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Issues

Letters

J. Vac. Sci. Technol. B 32, 050601 (2014) https://doi.org/10.1116/1.4892519
J. Vac. Sci. Technol. B 32, 050602 (2014) https://doi.org/10.1116/1.4895840

Electronic & Optoelectronic Materials, Devices & Processing

J. Vac. Sci. Technol. B 32, 051201 (2014) https://doi.org/10.1116/1.4891164
J. Vac. Sci. Technol. B 32, 051202 (2014) https://doi.org/10.1116/1.4891108
J. Vac. Sci. Technol. B 32, 051203 (2014) https://doi.org/10.1116/1.4891629
J. Vac. Sci. Technol. B 32, 051204 (2014) https://doi.org/10.1116/1.4891966
J. Vac. Sci. Technol. B 32, 051205 (2014) https://doi.org/10.1116/1.4892172
J. Vac. Sci. Technol. B 32, 051206 (2014) https://doi.org/10.1116/1.4892797
J. Vac. Sci. Technol. B 32, 051207 (2014) https://doi.org/10.1116/1.4892786
J. Vac. Sci. Technol. B 32, 051208 (2014) https://doi.org/10.1116/1.4894461
J. Vac. Sci. Technol. B 32, 051209 (2014) https://doi.org/10.1116/1.4893976
J. Vac. Sci. Technol. B 32, 051210 (2014) https://doi.org/10.1116/1.4895111
J. Vac. Sci. Technol. B 32, 051211 (2014) https://doi.org/10.1116/1.4895112
J. Vac. Sci. Technol. B 32, 051212 (2014) https://doi.org/10.1116/1.4895658
J. Vac. Sci. Technol. B 32, 051213 (2014) https://doi.org/10.1116/1.4895966

Lithography

J. Vac. Sci. Technol. B 32, 051601 (2014) https://doi.org/10.1116/1.4892063

Nanometer Science & Technology

J. Vac. Sci. Technol. B 32, 051801 (2014) https://doi.org/10.1116/1.4891961
J. Vac. Sci. Technol. B 32, 051802 (2014) https://doi.org/10.1116/1.4891920
J. Vac. Sci. Technol. B 32, 051803 (2014) https://doi.org/10.1116/1.4893540
J. Vac. Sci. Technol. B 32, 051804 (2014) https://doi.org/10.1116/1.4893437
J. Vac. Sci. Technol. B 32, 051805 (2014) https://doi.org/10.1116/1.4895037
J. Vac. Sci. Technol. B 32, 051806 (2014) https://doi.org/10.1116/1.4895334
J. Vac. Sci. Technol. B 32, 051807 (2014) https://doi.org/10.1116/1.4895663
J. Vac. Sci. Technol. B 32, 051808 (2014) https://doi.org/10.1116/1.4895846

MEMS & NEMS

J. Vac. Sci. Technol. B 32, 052001 (2014) https://doi.org/10.1116/1.4891924
J. Vac. Sci. Technol. B 32, 052002 (2014) https://doi.org/10.1116/1.4893671

Microelectronic & Nanoelectronic Devices

J. Vac. Sci. Technol. B 32, 052201 (2014) https://doi.org/10.1116/1.4891168
J. Vac. Sci. Technol. B 32, 052202 (2014) https://doi.org/10.1116/1.4891928

Organic Electronics and Optoelectronics

J. Vac. Sci. Technol. B 32, 052401 (2014) https://doi.org/10.1116/1.4893438

Plasmonics

J. Vac. Sci. Technol. B 32, 052601 (2014) https://doi.org/10.1116/1.4891170

Spintronics and Magnetic Devices

J. Vac. Sci. Technol. B 32, 052801 (2014) https://doi.org/10.1116/1.4894179

Errata

J. Vac. Sci. Technol. B 32, 053401 (2014) https://doi.org/10.1116/1.4892216
J. Vac. Sci. Technol. B 32, 053402 (2014) https://doi.org/10.1116/1.4895033
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