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LETTERS

Dependence of dielectric constant of hydrocarbon bridged low-k films on porosity

Alexander P. Palov; Mikhail R. Baklanov; Shuhua Wei

J. Vac. Sci. Technol. B 37, 010601 (2019) https://doi.org/10.1116/1.5082781

Abstract

View articletitled, Dependence of dielectric constant of hydrocarbon bridged low-k films on porosity

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Flexible vertical-channel thin-film transistors using In-Ga-Zn-O active channel and polyimide spacer on poly(ethylene naphthalate) substrate

Hyeong-Rae Kim; Ji-Hee Yang; Gi-Heon Kim; Sung-Min Yoon

J. Vac. Sci. Technol. B 37, 010602 (2019) https://doi.org/10.1116/1.5082898

Abstract

View articletitled, Flexible vertical-channel thin-film transistors using In-Ga-Zn-O active channel and polyimide spacer on poly(ethylene naphthalate) substrate

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Articles

Electronic & Optoelectronic Materials, Devices & Processing

Enhanced green luminescence from ZnO nanorods

In Special Collection: Special Topic Collection Honoring Paul Holloway for Contributions in Luminescent Materials Growth, Synthesis and Characterization

Emad H. H. Hasabeldaim; Odireleng M. Ntwaeaborwa; Robin E. Kroon; Elizabeth Coetsee; Hendrik C. Swart

J. Vac. Sci. Technol. B 37, 011201 (2019) https://doi.org/10.1116/1.5052543

Abstract

View articletitled, Enhanced green luminescence from ZnO nanorods

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Origin of spectral brightness variations in InAs/InP quantum dot telecom single photon emitters

In Special Collection: Special Topic Collection Honoring Paul Holloway for Contributions in Luminescent Materials Growth, Synthesis and Characterization

Christopher J. K. Richardson; Richard P. Leavitt; Je-Hyung Kim; Edo Waks; Ilke Arslan; Bruce Arey

J. Vac. Sci. Technol. B 37, 011202 (2019) https://doi.org/10.1116/1.5042540

Abstract

View articletitled, Origin of spectral brightness variations in InAs/InP quantum dot telecom single photon emitters

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CHORUS

Focusing of x-rays emitted by a pyroelectric x-ray generator for micro x-ray fluorescence

In Special Collection: Special Topic Collection: Papers from the 31st International Vacuum Nanoelectronics Conference 2018

Markus Wilke; Karsten Harnisch; Wolfram Knapp; Martin Ecke; Thorsten Halle

J. Vac. Sci. Technol. B 37, 011203 (2019) https://doi.org/10.1116/1.5067322

Abstract

View articletitled, Focusing of x-rays emitted by a pyroelectric x-ray generator for micro x-ray fluorescence

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Two-stage reactive ion etching of AlGaN/GaN high electron mobility transistor type heterostructures

Sławomir Owczarzak; Andrzej Stafiniak; Regina Paszkiewicz

J. Vac. Sci. Technol. B 37, 011204 (2019) https://doi.org/10.1116/1.5064778

Abstract

View articletitled, Two-stage reactive ion etching of AlGaN/GaN high electron mobility transistor type heterostructures

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Structure-specific photoluminescence of ZnGa₂O₄:Eu³⁺ thin films deposited on sapphire C-plane substrates

In Special Collection: Special Topic Collection Honoring Paul Holloway for Contributions in Luminescent Materials Growth, Synthesis and Characterization

Housei Akazawa

J. Vac. Sci. Technol. B 37, 011205 (2019) https://doi.org/10.1116/1.5063942

Abstract

View articletitled, Structure-specific photoluminescence of ZnGa2O4:Eu3+ thin films deposited on sapphire C-plane substrates

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Luminescence properties and cathodoluminescence degradation of Bi doped SrO powder

In Special Collection: Special Topic Collection Honoring Paul Holloway for Contributions in Luminescent Materials Growth, Synthesis and Characterization

Mogahid H. M. Abdelrehman; Robin E. Kroon; Abdelrhman Yousif; Hassan A. A. Seed Ahmed; Hendrik C. Swart

J. Vac. Sci. Technol. B 37, 011206 (2019) https://doi.org/10.1116/1.5075492

Abstract

View articletitled, Luminescence properties and cathodoluminescence degradation of Bi doped SrO powder

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Characterization of the nature of shear-induced agglomerates as hard and soft in chemical mechanical polishing slurries

Aniruddh J. Khanna; Feng-Chi Chang; Sushant Gupta; Purushottam Kumar; Rajiv K. Singh

J. Vac. Sci. Technol. B 37, 011207 (2019) https://doi.org/10.1116/1.5065516

Abstract

View articletitled, Characterization of the nature of shear-induced agglomerates as hard and soft in chemical mechanical polishing slurries

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Over 1 GW/cm² for high-power GaN p-i-n diodes with edge termination structure and laser annealing

Chia-Jui Yu; Jyun-You Lu; Li-Wei Shan; Chien-Ju Chen; Jyun-Hao Liao; Meng-Chyi Wu

J. Vac. Sci. Technol. B 37, 011208 (2019) https://doi.org/10.1116/1.5066633

Abstract

View articletitled, Over 1 GW/cm2 for high-power GaN p-i-n diodes with edge termination structure and laser annealing

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High-voltage metal-insulator-metal capacitor based on crystalline HfAlO_x film grown by atomic layer deposition

Michael Lisiansky; Inna Popov; Vladimir Uvarov; Valentina Korchnoy; Boris Meyler; Svetlana Yofis; Yacov Shneider

J. Vac. Sci. Technol. B 37, 011209 (2019) https://doi.org/10.1116/1.5054848

Abstract

View articletitled, High-voltage metal-insulator-metal capacitor based on crystalline HfAlOx film grown by atomic layer deposition

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Lithography

Electrically-assisted nanoimprint of block copolymers

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Andre Mayer; Wenyang Ai; Johannes Rond; Johannes Staabs; Christian Steinberg; Marc Papenheim; Hella-Christin Scheer; Massimo Tormen; Alesandro Cian; Joachim Zajadacz; Klaus Zimmer

J. Vac. Sci. Technol. B 37, 011601 (2019) https://doi.org/10.1116/1.5048204

Abstract

View articletitled, Electrically-assisted nanoimprint of block copolymers

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On evaporation via an inclined rotating circular lift-off shadow or stencil mask

Steve Arscott

J. Vac. Sci. Technol. B 37, 011602 (2019) https://doi.org/10.1116/1.5057404

Abstract

View articletitled, On evaporation via an inclined rotating circular lift-off shadow or stencil mask

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Synthesis and self-assembly of high-χ poly(4-tertbutylstyrene)-block-poly(2-hydroxyethylmethacrylate)

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Caleb L. Breaux; Brandon L. Sharp; Peter J. Ludovice; Clifford L. Henderson; Haibo Li; Bing Li; Mark Neisser

J. Vac. Sci. Technol. B 37, 011603 (2019) https://doi.org/10.1116/1.5056256

Abstract

View articletitled, Synthesis and self-assembly of high-χ poly(4-tertbutylstyrene)-block-poly(2-hydroxyethylmethacrylate)

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CHORUS

Structural effects on the performance of epoxide-based negative-tone molecular resists

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Brandon L. Sharp; Hannah L. Narcross; Peter Ludovice; Laren M. Tolbert; Clifford L. Henderson

J. Vac. Sci. Technol. B 37, 011604 (2019) https://doi.org/10.1116/1.5057741

Abstract

View articletitled, Structural effects on the performance of epoxide-based negative-tone molecular resists

Supplementary Material

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CHORUS

Microelectronic & Nanoelectronic Devices

Optimization of a nanoscale field emission cell with a planar blade-shaped multilayer graphene/SiC emitter

Igor L. Jityaev; Alexander M. Svetlichnyi

J. Vac. Sci. Technol. B 37, 012201 (2019) https://doi.org/10.1116/1.5051253

Abstract

View articletitled, Optimization of a nanoscale field emission cell with a planar blade-shaped multilayer graphene/SiC emitter

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Data retention investigation in Al:HfO₂-based resistive random access memory arrays by using high-temperature accelerated tests

In Special Collection: Conference Collection: 20th Workshop on Dielectrics in Microelectronics

Eduardo Perez; Mamathamba K. Mahadevaiah; Cristian Zambelli; Piero Olivo; Christian Wenger

J. Vac. Sci. Technol. B 37, 012202 (2019) https://doi.org/10.1116/1.5054983

Abstract

View articletitled, Data retention investigation in Al:HfO2-based resistive random access memory arrays by using high-temperature accelerated tests

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New method to analyze random telegraph signals in resistive random access memories

In Special Collection: Conference Collection: 20th Workshop on Dielectrics in Microelectronics

Gerardo González-Cordero; Mireia B. González; Francisco Jiménez-Molinos; Francesca Campabadal; Juan Bautista Roldán

J. Vac. Sci. Technol. B 37, 012203 (2019) https://doi.org/10.1116/1.5059384

Abstract

View articletitled, New method to analyze random telegraph signals in resistive random access memories

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Thermal study of multilayer resistive random access memories based on HfO₂ and Al₂O₃ oxides

In Special Collection: Conference Collection: 20th Workshop on Dielectrics in Microelectronics

Manuel Cazorla; Samuel Aldana; Marcos Maestro; Mireia Bargalló González; Francesca Campabadal; Enrique Moreno; Francisco Jiménez-Molinos; Juan Bautista Roldán

J. Vac. Sci. Technol. B 37, 012204 (2019) https://doi.org/10.1116/1.5058294

Abstract

View articletitled, Thermal study of multilayer resistive random access memories based on HfO2 and Al2O3 oxides

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Measurement and Characterization

Analysis of multipole fields for a practical wire lens of an aberration corrector

Tomonori Nakano; Yu Yamazawa

J. Vac. Sci. Technol. B 37, 012901 (2019) https://doi.org/10.1116/1.5065554

Abstract

View articletitled, Analysis of multipole fields for a practical wire lens of an aberration corrector

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Measurement method for plume divergence angle of Hall thrusters

In Special Collection: Special Topic Collection: Advanced Nano, and Metamaterials in Space Propulsion

Yongjie Ding; Hongbo Su; Hong Li; Boyang Jia; Liqiu Wei; Wuji Peng; Yanlin Hu; Wei Mao; Daren Yu

J. Vac. Sci. Technol. B 37, 012902 (2019) https://doi.org/10.1116/1.5037440

Abstract

View articletitled, Measurement method for plume divergence angle of Hall thrusters

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Solid-solid dewetting of scandium thin films on the W(100) surface observed using emission microscopy

In Special Collection: Special Topic Collection: Papers from the 31st International Vacuum Nanoelectronics Conference 2018

Michael V. Mroz; Tatiana Savina; Martin E. Kordesch; Jerzy T. Sadowski; Samuel A. Tenney

J. Vac. Sci. Technol. B 37, 012903 (2019) https://doi.org/10.1116/1.5066015

Abstract

View articletitled, Solid-solid dewetting of scandium thin films on the W(100) surface observed using emission microscopy

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CHORUS

Drude and Kukharskii mobility of doped semiconductors extracted from Fourier-transform infrared ellipsometry spectra

In Special Collection: Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE

Stefan Zollner; Pablo P. Paradis; Farzin Abadizaman; Nuwanjula S. Samarasingha

J. Vac. Sci. Technol. B 37, 012904 (2019) https://doi.org/10.1116/1.5081055

Abstract

View articletitled, Drude and Kukharskii mobility of doped semiconductors extracted from Fourier-transform infrared ellipsometry spectra

Supplementary Material

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Dynamic characteristics of beam perveance under thermal deformation for a three-grid ion thruster

In Special Collection: Special Topic Collection: Advanced Nano, and Metamaterials in Space Propulsion

Jianfei Long; Xiaodong Wen

J. Vac. Sci. Technol. B 37, 012905 (2019) https://doi.org/10.1116/1.5051810

Abstract

View articletitled, Dynamic characteristics of beam perveance under thermal deformation for a three-grid ion thruster

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Silver nanoparticles for solvent-free detection of small molecules and mass-to-charge calibration of laser desorption/ionization mass spectrometry

Vadym Prysiazhnyi; Filip Dycka; Jiri Kratochvil; Vitezslav Stranak; Petra Ksirova; Zdenek Hubicka

J. Vac. Sci. Technol. B 37, 012906 (2019) https://doi.org/10.1116/1.5050878

Abstract

View articletitled, Silver nanoparticles for solvent-free detection of small molecules and mass-to-charge calibration of laser desorption/ionization mass spectrometry

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Effect of BO₃³⁻ ions on photoluminescence of CaMoO₄:Eu³⁺ phosphor

In Special Collection: Special Topic Collection Honoring Paul Holloway for Contributions in Luminescent Materials Growth, Synthesis and Characterization

Machaba L. A. Letswalo; Leelakrishna Reddy; Avula Balakrishna; Hendrik C. Swart; Odireleng M. Ntwaeaborwa

J. Vac. Sci. Technol. B 37, 012907 (2019) https://doi.org/10.1116/1.5083817

Abstract

View articletitled, Effect of BO33− ions on photoluminescence of CaMoO4:Eu3+ phosphor

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LETTERS

Dependence of dielectric constant of hydrocarbon bridged low-k films on porosity

Flexible vertical-channel thin-film transistors using In-Ga-Zn-O active channel and polyimide spacer on poly(ethylene naphthalate) substrate

Articles

Electronic & Optoelectronic Materials, Devices & Processing

Enhanced green luminescence from ZnO nanorods

Origin of spectral brightness variations in InAs/InP quantum dot telecom single photon emitters

Focusing of x-rays emitted by a pyroelectric x-ray generator for micro x-ray fluorescence

Two-stage reactive ion etching of AlGaN/GaN high electron mobility transistor type heterostructures

Structure-specific photoluminescence of ZnGa₂O₄:Eu³⁺ thin films deposited on sapphire C-plane substrates

Luminescence properties and cathodoluminescence degradation of Bi doped SrO powder

Characterization of the nature of shear-induced agglomerates as hard and soft in chemical mechanical polishing slurries

Over 1 GW/cm² for high-power GaN p-i-n diodes with edge termination structure and laser annealing

High-voltage metal-insulator-metal capacitor based on crystalline HfAlO_x film grown by atomic layer deposition

Lithography

Electrically-assisted nanoimprint of block copolymers

On evaporation via an inclined rotating circular lift-off shadow or stencil mask

Synthesis and self-assembly of high-χ poly(4-tertbutylstyrene)-block-poly(2-hydroxyethylmethacrylate)

Structural effects on the performance of epoxide-based negative-tone molecular resists

Microelectronic & Nanoelectronic Devices

Optimization of a nanoscale field emission cell with a planar blade-shaped multilayer graphene/SiC emitter

Data retention investigation in Al:HfO₂-based resistive random access memory arrays by using high-temperature accelerated tests

New method to analyze random telegraph signals in resistive random access memories

Thermal study of multilayer resistive random access memories based on HfO₂ and Al₂O₃ oxides

Measurement and Characterization

Analysis of multipole fields for a practical wire lens of an aberration corrector

Measurement method for plume divergence angle of Hall thrusters

Solid-solid dewetting of scandium thin films on the W(100) surface observed using emission microscopy

Drude and Kukharskii mobility of doped semiconductors extracted from Fourier-transform infrared ellipsometry spectra

Dynamic characteristics of beam perveance under thermal deformation for a three-grid ion thruster

Silver nanoparticles for solvent-free detection of small molecules and mass-to-charge calibration of laser desorption/ionization mass spectrometry

Effect of BO₃³⁻ ions on photoluminescence of CaMoO₄:Eu³⁺ phosphor

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LETTERS

Articles

Electronic & Optoelectronic Materials, Devices & Processing

Lithography

Microelectronic & Nanoelectronic Devices

Measurement and Characterization

RSS

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

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