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Controlled removal of hydrogen atoms from H-terminated silicon surfaces

Hamed Alemansour; S. O. Reza Moheimani; James H. G. Owen; John N. Randall; Ehud Fuchs

J. Vac. Sci. Technol. B 38, 040601 (2020) https://doi.org/10.1116/6.0000241

Abstract

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CHORUS

Engineering anisotropic magnetoresistance of Hall bars with interfacial organic layers

Jun Hong Park; Mario Ribeiro; Thi Kim Hang Pham; Nyun Jong Lee; Tai-woon Eom; Junhyeon Jo; Seung-Young Park; Sonny H. Rhim; Kohji Nakamura; Jung-Woo Yoo; Tae Hee Kim

J. Vac. Sci. Technol. B 38, 040602 (2020) https://doi.org/10.1116/6.0000222

Abstract

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ARTICLES

Electronic and Optoelectronic Materials, Devices and Processing

Thickness dependence of infrared lattice absorption and excitonic absorption in ZnO layers on Si and SiO₂ grown by atomic layer deposition

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Nuwanjula S. Samarasingha; Stefan Zollner; Dipayan Pal; Rinki Singh; Sudeshna Chattopadhyay

J. Vac. Sci. Technol. B 38, 042201 (2020) https://doi.org/10.1116/6.0000184

Abstract

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Photoluminescence properties of epitaxial asymmetric triple CdSe quantum wells

In Special Collection: Conference Collection: 35th North American Molecular Beam Epitaxy Conference 2019

Liliana Fernanda Hernández-García; Frantisek Sutara; Isaac Hernández-Calderón

J. Vac. Sci. Technol. B 38, 042202 (2020) https://doi.org/10.1116/6.0000091

Abstract

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Quantum and transport lifetimes in optically induced GaN/AlGaN 2DEGs grown on bulk GaN

In Special Collection: Conference Collection: 35th North American Molecular Beam Epitaxy Conference 2019

Luisa Krückeberg; Steffen Wirth; Victor V. Solovyev; Andreas Großer; Igor V. Kukushkin; Thomas Mikolajick; Stefan Schmult

J. Vac. Sci. Technol. B 38, 042203 (2020) https://doi.org/10.1116/1.5145198

Abstract

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In situ grown single crystal aluminum as a nonalloyed ohmic contact to n-ZnSe by molecular beam epitaxy

Zongjian Fan; Ryan Bunk; Guangying Wang; Jerry M. Woodall

J. Vac. Sci. Technol. B 38, 042204 (2020) https://doi.org/10.1116/6.0000245

Abstract

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Strain-dependent luminescence and piezoelectricity in monolayer transition metal dichalcogenides

In Special Collection: Papers from the 47th Conference on the Physics and Chemistry of Surfaces and Interfaces (PCSI-47) 2020

Alex C. De Palma; Gabriel Cossio; Kayleigh Jones; Jiamin Quan; Xiaoqin Li; Edward T. Yu

J. Vac. Sci. Technol. B 38, 042205 (2020) https://doi.org/10.1116/6.0000251

Abstract

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CHORUS

Inkjet-printed MoS₂-based field-effect transistors with graphene and hexagonal boron nitride inks

Ridwan F. Hossain; Anupama B. Kaul

J. Vac. Sci. Technol. B 38, 042206 (2020) https://doi.org/10.1116/6.0000082

Abstract

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Photoassisted chemical smoothing of AlGaN surface after laser lift-off

Zhongming Zheng; Hao Long; Samuel Matta; Mathieu Leroux; Julien Brault; Leiying Ying; Zhiwei Zheng; Baoping Zhang

J. Vac. Sci. Technol. B 38, 042207 (2020) https://doi.org/10.1116/6.0000192

Abstract

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Extending the metal-induced gap state model of Schottky barriers

In Special Collection: Papers from the 47th Conference on the Physics and Chemistry of Surfaces and Interfaces (PCSI-47) 2020

John Robertson; Yuzheng Guo; Zhaofu Zhang; Hongfei Li

J. Vac. Sci. Technol. B 38, 042208 (2020) https://doi.org/10.1116/6.0000164

Abstract

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Lithography

Self-detached membranes with well-defined pore size, shape and distribution fabricated by underexposure photolithography

Tingjie Li; Peipei Jia; Kar Man Leung; Qiuquan Guo; Jun Yang

J. Vac. Sci. Technol. B 38, 042601 (2020) https://doi.org/10.1116/6.0000203

Abstract

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Nanometer Science and Technology

Boron liquid metal alloy ion sources for special focused ion beam applications

Lothar Bischoff; Nico Klingner; Paul Mazarov; Wolfgang Pilz; Fabian Meyer

J. Vac. Sci. Technol. B 38, 042801 (2020) https://doi.org/10.1116/6.0000073

Abstract

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Implementation of the inductively coupled plasma etching processes for forming gallium nitride nanorods used in ultraviolet light-emitting diode technology

Marek Ekielski; Marek Wzorek; Krystyna Gołaszewska; Alina Domanowska; Andrzej Taube; Mariusz Sochacki

J. Vac. Sci. Technol. B 38, 042802 (2020) https://doi.org/10.1116/6.0000133

Abstract

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Adsorption behavior of cobalt phthalocyanine submonolayer coverages on B-Si(111)- $\sqrt{3} \times \sqrt{3} R 30^{°}$

In Special Collection: Papers from the 47th Conference on the Physics and Chemistry of Surfaces and Interfaces (PCSI-47) 2020

Milan Kubicki; Susi Lindner; Martin Franz; Holger Eisele; Mario Dähne

J. Vac. Sci. Technol. B 38, 042803 (2020) https://doi.org/10.1116/6.0000242

Abstract

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Individual arc-discharge synthesized multiwalled carbon nanotubes probed with multiple measurement techniques

Markus Ahlskog; Matti J. Hokkanen; Dmitry Levshov; Krister Svensson; Alexander Volodin; Chris van Haesendonck

J. Vac. Sci. Technol. B 38, 042804 (2020) https://doi.org/10.1116/6.0000187

Abstract

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Mechanism of premature etch stop in high-density magnetic-tunnel-junction patterning using CO/NH₃ plasma with Ta mask

Makoto Satake; Masaki Yamada; Kenetsu Yokogawa

J. Vac. Sci. Technol. B 38, 042805 (2020) https://doi.org/10.1116/6.0000305

Abstract

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Microelectronic and Nanoelectronic Devices

Advanced modeling of field enhanced thermionic emission

In Special Collection: Conference Collection: 32nd IVNC and 12th IVESC (2019 Joint Meeting)

Jonathan P. Edelen; Nathan M. Cook; Christopher C. Hall; Yuan Hu; Xi Tan; Jean-Luc Vay

J. Vac. Sci. Technol. B 38, 043201 (2020) https://doi.org/10.1116/1.5140753

Abstract

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CHORUS

Monolithically fabricated sample for the calibration of the tip-sample thermal conductance in scanning thermal microscopy

Zarina Umatova; Yuan Zhang; Rory Lambert; Phillip S. Dobson; Jonathan M. R. Weaver

J. Vac. Sci. Technol. B 38, 043202 (2020) https://doi.org/10.1116/6.0000034

Abstract

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Comparison of macroscopic and microscopic emission characteristics of large area field emitters based on carbon nanotubes and graphene

In Special Collection: Conference Collection: 32nd IVNC and 12th IVESC (2019 Joint Meeting)

Eugeni O. Popov; Anatoly G. Kolosko; Sergey V. Filippov; Evgeny I. Terukov; Roman M. Ryazanov; Evgeny P. Kitsyuk

J. Vac. Sci. Technol. B 38, 043203 (2020) https://doi.org/10.1116/6.0000072

Abstract

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High current density electron emission from an electrodeposited metal nanowire array

Tanouir Aloui; Matthew P. Kirley; Erik Vick; Allan Hilton; Pedro Colon; William Kim; Charles B. Parker; Jason J. Amsden; Jeffrey T. Glass; Kristin H. Gilchrist

J. Vac. Sci. Technol. B 38, 043204 (2020) https://doi.org/10.1116/6.0000135

Abstract

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CHORUS

Measurement and Characterization

Development of two-color resonant ionization sputtered neutral mass spectrometry and microarea imaging for Sr

In Special Collection: Special Topic Collection on Secondary Ion Mass Spectrometry (SIMS)

Yue Zhao; Takeru Yoshida; Yuzuka Ohmori; Yuta Miyashita; Masato Morita; Tetsuo Sakamoto; Kotaro Kato; Ryohei Terabayashi; Volker Sonnenschein; Hideki Tomita; Toshihide Kawai; Takeo Okumura; Yukihiko Satou; Masabumi Miyabe; Ikuo Wakaida

J. Vac. Sci. Technol. B 38, 044001 (2020) https://doi.org/10.1116/6.0000006

Abstract

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Analysis of useful ion yield for Si in GaN by secondary ion mass spectrometry

In Special Collection: Special Topic Collection on Secondary Ion Mass Spectrometry (SIMS)

M. K. Indika Senevirathna; Mark Vernon; Graham A. Cooke; Garnett B. Cross; Alexander Kozhanov; Michael D. Williams

J. Vac. Sci. Technol. B 38, 044002 (2020) https://doi.org/10.1116/6.0000138

Abstract

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CHORUS

Ionization probability of sputtered indium atoms under impact of slow highly charged ions

In Special Collection: Special Topic Collection on Secondary Ion Mass Spectrometry (SIMS)

Matthias Herder; Philipp Ernst; Lucia Skopinski; Boris Weidtmann; Marika Schleberger; Andreas Wucher

J. Vac. Sci. Technol. B 38, 044003 (2020) https://doi.org/10.1116/6.0000171

Abstract

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Correlation between electromigration-related void volumes and time-to-failure, the high-resolution x-ray tomography’s vital support

In Special Collection: Reliability and Stress-related Phenomena in Nano and Microelectronics

Stéphane Moreau; Alexandra Fraczkiewicz

J. Vac. Sci. Technol. B 38, 044004 (2020) https://doi.org/10.1116/6.0000252

Abstract

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Calibration of matrix-dependent biases in isotope and trace element analyses of carbonate minerals

In Special Collection: Special Topic Collection on Secondary Ion Mass Spectrometry (SIMS)

Kaitlyn A. McCain; Ming-Chang Liu; Kevin D. McKeegan

J. Vac. Sci. Technol. B 38, 044005 (2020) https://doi.org/10.1116/6.0000111

Abstract

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CHORUS

Observation of light and secondary ion emissions from surfaces irradiated with highly charged ions

In Special Collection: Special Topic Collection on Secondary Ion Mass Spectrometry (SIMS)

Naofumi Nishida; Makoto Sakurai; Daiji Kato; Hiroyuki A. Sakaue

J. Vac. Sci. Technol. B 38, 044006 (2020) https://doi.org/10.1116/6.0000042

Abstract

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Dielectric breakdown in epitaxial BaTiO₃ thin films

HsinWei Wu; Patrick Ponath; Edward L. Lin; Robert M. Wallace; Chadwin Young; John G. Ekerdt; Alexander A. Demkov; Martha R. McCartney; David J. Smith

J. Vac. Sci. Technol. B 38, 044007 (2020) https://doi.org/10.1116/6.0000237

Abstract

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Enhanced sputter and secondary ion yields using MeV gold nanoparticle beams delivered by the Andromede facility

In Special Collection: Special Topic Collection on Secondary Ion Mass Spectrometry (SIMS)

Thanh Loan Lai; Dominique Jacquet; Isabelle Ribaud; Michael John Eller; Dmitriy Verkhoturov; Emile Albert Schweikert; Luiz Henrique Galvão Tizei; Fuhui Shao; Suheyla Bilgen; Bruno Mercier; Gael Sattonnay; Serge Della Negra

J. Vac. Sci. Technol. B 38, 044008 (2020) https://doi.org/10.1116/6.0000173

Abstract

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Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy

Arnoud J. Onnink; Ramazan O. Apaydin; Antonius A. I. Aarnink; Michel P. de Jong; Dirk J. Gravesteijn; Alexey Y. Kovalgin

J. Vac. Sci. Technol. B 38, 044009 (2020) https://doi.org/10.1116/6.0000193

Abstract

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Vacuum Measurement and Technology

One-dimensional simulation of Couette–Poiseuille flow with variable cross section for the full range of gas rarefaction

Timo Jünemann; Andreas Brümmer

J. Vac. Sci. Technol. B 38, 044201 (2020) https://doi.org/10.1116/6.0000207

Abstract

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Notes

Simple O-ring sealed Brewster-angle window for ultrahigh vacuum applications

Oskar Asvany; Hanna Krüger; Stephan Schlemmer

J. Vac. Sci. Technol. B 38, 045001 (2020) https://doi.org/10.1116/6.0000221

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Issues

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Letters

ARTICLES

Electronic and Optoelectronic Materials, Devices and Processing

Lithography

Nanometer Science and Technology

Microelectronic and Nanoelectronic Devices

Measurement and Characterization

Vacuum Measurement and Technology

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