAs(111)A

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CHORUS

Investigating the pattern transfer fidelity of Norland Optical Adhesive 81 for nanogrooves by microtransfer molding

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Rahman Sabahi-Kaviani; Regina Luttge

J. Vac. Sci. Technol. B 39, 062810 (2021) https://doi.org/10.1116/6.0001333

Abstract

View articletitled, Investigating the pattern transfer fidelity of Norland Optical Adhesive 81 for nanogrooves by microtransfer molding

Supplementary Material

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MEMS and NEMS

Neural optoelectrodes merging semiconductor scalability with polymeric-like bendability for low damage acute in vivo neuron readout and stimulation

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Vittorino Lanzio; Vanessa Gutierrez; John Hermiz; Kristofer Bouchard; Stefano Cabrini

J. Vac. Sci. Technol. B 39, 063001 (2021) https://doi.org/10.1116/6.0001269

Abstract

View articletitled, Neural optoelectrodes merging semiconductor scalability with polymeric-like bendability for low damage acute in vivo neuron readout and stimulation

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Microelectronic and Nanoelectronic Devices

Influences of etching chemical parameters on AlGaN/GaN electrical degradation in power devices

Frédéric Le Roux; Nicolas Possémé; Pauline Burtin

J. Vac. Sci. Technol. B 39, 063201 (2021) https://doi.org/10.1116/6.0001130

Abstract

View articletitled, Influences of etching chemical parameters on AlGaN/GaN electrical degradation in power devices

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Planar figure-8 coils for ultra-focal and directional micromagnetic brain stimulation

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Hongbae Jeong; Jiangdong Deng; Giorgio Bonmassar

J. Vac. Sci. Technol. B 39, 063202 (2021) https://doi.org/10.1116/6.0001281

Abstract

View articletitled, Planar figure-8 coils for ultra-focal and directional micromagnetic brain stimulation

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Organic Electronic and Optoelectronic Devices

Fabrication of Cd-free ZnCuInS/ZnS based inverted quantum dot light-emitting diode: Considering substrate temperature effect on sputtered ZnO layer

Mohammad Mostafizur Rahman Biswas; Md. Faruk Hossain; Masahiro Morimoto; Shigeki Naka; Hiroyuki Okada

J. Vac. Sci. Technol. B 39, 063401 (2021) https://doi.org/10.1116/6.0001365

Abstract

View articletitled, Fabrication of Cd-free ZnCuInS/ZnS based inverted quantum dot light-emitting diode: Considering substrate temperature effect on sputtered ZnO layer

Supplementary Material

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Plasmonics

Subradiant resonances in Au and Ag bipartite lattices in the visible spectrum

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Aran Warren; Maan M. Alkaisi; Ciaran P. Moore

J. Vac. Sci. Technol. B 39, 063601 (2021) https://doi.org/10.1116/6.0001270

Abstract

View articletitled, Subradiant resonances in Au and Ag bipartite lattices in the visible spectrum

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Measurement and Characterization

Optical metrology of characterizing wetting states

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Deming Meng; Yifei Wang; Hao Yang; Buyun Chen; Pan Hu; Boxiang Song; Yunxiang Wang; Zerui Liu; Tse-Hsien Ou; Ximing Zheng; Yichen Gong; Wei Wu

J. Vac. Sci. Technol. B 39, 064001 (2021) https://doi.org/10.1116/6.0001187

Abstract

View articletitled, Optical metrology of characterizing wetting states

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Distribution of trace impurities in microvolumes and analysis of concentration using laser sputtered neutral mass spectrometry

Haruko Akutsu; Reiko Saito; Jun Asakawa; Kei Kiyokawa; Masato Morita; Tetsuo Sakamoto; Masaaki Fujii

J. Vac. Sci. Technol. B 39, 064002 (2021) https://doi.org/10.1116/6.0001244

Abstract

View articletitled, Distribution of trace impurities in microvolumes and analysis of concentration using laser sputtered neutral mass spectrometry

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Virtual metrology modeling of reactive ion etching based on statistics-based and dynamics-inspired spectral features

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Kun-Chieh Chien; Chih-Hao Chang; Dragan Djurdjanovic

J. Vac. Sci. Technol. B 39, 064003 (2021) https://doi.org/10.1116/6.0001277

Abstract

View articletitled, Virtual metrology modeling of reactive ion etching based on statistics-based and dynamics-inspired spectral features

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CHORUS

Long-term brain-on-chip: Multielectrode array recordings in 3D neural cell cultures

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Yagmur Demircan Yalcin; Alex J. Bastiaens; Jean-Philippe Frimat; Regina Luttge

J. Vac. Sci. Technol. B 39, 064004 (2021) https://doi.org/10.1116/6.0001297

Abstract

View articletitled, Long-term brain-on-chip: Multielectrode array recordings in 3D neural cell cultures

Supplementary Material

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Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution

In Special Collection: 64th International Conference on Electron, Ion, And Photon Beam Technology and Nanofabrication, EIPBN 2021

Elizabeth M. Ashley; Peter J. Duda, III; Paul F. Nealey

J. Vac. Sci. Technol. B 39, 064005 (2021) https://doi.org/10.1116/6.0001287

Abstract

View articletitled, Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution

Supplementary Material

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CHORUS

Vacuum Measurement and Technology

Electron beam deposition of cobalt on the silicon substrate: Experiment and simulation

Pavel E. L'vov; Sergey V. Bulyarskiy; Alexander N. Saurov; Vyacheslav V. Svetukhin; Alexey I. Terentyev

J. Vac. Sci. Technol. B 39, 064201 (2021) https://doi.org/10.1116/6.0001223

Abstract

View articletitled, Electron beam deposition of cobalt on the silicon substrate: Experiment and simulation

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Comparative study of thermal desorption and pumping performance for TiZrV-, Pd-, or Pd/TiZrV-coated copper tubes

Xiuguang Jin; Takashi Uchiyama; Yasunori Tanimoto; Tohru Honda

J. Vac. Sci. Technol. B 39, 064202 (2021) https://doi.org/10.1116/6.0001475

Abstract

View articletitled, Comparative study of thermal desorption and pumping performance for TiZrV-, Pd-, or Pd/TiZrV-coated copper tubes

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Miniature touch mode capacitance vacuum gauge with circular diaphragm

Xiaodong Han; Gang Li; Mahui Xu; Huangping Yan; Yongjian Feng; Detian Li

J. Vac. Sci. Technol. B 39, 064203 (2021) https://doi.org/10.1116/6.0001332

Abstract

View articletitled, Miniature touch mode capacitance vacuum gauge with circular diaphragm

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Leakage rate detection of ConFlat seals in aluminum and stainless steel flanges under mechanical loads for quantum optical experiments in space

Michael Elsen; Thi Thu Hien Dao; Claus Braxmaier; Jens Grosse

J. Vac. Sci. Technol. B 39, 064204 (2021) https://doi.org/10.1116/6.0001525

Abstract

View articletitled, Leakage rate detection of ConFlat seals in aluminum and stainless steel flanges under mechanical loads for quantum optical experiments in space

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Notes

Fabry–Perot-cavity-based refractometry without influence of mirror penetration depth

C. Forssén; I. Silander; J. Zakrisson; M. Zelan; O. Axner

J. Vac. Sci. Technol. B 39, 065001 (2021) https://doi.org/10.1116/6.0001501

Abstract

View articletitled, Fabry–Perot-cavity-based refractometry without influence of mirror penetration depth

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Errata

Erratum: “Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation” [J. Vac. Sci. Technol. B 39, 054202 (2021)]

Clément Bessouet; Sylvain Lemettre; Charlotte Kutyla; Alain Bosseboeuf; Philippe Coste; Thierry Sauvage; Hélène Lecoq; Olivier Wendling; Aurélien Bellamy; Piyush Jagtap; Stéphanie Escoubas; Christophe Guichet; Olivier Thomas; Johan Moulin

J. Vac. Sci. Technol. B 39, 067001 (2021) https://doi.org/10.1116/6.0001458

Extract

View articletitled, Erratum: “Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation” [J. Vac. Sci. Technol. B 39, 054202 (2021)]

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Erratum: “Pulsed laser deposition nickel oxide on crystalline silicon as hole selective contacts” [J. Vac. Sci. Technol. B 38, 014013 (2020)]

Jing Zhao; Anita Ho-Baillie; Stephen P. Bremner

J. Vac. Sci. Technol. B 39, 067002 (2021) https://doi.org/10.1116/6.0001492

Extract

View articletitled, Erratum: “Pulsed laser deposition nickel oxide on crystalline silicon as hole selective contacts” [J. Vac. Sci. Technol. B 38, 014013 (2020)]

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Issues

Cover Image

Letters

ARTICLES

Electronic and Optoelectronic Materials, Devices and Processing

Lithography

Nanoscale Science and Technology

MEMS and NEMS

Microelectronic and Nanoelectronic Devices

Organic Electronic and Optoelectronic Devices

Plasmonics

Measurement and Characterization

Vacuum Measurement and Technology

Notes

Errata

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