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Volume 32, Issue 4
July 2014
Journal of Vacuum Science & Technology B Cover Image for Volume 32, Issue 4
All Issues
ISSN 2166-2746
EISSN 2166-2754

Letters

Time-resolved and excitation-dependent photoluminescence study of CdTe/MgCdTe double heterostructures grown by molecular beam epitaxy
Xin-Hao Zhao; Michael J. DiNezza; Shi Liu; Su Lin; Yuan Zhao; Yong-Hang Zhang
J. Vac. Sci. Technol. B 32, 040601 (2014) https://doi.org/10.1116/1.4878317
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Thermal stability of DNA origami on mica
Michelle A. Pillers; Marya Lieberman
J. Vac. Sci. Technol. B 32, 040602 (2014) https://doi.org/10.1116/1.4879417
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Review Articles

Role of molybdenum oxide for organic electronics: Surface analytical studies
Chenggong Wang; Irfan Irfan; Xiaoliang Liu; Yongli Gao
J. Vac. Sci. Technol. B 32, 040801 (2014) https://doi.org/10.1116/1.4886364
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Access devices for 3D crosspoint memory
Geoffrey W. Burr; Rohit S. Shenoy; Kumar Virwani; Pritish Narayanan; Alvaro Padilla; Bülent Kurdi; Hyunsang Hwang
J. Vac. Sci. Technol. B 32, 040802 (2014) https://doi.org/10.1116/1.4889999
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Electronic & Optoelectronic Materials, Devices & Processing

GaSb oxide thermal stability studied by dynamic-XPS
Stephen McDonnell; Barry Brennan; Emin Bursa; Robert M. Wallace; Konrad Winkler; Peter Baumann
J. Vac. Sci. Technol. B 32, 041201 (2014) https://doi.org/10.1116/1.4878940
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Effect of Al concentration on Al-doped ZnO channels fabricated by atomic-layer deposition for top-gate oxide thin-film transistor applications
Eom-Ji Kim; Jun-Yong Bak; Jeong-Seon Choi; Sung-Min Yoon
J. Vac. Sci. Technol. B 32, 041202 (2014) https://doi.org/10.1116/1.4880823
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Barrier height inhomogeneities induced anomaly in thermal sensitivity of Ni/4H-SiC Schottky diode temperature sensor
Vibhor Kumar; Anup Singh Maan; Jamil Akhtar
J. Vac. Sci. Technol. B 32, 041203 (2014) https://doi.org/10.1116/1.4884756
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Development of cap-free sputtered GeTe films for inline phase change switch based RF circuits
Matthew R. King; Brian P. Wagner; Evan B. Jones; Nabil El-Hinnawy; Pavel Borodulin; Sean R. McLaughlin; John S. Mason, Jr.; Robert S. Howell; Michael J. Lee; Robert M. Young
J. Vac. Sci. Technol. B 32, 041204 (2014) https://doi.org/10.1116/1.4883217
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Dual-superlattice calibrations for group-III species in III-V semiconductor epitaxial structure growth
Richard P. Leavitt; Lei He; Christopher J. K. Richardson
J. Vac. Sci. Technol. B 32, 041205 (2014) https://doi.org/10.1116/1.4887482
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Isotope effects on plasma species of Ar/H2/D2 plasmas
Nick Fox-Lyon; Gottlieb S. Oehrlein
J. Vac. Sci. Technol. B 32, 041206 (2014) https://doi.org/10.1116/1.4889858
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Fabrication of sub-200 nm AlN-GaN-AlN waveguide with cleaved end facet
Yijing Chen; Vivek Krishnamurthy; Yicheng Lai; Yi Luo; Zhibiao Hao; Lai Wang; Seng-Tiong Ho
J. Vac. Sci. Technol. B 32, 041207 (2014) https://doi.org/10.1116/1.4890487
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Lithography

Electron scattering analysis based on electron ray-tracing in extreme ultraviolet photomask
Jin Choi; Byung Sup Ahn; Chan Uk Jeon
J. Vac. Sci. Technol. B 32, 041601 (2014) https://doi.org/10.1116/1.4878943
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Focused ion beam direct patterning of hardmask layers
Simon Waid; Heinz D. Wanzenboeck; Michael Muehlberger; Marco Gavagnin; Emmerich Bertagnolli
J. Vac. Sci. Technol. B 32, 041602 (2014) https://doi.org/10.1116/1.4884777
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Nanometer Science & Technology

Ni2.36Mn0.72Ga0.92 nanowires with high martensite transition temperature
Parshu Gyawali; Keshab Sapkota; Ian Pegg; John Philip
J. Vac. Sci. Technol. B 32, 041801 (2014) https://doi.org/10.1116/1.4881137
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Nanocolumnar growth of thin films deposited at oblique angles: Beyond the tangent rule
Rafael Alvarez; Carmen Lopez-Santos; Julian Parra-Barranco; Victor Rico; Angel Barranco; Jose Cotrino; Agustin R. Gonzalez-Elipe; Alberto Palmero
J. Vac. Sci. Technol. B 32, 041802 (2014) https://doi.org/10.1116/1.4882877
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AC and DC electrical transport studies of (Fe, Co) codoped ZnO nanoparticles
Sanjay Kumar Mandal; Puja Dey; Tapan Kumar Nath
J. Vac. Sci. Technol. B 32, 041803 (2014) https://doi.org/10.1116/1.4887480
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Pattern transfer of hydrogen depassivation lithography patterns into silicon with atomically traceable placement and size control
Joshua B. Ballard; James H. G. Owen; William Owen; Justin R. Alexander; Ehud Fuchs; John N. Randall; James R. Von Ehr; Stephen McDonnell; Don D. Dick; Robert M. Wallace; Yves J. Chabal; Maia R. Bischof; David L. Jaeger; Richard F. Reidy; Joseph Fu; Pradeep Namboodiri; Kai Li; Richard M. Silver
J. Vac. Sci. Technol. B 32, 041804 (2014) https://doi.org/10.1116/1.4890484
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MEMS & NEMS

Fabrication and characterization of glassy carbon membranes
Yuri Koval; Andreas Geworski; Klaus Gieb; Irina Lazareva; Paul Müller
J. Vac. Sci. Technol. B 32, 042001 (2014) https://doi.org/10.1116/1.4890008
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Microelectronic & Nanoelectronic Devices

Growth of high-density Ir nanocrystals by atomic layer deposition for nonvolatile nanocrystal memory applications
Xiao-Jie Liu; Lin Zhu; Xue-Fei Li; Zheng-Yi Cao; Ai-Dong Li; Di Wu
J. Vac. Sci. Technol. B 32, 042201 (2014) https://doi.org/10.1116/1.4878942
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Errata

Erratum: “Strain- and kinetically induced suppression of phase separation in MBE-grown metastable and unstable GaInAsSb quaternary alloys for mid-infrared optoelectronics” [J. Vac. Sci. Technol. B 31, 03C125 (2013)]
Asli Yildirim; John P. Prineas
J. Vac. Sci. Technol. B 32, 043401 (2014) https://doi.org/10.1116/1.4884775
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41st Conference on the Physics and Chemistry of Semiconductor Interfaces (41st PCSI 2014)

Theory of graphene–insulator–graphene tunnel junctions
Sergio C. de la Barrera; Qin Gao; Randall M. Feenstra
J. Vac. Sci. Technol. B 32, 04E101 (2014) https://doi.org/10.1116/1.4871760
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Revealing optically induced magnetization in SrTiO3 using optically coupled SQUID magnetometry and magnetic circular dichroism
William D. Rice; Palak Ambwani; Joe D. Thompson; Christopher Leighton; Scott A. Crooker
J. Vac. Sci. Technol. B 32, 04E102 (2014) https://doi.org/10.1116/1.4871691
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Coexisting Bi and Se surface terminations of cleaved Bi2Se3 single crystals
Andrew S. Hewitt; Jingying Wang; Jon Boltersdorf; Paul A. Maggard; Daniel B. Dougherty
J. Vac. Sci. Technol. B 32, 04E103 (2014) https://doi.org/10.1116/1.4873689
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Tuning the oxidation states and crystallinity of copper oxide nanofibers by calcination
Juyun Park; SungYong Seo; Yong-Cheol Kang; Sung-Wi Koh
J. Vac. Sci. Technol. B 32, 04E104 (2014) https://doi.org/10.1116/1.4874617
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Flexible transparent conductive heater using multiwalled carbon nanotube sheet
Daewoong Jung; Maeum Han; Gil S. Lee
J. Vac. Sci. Technol. B 32, 04E105 (2014) https://doi.org/10.1116/1.4876127
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Selective Raman modes and strong photoluminescence of gallium selenide flakes on sp2 carbon
Raul D. Rodriguez; Susanne Müller; Evgeniya Sheremet; Dietrich R. T. Zahn; Alexander Villabona; Santos A. Lopez-Rivera; Philipp Tonndorf; Steffen Michaelis de Vasconcellos; Rudolf Bratschitsch
J. Vac. Sci. Technol. B 32, 04E106 (2014) https://doi.org/10.1116/1.4881995
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Infrared sensing characteristics of multiwalled carbon nanotube sheet
Daewoong Jung; Maeum Han; Gil S. Lee
J. Vac. Sci. Technol. B 32, 04E107 (2014) https://doi.org/10.1116/1.4883050
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Low resistance palladium/molybdenum based ohmic contacts to n-GaSb grown on GaAs
Nassim Rahimi; Andrew A. Aragon; Orlando S. Romero; Darryl M. Shima; Thomas J. Rotter; Sayan D. Mukherjee; Ganesh Balakrishnan; Luke F. Lester
J. Vac. Sci. Technol. B 32, 04E108 (2014) https://doi.org/10.1116/1.4884948
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Characterization of surface defects on Be-implanted GaSb
Nassim Rahimi; Andrew A. Aragon; Darryl M. Shima; Christopher Hains; Tito Busani; Olga Lavrova; Ganesh Balakrishnan; Luke F. Lester
J. Vac. Sci. Technol. B 32, 04E109 (2014) https://doi.org/10.1116/1.4886095
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Surface-enhanced Raman scattering and gap-mode tip-enhanced Raman scattering investigations of phthalocyanine molecules on gold nanostructured substrates
Evgeniya Sheremet; Raul D. Rodriguez; Dietrich R. T. Zahn; Alexander G. Milekhin; Ekaterina E. Rodyakina; Alexander V. Latyshev
J. Vac. Sci. Technol. B 32, 04E110 (2014) https://doi.org/10.1116/1.4890126
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Future of plasma etching for microelectronics: Challenges and opportunities
Gottlieb S. Oehrlein, Stephan M. Brandstadter, et al.
Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications
Haochen Zhao, Suho Park, et al.
Heating of C s 2 Te photocathode via field emission and radiofrequency pulsed heating: Implication toward breakdown
Ryo Shinohara, Soumendu Bagchi, et al.
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