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Letters

J. Vac. Sci. Technol. B 30, 030601 (2012) https://doi.org/10.1116/1.3698602
J. Vac. Sci. Technol. B 30, 030602 (2012) https://doi.org/10.1116/1.3701711
J. Vac. Sci. Technol. B 30, 030603 (2012) https://doi.org/10.1116/1.4705375
J. Vac. Sci. Technol. B 30, 030604 (2012) https://doi.org/10.1116/1.4711000
J. Vac. Sci. Technol. B 30, 030605 (2012) https://doi.org/10.1116/1.4710997
J. Vac. Sci. Technol. B 30, 030606 (2012) https://doi.org/10.1116/1.4710999
J. Vac. Sci. Technol. B 30, 030607 (2012) https://doi.org/10.1116/1.4709620

Review Article

J. Vac. Sci. Technol. B 30, 030801 (2012) https://doi.org/10.1116/1.3693416
J. Vac. Sci. Technol. B 30, 030802 (2012) https://doi.org/10.1116/1.3695646
J. Vac. Sci. Technol. B 30, 030803 (2012) https://doi.org/10.1116/1.3702806

Electronic & Optoelectronic Materials, Devices & Processing

J. Vac. Sci. Technol. B 30, 031201 (2012) https://doi.org/10.1116/1.3696861
J. Vac. Sci. Technol. B 30, 031202 (2012) https://doi.org/10.1116/1.3698402
J. Vac. Sci. Technol. B 30, 031203 (2012) https://doi.org/10.1116/1.3698400
J. Vac. Sci. Technol. B 30, 031204 (2012) https://doi.org/10.1116/1.3699042
J. Vac. Sci. Technol. B 30, 031205 (2012) https://doi.org/10.1116/1.3700440
J. Vac. Sci. Technol. B 30, 031206 (2012) https://doi.org/10.1116/1.3701945
J. Vac. Sci. Technol. B 30, 031207 (2012) https://doi.org/10.1116/1.3696731
J. Vac. Sci. Technol. B 30, 031208 (2012) https://doi.org/10.1116/1.4706894
J. Vac. Sci. Technol. B 30, 031209 (2012) https://doi.org/10.1116/1.4705730
J. Vac. Sci. Technol. B 30, 031210 (2012) https://doi.org/10.1116/1.4710519
J. Vac. Sci. Technol. B 30, 031211 (2012) https://doi.org/10.1116/1.4711215
J. Vac. Sci. Technol. B 30, 031212 (2012) https://doi.org/10.1116/1.4705732
J. Vac. Sci. Technol. B 30, 031213 (2012) https://doi.org/10.1116/1.4714521

Energy Conversion and Storage Devices

J. Vac. Sci. Technol. B 30, 031401 (2012) https://doi.org/10.1116/1.3696720

Lithography

J. Vac. Sci. Technol. B 30, 031601 (2012) https://doi.org/10.1116/1.3696696
J. Vac. Sci. Technol. B 30, 031602 (2012) https://doi.org/10.1116/1.3697718
J. Vac. Sci. Technol. B 30, 031603 (2012) https://doi.org/10.1116/1.3697753
J. Vac. Sci. Technol. B 30, 031604 (2012) https://doi.org/10.1116/1.3696855
J. Vac. Sci. Technol. B 30, 031605 (2012) https://doi.org/10.1116/1.3698315
J. Vac. Sci. Technol. B 30, 031606 (2012) https://doi.org/10.1116/1.3700439

Nanometer Science & Technology

J. Vac. Sci. Technol. B 30, 031801 (2012) https://doi.org/10.1116/1.3700237
J. Vac. Sci. Technol. B 30, 031802 (2012) https://doi.org/10.1116/1.3698600
J. Vac. Sci. Technol. B 30, 031803 (2012) https://doi.org/10.1116/1.4706893
J. Vac. Sci. Technol. B 30, 031804 (2012) https://doi.org/10.1116/1.4711040
J. Vac. Sci. Technol. B 30, 031805 (2012) https://doi.org/10.1116/1.4711246
J. Vac. Sci. Technol. B 30, 031806 (2012) https://doi.org/10.1116/1.4711134
J. Vac. Sci. Technol. B 30, 031807 (2012) https://doi.org/10.1116/1.3697752

MEMS & NEMS

J. Vac. Sci. Technol. B 30, 032001 (2012) https://doi.org/10.1116/1.4704638

Spintronics and Magnetic Devices

J. Vac. Sci. Technol. B 30, 032801 (2012) https://doi.org/10.1116/1.3698404

Shop Notes

J. Vac. Sci. Technol. B 30, 033201 (2012) https://doi.org/10.1116/1.3701977

Special Issue: Graphene and Related Materials

J. Vac. Sci. Technol. B 30, 03D101 (2012) https://doi.org/10.1116/1.3692724
J. Vac. Sci. Technol. B 30, 03D102 (2012) https://doi.org/10.1116/1.3688760
J. Vac. Sci. Technol. B 30, 03D103 (2012) https://doi.org/10.1116/1.3693417
J. Vac. Sci. Technol. B 30, 03D104 (2012) https://doi.org/10.1116/1.3693593
J. Vac. Sci. Technol. B 30, 03D105 (2012) https://doi.org/10.1116/1.3694027
J. Vac. Sci. Technol. B 30, 03D106 (2012) https://doi.org/10.1116/1.3693594
J. Vac. Sci. Technol. B 30, 03D107 (2012) https://doi.org/10.1116/1.3695337
J. Vac. Sci. Technol. B 30, 03D108 (2012) https://doi.org/10.1116/1.3697527
J. Vac. Sci. Technol. B 30, 03D109 (2012) https://doi.org/10.1116/1.3701701
J. Vac. Sci. Technol. B 30, 03D110 (2012) https://doi.org/10.1116/1.3701700
J. Vac. Sci. Technol. B 30, 03D111 (2012) https://doi.org/10.1116/1.3699011
J. Vac. Sci. Technol. B 30, 03D112 (2012) https://doi.org/10.1116/1.4706892
J. Vac. Sci. Technol. B 30, 03D113 (2012) https://doi.org/10.1116/1.4709419
J. Vac. Sci. Technol. B 30, 03D114 (2012) https://doi.org/10.1116/1.4711128
J. Vac. Sci. Technol. B 30, 03D115 (2012) https://doi.org/10.1116/1.4709768
J. Vac. Sci. Technol. B 30, 03D116 (2012) https://doi.org/10.1116/1.4715440
J. Vac. Sci. Technol. B 30, 03D117 (2012) https://doi.org/10.1116/1.4715549
J. Vac. Sci. Technol. B 30, 03D118 (2012) https://doi.org/10.1116/1.4712537
J. Vac. Sci. Technol. B 30, 03D119 (2012) https://doi.org/10.1116/1.4715698
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