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Kinetically controlled dewetting of thin GaAs cap from an ErAs/GaAs nanoparticle composite layer
Temperature dependence of photoinduced hydrogen production and simultaneous separation in TiO2 nanotubes/palladium bilayer membrane
Letters
Enhanced temperature and light stability of amorphous indium-gallium-zinc oxide thin film transistors by interface nitrogen doping
J. Vac. Sci. Technol. B 36, 040601 (2018)
https://doi.org/10.1116/1.5031471
Synchrotron radiation study of metallic titanium deposited on dielectric substrates
J. Vac. Sci. Technol. B 36, 040602 (2018)
https://doi.org/10.1116/1.5036943
Electronic & Optoelectronic Materials, Devices & Processing
Dry etch damage in n-type crystalline silicon wafers assessed by deep-level transient spectroscopy and minority carrier lifetime
J. Vac. Sci. Technol. B 36, 041201 (2018)
https://doi.org/10.1116/1.5026529
High temperature capacitors using AlN grown by MBE as the dielectric
J. Vac. Sci. Technol. B 36, 041202 (2018)
https://doi.org/10.1116/1.5033931
Effect of alpha-particle irradiation dose on SiNx/AlGaN/GaN metal–insulator semiconductor high electron mobility transistors
J. Vac. Sci. Technol. B 36, 041203 (2018)
https://doi.org/10.1116/1.5042261
Growth of well-oriented InN nanodots by magnetron sputtering with varying sputtering temperature
J. Vac. Sci. Technol. B 36, 041204 (2018)
https://doi.org/10.1116/1.5028165
Lithography
Near-infrared light absorption enhancement in Ge nanostructures prepared by nanosphere lithography
J. Vac. Sci. Technol. B 36, 041601 (2018)
https://doi.org/10.1116/1.5029435
Nanometer Science & Technology
Kinetically controlled dewetting of thin GaAs cap from an ErAs/GaAs nanoparticle composite layer
J. Vac. Sci. Technol. B 36, 041801 (2018)
https://doi.org/10.1116/1.5030864
Energy dissipation contributed on the machined depth via dynamic plowing lithography of atomic force microscopy
J. Vac. Sci. Technol. B 36, 041802 (2018)
https://doi.org/10.1116/1.5034168
Block copolymer selectivity: A new dry etch approach for cylindrical applications
J. Vac. Sci. Technol. B 36, 041803 (2018)
https://doi.org/10.1116/1.5034133
Microelectronic & Nanoelectronic Devices
Degradation of AlGaN/GaN metal–insulator–semiconductor high electron mobility transistors under off-state electrical stress
J. Vac. Sci. Technol. B 36, 042201 (2018)
https://doi.org/10.1116/1.5023844
Plasmonics
Fabrication of long range surface plasmon waveguide biosensors in a low-index fluoropolymer
J. Vac. Sci. Technol. B 36, 042601 (2018)
https://doi.org/10.1116/1.5027859
Measurement and Characterization
Germanium out diffusion in SiGe-based HfO2 gate stacks
J. Vac. Sci. Technol. B 36, 042902 (2018)
https://doi.org/10.1116/1.5027072
In situ voltage-application system for active voltage contrast imaging in helium ion microscope
J. Vac. Sci. Technol. B 36, 042903 (2018)
https://doi.org/10.1116/1.5031086
Perspectives
Beyond equilibrium thermodynamics in the low temperature plasma processor
J. Vac. Sci. Technol. B 36, 048501 (2018)
https://doi.org/10.1116/1.5022470
Papers from the International Conference on Thin Films 2017
Preparation and characterization of Al2O3 film deposited by RF sputtering and plasma enhanced atomic layer deposition
In Special Collection:
Papers from the International Conference on Thin Films 2017
J. Vac. Sci. Technol. B 36, 04G101 (2018)
https://doi.org/10.1116/1.5023591
Influence of growth temperature on structural and optical properties of laser MBE grown epitaxial thin GaN films on a-plane sapphire
In Special Collection:
Papers from the International Conference on Thin Films 2017
J. Vac. Sci. Technol. B 36, 04G102 (2018)
https://doi.org/10.1116/1.5025126
Heteroepitaxial growth of self-assembled BaTiO3-Fe2O3 nanostructures
In Special Collection:
Papers from the International Conference on Thin Films 2017
J. Vac. Sci. Technol. B 36, 04G103 (2018)
https://doi.org/10.1116/1.5026069
Highly efficient fluorescence quenching with chemically exfoliated reduced graphene oxide
In Special Collection:
Papers from the International Conference on Thin Films 2017
J. Vac. Sci. Technol. B 36, 04G104 (2018)
https://doi.org/10.1116/1.5026170
Numerical simulations of perovskite thin-film solar cells using a CdS hole blocking layer
In Special Collection:
Papers from the International Conference on Thin Films 2017
J. Vac. Sci. Technol. B 36, 04G105 (2018)
https://doi.org/10.1116/1.5026163
Papers from the 45th Conference on the Physics and Chemistry of Surfaces and Interfaces
Temperature dependence of photoinduced hydrogen production and simultaneous separation in TiO2 nanotubes/palladium bilayer membrane
In Special Collection:
Papers from the 45th Conference on the Physics and Chemistry of Surfaces and Interfaces
J. Vac. Sci. Technol. B 36, 04H101 (2018)
https://doi.org/10.1116/1.5029281
Real-space pseudopotential calculations for simulating noncontact atomic force microscopy images
In Special Collection:
Papers from the 45th Conference on the Physics and Chemistry of Surfaces and Interfaces
J. Vac. Sci. Technol. B 36, 04H102 (2018)
https://doi.org/10.1116/1.5029827
Influence of anisotropic Si(111)-(4 × 1)-In surface on growth of nanoscale In islands
In Special Collection:
Papers from the 45th Conference on the Physics and Chemistry of Surfaces and Interfaces
J. Vac. Sci. Technol. B 36, 04H103 (2018)
https://doi.org/10.1116/1.5031228
Dark and photo-induced charge transport across molecular spacers
In Special Collection:
Papers from the 45th Conference on the Physics and Chemistry of Surfaces and Interfaces
J. Vac. Sci. Technol. B 36, 04H104 (2018)
https://doi.org/10.1116/1.5037219
Papers from the 2nd International Symposium of the Vacuum Society of the Philippines
Effects of RF plasma modification on the thermal and mechanical properties of electrospun chitosan/poly(vinyl alcohol) nanofiber mats
J. Vac. Sci. Technol. B 36, 04I101 (2018)
https://doi.org/10.1116/1.5030507
Plasma polymerization of styrene using an argon-fed atmospheric pressure plasma jet
J. Vac. Sci. Technol. B 36, 04I102 (2018)
https://doi.org/10.1116/1.5030840
