Issues

LETTERS

Broadband UV-assisted thermal annealing of low-k silicon carbonitride films using a C-rich silazane precursor

Wei-Yuan Chang; Hau-Ting Chung; Yi-Chang Chen; Jihperng Leu

J. Vac. Sci. Technol. B 36, 060601 (2018) https://doi.org/10.1116/1.5063294

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Review Articles

Future prospects of fluoride based upconversion nanoparticles for emerging applications in biomedical and energy harvesting

In Special Collection: Special Topic Collection Honoring Paul Holloway for Contributions in Luminescent Materials Growth, Synthesis and Characterization

Surya P. Tiwari; Sachin K. Maurya; Ram S. Yadav; Abhishek Kumar; Vinod Kumar; Marie-France Joubert; Hendrik C. Swart

J. Vac. Sci. Technol. B 36, 060801 (2018) https://doi.org/10.1116/1.5044596

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Electronic & Optoelectronic Materials, Devices & Processing

Effect of surface treatments on electrical properties of β-Ga₂O₃

Jiancheng Yang; Zachary Sparks; Fan Ren; Stephen J. Pearton; Marko Tadjer

J. Vac. Sci. Technol. B 36, 061201 (2018) https://doi.org/10.1116/1.5052229

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CHORUS

Enhanced cracking in Si/B-doped Si_0.70Ge_0.30/Si heterostructures via hydrogen trapping effect

Xing Wei; Zhongying Xue; Yongwei Chang; Jiurong Li; Gang Wang; Da Chen; Qinglei Guo

J. Vac. Sci. Technol. B 36, 061202 (2018) https://doi.org/10.1116/1.5044215

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Dual-band ultraviolet photodetectors comprising nanostructured MgZnO on ZnO films

Ching-Ting Lee; Tzu-Shun Lin; Hsin-Ying Lee; Day-Shan Liu

J. Vac. Sci. Technol. B 36, 061203 (2018) https://doi.org/10.1116/1.5048677

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TEOS layers for low temperature processing of group IV optoelectronic devices

Simone Assali; Anis Attiaoui; Samik Mukherjee; Jérôme Nicolas; Oussama Moutanabbir

J. Vac. Sci. Technol. B 36, 061204 (2018) https://doi.org/10.1116/1.5047909

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Solid-source doping by using phosphosilicate glass into p-type bulk Si (100) substrate: Role of the capping SiO₂ barrier

Yoshiaki Kikuchi; Antony Peter; Bartlomiej Jan Pawlak; An De Keersgieter; Pierre Eyben; Naoto Horiguchi; Anda Mocuta

J. Vac. Sci. Technol. B 36, 061205 (2018) https://doi.org/10.1116/1.5053455

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Effect of carbon doping on threshold voltage and mobility of In-Si-O thin-film transistors

Kazunori Kurishima; Toshihide Nabatame; Nobuhiko Mitoma; Takio Kizu; Shinya Aikawa; Kazuhito Tsukagoshi; Akihiko Ohi; Toyohiro Chikyow; Atsushi Ogura

J. Vac. Sci. Technol. B 36, 061206 (2018) https://doi.org/10.1116/1.5039665

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Band alignment of atomic layer deposited SiO₂ on (010) (Al_0.14Ga_0.86)₂O₃

Chaker Fares; F. Ren; Eric Lambers; David C. Hays; B. P. Gila; S. J. Pearton

J. Vac. Sci. Technol. B 36, 061207 (2018) https://doi.org/10.1116/1.5052620

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CHORUS

Effects of Ar⁺ etching of Cu₂ZnSnSe₄ thin films: An x-ray photoelectron spectroscopy and photoluminescence study

Michael V. Yakushev; Mikhail A. Sulimov; Ekaterina Skidchenko; Jose Márquez-Prieto; Ian Forbes; Paul R. Edwards; Mikhail V. Kuznetsov; Vadim D. Zhivulko; Olga M. Borodavchenko; Alexander V. Mudryi; Juri Krustok; Robert W. Martin

J. Vac. Sci. Technol. B 36, 061208 (2018) https://doi.org/10.1116/1.5050243

Abstract

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Gaussian distribution in current-conduction mechanism of (Ni/Pt) Schottky contacts on wide bandgap AlInGaN quaternary alloy

Engin Arslan; S¸emsettin Altındal; Sertaç Ural; Ömer Ahmet Kayal; Mustafa Öztürk; Ekmel Özbay

J. Vac. Sci. Technol. B 36, 061209 (2018) https://doi.org/10.1116/1.5045259

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Enhancing the focused ion beam etch rate of Ag films by Joule heating

Takahiro Sasaki; Hironori Tohmyoh

J. Vac. Sci. Technol. B 36, 061210 (2018) https://doi.org/10.1116/1.5054991

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Effects of oxygen-inserted layers and oxide capping layer on dopant activation for the formation of ultrashallow p-n junctions in silicon

Xi Zhang; Daniel Connelly; Hideki Takeuchi; Marek Hytha; Robert J. Mears; Leonard M. Rubin; Tsu-Jae King Liu

J. Vac. Sci. Technol. B 36, 061211 (2018) https://doi.org/10.1116/1.5062366

Abstract

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Lithography

Nanostructures prepared by vacuum-line deposition of organosilanes through a colloidal mask

Susan D. Verberne-Sutton; Zorabel M. LeJeune; Sean Hill; Jason P. LeJeune; Jayne C. Garno

J. Vac. Sci. Technol. B 36, 061601 (2018) https://doi.org/10.1116/1.5051350

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Nanometer Science & Technology

Development of ultralight nanocellulose magnets using ultrasonic agitation

Derek T. Bradley; Eric Clausen; Paul M. Shand; Matthew Fleming; Timothy E. Kidd

J. Vac. Sci. Technol. B 36, 061801 (2018) https://doi.org/10.1116/1.5049814

Abstract

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CHORUS

Prediction of surface topography due to finite pixel spacing in focused ion beam milling of circular holes and trenches

Alexander V. Rumyantsev; Nikolay I. Borgardt

J. Vac. Sci. Technol. B 36, 061802 (2018) https://doi.org/10.1116/1.5047107

Abstract

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Magnetic nanotubes obtained from atomic layer deposition coated electrospun nanofibers

Alejandro Pereira; Juan Escrig; Juan Luis Palma; Carol López de Dicastillo; Cristian Patiño; María José Galotto

J. Vac. Sci. Technol. B 36, 061803 (2018) https://doi.org/10.1116/1.5058706

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Microelectronic & Nanoelectronic Devices

Analysis of conductive filament density in resistive random access memories: a 3D kinetic Monte Carlo approach

In Special Collection: Conference Collection: 20th Workshop on Dielectrics in Microelectronics

Samuel Aldana; Pedro García-Fernández; Rocío Romero-Zaliz; Francisco Jiménez-Molinos; Francisco Gómez-Campos; Juan Bautista Roldán

J. Vac. Sci. Technol. B 36, 062201 (2018) https://doi.org/10.1116/1.5049213

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Single electron transistors with e-beam evaporation of SiO₂ tunnel barriers

Matthew J. Filmer; Gregory L. Snider; Alexei O. Orlov

J. Vac. Sci. Technol. B 36, 062202 (2018) https://doi.org/10.1116/1.5050379

Abstract

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CHORUS

Silver-doped tin oxide for electrical property enhancement in p-type channel thin film transistor

An Hoang-Thuy Nguyen; Manh-Cuong Nguyen; Hyungmin Ji; Jonggyu Cheon; Kyoungmun Yu; Jinhyun Kim; Sangwoo Kim; Seongyong Cho; Rino Choi; Hoai Phuong Pham; Quang Trung Tran

J. Vac. Sci. Technol. B 36, 062203 (2018) https://doi.org/10.1116/1.5051419

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Plasmonics

Effects of annular-cylindrical combined channel Hall thruster length on the discharge characteristics

In Special Collection: Special Topic Collection: Advanced Nano, and Metamaterials in Space Propulsion

Yongjie Ding; Hongbo Su; Boyang Jia; Hong Li; Liqiu Wei; Peng Li; Hezhi Sun; Daren Yu

J. Vac. Sci. Technol. B 36, 062601 (2018) https://doi.org/10.1116/1.5037740

Abstract

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Spintronics and Magnetic Devices

Effect of magnetic field directionality on discharging characteristics of Hall effect thruster with azimuthal diversion rail

In Special Collection: Special Topic Collection: Advanced Nano, and Metamaterials in Space Propulsion

Yongjie Ding; Hongbo Su; Lei Wang; Hong Li; Liqiu Wei; Boyang Jia; Hezhi Sun; Peng Li; Daren Yu

J. Vac. Sci. Technol. B 36, 062801 (2018) https://doi.org/10.1116/1.5037215

Abstract

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Measurement and Characterization

Interaction of hydrogen with hafnium dioxide grown on silicon dioxide by the atomic layer deposition technique

In Special Collection: Conference Collection: 20th Workshop on Dielectrics in Microelectronics

Vladimir Kolkovsky; Sebastian Scholz; Valery Kolkovsky; Jan-Uwe Schmidt; Rene Heller

J. Vac. Sci. Technol. B 36, 062901 (2018) https://doi.org/10.1116/1.5045634

Abstract

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Tutorial on interpreting x-ray photoelectron spectroscopy survey spectra: Questions and answers on spectra from the atomic layer deposition of Al₂O₃ on silicon

Dhruv Shah; Dhananjay I. Patel; Tuhin Roychowdhury; G. Bruce Rayner; Noel O’Toole; Donald R. Baer; Matthew R. Linford

J. Vac. Sci. Technol. B 36, 062902 (2018) https://doi.org/10.1116/1.5043297

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Reactivity studies and structural properties of Al on compound semiconductor surfaces

Wendy L. Sarney; Stefan P. Svensson; Kaushini S. Wickramasinghe; Joseph Yuan; Javad Shabani

J. Vac. Sci. Technol. B 36, 062903 (2018) https://doi.org/10.1116/1.5053987

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Structural characterization of tantalum nitride films as wet etch stop layer in advanced multiwork function metal gate MOSFETs

Petra Mennell; Hamed Parvaneh; Zeynel Bayindir; Dong Hun Kang; Frieder Baumann; Anita Madan; Abner Bello; Ashawaraya Shalini; Mark Klare

J. Vac. Sci. Technol. B 36, 062904 (2018) https://doi.org/10.1116/1.5044633

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Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (62nd EIPBN 2018)

EIPBN Review Articles

Review Article: Review of electrohydrodynamical ion sources and their applications to focused ion beam technology

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Jacques Gierak; Paul Mazarov; Lars Bruchhaus; Ralf Jede; Lothar Bischoff

J. Vac. Sci. Technol. B 36, 06J101 (2018) https://doi.org/10.1116/1.5047150

Abstract

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Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Ivo W. Rangelow; Marcus Kaestner; Tzvetan Ivanov; Ahmad Ahmad; Steve Lenk; Claudia Lenk; Elshad Guliyev; Alexander Reum; Martin Hofmann; Christoph Reuter; Mathias Holz

J. Vac. Sci. Technol. B 36, 06J102 (2018) https://doi.org/10.1116/1.5048524

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Advanced Lithography

Improving the resolution and throughput of achromatic Talbot lithography

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Dimitrios Kazazis; Li-Ting Tseng; Yasin Ekinci

J. Vac. Sci. Technol. B 36, 06J501 (2018) https://doi.org/10.1116/1.5048506

Abstract

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Optimized structure of standard sample with programed defects for pattern inspection using electron beams

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Susumu Iida; Takayuki Uchiyama

J. Vac. Sci. Technol. B 36, 06J502 (2018) https://doi.org/10.1116/1.5048047

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Unbiased roughness measurements: Subtracting out SEM effects, part 2

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Gian F. Lorusso; Vito Rutigliani; Frieda Van Roey; Chris A. Mack

J. Vac. Sci. Technol. B 36, 06J503 (2018) https://doi.org/10.1116/1.5046477

Abstract

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Progress in metal organic cluster EUV photoresists

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Kazunori Sakai; Hong Xu; Vasiliki Kosma; Emmanuel P. Giannelis; Christopher K. Ober

J. Vac. Sci. Technol. B 36, 06J504 (2018) https://doi.org/10.1116/1.5050942

Abstract

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Biomedical Devices

Investigating the interplay of lateral and height dimensions influencing neuronal processes on nanogrooves

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Alex J. Bastiaens; Sijia Xie; Regina Luttge

J. Vac. Sci. Technol. B 36, 06J801 (2018) https://doi.org/10.1116/1.5048069

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Charged Particle Optics

Brightness measurements of the nano-aperture ion source

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Leon van Kouwen; Pieter Kruit

J. Vac. Sci. Technol. B 36, 06J901 (2018) https://doi.org/10.1116/1.5048054

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Variations of the field of view depending on the Si deflector shape in a microcolumn

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Hyung Woo Kim; Young Bok Lee; Dae-Wook Kim; Seungjoon Ahn; Tae Sik Oh; Ho Seob Kim; Young Chul Kim

J. Vac. Sci. Technol. B 36, 06J902 (2018) https://doi.org/10.1116/1.5048128

Abstract

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E Beam Lithography

Fabrication of astronomical x-ray reflection gratings using thermally activated selective topography equilibration

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Jake A. McCoy; Randall L. McEntaffer; Chad M. Eichfeld

J. Vac. Sci. Technol. B 36, 06JA01 (2018) https://doi.org/10.1116/1.5048197

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Statistical comparison of field height correction by Z-stage movement versus height-correction hardware in a modern electron-beam lithography tool

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Michael P. Young

J. Vac. Sci. Technol. B 36, 06JA02 (2018) https://doi.org/10.1116/1.5048117

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Effects of lithographic parameters in massively parallel electron-beam systems

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Soomin Moon; Soo-Young Lee; Jin Choi; Seom-Beom Kim; Chan-Uk Jeon

J. Vac. Sci. Technol. B 36, 06JA03 (2018) https://doi.org/10.1116/1.5048084

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Stochastic simulation of pattern formation in electron beam lithography

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Masaaki Yasuda; Masanori Koyama; Masamitsu Shirai; Hiroaki Kawata; Yoshihiko Hirai

J. Vac. Sci. Technol. B 36, 06JA04 (2018) https://doi.org/10.1116/1.5049757

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On the trends and application of pattern density dependent isofocal dose of positive resists for 100 keV electron beam lithography

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Gerald G. Lopez; Glen de Villafranca; Mohsen Azadi; Meredith G. Metzler; Kevin Lister; Michael Labella; Chad Eichfeld; Nikola Belic; Ulrich Hofmann

J. Vac. Sci. Technol. B 36, 06JA05 (2018) https://doi.org/10.1116/1.5048206

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CHORUS

Designing an anisotropic noise filter for measuring critical dimension and line edge roughness from scanning electron microscope images

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Hyesung Ji; Soo-Young Lee

J. Vac. Sci. Technol. B 36, 06JA06 (2018) https://doi.org/10.1116/1.5048077

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Imaging and Characterization

In situ femtosecond pulse laser ablation for large volume 3D analysis in scanning electron microscope systems

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Steven Jeffrey Randolph; Jorge Filevich; Aurelien Botman; Renae Gannon; Chad Rue; Marcus Straw

J. Vac. Sci. Technol. B 36, 06JB01 (2018) https://doi.org/10.1116/1.5047806

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Materials for Advanced Patterning

Influence of tetramethylammonium hydroxide on niobium nitride thin films

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Emily Toomey; Marco Colangelo; Navid Abedzadeh; Karl K. Berggren

J. Vac. Sci. Technol. B 36, 06JC01 (2018) https://doi.org/10.1116/1.5047427

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CHORUS

Phenol-functionalized polymerization control additives for negative tone epoxide crosslinking molecular resists

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Hannah Narcross; Brandon L. Sharp; Peter J. Ludovice; Laren M. Tolbert; Clifford L. Henderson

J. Vac. Sci. Technol. B 36, 06JC02 (2018) https://doi.org/10.1116/1.5057442

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CHORUS

Nanoimprint

Fabrication and replication of re-entrant structures by nanoimprint lithography methods

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Nikolaos Kehagias; Achille Francone; Markus Guttmann; Frank Winkler; Ariadna Fernández; Clivia M. Sotomayor Torres

J. Vac. Sci. Technol. B 36, 06JF01 (2018) https://doi.org/10.1116/1.5048241

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Visualization of organic/inorganic hybridization of UV-cured films with trimethylaluminum by scanning transmission electron microscopy and energy dispersive x-ray spectroscopy

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Masaru Nakagawa; Takuya Uehara; Yuki Ozaki; Takahiro Nakamura; Shunya Ito

J. Vac. Sci. Technol. B 36, 06JF02 (2018) https://doi.org/10.1116/1.5047822

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Nanophotonics

Moth-eye antireflection nanostructure on glass for CubeSats

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Yaoze Liu; Mohammad Soltani; Ripon Kumar Dey; Bo Cui; Regina Lee; Hugh Podmore

J. Vac. Sci. Technol. B 36, 06JG01 (2018) https://doi.org/10.1116/1.5050986

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NEMS/MEMS

Electrospun charge transport structures for hybrid perovskite solar cells

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

John P. Murphy; Molly C. Brockway; Jessica M. Andriolo; Jack L. Skinner

J. Vac. Sci. Technol. B 36, 06JH01 (2018) https://doi.org/10.1116/1.5049434

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Quantum Electronics

Preparation of Ga-terminated negative electron affinity-GaAs (100) surface by HCl-isopropanol treatment for nanoanalysis by scanning tunneling microscopy

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Ryutaro Fukuzoe; Masayuki Hirao; Daichi Yamanaka; Youta Iwabuchi; Hokuto Iijima; Takashi Meguro

J. Vac. Sci. Technol. B 36, 06JK01 (2018) https://doi.org/10.1116/1.5048060

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Analysis of negative electron affinity InGaN photocathode by temperature-programed desorption method

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Masahiro Kashima; Daiki Sato; Atsushi Koizumi; Tomohiro Nishitani; Yoshio Honda; Hiroshi Amano; Hokuto Iijima; Takashi Meguro

J. Vac. Sci. Technol. B 36, 06JK02 (2018) https://doi.org/10.1116/1.5048061

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CHORUS

Scanning Probe Lithography

Theoretical investigation of the enhancement factor for a single field emitter in close proximity to the counter electrode

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Steve Lenk; Claudia Lenk; Ivo W. Rangelow

J. Vac. Sci. Technol. B 36, 06JL01 (2018) https://doi.org/10.1116/1.5046940

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Field emission from diamond nanotips for scanning probe lithography

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Martin Hofmann; Claudia Lenk; Tzvetan Ivanov; Ivo W. Rangelow; Alexander Reum; Ahmad Ahmad; Mathias Holz; Eberhard Manske

J. Vac. Sci. Technol. B 36, 06JL02 (2018) https://doi.org/10.1116/1.5048193

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Experimental study of field emission from ultrasharp silicon, diamond, GaN, and tungsten tips in close proximity to the counter electrode

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Claudia Lenk; Steve Lenk; Mathias Holz; Elshad Guliyev; Martin Hofmann; Tzvetan Ivanov; Ivo W. Rangelow; Mahmoud Behzadirad; Ashwin K. Rishinaramangalam; Daniel Feezell; Tito Busani

J. Vac. Sci. Technol. B 36, 06JL03 (2018) https://doi.org/10.1116/1.5048518

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Sharp GaN nanowires used as field emitter on active cantilevers for scanning probe lithography

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Claudia Lenk; Martin Hofmann; Tzvetan Ivanov; Ahmad Ahmad; Steve Lenk; Ivo W. Rangelow; Alexander Reum; Christoph Reuter; Mathias Holz; Mahmoud Behzadirad; Ashwin K. Rishinaramangalam; Daniel Feezell; Tito Busani

J. Vac. Sci. Technol. B 36, 06JL04 (2018) https://doi.org/10.1116/1.5048190

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Highly parallel scanning tunneling microscope based hydrogen depassivation lithography

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

John N. Randall; James H. G. Owen; Joseph Lake; Rahul Saini; Ehud Fuchs; Mohammad Mahdavi; S. O. Reza Moheimani; Benjamin Carrion Schaefer

J. Vac. Sci. Technol. B 36, 06JL05 (2018) https://doi.org/10.1116/1.5047939

Abstract

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CHORUS

Field-emission scanning probe lithography tool for 150 mm wafer

In Special Collection: Papers from the 62nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Mathias Holz; Elshad Guliyev; Ahmad Ahmad; Tzvetan Ivanov; Alexander Reum; Martin Hofmann; Claudia Lenk; Marcus Kaestner; Christoph Reuter; Steve Lenk; Ivo W. Rangelow; Nikolay Nikolov

J. Vac. Sci. Technol. B 36, 06JL06 (2018) https://doi.org/10.1116/1.5048357

Abstract

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