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Polarization switching kinetics of the ferroelectric Al-doped HfO₂ thin films prepared by atomic layer deposition with different ozone doses

So-Jung Yoon; So-Yeong Na; Seung-Eon Moon; Sung-Min Yoon

J. Vac. Sci. Technol. B 37, 050601 (2019) https://doi.org/10.1116/1.5110621

Abstract

View articletitled, Polarization switching kinetics of the ferroelectric Al-doped HfO2 thin films prepared by atomic layer deposition with different ozone doses

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Stability of epitaxial pseudocubic group IV-V semiconductors

David Lee Brown; Kevin S. Jones; Simon R. Phillpot

J. Vac. Sci. Technol. B 37, 050602 (2019) https://doi.org/10.1116/1.5111715

Abstract

View articletitled, Stability of epitaxial pseudocubic group IV-V semiconductors

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Fabrication of the nanofluidic channels type leak assembly based on the glass frit sealing method

Wentian Zhou; Hailin Bi; Zhenhua Yu; Xudi Wang; Yongjun Cheng; Zhenhua Xi; Wei Wei

J. Vac. Sci. Technol. B 37, 050603 (2019) https://doi.org/10.1116/1.5119842

Abstract

View articletitled, Fabrication of the nanofluidic channels type leak assembly based on the glass frit sealing method

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Rapid reflectance difference microscopy based on liquid crystal variable retarder

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Chunguang Hu; Hao Wang; Shuchun Huo; Wanfu Shen; Xiaotang Hu

J. Vac. Sci. Technol. B 37, 050604 (2019) https://doi.org/10.1116/1.5122694

Abstract

View articletitled, Rapid reflectance difference microscopy based on liquid crystal variable retarder

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Articles

Electronic & Optoelectronic Materials, Devices & Processing

Amorphous sulfide heterostructure precursors prepared by radio frequency sputtering

In Special Collection: Conference Collection: 46th Conference on the Physics and Chemistry of Surfaces and Interfaces (PCSI-46) 2019

Dennice M. Roberts; John D. Perkins; Andrew G. Norman; Conrad R. Stoldt; Andriy Zakutayev; Sage R. Bauers

J. Vac. Sci. Technol. B 37, 051201 (2019) https://doi.org/10.1116/1.5099502

Abstract

View articletitled, Amorphous sulfide heterostructure precursors prepared by radio frequency sputtering

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Enhanced performance of graphene/GaAs nanowire photoelectric conversion devices by improving the Schottky barrier height

Yanbin Luo; Xin Yan; Xia Zhang; Mingqian Zhang; Bang Li; Jiahui Zheng; Qichao Lu; Qimin Lin; Qingsheng Zeng; Xiaomin Ren

J. Vac. Sci. Technol. B 37, 051202 (2019) https://doi.org/10.1116/1.5114910

Abstract

View articletitled, Enhanced performance of graphene/GaAs nanowire photoelectric conversion devices by improving the Schottky barrier height

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Fast microfocus x-ray tube based on carbon nanotube array

Xiaobing Li; Juntao Zhou; Qingyang Wu; Menglong Liu; Rifeng Zhou; Zexiang Chen

J. Vac. Sci. Technol. B 37, 051203 (2019) https://doi.org/10.1116/1.5099697

Abstract

View articletitled, Fast microfocus x-ray tube based on carbon nanotube array

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Diffusion of implanted Ge and Sn in β-Ga₂O₃

Ribhu Sharma; Mark E. Law; Minghan Xian; Marko Tadjer; Elaf A. Anber; Daniel Foley; Andrew C. Lang; James L. Hart; James Nathaniel; Mitra L. Taheri; Fan Ren; S. J. Pearton; A. Kuramata

J. Vac. Sci. Technol. B 37, 051204 (2019) https://doi.org/10.1116/1.5118001

Abstract

View articletitled, Diffusion of implanted Ge and Sn in β-Ga2O3

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CHORUS

Linear and nonlinear filtering of spectra

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

David E. Aspnes; Van L. Le; Young D. Kim

J. Vac. Sci. Technol. B 37, 051205 (2019) https://doi.org/10.1116/1.5118230

Abstract

View articletitled, Linear and nonlinear filtering of spectra

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Ellipsometry, reflectance, and photoluminescence of nanocrystalline CuCl thin films on silicon

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Josef Humlíček; Karla Kuldová; Richard Krumpolec; David C. Cameron

J. Vac. Sci. Technol. B 37, 051206 (2019) https://doi.org/10.1116/1.5121240

Abstract

View articletitled, Ellipsometry, reflectance, and photoluminescence of nanocrystalline CuCl thin films on silicon

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Investigation of ma-N 2400 series photoresist as an electron-beam resist for superconducting nanoscale devices

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Emily Toomey; Marco Colangelo; Karl K. Berggren

J. Vac. Sci. Technol. B 37, 051207 (2019) https://doi.org/10.1116/1.5119516

Abstract

View articletitled, Investigation of ma-N 2400 series photoresist as an electron-beam resist for superconducting nanoscale devices

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CHORUS

Increase of space width roughness in directed self-assembly patterning arising from shrinking stress in the remaining poly(methyl methacrylate)

Makoto Satake; Naoyuki Kofuji; Kenji Maeda

J. Vac. Sci. Technol. B 37, 051208 (2019) https://doi.org/10.1116/1.5115164

Abstract

View articletitled, Increase of space width roughness in directed self-assembly patterning arising from shrinking stress in the remaining poly(methyl methacrylate)

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Energy Conversion and Storage Devices

Synthesis and characterization of thin film polyelectrolytes for solid-state lithium microbatteries

Yifan Gao; Wyatt E. Tenhaeff

J. Vac. Sci. Technol. B 37, 051401 (2019) https://doi.org/10.1116/1.5109436

Abstract

View articletitled, Synthesis and characterization of thin film polyelectrolytes for solid-state lithium microbatteries

Supplementary Material

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CHORUS

Lithography

Hybrid refractive-diffractive microlenses in glass by focused Xe ion beam

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Sergey Gorelick; Alex de Marco

J. Vac. Sci. Technol. B 37, 051601 (2019) https://doi.org/10.1116/1.5114953

Abstract

View articletitled, Hybrid refractive-diffractive microlenses in glass by focused Xe ion beam

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Self-aligned structures by a single-step through-membrane 100-keV electron beam lithography

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Sergey Gorelick; Alex de Marco

J. Vac. Sci. Technol. B 37, 051602 (2019) https://doi.org/10.1116/1.5114948

Abstract

View articletitled, Self-aligned structures by a single-step through-membrane 100-keV electron beam lithography

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Charge-induced pattern displacement in E-beam lithography

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Kerim T. Arat; Thomas Klimpel; Aernout C. Zonnevylle; Wilhelmus S. M. M. Ketelaars; Carel Th. H. Heerkens,; Cornelis W. Hagen

J. Vac. Sci. Technol. B 37, 051603 (2019) https://doi.org/10.1116/1.5120631

Abstract

View articletitled, Charge-induced pattern displacement in E-beam lithography

Supplementary Material

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Electron beam lithography on curved or tilted surfaces: Simulations and experiments

Kerim T. Arat; Aernout C. Zonnevylle; Wilhelmus S. M. M. Ketelaars; Nikola Belic; Ulrich Hofmann; Cornelis W. Hagen

J. Vac. Sci. Technol. B 37, 051604 (2019) https://doi.org/10.1116/1.5120632

Abstract

View articletitled, Electron beam lithography on curved or tilted surfaces: Simulations and experiments

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Nanometer Science & Technology

Atomic H diffusion and C etching in multilayer graphene monitored using a Y based optical sensor

Baibhav K. Mund; Olena Soroka; Jacobus M. Sturm; Wesley T. E. van den Beld; Chris J. Lee; Fred Bijkerk

J. Vac. Sci. Technol. B 37, 051801 (2019) https://doi.org/10.1116/1.5110213

Abstract

View articletitled, Atomic H diffusion and C etching in multilayer graphene monitored using a Y based optical sensor

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Why converting field emission voltages to macroscopic fields before making a Fowler-Nordheim plot has often led to spurious characterization results

Richard G. Forbes

J. Vac. Sci. Technol. B 37, 051802 (2019) https://doi.org/10.1116/1.5111455

Abstract

View articletitled, Why converting field emission voltages to macroscopic fields before making a Fowler-Nordheim plot has often led to spurious characterization results

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Chemical nature and thermal decomposition behavior of tartaric acid multilayers on rutile TiO₂(110)

In Special Collection: Conference Collection: PACSURF 2018

Elisa Meriggio; Rémi Lazzari; Christophe Méthivier; Pascal David; Stéphane Chenot; Xavier Carrier; Gregory Cabailh; Vincent Humblot

J. Vac. Sci. Technol. B 37, 051803 (2019) https://doi.org/10.1116/1.5100957

Abstract

View articletitled, Chemical nature and thermal decomposition behavior of tartaric acid multilayers on rutile TiO2(110)

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Effect of bilayer period on the oxidation and corrosion resistance of Pb-Ti/MoS₂ nanoscale multilayer films

Hao Li; Mingling Xie; Xiaojun Xu; Xiaoqiang Fan; Renhui Zhang; Qi Sun; Guangan Zhang; Minhao Zhu

J. Vac. Sci. Technol. B 37, 051804 (2019) https://doi.org/10.1116/1.5115773

Abstract

View articletitled, Effect of bilayer period on the oxidation and corrosion resistance of Pb-Ti/MoS2 nanoscale multilayer films

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Balancing ion parameters and fluorocarbon chemical reactants for SiO₂ pattern transfer control using fluorocarbon-based atomic layer etching

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Stefano Dallorto; Monica Lorenzon; Julia Szornel; Adam Schwartzberg; Andy Goodyear; Mike Cooke; Martin Hofmann; Ivo W. Rangelow; Stefano Cabrini

J. Vac. Sci. Technol. B 37, 051805 (2019) https://doi.org/10.1116/1.5120414

Abstract

View articletitled, Balancing ion parameters and fluorocarbon chemical reactants for SiO2 pattern transfer control using fluorocarbon-based atomic layer etching

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CHORUS

Nanoscale details of liquid drops on 1D patterned surfaces revealed by etching

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Xuemei Wang; Juan J. Faria-Briceno; Tito Busani; S. R. J. Brueck

J. Vac. Sci. Technol. B 37, 051806 (2019) https://doi.org/10.1116/1.5116703

Abstract

View articletitled, Nanoscale details of liquid drops on 1D patterned surfaces revealed by etching

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CHORUS

Microelectronic & Nanoelectronic Devices

Fabrication of suspended antenna-coupled nanothermocouples

Gergo P. Szakmany; Alexei O. Orlov; Gary H. Bernstein; Wolfgang Porod

J. Vac. Sci. Technol. B 37, 052201 (2019) https://doi.org/10.1116/1.5113506

Abstract

View articletitled, Fabrication of suspended antenna-coupled nanothermocouples

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Effects of oxygen on the resistivity in Au thin films with Ti-Al adhesion layer

Chiara D. Nascimento; Everton G. Souza; Cesar Aguzzoli; Rafael L. Cruz

J. Vac. Sci. Technol. B 37, 052202 (2019) https://doi.org/10.1116/1.5119099

Abstract

View articletitled, Effects of oxygen on the resistivity in Au thin films with Ti-Al adhesion layer

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Measurement and Characterization

Electron backscatter diffraction of Nb₃Sn coated niobium: Revealing structure as a function of depth

Jay Tuggle; Uttar Pudasaini; Jonathan Angle; Grigory Eremeev; Charlie E. Reece; Fred A. Stevie; Michael J. Kelley

J. Vac. Sci. Technol. B 37, 052901 (2019) https://doi.org/10.1116/1.5096338

Abstract

View articletitled, Electron backscatter diffraction of Nb3Sn coated niobium: Revealing structure as a function of depth

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Effects of solvents and polymer on photoluminescence of transferred WS₂ monolayers

Xiaotian Wang; Kyungnam Kang; Kyle Godin; Shichen Fu; Siwei Chen; Eui-Hyeok Yang

J. Vac. Sci. Technol. B 37, 052902 (2019) https://doi.org/10.1116/1.5094543

Abstract

View articletitled, Effects of solvents and polymer on photoluminescence of transferred WS2 monolayers

Supplementary Material

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Combined interpolation, scale change, and noise reduction in spectral analysis

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Van L. Le; Tae J. Kim; Young D. Kim; David E. Aspnes

J. Vac. Sci. Technol. B 37, 052903 (2019) https://doi.org/10.1116/1.5120358

Abstract

View articletitled, Combined interpolation, scale change, and noise reduction in spectral analysis

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Optical angular scatterometry: In-line metrology approach for roll-to-roll and nanoimprint fabrication

In Special Collection: Conference Collection: The 63rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2019)

Juan J. Faria-Briceno; Ruichao Zhu; Vineeth Sasidharan; Alexander Neumann; Shrawan Singhal; S. V. Sreenivasan; S. R. J. Brueck

J. Vac. Sci. Technol. B 37, 052904 (2019) https://doi.org/10.1116/1.5119707

Abstract

View articletitled, Optical angular scatterometry: In-line metrology approach for roll-to-roll and nanoimprint fabrication

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CHORUS

Completing an experimental nondepolarizing Mueller matrix whose column or row is missing

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Razvigor Ossikovski; Oriol Arteaga

J. Vac. Sci. Technol. B 37, 052905 (2019) https://doi.org/10.1116/1.5120342

Abstract

View articletitled, Completing an experimental nondepolarizing Mueller matrix whose column or row is missing

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Imaging the native inversion layer under buried oxide in silicon-on-insulator radio frequency device technology via scanning surface photovoltage microscopy

Daminda H. Dahanayaka; Philip V. Kaszuba; Leon Moszkowicz; Randall H. Wells; Franklin J. Alwine; Richard A. Phelps; James A. Slinkman; Andrew A. Wong; Lloyd A. Bumm

J. Vac. Sci. Technol. B 37, 052906 (2019) https://doi.org/10.1116/1.5111139

Abstract

View articletitled, Imaging the native inversion layer under buried oxide in silicon-on-insulator radio frequency device technology via scanning surface photovoltage microscopy

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Obtaining the scattering rate of different T_c0 FeSe thin films via spectroscopic ellipsometry

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Yujun Shi; Jie Lian; Zhongpei Feng; Minglin Zhao; Kui Jin; Haonan Song; Mingyang Wei; Kai Dai; Qingfen Jiang; Jiaxiong Fang

J. Vac. Sci. Technol. B 37, 052907 (2019) https://doi.org/10.1116/1.5119394

Abstract

View articletitled, Obtaining the scattering rate of different Tc0 FeSe thin films via spectroscopic ellipsometry

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