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J. Vac. Sci. Technol. B 28, 1081–1085 (2010) https://doi.org/10.1116/1.3497030
J. Vac. Sci. Technol. B 28, 1086–1092 (2010) https://doi.org/10.1116/1.3498739
J. Vac. Sci. Technol. B 28, 1093–1096 (2010) https://doi.org/10.1116/1.3498742
J. Vac. Sci. Technol. B 28, 1097–1099 (2010) https://doi.org/10.1116/1.3498740
J. Vac. Sci. Technol. B 28, 1100–1103 (2010) https://doi.org/10.1116/1.3498744
J. Vac. Sci. Technol. B 28, 1104–1110 (2010) https://doi.org/10.1116/1.3499271
J. Vac. Sci. Technol. B 28, 1111–1119 (2010) https://doi.org/10.1116/1.3498753
J. Vac. Sci. Technol. B 28, 1120–1124 (2010) https://doi.org/10.1116/1.3498755
J. Vac. Sci. Technol. B 28, 1125–1131 (2010) https://doi.org/10.1116/1.3497033
J. Vac. Sci. Technol. B 28, 1132–1137 (2010) https://doi.org/10.1116/1.3499647
J. Vac. Sci. Technol. B 28, 1138–1142 (2010) https://doi.org/10.1116/1.3499716
J. Vac. Sci. Technol. B 28, 1143–1147 (2010) https://doi.org/10.1116/1.3501109
J. Vac. Sci. Technol. B 28, 1148–1152 (2010) https://doi.org/10.1116/1.3501131
J. Vac. Sci. Technol. B 28, 1153–1157 (2010) https://doi.org/10.1116/1.3502024
J. Vac. Sci. Technol. B 28, 1158–1163 (2010) https://doi.org/10.1116/1.3499648
J. Vac. Sci. Technol. B 28, 1164–1168 (2010) https://doi.org/10.1116/1.3502674
J. Vac. Sci. Technol. B 28, 1169–1172 (2010) https://doi.org/10.1116/1.3497031
J. Vac. Sci. Technol. B 28, 1173–1178 (2010) https://doi.org/10.1116/1.3501338
J. Vac. Sci. Technol. B 28, 1179–1186 (2010) https://doi.org/10.1116/1.3501120
J. Vac. Sci. Technol. B 28, 1187–1194 (2010) https://doi.org/10.1116/1.3498737
J. Vac. Sci. Technol. B 28, 1195–1201 (2010) https://doi.org/10.1116/1.3503612
J. Vac. Sci. Technol. B 28, 1202–1205 (2010) https://doi.org/10.1116/1.3503619
J. Vac. Sci. Technol. B 28, 1206–1209 (2010) https://doi.org/10.1116/1.3504594
J. Vac. Sci. Technol. B 28, 1210–1214 (2010) https://doi.org/10.1116/1.3503611
J. Vac. Sci. Technol. B 28, 1215–1221 (2010) https://doi.org/10.1116/1.3504592
J. Vac. Sci. Technol. B 28, 1222–1230 (2010) https://doi.org/10.1116/1.3504595
J. Vac. Sci. Technol. B 28, 1231–1234 (2010) https://doi.org/10.1116/1.3506105
J. Vac. Sci. Technol. B 28, 1235–1238 (2010) https://doi.org/10.1116/1.3506111
J. Vac. Sci. Technol. B 28, 1239–1241 (2010) https://doi.org/10.1116/1.3501126
J. Vac. Sci. Technol. B 28, 1242–1250 (2010) https://doi.org/10.1116/1.3514206
J. Vac. Sci. Technol. B 28, 1251–1258 (2010) https://doi.org/10.1116/1.3504591
J. Vac. Sci. Technol. B 28, 1259–1266 (2010) https://doi.org/10.1116/1.3509437
J. Vac. Sci. Technol. B 28, 1267–1270 (2010) https://doi.org/10.1116/1.3514103
J. Vac. Sci. Technol. B 28, 1271–1273 (2010) https://doi.org/10.1116/1.3516010
J. Vac. Sci. Technol. B 28, 1274–1278 (2010) https://doi.org/10.1116/1.3516017
J. Vac. Sci. Technol. B 28, 1279–1283 (2010) https://doi.org/10.1116/1.3511505
J. Vac. Sci. Technol. B 28, 1284–1286 (2010) https://doi.org/10.1116/1.3506089
J. Vac. Sci. Technol. B 28, 1287–1297 (2010) https://doi.org/10.1116/1.3514117
J. Vac. Sci. Technol. B 28, 1298–1303 (2010) https://doi.org/10.1116/1.3516014
J. Vac. Sci. Technol. B 28, 1304–1313 (2010) https://doi.org/10.1116/1.3514124
J. Vac. Sci. Technol. B 28, 1314–1317 (2010) https://doi.org/10.1116/1.3514204
J. Vac. Sci. Technol. B 28, 1318–1321 (2010) https://doi.org/10.1116/1.3514205

Brief Reports and Comments

J. Vac. Sci. Technol. B 28, 1322–1325 (2010) https://doi.org/10.1116/1.3501127

Shop Notes

J. Vac. Sci. Technol. B 28, 1326–1329 (2010) https://doi.org/10.1116/1.3501118

PAPERS FROM THE 54th INTERNATIONAL CONFERENCE ON ELECTRON, ION, AND PHOTON BEAM TECHNOLOGY AND NANOFABRICATION

J. Vac. Sci. Technol. B 28, C6a1 (2010) https://doi.org/10.1116/1.3522593
Plenary
J. Vac. Sci. Technol. B 28, C6A1–C6A6 (2010) https://doi.org/10.1116/1.3517607
Directed Assembly
J. Vac. Sci. Technol. B 28, C6B1–C6B6 (2010) https://doi.org/10.1116/1.3517643
J. Vac. Sci. Technol. B 28, C6B13–C6B19 (2010) https://doi.org/10.1116/1.3518918
J. Vac. Sci. Technol. B 28, C6B20–C6B23 (2010) https://doi.org/10.1116/1.3518462
J. Vac. Sci. Technol. B 28, C6B24–C6B29 (2010) https://doi.org/10.1116/1.3518910
J. Vac. Sci. Technol. B 28, C6B30–C6B34 (2010) https://doi.org/10.1116/1.3501348
J. Vac. Sci. Technol. B 28, C6B7–C6B12 (2010) https://doi.org/10.1116/1.3501347
Electron Beams
J. Vac. Sci. Technol. B 28, C6C1–C6C5 (2010) https://doi.org/10.1116/1.3505130
J. Vac. Sci. Technol. B 28, C6C14–C6C20 (2010) https://doi.org/10.1116/1.3517664
J. Vac. Sci. Technol. B 28, C6C21–C6C25 (2010) https://doi.org/10.1116/1.3504566
J. Vac. Sci. Technol. B 28, C6C26–C6C33 (2010) https://doi.org/10.1116/1.3501362
J. Vac. Sci. Technol. B 28, C6C34–C6C40 (2010) https://doi.org/10.1116/1.3517721
J. Vac. Sci. Technol. B 28, C6C41–C6C47 (2010) https://doi.org/10.1116/1.3518917
J. Vac. Sci. Technol. B 28, C6C48–C6C57 (2010) https://doi.org/10.1116/1.3497019
J. Vac. Sci. Technol. B 28, C6C58–C6C62 (2010) https://doi.org/10.1116/1.3501353
J. Vac. Sci. Technol. B 28, C6C6–C6C13 (2010) https://doi.org/10.1116/1.3511436
J. Vac. Sci. Technol. B 28, C6C63–C6C68 (2010) https://doi.org/10.1116/1.3504590
J. Vac. Sci. Technol. B 28, C6C69–C6C73 (2010) https://doi.org/10.1116/1.3502658
J. Vac. Sci. Technol. B 28, C6C74–C6C79 (2010) https://doi.org/10.1116/1.3502642
Emerging Technologies
J. Vac. Sci. Technol. B 28, C6D1–C6D4 (2010) https://doi.org/10.1116/1.3511511
J. Vac. Sci. Technol. B 28, C6D11–C6D14 (2010) https://doi.org/10.1116/1.3516649
J. Vac. Sci. Technol. B 28, C6D5–C6D10 (2010) https://doi.org/10.1116/1.3511475
Extreme Ultraviolet Lithography
J. Vac. Sci. Technol. B 28, C6E1–C6E10 (2010) https://doi.org/10.1116/1.3498757
J. Vac. Sci. Technol. B 28, C6E11–C6E16 (2010) https://doi.org/10.1116/1.3498756
J. Vac. Sci. Technol. B 28, C6E17–C6E22 (2010) https://doi.org/10.1116/1.3502449
J. Vac. Sci. Technol. B 28, C6E23–C6E30 (2010) https://doi.org/10.1116/1.3502436
J. Vac. Sci. Technol. B 28, C6E31–C6E35 (2010) https://doi.org/10.1116/1.3501344
J. Vac. Sci. Technol. B 28, C6E36–C6E41 (2010) https://doi.org/10.1116/1.3505126
Focused Ion Beams
J. Vac. Sci. Technol. B 28, C6F1–C6F5 (2010) https://doi.org/10.1116/1.3502668
J. Vac. Sci. Technol. B 28, C6F10–C6F14 (2010) https://doi.org/10.1116/1.3497021
J. Vac. Sci. Technol. B 28, C6F15–C6F21 (2010) https://doi.org/10.1116/1.3511509
J. Vac. Sci. Technol. B 28, C6F22–C6F25 (2010) https://doi.org/10.1116/1.3517536
J. Vac. Sci. Technol. B 28, C6F26–C6F30 (2010) https://doi.org/10.1116/1.3497013
J. Vac. Sci. Technol. B 28, C6F31–C6F37 (2010) https://doi.org/10.1116/1.3516651
J. Vac. Sci. Technol. B 28, C6F38–C6F41 (2010) https://doi.org/10.1116/1.3504584
J. Vac. Sci. Technol. B 28, C6F6–C6F9 (2010) https://doi.org/10.1116/1.3497012
Masks and Maskless Lithography
J. Vac. Sci. Technol. B 28, C6G1–C6G4 (2010) https://doi.org/10.1116/1.3502437
J. Vac. Sci. Technol. B 28, C6G5–C6G10 (2010) https://doi.org/10.1116/1.3498749
Metrology and Imaging
J. Vac. Sci. Technol. B 28, C6H1–C6H5 (2010) https://doi.org/10.1116/1.3504476
J. Vac. Sci. Technol. B 28, C6H11–C6H17 (2010) https://doi.org/10.1116/1.3501359
J. Vac. Sci. Technol. B 28, C6H18–C6H33 (2010) https://doi.org/10.1116/1.3517718
J. Vac. Sci. Technol. B 28, C6H34–C6H39 (2010) https://doi.org/10.1116/1.3517717
J. Vac. Sci. Technol. B 28, C6H6–C6H10 (2010) https://doi.org/10.1116/1.3505129
Microfluidics
J. Vac. Sci. Technol. B 28, C6I1–C6I6 (2010) https://doi.org/10.1116/1.3505128
J. Vac. Sci. Technol. B 28, C6I11–C6I13 (2010) https://doi.org/10.1116/1.3517620
J. Vac. Sci. Technol. B 28, C6I14–C6I19 (2010) https://doi.org/10.1116/1.3502670
J. Vac. Sci. Technol. B 28, C6I7–C6I10 (2010) https://doi.org/10.1116/1.3517701
Modeling
J. Vac. Sci. Technol. B 28, C6J1–C6J7 (2010) https://doi.org/10.1116/1.3497024
J. Vac. Sci. Technol. B 28, C6J13–C6J18 (2010) https://doi.org/10.1116/1.3511506
J. Vac. Sci. Technol. B 28, C6J19–C6J24 (2010) https://doi.org/10.1116/1.3511510
J. Vac. Sci. Technol. B 28, C6J8–C6J12 (2010) https://doi.org/10.1116/1.3503899
Nanobiology
J. Vac. Sci. Technol. B 28, C6K1–C6K7 (2010) https://doi.org/10.1116/1.3511435
J. Vac. Sci. Technol. B 28, C6K13–C6K16 (2010) https://doi.org/10.1116/1.3498764
J. Vac. Sci. Technol. B 28, C6K17–C6K22 (2010) https://doi.org/10.1116/1.3501342
J. Vac. Sci. Technol. B 28, C6K8–C6K12 (2010) https://doi.org/10.1116/1.3507890
Nanoelectronics
J. Vac. Sci. Technol. B 28, C6L1–C6L5 (2010) https://doi.org/10.1116/1.3501355
J. Vac. Sci. Technol. B 28, C6L6–C6L8 (2010) https://doi.org/10.1116/1.3511432
J. Vac. Sci. Technol. B 28, C6L9–C6L13 (2010) https://doi.org/10.1116/1.3498748
Nanoimprint
J. Vac. Sci. Technol. B 28, C6M1–C6M6 (2010) https://doi.org/10.1116/1.3498750
J. Vac. Sci. Technol. B 28, C6M104–C6M107 (2010) https://doi.org/10.1116/1.3517513
J. Vac. Sci. Technol. B 28, C6M108–C6M113 (2010) https://doi.org/10.1116/1.3511789
J. Vac. Sci. Technol. B 28, C6M114–C6M121 (2010) https://doi.org/10.1116/1.3501361
J. Vac. Sci. Technol. B 28, C6M12–C6M16 (2010) https://doi.org/10.1116/1.3507882
J. Vac. Sci. Technol. B 28, C6M122–C6M124 (2010) https://doi.org/10.1116/1.3517608
J. Vac. Sci. Technol. B 28, C6M125–C6M129 (2010) https://doi.org/10.1116/1.3497015
J. Vac. Sci. Technol. B 28, C6M130–C6M135 (2010) https://doi.org/10.1116/1.3507888
J. Vac. Sci. Technol. B 28, C6M136–C6M139 (2010) https://doi.org/10.1116/1.3507879
J. Vac. Sci. Technol. B 28, C6M17–C6M22 (2010) https://doi.org/10.1116/1.3517511
J. Vac. Sci. Technol. B 28, C6M23–C6M27 (2010) https://doi.org/10.1116/1.3503896
J. Vac. Sci. Technol. B 28, C6M28–C6M31 (2010) https://doi.org/10.1116/1.3497018
J. Vac. Sci. Technol. B 28, C6M32–C6M36 (2010) https://doi.org/10.1116/1.3501352
J. Vac. Sci. Technol. B 28, C6M37–C6M40 (2010) https://doi.org/10.1116/1.3497022
J. Vac. Sci. Technol. B 28, C6M41–C6M44 (2010) https://doi.org/10.1116/1.3498762
J. Vac. Sci. Technol. B 28, C6M45–C6M49 (2010) https://doi.org/10.1116/1.3511474
J. Vac. Sci. Technol. B 28, C6M50–C6M56 (2010) https://doi.org/10.1116/1.3507440
J. Vac. Sci. Technol. B 28, C6M57–C6M62 (2010) https://doi.org/10.1116/1.3518914
J. Vac. Sci. Technol. B 28, C6M63–C6M67 (2010) https://doi.org/10.1116/1.3501343
J. Vac. Sci. Technol. B 28, C6M68–C6M71 (2010) https://doi.org/10.1116/1.3511434
J. Vac. Sci. Technol. B 28, C6M7–C6M11 (2010) https://doi.org/10.1116/1.3498752
J. Vac. Sci. Technol. B 28, C6M72–C6M76 (2010) https://doi.org/10.1116/1.3501339
J. Vac. Sci. Technol. B 28, C6M77–C6M82 (2010) https://doi.org/10.1116/1.3517537
J. Vac. Sci. Technol. B 28, C6M83–C6M87 (2010) https://doi.org/10.1116/1.3497023
J. Vac. Sci. Technol. B 28, C6M88–C6M92 (2010) https://doi.org/10.1116/1.3498759
J. Vac. Sci. Technol. B 28, C6M93–C6M97 (2010) https://doi.org/10.1116/1.3501341
J. Vac. Sci. Technol. B 28, C6M98–C6M103 (2010) https://doi.org/10.1116/1.3498754
Nanomechanics
J. Vac. Sci. Technol. B 28, C6N1–C6N6 (2010) https://doi.org/10.1116/1.3504892
J. Vac. Sci. Technol. B 28, C6N12–C6N17 (2010) https://doi.org/10.1116/1.3518465
J. Vac. Sci. Technol. B 28, C6N18–C6N23 (2010) https://doi.org/10.1116/1.3498760
J. Vac. Sci. Technol. B 28, C6N7–C6N11 (2010) https://doi.org/10.1116/1.3502614
Nanophotonics
J. Vac. Sci. Technol. B 28, C6O1–C6O7 (2010) https://doi.org/10.1116/1.3511508
J. Vac. Sci. Technol. B 28, C6O11–C6O15 (2010) https://doi.org/10.1116/1.3503897
J. Vac. Sci. Technol. B 28, C6O16–C6O20 (2010) https://doi.org/10.1116/1.3503898
J. Vac. Sci. Technol. B 28, C6O21–C6O25 (2010) https://doi.org/10.1116/1.3501349
J. Vac. Sci. Technol. B 28, C6O26–C6O29 (2010) https://doi.org/10.1116/1.3504890
J. Vac. Sci. Technol. B 28, C6O30–C6O33 (2010) https://doi.org/10.1116/1.3504586
J. Vac. Sci. Technol. B 28, C6O34–C6O37 (2010) https://doi.org/10.1116/1.3518461
J. Vac. Sci. Technol. B 28, C6O38–C6O44 (2010) https://doi.org/10.1116/1.3507887
J. Vac. Sci. Technol. B 28, C6O45–C6O49 (2010) https://doi.org/10.1116/1.3501351
J. Vac. Sci. Technol. B 28, C6O50–C6O55 (2010) https://doi.org/10.1116/1.3501350
J. Vac. Sci. Technol. B 28, C6O56–C6O59 (2010) https://doi.org/10.1116/1.3518460
J. Vac. Sci. Technol. B 28, C6O60–C6O63 (2010) https://doi.org/10.1116/1.3511430
J. Vac. Sci. Technol. B 28, C6O8–C6O10 (2010) https://doi.org/10.1116/1.3498763
Nanostructures
J. Vac. Sci. Technol. B 28, C6P1–C6P5 (2010) https://doi.org/10.1116/1.3504527
J. Vac. Sci. Technol. B 28, C6P11–C6P13 (2010) https://doi.org/10.1116/1.3501363
J. Vac. Sci. Technol. B 28, C6P14–C6P17 (2010) https://doi.org/10.1116/1.3495756
J. Vac. Sci. Technol. B 28, C6P18–C6P23 (2010) https://doi.org/10.1116/1.3517514
J. Vac. Sci. Technol. B 28, C6P24–C6P29 (2010) https://doi.org/10.1116/1.3517716
J. Vac. Sci. Technol. B 28, C6P30–C6P35 (2010) https://doi.org/10.1116/1.3501357
J. Vac. Sci. Technol. B 28, C6P36–C6P41 (2010) https://doi.org/10.1116/1.3517683
J. Vac. Sci. Technol. B 28, C6P42–C6P47 (2010) https://doi.org/10.1116/1.3501345
J. Vac. Sci. Technol. B 28, C6P48–C6P52 (2010) https://doi.org/10.1116/1.3518911
J. Vac. Sci. Technol. B 28, C6P53–C6P58 (2010) https://doi.org/10.1116/1.3511473
J. Vac. Sci. Technol. B 28, C6P59–C6P65 (2010) https://doi.org/10.1116/1.3504589
J. Vac. Sci. Technol. B 28, C6P6–C6P10 (2010) https://doi.org/10.1116/1.3501346
J. Vac. Sci. Technol. B 28, C6P66–C6P69 (2010) https://doi.org/10.1116/1.3517517
J. Vac. Sci. Technol. B 28, C6P70–C6P75 (2010) https://doi.org/10.1116/1.3507427
Novel Imaging-Optical Lithography
J. Vac. Sci. Technol. B 28, C6Q1–C6Q5 (2010) https://doi.org/10.1116/1.3501340
J. Vac. Sci. Technol. B 28, C6Q12–C6Q19 (2010) https://doi.org/10.1116/1.3504550
J. Vac. Sci. Technol. B 28, C6Q20–C6Q24 (2010) https://doi.org/10.1116/1.3504498