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Volume 39, Issue 2

March 2021

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ISSN 2166-2746

EISSN 2166-2754

In this Issue

Letters
ARTICLES
Errata

Letters

Formation of ideally ordered porous anodic zirconia by anodization of vacuum deposited Zr on molds

Toshiaki Kondo; Touko Tamura; Takashi Yanagishita; Hideki Masuda

J. Vac. Sci. Technol. B 39, 020601 (2021) https://doi.org/10.1116/6.0000864

Abstract

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ARTICLES

Electronic and Optoelectronic Materials, Devices and Processing

Particle-in-cell simulation of an industrial magnetron with electron population analysis

Andong Yue; Marcus Pearlman; Mike Worthington; John Cipolla; Jim Browning

J. Vac. Sci. Technol. B 39, 022201 (2021) https://doi.org/10.1116/6.0000809

Abstract

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High sensitivity x-ray detectors based on 4H-SiC p-i-n structure with 80 μm thick intrinsic layer

Qing Liu; Dong Zhou; Weizong Xu; Dunjun Chen; Fangfang Ren; Rong Zhang; Youdou Zheng; Hai Lu

J. Vac. Sci. Technol. B 39, 022202 (2021) https://doi.org/10.1116/6.0000829

Abstract

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Lithography

Optimization of photoresist plating mold fabrication for metal mask patterning

Doreen Hii; Daryosh Vatanparvar; Andrei M. Shkel

J. Vac. Sci. Technol. B 39, 022601 (2021) https://doi.org/10.1116/6.0000879

Abstract

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CHORUS

Nanoscale Science and Technology

Systematic growth of carbon nanotubes on aluminum substrate for enhanced field emission performance

Palash Chandra Maity; Subham Gandhi; Manuj Dixit; Indranil Lahiri

J. Vac. Sci. Technol. B 39, 022801 (2021) https://doi.org/10.1116/6.0000560

Abstract

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About the robustness of Schottky conjecture when quasi-one-dimensional stages are present

Edgar Marcelino de Carvalho Neto

J. Vac. Sci. Technol. B 39, 022802 (2021) https://doi.org/10.1116/6.0000727

Abstract

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Intrinsic excitation-dependent room-temperature internal quantum efficiency of AlGaN nanowires with varying Al contents

Jiaying Lu; Yun Zhong; Songrui Zhao

J. Vac. Sci. Technol. B 39, 022803 (2021) https://doi.org/10.1116/6.0000763

Abstract

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Theoretical model for fast calculations of the electrical resistivity of thin metallic films with rough surfaces

Alexander. A. Pribylov

J. Vac. Sci. Technol. B 39, 022804 (2021) https://doi.org/10.1116/6.0000781

Abstract

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Blue and near infrared luminescence degradation by electron beam irradiation in Y₂O₃:Tm³⁺ nanophosphors

Shivaramu Nagarasanakote Jayaramu; Elizabeth Coetsee; Hendrik C. Swart

J. Vac. Sci. Technol. B 39, 022805 (2021) https://doi.org/10.1116/6.0000919

Abstract

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Supplementary Material

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Microelectronic and Nanoelectronic Devices

Temperature effects on gated silicon field emission array performance

Ranajoy Bhattacharya; Nedeljko Karaulac; Winston Chern; Akintunde Ibitayo Akinwande; Jim Browning

J. Vac. Sci. Technol. B 39, 023201 (2021) https://doi.org/10.1116/6.0000753

Abstract

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Apparent size effects on dopant activation in nanometer-wide Si fins

Steven Folkersma; Janusz Bogdanowicz; Paola Favia; Lennaert Wouters; Dirch Hjorth Petersen; Ole Hansen; Henrik Hartmann Henrichsen; Peter Former Nielsen; Lior Shiv; Wilfried Vandervorst

J. Vac. Sci. Technol. B 39, 023202 (2021) https://doi.org/10.1116/6.0000921

Abstract

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Measurement and Characterization

Information extraction from Murphy–Good plots of tungsten field electron emitters

Mazen Madanat; Mohammad Al Share; Mohammad M. Allaham; Marwan S. Mousa

J. Vac. Sci. Technol. B 39, 024001 (2021) https://doi.org/10.1116/6.0000803

Abstract

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Numerical analysis of pattern shape deformation in UV imprint considering thermal deformation with UV shrinkage and curing

Yuki Onishi; Ryunosuke Yamashita; Kenji Amaya; Yoshihiko Hirai

J. Vac. Sci. Technol. B 39, 024002 (2021) https://doi.org/10.1116/6.0000817

Abstract

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Optical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas

Keith Hernandez; Alex Press; Matthew J. Goeckner; Lawrence J. Overzet

J. Vac. Sci. Technol. B 39, 024003 (2021) https://doi.org/10.1116/6.0000679

Abstract

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CHORUS

Advances in secondary ion mass spectrometry for N-doped niobium

Jonathan W. Angle; Ari D. Palczewski; Charles E. Reece; Fred A. Stevie; Michael J. Kelley

J. Vac. Sci. Technol. B 39, 024004 (2021) https://doi.org/10.1116/6.0000848

Abstract

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Vacuum Measurement and Technology

Outgassing rate comparison of seven geometrically similar vacuum chambers of different materials and heat treatments

James A. Fedchak; Julia K. Scherschligt; Sefer Avdiaj; Daniel S. Barker; Stephen P. Eckel; Ben Bowers; Scott O’Connell; Perry Henderson

J. Vac. Sci. Technol. B 39, 024201 (2021) https://doi.org/10.1116/6.0000657

Abstract

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Pyroelectric lithium niobate electron emission-based ion-pump

KB Vinayakumar; Ved Gund; Amit Lal

J. Vac. Sci. Technol. B 39, 024202 (2021) https://doi.org/10.1116/6.0000882

Abstract

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Supplementary Material

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Errata

Publisher’s Note: “Silicon field emitters fabricated by dicing-saw and wet-chemical-etching” [J. Vac. Sci. Technol. B 39, 013205 (2021)]

Simon Edler; Andreas Schels; Josef Biba; Walter Hansch; Michael Bachmann; Felix Düsberg; Marinus Werber; Christoph Langer; Manuel Meyer; David von Bergen; Andreas Pahlke

J. Vac. Sci. Technol. B 39, 027001 (2021) https://doi.org/10.1116/6.0000974

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Letters

Formation of ideally ordered porous anodic zirconia by anodization of vacuum deposited Zr on molds

ARTICLES

Electronic and Optoelectronic Materials, Devices and Processing

Particle-in-cell simulation of an industrial magnetron with electron population analysis

High sensitivity x-ray detectors based on 4H-SiC p-i-n structure with 80 μm thick intrinsic layer

Lithography

Optimization of photoresist plating mold fabrication for metal mask patterning

Nanoscale Science and Technology

Systematic growth of carbon nanotubes on aluminum substrate for enhanced field emission performance

About the robustness of Schottky conjecture when quasi-one-dimensional stages are present

Intrinsic excitation-dependent room-temperature internal quantum efficiency of AlGaN nanowires with varying Al contents

Theoretical model for fast calculations of the electrical resistivity of thin metallic films with rough surfaces

Blue and near infrared luminescence degradation by electron beam irradiation in Y₂O₃:Tm³⁺ nanophosphors

Microelectronic and Nanoelectronic Devices

Temperature effects on gated silicon field emission array performance

Apparent size effects on dopant activation in nanometer-wide Si fins

Measurement and Characterization

Information extraction from Murphy–Good plots of tungsten field electron emitters

Numerical analysis of pattern shape deformation in UV imprint considering thermal deformation with UV shrinkage and curing

Optical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas

Advances in secondary ion mass spectrometry for N-doped niobium

Vacuum Measurement and Technology

Outgassing rate comparison of seven geometrically similar vacuum chambers of different materials and heat treatments

Pyroelectric lithium niobate electron emission-based ion-pump

Errata

Publisher’s Note: “Silicon field emitters fabricated by dicing-saw and wet-chemical-etching” [J. Vac. Sci. Technol. B 39, 013205 (2021)]

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Issues

Cover Image

Letters

ARTICLES

Electronic and Optoelectronic Materials, Devices and Processing

Lithography

Nanoscale Science and Technology

Microelectronic and Nanoelectronic Devices

Measurement and Characterization

Vacuum Measurement and Technology

Errata

RSS

Resources

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pubs.aip.org

Connect with AIP Publishing

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