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Issues

Volume 33, Issue 6
November 2015
Journal of Vacuum Science & Technology B Cover Image for Volume 33, Issue 6
All Issues
ISSN 2166-2746
EISSN 2166-2754

Letters

Physical and electrical characteristics of hydrothermally synthesized nanocrystalline TiO2 thin films
Chin-Lung Cheng; Jin-Tsong Jeng; Jung-Yen Yang; Tsung-Chieh Cheng; Chi-Chung Liu
J. Vac. Sci. Technol. B 33, 060601 (2015) https://doi.org/10.1116/1.4931792
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Dependence of reverse bias leakage on depletion width and V-pit size in InGaN/GaN light-emitting diodes grown on silicon
Hyun Kum; Mihyun Kim; Dong-gun Lee; Youngjo Tak; Jongsun Maeng; Joosung Kim; Gilho Gu; Joong Jung Kim; Yongil Kim; Jun-Youn Kim; Youngsoo Park
J. Vac. Sci. Technol. B 33, 060602 (2015) https://doi.org/10.1116/1.4933039
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Ultrahigh vacuum deposition of higher manganese silicide Mn4Si7 thin films
Rajendra P. Dulal; Bishnu R. Dahal; Ian L. Pegg; John Philip
J. Vac. Sci. Technol. B 33, 060603 (2015) https://doi.org/10.1116/1.4933083
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Flux dependent Sb-incorporation during molecular beam epitaxy of InAsSb
Wendy L. Sarney; Stefan P. Svensson
J. Vac. Sci. Technol. B 33, 060604 (2015) https://doi.org/10.1116/1.4935892
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Deep germanium etching using time multiplexed plasma etching
Maxime Darnon; Mathieu de Lafontaine; Maïté Volatier; Simon Fafard; Richard Arès; Abdelatif Jaouad; Vincent Aimez
J. Vac. Sci. Technol. B 33, 060605 (2015) https://doi.org/10.1116/1.4936112
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Review Articles

Roll-to-roll UV imprinting lithography for micro/nanostructures
Peiyun Yi; Hao Wu; Chengpeng Zhang; Linfa Peng; Xinmin Lai
J. Vac. Sci. Technol. B 33, 060801 (2015) https://doi.org/10.1116/1.4933347
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Electronic & Optoelectronic Materials, Devices & Processing

Effect of GaN surface treatment on Al2O3/n-GaN MOS capacitors
Tashfin Hossain; Daming Wei; James H. Edgar; Nelson Y. Garces; Neeraj Nepal; Jennifer K. Hite; Michael A. Mastro; Charles R. Eddy, Jr.; Harry M. Meyer, III
J. Vac. Sci. Technol. B 33, 061201 (2015) https://doi.org/10.1116/1.4931793
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Investigation of traps in AlGaN/GaN high electron mobility transistors by sub-bandgap optical pumping
Tsung-Sheng Kang; Fan Ren; Brent P. Gila; Steve J. Pearton; Erin Patrick; David J. Cheney; Mark Law; Ming-Lan Zhang
J. Vac. Sci. Technol. B 33, 061202 (2015) https://doi.org/10.1116/1.4931790
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CHORUS
Deep level transient spectroscopy in III-Nitrides: Decreasing the effects of series resistance
Alexander Y. Polyakov; Nikolai B. Smirnov; In-Hwan Lee; Stephen J. Pearton
J. Vac. Sci. Technol. B 33, 061203 (2015) https://doi.org/10.1116/1.4932013
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CHORUS
Comparison of acid- and non-acid-based surface preparations of Nb-doped SrTiO3 (001)
Richard C. Hatch; Miri Choi; Agham B. Posadas; Alexander A. Demkov
J. Vac. Sci. Technol. B 33, 061204 (2015) https://doi.org/10.1116/1.4931616
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CHORUS
Modification of porous SiOCH by first contact with water vapor after plasma process
Maxime Darnon; Névine Rochat; Christophe Licitra
J. Vac. Sci. Technol. B 33, 061205 (2015) https://doi.org/10.1116/1.4932533
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Effect of excess Bi2O3 on structure and performance of ZnO-based thin film transistors
Wei Ye; Wei Ren; Zhao Wang; Peng Shi; Shuming Yang; Weixuan Jing; Zhuangde Jiang
J. Vac. Sci. Technol. B 33, 061206 (2015) https://doi.org/10.1116/1.4935105
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Charge control in N-polar InAlN high-electron-mobility transistors grown by plasma-assisted molecular beam epitaxy
Matthew T. Hardy; David F. Storm; Brian P. Downey; D. Scott Katzer; David J. Meyer; Thomas O. McConkie; David J. Smith
J. Vac. Sci. Technol. B 33, 061207 (2015) https://doi.org/10.1116/1.4935130
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Fabrication of metal strip waveguides for optical and microwave data transmission
Behnam Banan; R. Niall Tait; Odile Liboiron-Ladouceur; Pierre Berini
J. Vac. Sci. Technol. B 33, 061208 (2015) https://doi.org/10.1116/1.4935106
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Band offsets in HfSiO4/IGZO heterojunctions
David C. Hays; Brent P. Gila; Stephen J. Pearton; Fan Ren
J. Vac. Sci. Technol. B 33, 061209 (2015) https://doi.org/10.1116/1.4936117
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CHORUS
Plasma-assisted oxide removal from p-type GaSb for low resistivity ohmic contacts
Thanh-Nam Tran; Saroj Kumar Patra; Magnus Breivik; Bjørn-Ove Fimland
J. Vac. Sci. Technol. B 33, 061210 (2015) https://doi.org/10.1116/1.4935883
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Visible-light phototransistors based on InGaZnO and silver nanoparticles
Jiin Yu; Seung Won Shin; Kwang-Ho Lee; Jin-Seong Park; Seong Jun Kang
J. Vac. Sci. Technol. B 33, 061211 (2015) https://doi.org/10.1116/1.4936113
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Etch residue removal of CoFeB using CO/NH3 reactive ion beam for spin transfer torque-magnetic random access memory device
Min Hwan Jeon; Kyung Chae Yang; Jin Woo Park; Deok Hyun Yun; Kyong Nam Kim; Geun Young Yeom
J. Vac. Sci. Technol. B 33, 061212 (2015) https://doi.org/10.1116/1.4936114
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Lithography

Highly selective removal of poly(methyl methacrylate) from polystyrene-block-poly(methyl methacrylate) by CO/H2 plasma etching
Tsubasa Imamura; Hiroshi Yamamoto; Mitsuhiro Omura; Itsuko Sakai; Hisataka Hayashi
J. Vac. Sci. Technol. B 33, 061601 (2015) https://doi.org/10.1116/1.4932541
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Electron beam lithography using a PMMA/P(MMA 8.5 MAA) bilayer for negative tone lift-off process
Andre-Pierre Blanchard-Dionne; Michel Meunier
J. Vac. Sci. Technol. B 33, 061602 (2015) https://doi.org/10.1116/1.4935129
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Effect of extreme ultraviolet photoresist underlayer optical properties on imaging performance
Jung Sik Kim; Han Ku Cho; Seongchul Hong; Jinho Ahn
J. Vac. Sci. Technol. B 33, 061603 (2015) https://doi.org/10.1116/1.4936121
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MEMS & NEMS

Sacrificial structures for deep reactive ion etching of high-aspect ratio kinoform silicon x-ray lenses
Frederik Stöhr; Jonas Michael-Lindhard; Jörg Hübner; Flemming Jensen; Hugh Simons; Anders Clemen Jakobsen; Henning Friis Poulsen; Ole Hansen
J. Vac. Sci. Technol. B 33, 062001 (2015) https://doi.org/10.1116/1.4931622
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Highly efficient initiation carrier injection for nonthermal atmospheric plasma generation
Youngmin Kim; Jaeyeong Park
J. Vac. Sci. Technol. B 33, 062002 (2015) https://doi.org/10.1116/1.4933043
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Microelectronic & Nanoelectronic Devices

Effects of conducting defects on resistive switching characteristics of SiNx-based resistive random-access memory with MIS structure
Sungjun Kim; Seongjae Cho; Kyung-Chang Ryoo; Byung-Gook Park
J. Vac. Sci. Technol. B 33, 062201 (2015) https://doi.org/10.1116/1.4931946
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Concept for assembling individual nanostructure-based components into complex devices
Dmitry B. Suyatin; Richard Sundberg; Ivan Maximov; Sergey Shleev; Lars Montelius
J. Vac. Sci. Technol. B 33, 062202 (2015) https://doi.org/10.1116/1.4931952
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Integration of broken-gap heterojunction InAs/GaSb Esaki tunnel diodes on silicon
Kunal Bhatnagar; Manuel P. Caro; Juan S. Rojas-Ramirez; Ravi Droopad; Paul M. Thomas; Abhinav Gaur; Matthew J. Filmer; Sean L. Rommel
J. Vac. Sci. Technol. B 33, 062203 (2015) https://doi.org/10.1116/1.4935885
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CHORUS

Organic Electronics and Optoelectronics

Quantum-dot light-emitting diodes with a double-layer structured hole injection layer
Sang Moo Lee; Nam-Kwang Cho; Seong Jun Kang
J. Vac. Sci. Technol. B 33, 062401 (2015) https://doi.org/10.1116/1.4932542
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59th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

EIPBN Invited Articles
Direct fabrication of high aspect-ratio metal oxide nanopatterns via sequential infiltration synthesis in lithographically defined SU-8 templates
Chang-Yong Nam; Aaron Stein; Kim Kisslinger
J. Vac. Sci. Technol. B 33, 06F201 (2015) https://doi.org/10.1116/1.4929508
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CHORUS
Characterization of small microfluidic valves for studies of mechanical properties of bacteria
Da Yang; Clayton M. Greer; Branndon P. Jones; Anna D. Jennings; Scott T. Retterer; Jaan Männik
J. Vac. Sci. Technol. B 33, 06F202 (2015) https://doi.org/10.1116/1.4929883
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CHORUS
Fabrication of pyramidal probes with various periodic patterns and a single nanopore
Seong Soo Choi; Myoung Jin Park; Chul Hee Han; Sae Joong Oh; Sang Hun Han; Nam Kyou Park; Yong-Sang Kim; Hyuck Choo
J. Vac. Sci. Technol. B 33, 06F203 (2015) https://doi.org/10.1116/1.4935560
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Directed Self Assembly
Implementation of surface energy modification in graphoepitaxy directed self-assembly for hole multiplication
Jan Doise; Joost Bekaert; Boon Teik Chan; Roel Gronheid; Yi Cao; SungEun Hong; Guanyang Lin; Daniel Fishman; Yuli Chakk; Taisir Marzook
J. Vac. Sci. Technol. B 33, 06F301 (2015) https://doi.org/10.1116/1.4929884
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Electrical yield verification of half-pitch 15 nm patterns using directed self-assembly of polystyrene-block-poly(methyl methacrylate)
Tsukasa Azuma; Yuriko Seino; Hironobu Sato; Yusuke Kasahara; Katsutoshi Kobayashi; Hitoshi Kubota; Hideki Kanai; Katsuyoshi Kodera; Naoko Kihara; Yoshiaki Kawamonzen; Satoshi Nomura; Ken Miyagi; Shinya Minegishi; Toshikatsu Tobana; Masayuki Shiraishi
J. Vac. Sci. Technol. B 33, 06F302 (2015) https://doi.org/10.1116/1.4931635
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Simulation study on defect annihilation dynamics in directed self-assembly lithography
Katsuyoshi Kodera; Hideki Kanai; Hironobu Sato; Yuriko Seino; Katsutoshi Kobayashi; Yusuke Kasahara; Hitoshi Kubota; Naoko Kihara; Yoshiaki Kawamonzen; Shinya Minegishi; Ken Miyagi; Masayuki Shiraishi; Toshikatsu Tobana; Satoshi Nomura; Tsukasa Azuma
J. Vac. Sci. Technol. B 33, 06F303 (2015) https://doi.org/10.1116/1.4935254
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High resolution nanofabrication using self-assembly of metal salt-polymer nanocomposite film
Celal Con; Ferhat Aydinoglu; Bo Cui
J. Vac. Sci. Technol. B 33, 06F304 (2015) https://doi.org/10.1116/1.4935654
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Nano- and Micro- Electromechanical systems
High performance lithium niobate surface acoustic wave transducers in the 4–12 GHz super high frequency range
Xiao Chen; Mohammad Ali Mohammad; James Conway; Bo Liu; Yi Yang; Tian-Ling Ren
J. Vac. Sci. Technol. B 33, 06F401 (2015) https://doi.org/10.1116/1.4935561
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Beam Induced Deposition and Etching
Enhancement of XeF2-assisted gallium ion beam etching of silicon layer and endpoint detection from backside in circuit editing
Deying Xia; John Notte; Lewis Stern; Bernhard Goetze
J. Vac. Sci. Technol. B 33, 06F501 (2015) https://doi.org/10.1116/1.4928744
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Nanopore formation in TiN membranes by the focused electron beam of a transmission electron microscope
Hyun-Mi Kim; Seong-Yong Cho; Ki-Bum Kim
J. Vac. Sci. Technol. B 33, 06F502 (2015) https://doi.org/10.1116/1.4935504
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Helium ion beam induced growth of hammerhead AFM probes
Gaurav Nanda; Emile van Veldhoven; Diederik Maas; Hamed Sadeghian; Paul F. A. Alkemade
J. Vac. Sci. Technol. B 33, 06F503 (2015) https://doi.org/10.1116/1.4936068
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Nanoimprint Lithography
Flexible composite stamp for thermal nanoimprint lithography based on OrmoStamp
Marc Papenheim; Christian Steinberg; Khalid Dhima; Si Wang; Hella-Christin Scheer
J. Vac. Sci. Technol. B 33, 06F601 (2015) https://doi.org/10.1116/1.4929885
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Method for high temperature nanoimprint of an organic semicrystalline polymer
Si Wang; Johannes Rond; Khalid Dhima; Christian Steinberg; Marc Papenheim; Hella-Christin Scheer; Jan-Christoph Gasse
J. Vac. Sci. Technol. B 33, 06F602 (2015) https://doi.org/10.1116/1.4929882
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Thermal wrinkling of nanoimprinted SU-8 with masked UV-exposure
Christian Steinberg; Mhammed Belgouzi; Khalid Dhima; Marc Papenheim; Si Wang; Hella-Christin Scheer
J. Vac. Sci. Technol. B 33, 06F603 (2015) https://doi.org/10.1116/1.4931688
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Stereolithography with variable resolutions using optical filter with high-contrast gratings
Yuanrui Li; Huachao Mao; He Liu; Yuhan Yao; Yifei Wang; Boxiang Song; Yong Chen; Wei Wu
J. Vac. Sci. Technol. B 33, 06F604 (2015) https://doi.org/10.1116/1.4935336
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Nanophotonics
Charging suppression in focused-ion beam fabrication of visible subwavelength dielectric grating reflector using electron conducting polymer
Mohd Sharizal Alias; Hsien-Yu Liao; Tien Khee Ng; Boon Siew Ooi
J. Vac. Sci. Technol. B 33, 06F701 (2015) https://doi.org/10.1116/1.4929152
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Nanobiotechnology
Fabrication of free-standing casein devices with micro- and nanostructured regular and bioimprinted surface features
Azadeh Hashemi; Isha Mutreja; Maan M. Alkaisi; Volker Nock; Mohammad Azam Ali
J. Vac. Sci. Technol. B 33, 06F901 (2015) https://doi.org/10.1116/1.4931591
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Advances in 3D neuronal cell culture
Jean-Philippe Frimat; Sijia Xie; Alex Bastiaens; Bart Schurink; Floor Wolbers; Jaap den Toonder; Regina Luttge
J. Vac. Sci. Technol. B 33, 06F902 (2015) https://doi.org/10.1116/1.4931636
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Bosch etching for the creation of a 3D nanoelectroporation system for high throughput gene delivery
Paul Bertani; Wu Lu; Lingqian Chang; Daniel Gallego-Perez; Ly James Lee; Chiling Chiang; Natarajan Muthusamy
J. Vac. Sci. Technol. B 33, 06F903 (2015) https://doi.org/10.1116/1.4932157
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CHORUS
Carbon nanotube field effect transistor aptasensors for estrogen detection in liquids
Han Yue Zheng; Omar A. Alsager; Cameron S. Wood; Justin M. Hodgkiss; Natalie O. V. Plank
J. Vac. Sci. Technol. B 33, 06F904 (2015) https://doi.org/10.1116/1.4935246
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Advanced Pattern Transfer
Low DC-bias silicon nitride anisotropic etching
Yifei Wang; He Liu; Yuanrui Li; Wei Wu
J. Vac. Sci. Technol. B 33, 06FA01 (2015) https://doi.org/10.1116/1.4930298
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Directed ribbon-beam capability for novel etching applications
Simon Ruffell; Anthony Renau
J. Vac. Sci. Technol. B 33, 06FA02 (2015) https://doi.org/10.1116/1.4932161
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Topography-free sample for thermal spatial response measurement of scanning thermal microscopy
Yunfei Ge; Yuan Zhang; Jonathan M. R. Weaver; Haiping Zhou; Phillip S. Dobson
J. Vac. Sci. Technol. B 33, 06FA03 (2015) https://doi.org/10.1116/1.4933172
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Electron Beam Lithography
Lossless layout image compression algorithms for electron-beam direct-write lithography
Narendra Chaudhary; Yao Luo; Serap A. Savari; Roger McCay
J. Vac. Sci. Technol. B 33, 06FD01 (2015) https://doi.org/10.1116/1.4927639
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CHORUS
Automated geometry assisted proximity effect correction for electron beam direct write nanolithography
Leonidas E. Ocola; David J. Gosztola; Daniel Rosenmann; Gerald Lopez
J. Vac. Sci. Technol. B 33, 06FD02 (2015) https://doi.org/10.1116/1.4931691
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Patterning of defect arrays with e-beam lithography used to develop a high throughput e-beam defect inspection tool
Kevin D. Cummings; Ben Bunday; Matt Malloy; John Hartley; Laila Banu; M. Mellish; Weilun Chao; A. R. Bleier; A. Banerjee
J. Vac. Sci. Technol. B 33, 06FD03 (2015) https://doi.org/10.1116/1.4934052
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Multilayer on-chip stacked Fresnel zone plates: Hard x-ray fabrication and soft x-ray simulations
Kenan Li; Michael J. Wojcik; Leonidas E. Ocola; Ralu Divan; Chris Jacobsen
J. Vac. Sci. Technol. B 33, 06FD04 (2015) https://doi.org/10.1116/1.4935252
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Fabricating a high-resolution mask with improved line-edge roughness by using a nonchemically amplified resist and a postexposure bake
Hidetatsu Miyoshi; Jun Taniguchi
J. Vac. Sci. Technol. B 33, 06FD05 (2015) https://doi.org/10.1116/1.4935558
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Enhanced adhesion of electron beam resist by grafted monolayer poly(methylmethacrylate-co-methacrylic acid) brush
Francesco Narda Viscomi; Ripon Kumar Dey; Roberto Caputo; Bo Cui
J. Vac. Sci. Technol. B 33, 06FD06 (2015) https://doi.org/10.1116/1.4935506
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Analytic estimation and minimization of line edge roughness in electron-beam lithography
Rui Guo; Soo-Young Lee; Jin Choi; Sung-Hoon Park; In-Kyun Shin; Chan-Uk Jeon
J. Vac. Sci. Technol. B 33, 06FD07 (2015) https://doi.org/10.1116/1.4936070
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Optical and Extreme UV (EUV) Lithography
Demonstration of 22-nm half pitch resolution on the SHARP EUV microscope
Markus P. Benk; Kenneth A. Goldberg; Antoine Wojdyla; Christopher N. Anderson; Farhad Salmassi; Patrick P. Naulleau; Michael Kocsis
J. Vac. Sci. Technol. B 33, 06FE01 (2015) https://doi.org/10.1116/1.4929509
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CHORUS
Variation in phase defect size on extreme ultraviolet mask before and after reflective multilayer coating
Tsuyoshi Amano; Tsukasa Abe
J. Vac. Sci. Technol. B 33, 06FE02 (2015) https://doi.org/10.1116/1.4931934
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Atomic Layer Deposition
ZnO functionalization of multiwalled carbon nanotubes for methane sensing at single parts per million concentration levels
Md Tanim Humayun; Ralu Divan; Liliana Stan; Ashu Gupta; Daniel Rosenmann; Lara Gundel; Paul A. Solomon; Igor Paprotny
J. Vac. Sci. Technol. B 33, 06FF01 (2015) https://doi.org/10.1116/1.4931694
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Nanoelectronics
Fabrication and comparison of MoS2 and WSe2 field-effect transistor biosensors
Hongsuk Nam; Bo-Ram Oh; Mikai Chen; Sungjin Wi; Da Li; Katsuo Kurabayashi; Xiaogan Liang
J. Vac. Sci. Technol. B 33, 06FG01 (2015) https://doi.org/10.1116/1.4930040
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CHORUS
Fabrication of nanodamascene metallic single electron transistors with atomic layer deposition of tunnel barrier
Golnaz Karbasian; Alexei O. Orlov; Gregory L. Snider
J. Vac. Sci. Technol. B 33, 06FG02 (2015) https://doi.org/10.1116/1.4932156
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CHORUS
Fabrication of artificial graphene in a GaAs quantum heterostructure
Diego Scarabelli; Sheng Wang; Aron Pinczuk; Shalom J. Wind; Yuliya Y. Kuznetsova; Loren N. Pfeiffer; Ken West; Geoff C. Gardner; Michael J. Manfra; Vittorio Pellegrini
J. Vac. Sci. Technol. B 33, 06FG03 (2015) https://doi.org/10.1116/1.4932672
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CHORUS
Resists and Lithography Materials
Cross sections of photoacid generators at low electron energies
Steven Grzeskowiak; Amrit Narasimhan; Jonathan Ostrander; Jonathon Schad; William Earley; Robert L. Brainard; Greg Denbeaux; Leonidas E. Ocola; Mark Neisser
J. Vac. Sci. Technol. B 33, 06FH01 (2015) https://doi.org/10.1116/1.4935954
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Multiscale simulation of resist pattern shrinkage during scanning electron microscope observations
Masaaki Yasuda; Yuki Furukawa; Hiroaki Kawata; Yoshihiko Hirai
J. Vac. Sci. Technol. B 33, 06FH02 (2015) https://doi.org/10.1116/1.4935956
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Charged Particle Optics and Sources
Low-energy scanning electron microscope using a monochromator with double-offset cylindrical lenses
Takashi Ogawa; Boklae Cho; Sang Jung Ahn
J. Vac. Sci. Technol. B 33, 06FJ01 (2015) https://doi.org/10.1116/1.4931933
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Novel Imaging and Characterization Techniques
1.5 nm fabrication of test patterns for characterization of metrological systems
Sergey Babin; Giuseppe Calafiore; Christophe Peroz; Raymond Conley; Nathalie Bouet; Stefano Cabrini; Elaine Chan; Ian Lacey; Wayne R. McKinney; Valeriy V. Yashchuk; Andras E. Vladar
J. Vac. Sci. Technol. B 33, 06FL01 (2015) https://doi.org/10.1116/1.4935253
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Modeling of local dielectric charging induced by line scan during SEM observation
Zh. H. Cheng; H. Koyama; Y. Kimura; H. Shinada; O. Komuro
J. Vac. Sci. Technol. B 33, 06FL02 (2015) https://doi.org/10.1116/1.4936069
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Micro- and Nanofluidics
Nanofluidic interfaces in microfluidic networks
Larry J. Millet; Mitchel J. Doktycz; Scott T. Retterer
J. Vac. Sci. Technol. B 33, 06FM01 (2015) https://doi.org/10.1116/1.4931590
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Characterization of extended channel bioreactors for continuous-flow protein production
Andrea C. Timm; Peter G. Shankles; Carmen M. Foster; Mitchel J. Doktycz; Scott T. Retterer
J. Vac. Sci. Technol. B 33, 06FM02 (2015) https://doi.org/10.1116/1.4932155
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Supplementary Material
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CHORUS
Fabrication of nanoporous membranes for tuning microbial interactions and biochemical reactions
Peter G. Shankles; Andrea C. Timm; Mitchel J. Doktycz; Scott T. Retterer
J. Vac. Sci. Technol. B 33, 06FM03 (2015) https://doi.org/10.1116/1.4932671
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CHORUS
High Throughput Electron Microscopy
Proposed architecture of a multicolumn electron-beam wafer inspection system for high-volume manufacturing
Dan Meisburger; James Spallas; Kurt Werder; Lawrence Muray
J. Vac. Sci. Technol. B 33, 06FN01 (2015) https://doi.org/10.1116/1.4931589
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Simulation technique for pattern inspection using a projection electron microscope
Susumu Iida; Ryoichi Hirano; Tsuyoshi Amano; Hidehiro Watanabe
J. Vac. Sci. Technol. B 33, 06FN02 (2015) https://doi.org/10.1116/1.4931932
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High-brightness miniature column for high-speed multicolumn wafer inspection
James Spallas; Dan Meisburger; Kurt Werder; Lawrence Muray
J. Vac. Sci. Technol. B 33, 06FN03 (2015) https://doi.org/10.1116/1.4935505
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