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Letters
Ultraviolet light-emitting diode arrays using Ga-doped ZnO as current spreading layer
J. Vac. Sci. Technol. B 38, 010601 (2020)
https://doi.org/10.1116/1.5127064
ARTICLES
Nanometer Science and Technology
Ion bombardment induced formation of self-organized wafer-scale GaInP nanopillar assemblies
J. Vac. Sci. Technol. B 38, 012801 (2020)
https://doi.org/10.1116/1.5127265
Formation of CdSe quantum dots from single source precursor obtained by thermal and laser treatment
In Special Collection:
Conference Collection: XXIV AIV 2019 Conference of the Association of Science and Technology
J. Vac. Sci. Technol. B 38, 012802 (2020)
https://doi.org/10.1116/1.5129661
Electrical and optical properties of copper oxide thin films prepared by DC magnetron sputtering
J. Vac. Sci. Technol. B 38, 012803 (2020)
https://doi.org/10.1116/1.5131518
Effect of oxygen plasma cleaning on nonswitching pseudo-Bosch etching of high aspect ratio silicon pillars
J. Vac. Sci. Technol. B 38, 012804 (2020)
https://doi.org/10.1116/1.5122822
Electronic and Optoelectronic Materials, Devices and Processing
Nanoscale etching of perovskite oxides for field effect transistor applications
J. Vac. Sci. Technol. B 38, 012201 (2020)
https://doi.org/10.1116/1.5122667
Temperature dependent dielectric function and direct bandgap of Ge
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 012202 (2020)
https://doi.org/10.1116/1.5129685
Simplified patterning process for the selective 1D ZnO nanorods growth
J. Vac. Sci. Technol. B 38, 012204 (2020)
https://doi.org/10.1116/1.5131363
Evaluation of residual defects created by plasma exposure of Si substrates using vertical and lateral pn junctions
J. Vac. Sci. Technol. B 38, 012205 (2020)
https://doi.org/10.1116/1.5126344
Deep, vertical etching for GaAs using inductively coupled plasma/reactive ion etching
J. Vac. Sci. Technol. B 38, 012206 (2020)
https://doi.org/10.1116/1.5129184
Effects of mask material conductivity on lateral undercut etching in silicon nano-pillar fabrication
J. Vac. Sci. Technol. B 38, 012207 (2020)
https://doi.org/10.1116/1.5123601
Effects of substrate-controlled-orientation on the electrical performance of sputtered BaTiO3 thin films
J. Vac. Sci. Technol. B 38, 012208 (2020)
https://doi.org/10.1116/1.5131542
Integration of the Ni/InP system on a 300 mm platform for III-V/Si hybrid lasers
J. Vac. Sci. Technol. B 38, 012209 (2020)
https://doi.org/10.1116/1.5128554
Modification of near band edge emission and structure with Ga-related clusters in Ga-doped ZnO nanocrystal films
In Special Collection:
Papers from the 10th International Symposium on Clusters and Nanomaterials (ISCAN - 2019)
J. Vac. Sci. Technol. B 38, 012210 (2020)
https://doi.org/10.1116/1.5133063
Empirical modeling and Monte Carlo simulation of secondary electron yield reduction of laser drilled microporous gold surfaces
In Special Collection:
Conference Collection: 32nd IVNC and 12th IVESC (2019 Joint Meeting)
J. Vac. Sci. Technol. B 38, 013801 (2020)
https://doi.org/10.1116/1.5130683
Electronic & Optoelectronic Materials, Devices & Processing
Bismuth vanadate photoanodes for water splitting deposited by radio frequency plasma reactive co-sputtering
In Special Collection:
Conference Collection: XXIV AIV 2019 Conference of the Association of Science and Technology
J. Vac. Sci. Technol. B 38, 012203 (2020)
https://doi.org/10.1116/1.5129612
Lithography
High-brightness source of energetic He atoms
J. Vac. Sci. Technol. B 38, 012601 (2020)
https://doi.org/10.1116/1.5124838
Line edge roughness metrology software
J. Vac. Sci. Technol. B 38, 012602 (2020)
https://doi.org/10.1116/1.5122675
Recovery of quantum efficiency on Cs/O-activated GaN and GaAs photocathodes by thermal annealing in vacuum
J. Vac. Sci. Technol. B 38, 012603 (2020)
https://doi.org/10.1116/1.5120417
Microelectronic and Nanoelectronic Devices
Influence of specific forming algorithms on the device-to-device variability of memristive Al-doped HfO2 arrays
J. Vac. Sci. Technol. B 38, 013201 (2020)
https://doi.org/10.1116/1.5126936
Silicon chip field emission electron source fabricated by laser micromachining
In Special Collection:
Conference Collection: 32nd IVNC and 12th IVESC (2019 Joint Meeting)
J. Vac. Sci. Technol. B 38, 013202 (2020)
https://doi.org/10.1116/1.5134872
Plasmonics
Formation and optical response of self-assembled gold nanoparticle lattices on oxidized silicon synthesized using block copolymers
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 013601 (2020)
https://doi.org/10.1116/1.5129667
Gold nanoparticles growing in a polymer matrix: What can we learn from spectroscopic imaging ellipsometry?
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 013602 (2020)
https://doi.org/10.1116/1.5129578
Plasmonic coupling and how standard ellipsometry can feel surface plasmon
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 013603 (2020)
https://doi.org/10.1116/1.5122267
Measurement and Characterization
Application of a B-spline model dielectric function to infrared spectroscopic ellipsometry data analysis
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 014001 (2020)
https://doi.org/10.1116/1.5126110
Spectral ellipsometry of monolayer transition metal dichalcogenides: Analysis of excitonic peaks in dispersion
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 014002 (2020)
https://doi.org/10.1116/1.5122683
Ultrasensitive broadband infrared 4 × 4 Mueller-matrix ellipsometry for studies of depolarizing and anisotropic thin films
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 014003 (2020)
https://doi.org/10.1116/1.5129800
Effective structural chirality of beetle cuticle determined from transmission Mueller matrices using the Tellegen constitutive relations
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 014004 (2020)
https://doi.org/10.1116/1.5131634
Retroreflex ellipsometry for isotropic substrates with nonplanar surfaces
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 014005 (2020)
https://doi.org/10.1116/1.5121854
Mueller matrix ellipsometry of waveplates for control of their properties and alignment
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 014006 (2020)
https://doi.org/10.1116/1.5129615
Monitoring the growth of III-nitride materials by plasma assisted molecular beam epitaxy employing diffuse scattering of RHEED
J. Vac. Sci. Technol. B 38, 014007 (2020)
https://doi.org/10.1116/1.5124048
Transmission Mueller-matrix characterization of transparent ramie films
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 014008 (2020)
https://doi.org/10.1116/1.5129651
Nonideal optical response of liquid crystal variable retarders and its impact on their performance as polarization modulators
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 014009 (2020)
https://doi.org/10.1116/1.5122749
Dynamic Stokes polarimetric imaging system with dual-wavelength operation
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 014010 (2020)
https://doi.org/10.1116/1.5129301
Corrosion behavior of Ag film lines in atmospheric conditions estimated by means of electrical resistance technique
J. Vac. Sci. Technol. B 38, 014011 (2020)
https://doi.org/10.1116/1.5132765
Mueller matrix ellipsometry study of a circular polarizing filter
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 014012 (2020)
https://doi.org/10.1116/1.5129691
Pulsed laser deposition nickel oxide on crystalline silicon as hole selective contacts
J. Vac. Sci. Technol. B 38, 014013 (2020)
https://doi.org/10.1116/1.5124840
In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 014014 (2020)
https://doi.org/10.1116/1.5122797
Mid-IR and UV-Vis-NIR Mueller matrix ellipsometry characterization of tunable hyperbolic metamaterials based on self-assembled carbon nanotubes
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 014015 (2020)
https://doi.org/10.1116/1.5130888
Imaging ellipsometry for curved surfaces
In Special Collection:
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE
J. Vac. Sci. Technol. B 38, 014016 (2020)
https://doi.org/10.1116/1.5129654