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Oxidation and oxidative vapor-phase etching of few-layer MoS2
Top-down technique for scaling to nano in silicon MEMS
Electrical and physical characteristics of metal–oxide–semiconductor structured nonvolatile memory with HfLaxTiyOz charge trapping layers
Engineering carrier lifetimes in type-II In(Ga)Sb/InAs mid-IR emitters
Control of unintentional oxygen incorporation in GaN
Controlling color emission of InGaN/AlGaN nanowire light-emitting diodes grown by molecular beam epitaxy
Electrical properties of Cs3Sb photocathode emitters in panel device applications
Issues
March 2017
ISSN 2166-2746
EISSN 2166-2754
In this Issue
Letters
Structure compensation and illumination uniformity improvement through inkjet printing in organic light-emitting diode subpixels
J. Vac. Sci. Technol. B 35, 020601 (2017)
https://doi.org/10.1116/1.4974932
Formation of nickel germanides from Ni layers with thickness below 10 nm
Lukas Jablonka; Tomas Kubart; Daniel Primetzhofer; Ahmad Abedin; Per-Erik Hellström; Mikael Östling; Jean Jordan-Sweet; Christian Lavoie; Shi-Li Zhang; Zhen Zhang
J. Vac. Sci. Technol. B 35, 020602 (2017)
https://doi.org/10.1116/1.4975152
Fabrication of radiation hardened SOI with embedded Si nanocrystal by ion-cut technique
J. Vac. Sci. Technol. B 35, 020603 (2017)
https://doi.org/10.1116/1.4977577
Electronic & Optoelectronic Materials, Devices & Processing
Advanced single precursor based pSiCOH k = 2.4 for ULSI interconnects
Deepika Priyadarshini; Son V. Nguyen; Hosadurga Shobha; Eric Liniger; James H.-C. Chen; Huai Huang; Stephan A. Cohen; Alfred Grill
J. Vac. Sci. Technol. B 35, 021201 (2017)
https://doi.org/10.1116/1.4974317
Reduction of persistent photoconduction in Ge-Ga-In-O semiconductors by the incorporation of nitrogen
J. Vac. Sci. Technol. B 35, 021202 (2017)
https://doi.org/10.1116/1.4974925
Oxidation and oxidative vapor-phase etching of few-layer MoS2
J. Vac. Sci. Technol. B 35, 021203 (2017)
https://doi.org/10.1116/1.4975144
Cryogenic etching of porous low-k dielectrics in CF3Br and CF4 plasmas
Askar Rezvanov; Andrey V. Miakonkikh; Alexey S. Vishnevskiy; Konstantin V. Rudenko; Mikhail R. Baklanov
J. Vac. Sci. Technol. B 35, 021204 (2017)
https://doi.org/10.1116/1.4975646
Properties of pseudomorphic and relaxed germanium1−xtinx alloys (x < 0.185) grown by MBE
J. Vac. Sci. Technol. B 35, 021205 (2017)
https://doi.org/10.1116/1.4975149
Sub-10 nm plasma nanopatterning of InGaAs with nearly vertical and smooth sidewalls for advanced n-fin field effect transistors on silicon
Fares Chouchane; Bassem Salem; Guillaume Gay; Mickael Martin; Erwine Pargon; Franck Bassani; Sandrine Arnaud; Sylvain David; Reynald Alcotte; Sébastien Labau; Jérémy Moeyart; Thierry Baron
J. Vac. Sci. Technol. B 35, 021206 (2017)
https://doi.org/10.1116/1.4975796
Electronic field effect tuning of the electronic properties of fluorinated epitaxial graphene
J. Vac. Sci. Technol. B 35, 021207 (2017)
https://doi.org/10.1116/1.4975801
Investigation of thin InN/GaN heterostructures with in situ SiNx dielectric grown by plasma-assisted molecular beam epitaxy
Christos Zervos; Adam Adikimenakis; Petros Beleniotis; Athanasios Kostopoulos; Maria Androulidaki; Katerina Tsagaraki; Maria Kayambaki; George Konstantinidis; Alexandros Georgakilas
J. Vac. Sci. Technol. B 35, 021210 (2017)
https://doi.org/10.1116/1.4977606
Pore surface grafting of porous low-k dielectrics by selective polymers
Askar Rezvanov; Liping Zhang; Mitsuhiro Watanabe; Mikhail B. Krishtab; Lin Zhang; Nigel Hacker; Patrick Verdonck; Silvia Armini; Jean-François G. N. G. de Marneffe
J. Vac. Sci. Technol. B 35, 021211 (2017)
https://doi.org/10.1116/1.4978046
Modification of Schottky barrier properties of Al/p-type Si Schottky rectifiers with graphene-oxide-doped poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) interlayer
Vallivedu Janardhanam; Inapagundla Jyothi; Shim-Hoon Yuk; Chel-Jong Choi; Hyung-Joong Yun; Jonghan Won; Won-Gi Hong; Sung-Nam Lee; Varra Rajagopal Reddy
J. Vac. Sci. Technol. B 35, 021212 (2017)
https://doi.org/10.1116/1.4978511
Lithography
Influence of symmetry and duty cycles on the pattern generation in achromatic Talbot lithography
Shumin Yang; Jun Zhao; Liansheng Wang; Fangyuan Zhu; Chaofan Xue; Haigang Liu; Huazheng Sang; Yanqing Wu; Renzhong Tai
J. Vac. Sci. Technol. B 35, 021601 (2017)
https://doi.org/10.1116/1.4974930
Conformal reversal imprint lithography for polymer nanostructuring over large curved geometries
J. Vac. Sci. Technol. B 35, 021602 (2017)
https://doi.org/10.1116/1.4974927
Process development for high resolution hydrogen silsesquioxane patterning using a commercial scanner for extreme ultraviolet lithography
J. Vac. Sci. Technol. B 35, 021603 (2017)
https://doi.org/10.1116/1.4975797
Nanometer Science & Technology
Fabrication of germanium nanodisk array by neutral beam etching with protein as etching mask
Takuya Fujii; Takeru Okada; Taiga Isoda; Mohd Erman Syazwan; Mohamed-Tahar Chentir; Kohei M. Itoh; Ichiro Yamashita; Seiji Samukawa
J. Vac. Sci. Technol. B 35, 021801 (2017)
https://doi.org/10.1116/1.4976524
Gas-phase diagnostics during H2 and H2O plasma treatment of SnO2 nanomaterials: Implications for surface modification
J. Vac. Sci. Technol. B 35, 021802 (2017)
https://doi.org/10.1116/1.4976534
Sub-100 nm integrated ferroelectric tunnel junction devices using hydrogen silsesquioxane planarization
J. Vac. Sci. Technol. B 35, 021803 (2017)
https://doi.org/10.1116/1.4978519
MEMS & NEMS
Top-down technique for scaling to nano in silicon MEMS
Mustafa Yilmaz; Yasin Kilinc; Gokhan Nadar; Zuhal Tasdemir; Nicole Wollschläger; Werner Österle; Yusuf Leblebici; B. Erdem Alaca
J. Vac. Sci. Technol. B 35, 022001 (2017)
https://doi.org/10.1116/1.4978047
Microelectronic & Nanoelectronic Devices
Effect of growth conditions on interface stability and thermophysical properties of sputtered Cu films on Si with and without WTi barrier layers
Imane Souli; Velislava L. Terziyska; Jozef Keckes; Werner Robl; Johannes Zechner; Christian Mitterer
J. Vac. Sci. Technol. B 35, 022201 (2017)
https://doi.org/10.1116/1.4975805
Enhanced photocathode performance through optimization of film thickness and substrate
J. Vac. Sci. Technol. B 35, 022202 (2017)
https://doi.org/10.1116/1.4976527
Electrical and physical characteristics of metal–oxide–semiconductor structured nonvolatile memory with HfLaxTiyOz charge trapping layers
J. Vac. Sci. Technol. B 35, 022203 (2017)
https://doi.org/10.1116/1.4978048
Shop Notes
Economical rotatable holder for magnetotransport measurements
J. Vac. Sci. Technol. B 35, 023201 (2017)
https://doi.org/10.1116/1.4974488
Papers from the 32nd North American Conference on Molecular Beam Epitaxy
Engineering carrier lifetimes in type-II In(Ga)Sb/InAs mid-IR emitters
J. Vac. Sci. Technol. B 35, 02B101 (2017)
https://doi.org/10.1116/1.4972978
Temperature monitoring of narrow bandgap semiconductors
J. Vac. Sci. Technol. B 35, 02B102 (2017)
https://doi.org/10.1116/1.4975926
Growth of InGaAsP solar cells and their application to triple-junction top cells used in smart stack multijunction solar cells
Takeyoshi Sugaya; Yuki Nagato; Yoshinobu Okano; Ryuji Oshima; Takeshi Tayagaki; Kikuo Makita; Koji Matsubara
J. Vac. Sci. Technol. B 35, 02B103 (2017)
https://doi.org/10.1116/1.4975759
Control of unintentional oxygen incorporation in GaN
J. Vac. Sci. Technol. B 35, 02B104 (2017)
https://doi.org/10.1116/1.4975925
III-V semiconductor extended short-wave infrared detectors
Gregory R. Savich; Daniel E. Sidor; Xiaoyu Du; Gary W. Wicks; Mukul C. Debnath; Tetsuya D. Mishima; Michael B. Santos; Terry D. Golding; Manish Jain; Adam P. Craig; Andrew R. J. Marshall
J. Vac. Sci. Technol. B 35, 02B105 (2017)
https://doi.org/10.1116/1.4975340
Transport properties of Bi2(Se1−xTex)3 thin films grown by molecular beam epitaxy
J. Vac. Sci. Technol. B 35, 02B106 (2017)
https://doi.org/10.1116/1.4976622
On the study of antimony incorporation in InAs/InAsSb superlattices for infrared sensing
J. Vac. Sci. Technol. B 35, 02B107 (2017)
https://doi.org/10.1116/1.4977009
Controlling color emission of InGaN/AlGaN nanowire light-emitting diodes grown by molecular beam epitaxy
Moab R. Philip; Dipayan D. Choudhary; Mehrdad Djavid; Md Nasiruddin Bhuyian; James Piao; Thi T. Pham; Durgamadhab Misra; Hieu P. T. Nguyen
J. Vac. Sci. Technol. B 35, 02B108 (2017)
https://doi.org/10.1116/1.4977174
AlN/GaN/AlN resonant tunneling diodes grown by rf-plasma assisted molecular beam epitaxy on freestanding GaN
David F. Storm; Tyler A. Growden; Weidong Zhang; Elliott R. Brown; Neeraj Nepal; D. Scott Katzer; Matthew T. Hardy; Paul R. Berger; David J. Meyer
J. Vac. Sci. Technol. B 35, 02B110 (2017)
https://doi.org/10.1116/1.4977779
Mid-IR resonant cavity detectors
Trevor A. O'Loughlin; Gregory R. Savich; Daniel E. Sidor; Brendan T. Marozas; Terry D. Golding; Keith D. Jamison; Leif Fredin; Burt Fowler; Weerasinghe Priyantha; Gary W. Wicks
J. Vac. Sci. Technol. B 35, 02B111 (2017)
https://doi.org/10.1116/1.4977780
Threading dislocations in MBE grown AlInSb metamorphic buffers: Revealed and counted
J. Vac. Sci. Technol. B 35, 02B112 (2017)
https://doi.org/10.1116/1.4978025
High-resolution x-ray reflection Fourier analysis of metamorphic Si/SiGe quantum wells
J. Vac. Sci. Technol. B 35, 02B113 (2017)
https://doi.org/10.1116/1.4978595
In situ flashes of gallium technique for oxide-free epiready GaSb (100) surface
Sen Mathews; Theodore Schuler-Sandy; Jong Su Kim; Clark Kadlec; Alireza Kazemi; Vinita Dahiya; David A. Ramirez; Stephen A. Myers; Yuliya V. Kuznetsova; Sanjay Krishna
J. Vac. Sci. Technol. B 35, 02B114 (2017)
https://doi.org/10.1116/1.4978604
MBE growth techniques for InAs-based nBn IR detectors
Daniel E. Sidor; Gregory R. Savich; Brendan T. Marozas; Xiaoyu Du; Trevor A. O'Loughlin; Geoffrey D. Jenkins; William D. Hughes; Christian P. Morath; Vincent M. Cowan; Gary W. Wicks
J. Vac. Sci. Technol. B 35, 02B117 (2017)
https://doi.org/10.1116/1.4978389
Papers from the 32nd North American
MBE growth and digital etch of GaSb/InAs nanowires on Si for logic applications
Katherine Dropiewski; Vadim Tokranov; Michael Yakimov; Serge Oktyabrsky; Steven Bentley; Rohit Galatage
J. Vac. Sci. Technol. B 35, 02B115 (2017)
https://doi.org/10.1116/1.4978782
Articles
Growth of ordered and disordered ZnSnN2
Robert Allen Makin; Nancy Senabulya; James Mathis; N. Feldberg; P. Miska; Roy Clarke; Steven M. Durbin
J. Vac. Sci. Technol. B 35, 02B116 (2017)
https://doi.org/10.1116/1.4978021
Papers from the 29th International Vacuum Nanoelectronics Conference
2D/3D image charge for modeling field emission
J. Vac. Sci. Technol. B 35, 02C101 (2017)
https://doi.org/10.1116/1.4968007
Delayed photo-emission model for beam optics codes
J. Vac. Sci. Technol. B 35, 02C102 (2017)
https://doi.org/10.1116/1.4968511
Extraction of the characteristics of current-limiting elements from field emission measurement data
Michael Bachmann; Florian Dams; Felix Düsberg; Martin Hofmann; Andreas Pahlke; Christoph Langer; Robert Ławrowski; Christian Prommesberger; Rupert Schreiner; Pavel Serbun; Dirk Lützenkirchen-Hecht; Günter Müller
J. Vac. Sci. Technol. B 35, 02C103 (2017)
https://doi.org/10.1116/1.4971768
Modulation of the work function of graphene by Na and Cl coadsorbed on opposite sides on graphene
J. Vac. Sci. Technol. B 35, 02C104 (2017)
https://doi.org/10.1116/1.4972772
Nonlinear Fowler-Nordheim behavior of a single SnO2 nanowire
J. Vac. Sci. Technol. B 35, 02C105 (2017)
https://doi.org/10.1116/1.4973949
Bright and durable field-emission source derived from frozen refractory-metal Taylor cones
J. Vac. Sci. Technol. B 35, 02C106 (2017)
https://doi.org/10.1116/1.4976536
In situ study of graphene crystallinity effect on field electron emission characteristics
Shuai Tang; Yu Zhang; Ningsheng Xu; Runze Zhan; Li Gong; Peng Zhao; Jian Chen; Chaolun Liang; Jun Chen; Juncong She; Shaozhi Deng
J. Vac. Sci. Technol. B 35, 02C107 (2017)
https://doi.org/10.1116/1.4977546
Electrical properties of Cs3Sb photocathode emitters in panel device applications
J. Vac. Sci. Technol. B 35, 02C108 (2017)
https://doi.org/10.1116/1.4977582
Electron extraction electrode for a high-performance electron beam from carbon nanotube cold cathodes
J. Vac. Sci. Technol. B 35, 02C109 (2017)
https://doi.org/10.1116/1.4978045
Multiphoton photoemission of gold nanopillars fabricated by carbon nanotube templates
J. Vac. Sci. Technol. B 35, 02C110 (2017)
https://doi.org/10.1116/1.4978655
Future of plasma etching for microelectronics: Challenges and opportunities
Gottlieb S. Oehrlein, Stephan M. Brandstadter, et al.
Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications
Haochen Zhao, Suho Park, et al.
Exploring SiC CVD growth parameters compatible with remote epitaxy
Daniel J. Pennachio, Jenifer R. Hajzus, et al.