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Patterning of high-aspect-ratio nanogratings using phase-locked two-beam fiber-optic interference lithography

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Zhuofei Gan; Jingxuan Cai; Chuwei Liang; Liyang Chen; Siyi Min; Xing Cheng; Dehu Cui; Wen-Di Li

J. Vac. Sci. Technol. B 37, 060601 (2019) https://doi.org/10.1116/1.5123220

Abstract

View articletitled, Patterning of high-aspect-ratio nanogratings using phase-locked two-beam fiber-optic interference lithography

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Review Articles

Brilliant mid-infrared ellipsometry and polarimetry of thin films: Toward laboratory applications with laser based techniques

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Karsten Hinrichs; Timur Shaykhutdinov; Christoph Kratz; Andreas Furchner

J. Vac. Sci. Technol. B 37, 060801 (2019) https://doi.org/10.1116/1.5122869

Abstract

View articletitled, Brilliant mid-infrared ellipsometry and polarimetry of thin films: Toward laboratory applications with laser based techniques

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Polarization, thin-film optics, ellipsometry, and polarimetry: Retrospective

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

R. M. A. Azzam

J. Vac. Sci. Technol. B 37, 060802 (2019) https://doi.org/10.1116/1.5122802

Abstract

View articletitled, Polarization, thin-film optics, ellipsometry, and polarimetry: Retrospective

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ARTICLES

Electronic & Optoelectronic Materials, Devices & Processing

Effect of thermal annealing for W/β-Ga₂O₃ Schottky diodes up to 600 °C

Minghan Xian; Chaker Fares; Fan Ren; Brent P. Gila; Yen-Ting Chen; Yu-Te Liao; Marko Tadjer; Stephen J. Pearton

J. Vac. Sci. Technol. B 37, 061201 (2019) https://doi.org/10.1116/1.5125006

Abstract

View articletitled, Effect of thermal annealing for W/β-Ga2O3 Schottky diodes up to 600 °C

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CHORUS

Interplay between electronic and structural transitions in VO₂ revealed by ellipsometry

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Ievgen Voloshenko; Bruno Gompf; Audrey Berrier; Gabriel Schnoering; Florian Kuhl; Angelika Polity; Martin Dressel

J. Vac. Sci. Technol. B 37, 061202 (2019) https://doi.org/10.1116/1.5121903

Abstract

View articletitled, Interplay between electronic and structural transitions in VO2 revealed by ellipsometry

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Correlation between sputter deposition parameters and I-V characteristics in double-barrier memristive devices

Finn Zahari; Felix Schlichting; Julian Strobel; Sven Dirkmann; Julia Cipo; Sven Gauter; Jan Trieschmann; Richard Marquardt; Georg Haberfehlner; Gerald Kothleitner; Lorenz Kienle; Thomas Mussenbrock; Martin Ziegler; Holger Kersten; Hermann Kohlstedt

J. Vac. Sci. Technol. B 37, 061203 (2019) https://doi.org/10.1116/1.5119984

Abstract

View articletitled, Correlation between sputter deposition parameters and I-V characteristics in double-barrier memristive devices

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Low-temperature back-end-of-line technology compatible with III-V nanowire MOSFETs

Stefan Andric; Lars Ohlsson Fhager; Fredrik Lindelöw; Olli-Pekka Kilpi; Lars-Erik Wernersson

J. Vac. Sci. Technol. B 37, 061204 (2019) https://doi.org/10.1116/1.5121017

Abstract

View articletitled, Low-temperature back-end-of-line technology compatible with III-V nanowire MOSFETs

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Forward bias degradation and thermal simulations of vertical geometry β-Ga₂O₃ Schottky rectifiers

Minghan Xian; Randy Elhassani; Chaker Fares; Fan Ren; Marko Tadjer; S. J. Pearton

J. Vac. Sci. Technol. B 37, 061205 (2019) https://doi.org/10.1116/1.5127511

Abstract

View articletitled, Forward bias degradation and thermal simulations of vertical geometry β-Ga2O3 Schottky rectifiers

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CHORUS

Isotropic silicon etch characteristics in a purely inductively coupled SF₆ plasma

Parashara Panduranga; Aly Abdou; Zhong Ren; Rasmus H. Pedersen; Maziar P. Nezhad

J. Vac. Sci. Technol. B 37, 061206 (2019) https://doi.org/10.1116/1.5116021

Abstract

View articletitled, Isotropic silicon etch characteristics in a purely inductively coupled SF6 plasma

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Dielectric function spectra and optical transitions in thallium bromide crystals for radiation detectors

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Ryota Kitano; Yong-Gu Shim; Toshiyuki Onodera; Tadayoshi Shoji; Katsumi Mochizuki; Nazim Mamedov; Masato Ishikawa; Kazuki Wakita

J. Vac. Sci. Technol. B 37, 061207 (2019) https://doi.org/10.1116/1.5122720

Abstract

View articletitled, Dielectric function spectra and optical transitions in thallium bromide crystals for radiation detectors

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Structural, morphologic and optical properties of graphene doped binary TiO₂–P₂O₅ nanocomposite

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

L. Baschir; A. M. Iordache; D. Savastru; A. A. Popescu; I. C. Vasiliu; M. Elisa; C. Obreja; M. Filipescu; R. Trusca; M. Stchakovsky; S. Iordache

J. Vac. Sci. Technol. B 37, 061208 (2019) https://doi.org/10.1116/1.5122897

Abstract

View articletitled, Structural, morphologic and optical properties of graphene doped binary TiO2–P2O5 nanocomposite

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Transparent conductive oxide-based architectures for the electrical modulation of the optical response: A spectroscopic ellipsometry study

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Maria Sygletou; Francesco Bisio; Stefania Benedetti; Piero Torelli; Alessandro di Bona; Aleksandr Petrov; Maurizio Canepa

J. Vac. Sci. Technol. B 37, 061209 (2019) https://doi.org/10.1116/1.5122175

Abstract

View articletitled, Transparent conductive oxide-based architectures for the electrical modulation of the optical response: A spectroscopic ellipsometry study

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Thick film hydrogen silsesquioxane planarization for passive component technology associated with electronic-photonic integrated circuits

Ali Al-Moathin; Lianping Hou; Afesomeh Ofiare; Jue Wang; Shengwei Ye; Chong Li; John H. Marsh

J. Vac. Sci. Technol. B 37, 061210 (2019) https://doi.org/10.1116/1.5123286

Abstract

View articletitled, Thick film hydrogen silsesquioxane planarization for passive component technology associated with electronic-photonic integrated circuits

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Exploration of a Ca_1−x(NaCe)_x/2Bi₄Ti_3.98(WNb)_0.01O₁₅ ceramic intermediate phase by temperature-dependent spectroscopic ellipsometry and Raman scattering

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Qiong Ding (丁穷); Liping Xu (徐丽萍); Jinzhong Zhang (张金中); Kai Jiang (姜凯); Zhigao Hu (胡志高); Zhiyong Zhou (周志勇); Xianlin Dong (董显林); Junhao Chu (褚君浩)

J. Vac. Sci. Technol. B 37, 061211 (2019) https://doi.org/10.1116/1.5118791

Abstract

View articletitled, Exploration of a Ca1−x(NaCe)x/2Bi4Ti3.98(WNb)0.01O15 ceramic intermediate phase by temperature-dependent spectroscopic ellipsometry and Raman scattering

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Temperature dependence of dielectric function spectra and interband optical transitions in layered TlInS₂

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Yong-Gu Shim; Ryo Tashiro; Kazuki Wakita; Nazim Mamedov

J. Vac. Sci. Technol. B 37, 061212 (2019) https://doi.org/10.1116/1.5121905

Abstract

View articletitled, Temperature dependence of dielectric function spectra and interband optical transitions in layered TlInS2

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Ellipsometric analysis of concentration gradients induced in semiconductor crystals by pulsed laser induced epitaxy

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Jon Schlipf; Elena Martín; Michel Stchakovsky; Alessandro Benedetti; Inga A. Fischer; Jörg Schulze; Stefano Chiussi

J. Vac. Sci. Technol. B 37, 061213 (2019) https://doi.org/10.1116/1.5122777

Abstract

View articletitled, Ellipsometric analysis of concentration gradients induced in semiconductor crystals by pulsed laser induced epitaxy

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Optical, electrical, and structural properties of single-phase Ti_2 − xN films deposited by cathodic cage

C. H. Verbeno; A. C. Kröhling; M. C. Miranda; T. C. Freitas; V. P. Nascimento; E. C. Passamani; L. C. Gontijo

J. Vac. Sci. Technol. B 37, 061214 (2019) https://doi.org/10.1116/1.5120836

Abstract

View articletitled, Optical, electrical, and structural properties of single-phase Ti2 − xN films deposited by cathodic cage

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Simulation-aided design of very-high-frequency excited nitrogen plasma confinement using a shield plate

Yasuhiro Isobe; Takayuki Sakai; Kyoichi Suguro; Naoto Miyashita; Hiroki Kondo; Kenji Ishikawa; Amalraj Frank Wilson; Naohiro Shimizu; Osamu Oda; Makoto Sekine; Masaru Hori

J. Vac. Sci. Technol. B 37, 061215 (2019) https://doi.org/10.1116/1.5114831

Abstract

View articletitled, Simulation-aided design of very-high-frequency excited nitrogen plasma confinement using a shield plate

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Lithography (all types)

Multiple replication of hierarchical structures from polymer masters with anisotropy

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Andre Mayer; Johannes Rond; Johannes Staabs; Miriam Leifels; Joachim Zajadacz; Martin Ehrhardt; Pierre Lorenz; Hiroki Sunagawa; Yoshihiko Hirai; Klaus Zimmer; Hella-Christin Scheer

J. Vac. Sci. Technol. B 37, 061601 (2019) https://doi.org/10.1116/1.5120881

Abstract

View articletitled, Multiple replication of hierarchical structures from polymer masters with anisotropy

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Multirow writing method for massively-parallel electron-beam systems

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Soo-Young Lee; Byung-Sup Ahn; Jin Choi; Seom-Beom Kim; Chan-Uk Jeon

J. Vac. Sci. Technol. B 37, 061602 (2019) https://doi.org/10.1116/1.5122673

Abstract

View articletitled, Multirow writing method for massively-parallel electron-beam systems

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Comprehensive modeling of the lithographic errors in laser direct write

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Ningzhi Xie; David Jones; Gerald Lopez

J. Vac. Sci. Technol. B 37, 061603 (2019) https://doi.org/10.1116/1.5122660

Abstract

View articletitled, Comprehensive modeling of the lithographic errors in laser direct write

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CHORUS

Neural network-based model of photoresist reflow

Charmaine Chia; Joel Martis; Stefanie S. Jeffrey; Roger T. Howe

J. Vac. Sci. Technol. B 37, 061604 (2019) https://doi.org/10.1116/1.5116857

Abstract

View articletitled, Neural network-based model of photoresist reflow

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CHORUS

Next generation of extreme-resolution electron beam lithography

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

John N. Randall; James H. G. Owen; Joseph Lake; Ehud Fuchs

J. Vac. Sci. Technol. B 37, 061605 (2019) https://doi.org/10.1116/1.5119392

Abstract

View articletitled, Next generation of extreme-resolution electron beam lithography

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CHORUS

Increasing etching depth of sapphire nanostructures using multilayer etching mask

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Yi-An Chen; I-Te Chen; Chih-Hao Chang

J. Vac. Sci. Technol. B 37, 061606 (2019) https://doi.org/10.1116/1.5119388

Abstract

View articletitled, Increasing etching depth of sapphire nanostructures using multilayer etching mask

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CHORUS

Assessing stability of metal tellurides as alternative photomask materials for extreme ultraviolet lithography

Vu Luong; Vicky Philipsen; Karl Opsomer; Jens Rip; Eric Hendrickx; Marc Heyns; Christophe Detavernier; Christian Laubis; Frank Scholze

J. Vac. Sci. Technol. B 37, 061607 (2019) https://doi.org/10.1116/1.5125662

Abstract

View articletitled, Assessing stability of metal tellurides as alternative photomask materials for extreme ultraviolet lithography

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Investigation and optimization of reactive ion etching of Si₃N₄ and polyphthalaldehyde for two-step gray scale fabrication of diffractive optics

Alaleh Aminzadeh; Manjith Bose; Dan Smith; Md Hemayet Uddin; Andrew G. Peele; Grant van Riessen

J. Vac. Sci. Technol. B 37, 061608 (2019) https://doi.org/10.1116/1.5121760

Abstract

View articletitled, Investigation and optimization of reactive ion etching of Si3N4 and polyphthalaldehyde for two-step gray scale fabrication of diffractive optics

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Effects of abnormal beams on writing qualities in massively-parallel e-beam systems

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Md Nabid Hasan; Soo-Young Lee; Byung-Sup Ahn; Jin Choi; Seom-Beom Kim; Chan-Uk Jeon

J. Vac. Sci. Technol. B 37, 061609 (2019) https://doi.org/10.1116/1.5121798

Abstract

View articletitled, Effects of abnormal beams on writing qualities in massively-parallel e-beam systems

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Nanometer Science & Technology

Reflective metamaterial polarizer enabled by solid-immersion Lloyd's mirror interference lithography

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Fan Hong; Richard Blaikie

J. Vac. Sci. Technol. B 37, 061801 (2019) https://doi.org/10.1116/1.5119138

Abstract

View articletitled, Reflective metamaterial polarizer enabled by solid-immersion Lloyd's mirror interference lithography

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Exploiting nanogroove-induced cell culture anisotropy to advance in vitro brain models

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Alex Bastiaens; Jean-Philippe Frimat; Teun van Nunen; Regina Luttge

J. Vac. Sci. Technol. B 37, 061802 (2019) https://doi.org/10.1116/1.5119687

Abstract

View articletitled, Exploiting nanogroove-induced cell culture anisotropy to advance in vitro brain models

Supplementary Material

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Nanoscale lift-off process using field emission scanning probe lithography

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Martin Hofmann; Stephan Mecholdt; Markus Mohr; Mathias Holz; Stefano Dallorto; Eberhard Manske; Hans-Jörg Fecht; Ivo W. Rangelow

J. Vac. Sci. Technol. B 37, 061803 (2019) https://doi.org/10.1116/1.5122272

Abstract

View articletitled, Nanoscale lift-off process using field emission scanning probe lithography

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Ultrathin initiated chemical vapor deposition polymer interfacial energy control for directed self-assembly hole-shrink applications

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Moshe Dolejsi; Priya Moni; Cody T. Bezik; Chun Zhou; Juan J. de Pablo; Karen K. Gleason; Paul F. Nealey

J. Vac. Sci. Technol. B 37, 061804 (2019) https://doi.org/10.1116/1.5121541

Abstract

View articletitled, Ultrathin initiated chemical vapor deposition polymer interfacial energy control for directed self-assembly hole-shrink applications

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CHORUS

Double replication for characterizing cracks in surface-hardened polydimethylsiloxane

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Miriam Leifels; Andre Mayer; Hella-Christin Scheer

J. Vac. Sci. Technol. B 37, 061805 (2019) https://doi.org/10.1116/1.5119691

Abstract

View articletitled, Double replication for characterizing cracks in surface-hardened polydimethylsiloxane

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Inducing alternating nanoscale rectification in a dielectric material for bidirectional-trigger artificial synapses

Dan Berco; Diing Shenp Ang

J. Vac. Sci. Technol. B 37, 061806 (2019) https://doi.org/10.1116/1.5123665

Abstract

View articletitled, Inducing alternating nanoscale rectification in a dielectric material for bidirectional-trigger artificial synapses

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Optical properties of surface grated Si-based multilayer structure

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Ayaz Bayramov; Elvin Alizade; Samir Mammadov; Avtandil Tavkhelidze; Nazim Mamedov; Yegana Aliyeva; Khuraman Ahmedova; Saida Asadullayeva; Larissa Jangidze; Givi Skhiladze

J. Vac. Sci. Technol. B 37, 061807 (2019) https://doi.org/10.1116/1.5120799

Abstract

View articletitled, Optical properties of surface grated Si-based multilayer structure

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Eliminating etch stop in high-density magnetic tunnel junction patterning using high-temperature CO/NH₃ plasma etching

Makoto Satake; Takahiro Abe; Takamasa Ichino; Makoto Suyama; Tadayoshi Kawaguchi; Masaki Yamada; Eiji Matsumoto; Kenji Maeda; Kenetsu Yokogawa

J. Vac. Sci. Technol. B 37, 061808 (2019) https://doi.org/10.1116/1.5123485

Abstract

View articletitled, Eliminating etch stop in high-density magnetic tunnel junction patterning using high-temperature CO/NH3 plasma etching

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Detection of DNA homopolymer with graphene nanopore

Lei Zhou; Kun Li; Zhongwu Li; Pinyao He; Kabin Lin; Jingwen Mo; Jian Ma

J. Vac. Sci. Technol. B 37, 061809 (2019) https://doi.org/10.1116/1.5116295

Abstract

View articletitled, Detection of DNA homopolymer with graphene nanopore

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InAs(111)A homoepitaxy with molecular beam epitaxy

Kevin D. Vallejo; Trent A. Garrett; Kathryn E. Sautter; Kevin Saythavy; Baolai Liang; Paul J. Simmonds

J. Vac. Sci. Technol. B 37, 061810 (2019) https://doi.org/10.1116/1.5127857

Abstract

View articletitled, InAs(111)A homoepitaxy with molecular beam epitaxy

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Morphology and emission characteristics of an HfC〈110〉 thermal-field electron source

David W. Shook; Lynwood W. Swanson; Alan S. Bahm; Jessica R. Wambeke; Gregory A. Schwind

J. Vac. Sci. Technol. B 37, 061811 (2019) https://doi.org/10.1116/1.5124627

Abstract

View articletitled, Morphology and emission characteristics of an HfC〈110〉 thermal-field electron source

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Tip-based electron beam induced deposition using active cantilevers

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Mathias Holz; Frances I. Allen; Christoph Reuter; Ahmad Ahmad; Martin Hofmann; Alexander Reum; Tzvetan Ivanov; Ivo W. Rangelow

J. Vac. Sci. Technol. B 37, 061812 (2019) https://doi.org/10.1116/1.5123287

Abstract

View articletitled, Tip-based electron beam induced deposition using active cantilevers

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Sidewall channel fabrication using membrane projection lithography and metal assisted chemical etching

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Rimjhim Chaudhary; Gyuseok Kim; Hiromichi Yamamoto; George Patrick Watson

J. Vac. Sci. Technol. B 37, 061813 (2019) https://doi.org/10.1116/1.5123622

Abstract

View articletitled, Sidewall channel fabrication using membrane projection lithography and metal assisted chemical etching

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CHORUS

MEMS & NEMS

Two-step potassium hydroxide etching to enhance aspect ratio in trench fabrication

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Huseyin Ekinci; Ripon K. Dey; Bo Cui

J. Vac. Sci. Technol. B 37, 062001 (2019) https://doi.org/10.1116/1.5123530

Abstract

View articletitled, Two-step potassium hydroxide etching to enhance aspect ratio in trench fabrication

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Combined electrostatic and air driven electrospinning for biomedical applications

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Lane G. Huston; Emily A. Kooistra-Manning; Jack L. Skinner; Jessica M. Andriolo

J. Vac. Sci. Technol. B 37, 062002 (2019) https://doi.org/10.1116/1.5122659

Abstract

View articletitled, Combined electrostatic and air driven electrospinning for biomedical applications

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Microelectronic and Nanoelectronic Devices

Investigation of impact of gate underlap/overlap on the analog/RF performance of composite channel double gate MOSFETs

J. Ajayan; D. Nirmal; Dheena Kurian; P. Mohankumar; L. Arivazhagan; A. S. Augustine Fletcher; T. D. Subash; M. Saravanan

J. Vac. Sci. Technol. B 37, 062201 (2019) https://doi.org/10.1116/1.5116199

Abstract

View articletitled, Investigation of impact of gate underlap/overlap on the analog/RF performance of composite channel double gate MOSFETs

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Effect of annealing of NbLaO dielectric on the electrical properties of ZnO thin-film transistor

Yurong Liu; Yinxue Xiang

J. Vac. Sci. Technol. B 37, 062202 (2019) https://doi.org/10.1116/1.5126044

Abstract

View articletitled, Effect of annealing of NbLaO dielectric on the electrical properties of ZnO thin-film transistor

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Electrostatic field enhancement on end-caps of cylindrical field-emitters

Shreya Sarkar; Debabrata Biswas

J. Vac. Sci. Technol. B 37, 062203 (2019) https://doi.org/10.1116/1.5127118

Abstract

View articletitled, Electrostatic field enhancement on end-caps of cylindrical field-emitters

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Efficient methodology for estimation of metal effective work function, interface trap, and fixed oxide charges in metal-oxide-semiconductor capacitors with dual layer high $- κ$ /SiO₂ dielectric

Piyas Samanta

J. Vac. Sci. Technol. B 37, 062204 (2019) https://doi.org/10.1116/1.5120268

Abstract

View articletitled, Efficient methodology for estimation of metal effective work function, interface trap, and fixed oxide charges in metal-oxide-semiconductor capacitors with dual layer high<math xmlns="http://www.w3.org/1998/Math/MathML"><mstyle displaystyle="false" scriptlevel="0" xmlns=""><mtext>-</mtext></mstyle><mi xmlns="">κ</mi></math>/SiO2 dielectric

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Spectroscopic reflectometry for characterization of Through Silicon Via profile of Bosch etching process

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Joachim Bauer; Oksana Fursenko; Steffen Marschmeyer; Friedhelm Heinrich; Francesco Villasmunta; Claus Villringer; Christoph Zesch; Sigurd Schrader

J. Vac. Sci. Technol. B 37, 062205 (2019) https://doi.org/10.1116/1.5120617

Abstract

View articletitled, Spectroscopic reflectometry for characterization of Through Silicon Via profile of Bosch etching process

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Organic Electronic and Optoelectronic Devices

Role of the solvent in large crystal grain growth of inorganic-organic halide FA_0.8Cs_0.2PbI_xBr_3 −_x perovskite thin films monitored by ellipsometry

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Koki Kawamura; Ryo Ishikawa; Yoko Wasai; Nataliya Nabatova-Gabain; Shun-ji Kurosu; Tomofumi Ukai; Masahide Tokuda; Yasuhiko Fujii; Tatsuro Hanajiri; Keiji Ueno; Hajime Shirai

J. Vac. Sci. Technol. B 37, 062401 (2019) https://doi.org/10.1116/1.5123399

Abstract

View articletitled, Role of the solvent in large crystal grain growth of inorganic-organic halide FA0.8Cs0.2PbIxBr3 − x perovskite thin films monitored by ellipsometry

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Ellipsometric studies for thin polymer layers of organic photovoltaic cells

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Natalia Nosidlak; Janusz Jaglarz; Andrzej Danel

J. Vac. Sci. Technol. B 37, 062402 (2019) https://doi.org/10.1116/1.5122728

Abstract

View articletitled, Ellipsometric studies for thin polymer layers of organic photovoltaic cells

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Plasmonics

Bulk and localized plasmonic heating in nanogold doped polymers

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Jessica M. Andriolo; McKenzie L. Joseph; Mark H. Griep; Jack L. Skinner

J. Vac. Sci. Technol. B 37, 062601 (2019) https://doi.org/10.1116/1.5122693

Abstract

View articletitled, Bulk and localized plasmonic heating in nanogold doped polymers

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CHORUS

Infrared spectroscopic ellipsometry and optical spectroscopy of plasmons in classic 3D topological insulators

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Nazim T. Mamedov; Elvin H. Alizade; Zakir A. Jahangirli; Ziya S. Aliev; Nadir A. Abdullayev; Samir N. Mammadov; Imamaddin R. Amiraslanov; Yong-Gu Shim; Kazuki Wakita; Sadiyar S. Ragimov; Ayaz I. Bayramov; Mahammad B. Babanly; Alexander M. Shikin; Evgueni V. Chulkov

J. Vac. Sci. Technol. B 37, 062602 (2019) https://doi.org/10.1116/1.5122776

Abstract

View articletitled, Infrared spectroscopic ellipsometry and optical spectroscopy of plasmons in classic 3D topological insulators

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Measurement and Characterization

Spectroscopic ellipsometry study of FA_xMA_1−xPbI₃ hybrid perovskite single crystals

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Maria Isabel Alonso; Bethan Charles; Adrián Francisco-López; Miquel Garriga; Mark T. Weller; Alejandro R. Goñi

J. Vac. Sci. Technol. B 37, 062901 (2019) https://doi.org/10.1116/1.5121604

Abstract

View articletitled, Spectroscopic ellipsometry study of FAxMA1−xPbI3 hybrid perovskite single crystals

Supplementary Material

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Evaluation of the chemical and optical perturbations induced by Ar plasma on InP surface

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Solène Béchu; Céline Eypert; Anais Loubat; Jackie Vigneron; Sofia Gaiaschi; Patrick Chapon; Muriel Bouttemy; Arnaud Etcheberry

J. Vac. Sci. Technol. B 37, 062902 (2019) https://doi.org/10.1116/1.5121897

Abstract

View articletitled, Evaluation of the chemical and optical perturbations induced by Ar plasma on InP surface

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Determining the ultimate resolution of scanning electron microscope-based unbiased roughness measurements. I. Simulating noise

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Chris A. Mack; Gian F. Lorusso

J. Vac. Sci. Technol. B 37, 062903 (2019) https://doi.org/10.1116/1.5122758

Abstract

View articletitled, Determining the ultimate resolution of scanning electron microscope-based unbiased roughness measurements. I. Simulating noise

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Mueller-matrix modeling of the architecture in the cuticle of the beetle Chrysina resplendens

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Arturo Mendoza Galván; Kenneth Järrendahl; Hans Arwin

J. Vac. Sci. Technol. B 37, 062904 (2019) https://doi.org/10.1116/1.5122824

Abstract

View articletitled, Mueller-matrix modeling of the architecture in the cuticle of the beetle Chrysina resplendens

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Direct laser writing of birefringent photonic crystals for the infrared spectral range

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Marc Lata; Yanzeng Li; Serang Park; Micheal J. McLamb; Tino Hofmann

J. Vac. Sci. Technol. B 37, 062905 (2019) https://doi.org/10.1116/1.5122991

Abstract

View articletitled, Direct laser writing of birefringent photonic crystals for the infrared spectral range

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CHORUS

Effect of curvature of spherical microscopic indentations on the ellipsometric readout

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Daniel Fischer; Michael Griepentrog; Uwe Beck; Matthias Duwe; Jan-Henrik Quast; Stefan Schneider

J. Vac. Sci. Technol. B 37, 062906 (2019) https://doi.org/10.1116/1.5122252

Abstract

View articletitled, Effect of curvature of spherical microscopic indentations on the ellipsometric readout

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Optical properties of the crystalline silicon wafers described using the universal dispersion model

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Daniel Franta; Jiří Vohánka; Martin Bránecký; Pavel Franta; Martin Čermák; Ivan Ohlídal; Vladimír Čech

J. Vac. Sci. Technol. B 37, 062907 (2019) https://doi.org/10.1116/1.5122284

Abstract

View articletitled, Optical properties of the crystalline silicon wafers described using the universal dispersion model

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Thin-film metrology of tilted and curved surfaces by imaging Mueller-matrix ellipsometry

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Matthias Duwe; Jan-Henrik Quast; Stefan Schneider; Daniel Fischer; Uwe Beck

J. Vac. Sci. Technol. B 37, 062908 (2019) https://doi.org/10.1116/1.5122757

Abstract

View articletitled, Thin-film metrology of tilted and curved surfaces by imaging Mueller-matrix ellipsometry

Supplementary Material

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Evaluation of the Dawson function and its antiderivative needed for the Gaussian broadening of piecewise polynomial functions

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Jiří Vohánka; David Nečas; Daniel Franta

J. Vac. Sci. Technol. B 37, 062909 (2019) https://doi.org/10.1116/1.5122276

Abstract

View articletitled, Evaluation of the Dawson function and its antiderivative needed for the Gaussian broadening of piecewise polynomial functions

Supplementary Material

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Electronic structure and dielectric function of Mn-Bi-Te layered compounds

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Zakir A. Jahangirli; Elvin H. Alizade; Ziya S. Aliev; Mikhail M. Otrokov; Narmin A. Ismayilova; Samir N. Mammadov; Imamaddin R. Amiraslanov; Nazim T. Mamedov; Guseyn S. Orudjev; Mahammad B. Babanly; Alexander M. Shikin; Evgueni V. Chulkov

J. Vac. Sci. Technol. B 37, 062910 (2019) https://doi.org/10.1116/1.5122702

Abstract

View articletitled, Electronic structure and dielectric function of Mn-Bi-Te layered compounds

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In situ spectroelectrochemical ellipsometry using super continuum white laser: Study of the anodization of magnesium alloy

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Alexandre Zimmer; Delphine Veys-Renaux; Laurent Broch; Nicolas Stein; Emmanuel Rocca

J. Vac. Sci. Technol. B 37, 062911 (2019) https://doi.org/10.1116/1.5122320

Abstract

View articletitled, In situ spectroelectrochemical ellipsometry using super continuum white laser: Study of the anodization of magnesium alloy

Supplementary Material

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Roadmap of ellipsometric characterization of plasmonic nanoparticles

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Yann Battie; Aotmane En Naciri

J. Vac. Sci. Technol. B 37, 062912 (2019) https://doi.org/10.1116/1.5121343

Abstract

View articletitled, Roadmap of ellipsometric characterization of plasmonic nanoparticles

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Effect of heating treatment and mixture on optical properties of coating materials used in gravitational-wave detectors

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Alex Amato; Silvana Terreni; Massimo Granata; Christophe Michel; Laurent Pinard; Gianluca Gemme; Maurizio Canepa; Gianpietro Cagnoli

J. Vac. Sci. Technol. B 37, 062913 (2019) https://doi.org/10.1116/1.5122661

Abstract

View articletitled, Effect of heating treatment and mixture on optical properties of coating materials used in gravitational-wave detectors

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Ellipsometric characterization of Bi and Al₂O₃ coatings for plasmon excitation in an optical fiber sensor

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Eva Rodríguez-Schwendtner; Alberto Álvarez-Herrero; Antonio Mariscal; Rosalía Serna; Agustín González-Cano; María-Cruz Navarrete; Natalia Díaz-Herrera

J. Vac. Sci. Technol. B 37, 062914 (2019) https://doi.org/10.1116/1.5121590

Abstract

View articletitled, Ellipsometric characterization of Bi and Al2O3 coatings for plasmon excitation in an optical fiber sensor

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Numerical modeling method for UV imprint process simulation using thermoviscoelastic constitutive equations

Yuki Onishi; Ryunosuke Yamashita; Kenji Amaya; Yoshihiko Hirai

J. Vac. Sci. Technol. B 37, 062915 (2019) https://doi.org/10.1116/1.5112127

Abstract

View articletitled, Numerical modeling method for UV imprint process simulation using thermoviscoelastic constitutive equations

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Measurement of the residual stress in chromium nitride coatings deposited on an aluminum alloy substrate using arc ion plating method

In Special Collection: Conference Collection: 15th International Symposium on Sputtering and Plasma Processes (ISSP2019)

Kazuya Kusaka; Kenta Shirasaka; Daisuke Yonekura; Yuta Tanaka

J. Vac. Sci. Technol. B 37, 062916 (2019) https://doi.org/10.1116/1.5118702

Abstract

View articletitled, Measurement of the residual stress in chromium nitride coatings deposited on an aluminum alloy substrate using arc ion plating method

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Characterizing profile tilt of nanoscale deep-etched gratings via x-ray diffraction

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Jungki Song; Ralf K. Heilmann; Alexander R. Bruccoleri; Mark L. Schattenburg

J. Vac. Sci. Technol. B 37, 062917 (2019) https://doi.org/10.1116/1.5119713

Abstract

View articletitled, Characterizing profile tilt of nanoscale deep-etched gratings via x-ray diffraction

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CHORUS

Comparison imaging ellipsometry and its application to crystallization of indium oxide thin films

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Sungmo Park; Jungtae Lee; Hyunjin Kim; Jaekyun Kim; Suenne Kim; Ilsin An

J. Vac. Sci. Technol. B 37, 062918 (2019) https://doi.org/10.1116/1.5122707

Abstract

View articletitled, Comparison imaging ellipsometry and its application to crystallization of indium oxide thin films

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Residual stress measurement of {112}-oriented CrN layers in CrN/Cr multilayer films

In Special Collection: Conference Collection: 15th International Symposium on Sputtering and Plasma Processes (ISSP2019)

Kazuya Kusaka; Kenta Shirasaka; Daisuke Yonekura; Yuta Tanaka

J. Vac. Sci. Technol. B 37, 062919 (2019) https://doi.org/10.1116/1.5118682

Abstract

View articletitled, Residual stress measurement of {112}-oriented CrN layers in CrN/Cr multilayer films

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Optical constants of polycrystalline Ni from 0.06 to 6.0 eV at 300 K

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Farzin Abadizaman; Stefan Zollner

J. Vac. Sci. Technol. B 37, 062920 (2019) https://doi.org/10.1116/1.5118841

Abstract

View articletitled, Optical constants of polycrystalline Ni from 0.06 to 6.0 eV at 300 K

Supplementary Material

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CHORUS

Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Ivan Ohlídal; Jiří Vohánka; Vilma Buršíková; Jaroslav Ženíšek; Petr Vašina; Martin Čermák; Daniel Franta

J. Vac. Sci. Technol. B 37, 062921 (2019) https://doi.org/10.1116/1.5122014

Abstract

View articletitled, Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model

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Experimental comparative analysis on series and parallel antenna in an inductively coupled plasma

Tae-Woo Kim; Kyung-Hyun Kim; Moo-Young Lee; Chin-Wook Chung

J. Vac. Sci. Technol. B 37, 062922 (2019) https://doi.org/10.1116/1.5123543

Abstract

View articletitled, Experimental comparative analysis on series and parallel antenna in an inductively coupled plasma

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Surface analysis and pumping speed measurements of oxygen-free palladium/titanium nonevaporable getter after heating at 100–450 °C

Tetsuya Miyazawa; Yuta Sugawara; Ichiro Yoshikawa; Yuta Sato; Shinya Ohno; Tomohiro Okada; Masuaki Matsumoto; Takashi Kikuchi; Kazuhiko Mase

J. Vac. Sci. Technol. B 37, 062923 (2019) https://doi.org/10.1116/1.5111879

Abstract

View articletitled, Surface analysis and pumping speed measurements of oxygen-free palladium/titanium nonevaporable getter after heating at 100–450 °C

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Terahertz optical properties of polymethacrylates after thermal annealing

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Serang Park; Yanzeng Li; Daniel B. Fullager; Marc Lata; Philipp Kühne; Vanya Darakchieva; T. Hofmann

J. Vac. Sci. Technol. B 37, 062924 (2019) https://doi.org/10.1116/1.5122801

Abstract

View articletitled, Terahertz optical properties of polymethacrylates after thermal annealing

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CHORUS

Revised wavelength-by-wavelength inversion of ellipsometry data of semiconductor thin films

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Mickaël Gilliot; Aomar Hadjadj; Michel Stchakovsky

J. Vac. Sci. Technol. B 37, 062925 (2019) https://doi.org/10.1116/1.5122737

Abstract

View articletitled, Revised wavelength-by-wavelength inversion of ellipsometry data of semiconductor thin films

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Sub-rf period electrical characterization of a pulsed capacitively coupled argon plasma

Alex F. Press; Matthew J. Goeckner; Lawrence J. Overzet

J. Vac. Sci. Technol. B 37, 062926 (2019) https://doi.org/10.1116/1.5132753

Abstract

View articletitled, Sub-rf period electrical characterization of a pulsed capacitively coupled argon plasma

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CHORUS

Diagnostic of graphene on Ge(100)/Si(100) in a 200 mm wafer Si technology environment by spectroscopic ellipsometry/reflectometry

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Oksana Fursenko; Mindaugas Lukosius; Joachim Bauer; Claus Villringer; Helge Lux; Florian Bärwolf; Marco Lisker; Andreas Mai

J. Vac. Sci. Technol. B 37, 062927 (2019) https://doi.org/10.1116/1.5122792

Abstract

View articletitled, Diagnostic of graphene on Ge(100)/Si(100) in a 200 mm wafer Si technology environment by spectroscopic ellipsometry/reflectometry

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Monitoring subwavelength grating structures for vertical-cavity surface-emitting laser applications by spectroscopic ellipsometry

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Emeric Balogh; Peter Basa; Attila Suto; Benjamin Powell; Anna Bölcskei-Molnár; Szilvia Biró

J. Vac. Sci. Technol. B 37, 062928 (2019) https://doi.org/10.1116/1.5122771

Abstract

View articletitled, Monitoring subwavelength grating structures for vertical-cavity surface-emitting laser applications by spectroscopic ellipsometry

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Synthesis and study of γ-Fe₂O₃ and CoFe₂O₄ based ferrofluids by means of spectroscopic Mueller matrix ellipsometry

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Yann Battie; Michel Stchakovsky; Sophie Neveu; Damien Jamon; Enric Garcia-Caurel

J. Vac. Sci. Technol. B 37, 062929 (2019) https://doi.org/10.1116/1.5121286

Abstract

View articletitled, Synthesis and study of γ-Fe2O3 and CoFe2O4 based ferrofluids by means of spectroscopic Mueller matrix ellipsometry

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Optimization of the response time measuring method for liquid crystal variable retarders

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Antonio Campos-Jara; Pilar García Parejo; Alberto Álvarez-Herrero

J. Vac. Sci. Technol. B 37, 062930 (2019) https://doi.org/10.1116/1.5122786

Abstract

View articletitled, Optimization of the response time measuring method for liquid crystal variable retarders

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