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Letters

Employing refractive beam shaping in a Lloyd's interference lithography system for uniform periodic nanostructure formation

Yung-Jr Hung; Han-Jung Chang; Ping-Chien Chang; Jia-Jin Lin; Tzu-Chieh Kao

J. Vac. Sci. Technol. B 35, 030601 (2017) https://doi.org/10.1116/1.4980134

Abstract

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Low temperature carrier transport mechanism in high-mobility zinc oxynitride thin-film transistors

Hee-Joong Kim; Sae-Young Hong; Dae-Hwan Kim; Hwan-Seok Jeong; Hyuck-In Kwon

J. Vac. Sci. Technol. B 35, 030602 (2017) https://doi.org/10.1116/1.4983528

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Review Articles

Review Article: Overview of lanthanide pnictide films and nanoparticles epitaxially incorporated into III-V semiconductors

Cory C. Bomberger; Matthew R. Lewis; Laura R. Vanderhoef; Matthew F. Doty; Joshua M. O. Zide

J. Vac. Sci. Technol. B 35, 030801 (2017) https://doi.org/10.1116/1.4979347

Abstract

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CHORUS

Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams

Michael G. Stanford; Brett B. Lewis; Kyle Mahady; Jason D. Fowlkes; Philip D. Rack

J. Vac. Sci. Technol. B 35, 030802 (2017) https://doi.org/10.1116/1.4981016

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CHORUS

Review Article: Progress in fabrication of transition metal dichalcogenides heterostructure systems

Rui Dong; Irma Kuljanishvili

J. Vac. Sci. Technol. B 35, 030803 (2017) https://doi.org/10.1116/1.4982736

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Electronic & Optoelectronic Materials, Devices & Processing

Incorporation of dopants in epitaxial SiC layers grown with fluorinated CVD chemistry

Pontus Stenberg; Erik Janzén; Henrik Pedersen

J. Vac. Sci. Technol. B 35, 031201 (2017) https://doi.org/10.1116/1.4979279

Abstract

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Planar nanowires fabricated by thermal gratings on the GaAs(001) surface

Anahita Haghizadeh; Haeyeon Yang

J. Vac. Sci. Technol. B 35, 031202 (2017) https://doi.org/10.1116/1.4979330

Abstract

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Investigation on deep level defects in polycrystalline ZnO thin films

Christos Tsiarapas; Dimitra Girginoudi; Evangelos Ioannou Dimitriadis; Nikolaos Georgoulas

J. Vac. Sci. Technol. B 35, 031203 (2017) https://doi.org/10.1116/1.4979691

Abstract

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Study of tungsten films deposited by DC sputtering dedicated to integrated heaters

Nathalie Verbrugghe; Didier Fasquelle; Benoît Duponchel; Stéphanie Députier

J. Vac. Sci. Technol. B 35, 031204 (2017) https://doi.org/10.1116/1.4981786

Abstract

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Inductively coupled plasma etching of bulk, single-crystal Ga₂O₃

Jiancheng Yang; Shihyun Ahn; Fan Ren; Stephen Pearton; Rohit Khanna; Kristen Bevlin; Dwarakanath Geerpuram; Akito Kuramata

J. Vac. Sci. Technol. B 35, 031205 (2017) https://doi.org/10.1116/1.4982714

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CHORUS

High quality semicontinuous deep reactive ion etching of silicon for the creation of x-ray lenses

Karola Richter; André Mocker; Johann-Wolfgang Bartha

J. Vac. Sci. Technol. B 35, 031206 (2017) https://doi.org/10.1116/1.4982712

Abstract

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Preparation and effects of O₂ flow on the electrical characteristics of Li doped MgZnO thin film transistors

Longjie Tian; Song Gao; Yaobin Ma; Qi Wang; Dongzhan Zhou; Ran Li; Xiqing Zhang; Yongsheng Wang

J. Vac. Sci. Technol. B 35, 031207 (2017) https://doi.org/10.1116/1.4983086

Abstract

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1.5 MeV electron irradiation damage in β-Ga₂O₃ vertical rectifiers

Jiancheng Yang; Fan Ren; Stephen J. Pearton; Gwangseok Yang; Jihyun Kim; Akito Kuramata

J. Vac. Sci. Technol. B 35, 031208 (2017) https://doi.org/10.1116/1.4983377

Abstract

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CHORUS

Optimized process for fabrication of free-standing silicon nanophotonic devices

Paul Seidler

J. Vac. Sci. Technol. B 35, 031209 (2017) https://doi.org/10.1116/1.4983173

Abstract

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Energy Conversion and Storage Devices

Structural and optical properties of alumina passivated amorphous Si slanted columnar thin films during electrochemical Li-ion intercalation and deintercalation observed by in situ generalized spectroscopic ellipsometry

Derek Sekora; Rebecca Y. Lai; Daniel Schmidt; Mathias Schubert; Eva Schubert

J. Vac. Sci. Technol. B 35, 031401 (2017) https://doi.org/10.1116/1.4982880

Abstract

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CHORUS

Lithography

Exploring the fabrication of Co and Mn nanostructures with focused soft x-ray beam induced deposition

Fan Tu; Andreas Späth; Martin Drost; Florian Vollnhals; Sandra Krick Calderon; Rainer H. Fink; Hubertus Marbach

J. Vac. Sci. Technol. B 35, 031601 (2017) https://doi.org/10.1116/1.4979274

Abstract

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Effect of resin accumulation on filling process in roll-to-roll UV imprint lithography

Youquan Zhou; Mujun Li; Lianguan Shen; Huichun Ye; Jianping Wang; Shengzhou Huang

J. Vac. Sci. Technol. B 35, 031602 (2017) https://doi.org/10.1116/1.4982719

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Nanometer Science & Technology

SiC emitters for nanoscale vacuum electronics: A systematic study of cathode–anode gap by focused ion beam etching

Meng Liu; Tie Li; Yuelin Wang

J. Vac. Sci. Technol. B 35, 031801 (2017) https://doi.org/10.1116/1.4979049

Abstract

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ToF-SIMS quantification of bromine based insecticide in mosquito netting

Chuanzhen Zhou; Fred A. Stevie; Stephen C. Smith

J. Vac. Sci. Technol. B 35, 031802 (2017) https://doi.org/10.1116/1.4983098

Abstract

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Microelectronic & Nanoelectronic Devices

Nanodiamond vacuum field emission microtriode

Shao-Hua Hsu; Weng Poo Kang; Supil Raina; Mick Howell; Jin-Hua Huang

J. Vac. Sci. Technol. B 35, 032201 (2017) https://doi.org/10.1116/1.4981018

Abstract

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Current conduction mechanisms through thin tunnel oxide during erase operation of flash electrically erasable programmable read-only memory devices

Piyas Samanta

J. Vac. Sci. Technol. B 35, 032202 (2017) https://doi.org/10.1116/1.4981134

Abstract

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Voltage-amplitude-controlled complementary and self-compliance bipolar resistive switching of slender filaments in Pt/HfO₂/HfO_x/Pt memory devices

Mei Yang; Hong Wang; Xiaohua Ma; Haixia Gao; Yue Hao

J. Vac. Sci. Technol. B 35, 032203 (2017) https://doi.org/10.1116/1.4983193

Abstract

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Organic Electronics and Optoelectronics

Simulation and characterization of short-channel organic thin-film transistors fabricated using ink-jet printing and an imprint process

Juhyun Bae; Kyohyeok Kim; Namyong Kwon; Ilsub Chung

J. Vac. Sci. Technol. B 35, 032401 (2017) https://doi.org/10.1116/1.4981930

Abstract

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Shop Notes

Circuit design considerations for current preamplifiers for scanning tunneling microscopy

Jacob P. Petersen; S. Alex Kandel

J. Vac. Sci. Technol. B 35, 033201 (2017) https://doi.org/10.1116/1.4981017

Abstract

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CHORUS

Handling, transfer, storage, and shipping of commercial thin film hydride disk target samples

James L. Provo

J. Vac. Sci. Technol. B 35, 033202 (2017) https://doi.org/10.1116/1.4983291

Abstract

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Special Issue: AVS 63

Interaction study of nitrogen ion beam with silicon

Marek E. Schmidt; Xiaobin Zhang; Yoshifumi Oshima; Le The Anh; Anto Yasaka; Teruhisa Kanzaki; Manoharan Muruganathan; Masashi Akabori; Tatsuya Shimoda; Hiroshi Mizuta

J. Vac. Sci. Technol. B 35, 03D101 (2017) https://doi.org/10.1116/1.4977566

Abstract

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Method for patterning poly(acrylic acid) sacrificial layers for use in solder-based self-assembly

Connor S. Smith; Ying Feng; Susan L. Burkett

J. Vac. Sci. Technol. B 35, 03D102 (2017) https://doi.org/10.1116/1.4979004

Abstract

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Probing kinetically excited hot electrons using Schottky diodes

Dhruva D. Kulkarni; Daniel A. Field; Daniel B. Cutshall; James E. Harriss; William R. Harrell; Chad E. Sosolik

J. Vac. Sci. Technol. B 35, 03D103 (2017) https://doi.org/10.1116/1.4979003

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Study of device instability of bottom-gate ZnO transistors with sol–gel derived channel layers

Kosala Yapabandara; Vahid Mirkhani; Muhammad Shehzad Sultan; Burcu Ozden; Min P. Khanal; Minseo Park; Shiqiang Wang; Michael C. Hamilton; Yoonsung Chung; Dong-Joo Kim; Mobbassar Hassan Sk

J. Vac. Sci. Technol. B 35, 03D104 (2017) https://doi.org/10.1116/1.4979321

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X-ray analysis of metamorphic In_xGa_1-xAs/In_yGa_1-yAs superlattices on GaAs (001) substrates

Fahad A. Althowibi; John E. Ayers

J. Vac. Sci. Technol. B 35, 03D105 (2017) https://doi.org/10.1116/1.4979323

Abstract

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Polydimethylsiloxane and polyisoprene-based graphene composites for strain-sensing

Jorge A. Catalán; Anupama B. Kaul

J. Vac. Sci. Technol. B 35, 03D106 (2017) https://doi.org/10.1116/1.4979603

Abstract

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Electrical and optical characteristics of gamma-ray irradiated AlGaN/GaN high electron mobility transistors

Min P. Khanal; Burcu Ozden; Kyunghyuk Kim; Sunil Uprety; Vahid Mirkhani; Kosala Yapabandara; Ayayi C. Ahyi; Minseo Park

J. Vac. Sci. Technol. B 35, 03D107 (2017) https://doi.org/10.1116/1.4979976

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Simulated x-ray diffraction from pseudomorphic GaAs/In_0.3Ga_0.7As superlattice high electron mobility transistor heterostructures on GaAs (001) substrates

Fahad A. Althowibi; John E. Ayers

J. Vac. Sci. Technol. B 35, 03D108 (2017) https://doi.org/10.1116/1.4981015

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Periodically pulsed laser-assisted tunneling may generate terahertz radiation

Mark J. Hagmann; Dmtrij G. Coombs; Dmitry A. Yarotski

J. Vac. Sci. Technol. B 35, 03D109 (2017) https://doi.org/10.1116/1.4979549

Abstract

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Enhancing the electrical conductivity of vacuum-ultraviolet-reduced graphene oxide by multilayered stacking

Yudi Tu; Toru Utsunomiya; Takashi Ichii; Hiroyuki Sugimura

J. Vac. Sci. Technol. B 35, 03D110 (2017) https://doi.org/10.1116/1.4982722

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Investigation of structural morphology and electrical properties of graphene-C₆₀ hybrids

Srishti Chugh; Chandan Biswas; Luis Echegoyen; Anupama B. Kaul

J. Vac. Sci. Technol. B 35, 03D111 (2017) https://doi.org/10.1116/1.4982881

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CHORUS

Inkjet printing of liquid-exfoliated, highly conducting graphene/poly(3,4 ethylenedioxythiophene):poly(styrenesulfonate) nanosheets for organic electronics

Jay A. Desai; Chandan Biswas; Anupama B. Kaul

J. Vac. Sci. Technol. B 35, 03D112 (2017) https://doi.org/10.1116/1.4982723

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Electrical behavior of β-Ga₂O₃ Schottky diodes with different Schottky metals

Yao Yao; Raveena Gangireddy; Jaewoo Kim; Kalyan Kumar Das; Robert F. Davis; Lisa M. Porter

J. Vac. Sci. Technol. B 35, 03D113 (2017) https://doi.org/10.1116/1.4980042

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Issues

Letters

Review Articles

Electronic & Optoelectronic Materials, Devices & Processing

Energy Conversion and Storage Devices

Lithography

Nanometer Science & Technology

Microelectronic & Nanoelectronic Devices

Organic Electronics and Optoelectronics

Shop Notes

Special Issue: AVS 63

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