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Interface stability in advanced high- $κ$ -metal-gate stacks

C. Adelmann; A. Franquet; T. Conard; T. Witters; I. Ferain; J. Meersschaut; M. Jurczak; K. De Meyer; J. A. Kittl; S. Van Elshocht

J. Vac. Sci. Technol. B 27, 1021–1025 (2009) https://doi.org/10.1116/1.3112629

Abstract

View articletitled, Interface stability in advanced high-<math xmlns="http://www.w3.org/1998/Math/MathML"><mi xmlns="">κ</mi></math>-metal-gate stacks

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Electrical properties of metal-ferroelectric $(Pb {Zr}_{0.53} {Ti}_{0.47} O_{3})$ -polysilicon-insulator $(Y_{2} O_{3})$ -silicon capacitors and field-effect transistors

Po-Chin Chan; Wen-Chieh Shih; Ingram Yin-Ku Chang; Joseph Ya-min Lee

J. Vac. Sci. Technol. B 27, 1026–1029 (2009) https://doi.org/10.1116/1.3112651

Abstract

View articletitled, Electrical properties of metal-ferroelectric <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mo>(</mo><mi mathvariant="normal">Pb</mi><msub><mi mathvariant="normal">Zr</mi><mn>0.53</mn></msub><msub><mi mathvariant="normal">Ti</mi><mn>0.47</mn></msub><msub><mi mathvariant="normal">O</mi><mn>3</mn></msub><mo>)</mo></mrow></math>-polysilicon-insulator <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mo>(</mo><msub><mi mathvariant="normal">Y</mi><mn>2</mn></msub><msub><mi mathvariant="normal">O</mi><mn>3</mn></msub><mo>)</mo></mrow></math>-silicon capacitors and field-effect transistors

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Electrical levels of defect investigation of $Zr O_{2}$ thin film by spectroscopic ellipsometry

Y. R. Chen; P. Zhou; J. Li; L. Y. Chen

J. Vac. Sci. Technol. B 27, 1030–1034 (2009) https://doi.org/10.1116/1.3112652

Abstract

View articletitled, Electrical levels of defect investigation of <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mi mathvariant="normal">Zr</mi><msub><mi mathvariant="normal">O</mi><mn>2</mn></msub></mrow></math> thin film by spectroscopic ellipsometry

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Tunable optical filters with nanostructured suspended gratings

Jia-Sheng Ye; Takashi Kobayashi; Yoshiaki Kanamori; Fang-Ren Hu; Kazuhiro Hane

J. Vac. Sci. Technol. B 27, 1035–1038 (2009) https://doi.org/10.1116/1.3114465

Abstract

View articletitled, Tunable optical filters with nanostructured suspended gratings

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Contrast reversal effect in scanning electron microscopy due to charging

H. Abe; S. Babin; S. Borisov; A. Hamaguchi; M. Kadowaki; Y. Miyano; Y. Yamazaki

J. Vac. Sci. Technol. B 27, 1039–1042 (2009) https://doi.org/10.1116/1.3114486

Abstract

View articletitled, Contrast reversal effect in scanning electron microscopy due to charging

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Large-scale assembly of periodic nanostructures with metastable square lattices

Chih-Hung Sun; Wei-Lun Min; Nicholas C. Linn; Peng Jiang; Bin Jiang

J. Vac. Sci. Technol. B 27, 1043–1047 (2009) https://doi.org/10.1116/1.3117347

Abstract

View articletitled, Large-scale assembly of periodic nanostructures with metastable square lattices

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Laser micromachining of optical microstructures with inclined sidewall profile

X. H. Wang; P. T. Lai; H. W. Choi

J. Vac. Sci. Technol. B 27, 1048–1052 (2009) https://doi.org/10.1116/1.3117344

Abstract

View articletitled, Laser micromachining of optical microstructures with inclined sidewall profile

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Field-emission properties of multiwalled carbon nanotubes in gas

Q. Zou; M. Z. Wang

J. Vac. Sci. Technol. B 27, 1053–1056 (2009) https://doi.org/10.1116/1.3119683

Abstract

View articletitled, Field-emission properties of multiwalled carbon nanotubes in gas

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Isolation of organic field-effect transistors by surface patterning with an UV/ozone process

Sung-Jin Kim; Henry Beveridge; Jeffrey T. Koberstein; Ioannis Kymissis

J. Vac. Sci. Technol. B 27, 1057–1059 (2009) https://doi.org/10.1116/1.3117350

Abstract

View articletitled, Isolation of organic field-effect transistors by surface patterning with an UV/ozone process

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Protein patterning by thermal nanoimprint lithography and ${NH}_{3}$ -plasma functionalization of polystyrene

V. Trabadelo; A. Retolaza; S. Merino; A. Cruz; P. Heredia; A. Foelske; H. Schift; C. Padeste

J. Vac. Sci. Technol. B 27, 1060–1062 (2009) https://doi.org/10.1116/1.3123304

Abstract

View articletitled, Protein patterning by thermal nanoimprint lithography and <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><msub><mrow><mtext>NH</mtext></mrow><mn>3</mn></msub></mrow></math>-plasma functionalization of polystyrene

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Enhanced surface blistering of germanium with $B^{+} ∕ H^{+}$ coimplantation

Xiaobo Ma; Xiaofeng Du; Weili Liu; Chao Chen; Zhitang Song; Chenglu Lin

J. Vac. Sci. Technol. B 27, 1063–1067 (2009) https://doi.org/10.1116/1.3123321

Abstract

View articletitled, Enhanced surface blistering of germanium with <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><msup><mi mathvariant="normal">B</mi><mo>+</mo></msup><mo>∕</mo><msup><mi mathvariant="normal">H</mi><mo>+</mo></msup></mrow></math> coimplantation

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Improved field emission via laser processing of carbon nanotubes on paper substrates

S. M. Lyth; S. J. Henley; S. R. P. Silva

J. Vac. Sci. Technol. B 27, 1068–1071 (2009) https://doi.org/10.1116/1.3123326

Abstract

View articletitled, Improved field emission via laser processing of carbon nanotubes on paper substrates

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Topography of epitaxial GaAs surfaces for growth

S. Y. Lehman; A. Roshko; R. P. Mirin; K. A. Bertness; T. E. Harvey; K. D. Cobry

J. Vac. Sci. Technol. B 27, 1072–1079 (2009) https://doi.org/10.1116/1.3119684

Abstract

View articletitled, Topography of epitaxial GaAs surfaces for growth

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Fabrication and characterization of the substrate-free InGaN-based resonant-cavity light-emitting diodes for plastic optical fiber communications

Chia-Lung Tsai; Jia-Qing Lin; Ju-Ping Huang

J. Vac. Sci. Technol. B 27, 1080–1085 (2009) https://doi.org/10.1116/1.3119685

Abstract

View articletitled, Fabrication and characterization of the substrate-free InGaN-based resonant-cavity light-emitting diodes for plastic optical fiber communications

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Carbon nanotube array vias for interconnect applications

Jyh-Hua Ting; Ching-Chieh Chiu; Fuang-Yuan Huang

J. Vac. Sci. Technol. B 27, 1086–1092 (2009) https://doi.org/10.1116/1.3123330

Abstract

View articletitled, Carbon nanotube array vias for interconnect applications

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Inductively coupled plasma etching in fabrication of 2D InP-based photonic crystals

Hailing Wang; Mingxin Xing; Gang Ren; Wanhua Zheng

J. Vac. Sci. Technol. B 27, 1093–1096 (2009) https://doi.org/10.1116/1.3125268

Abstract

View articletitled, Inductively coupled plasma etching in fabrication of 2D InP-based photonic crystals

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Novel tapered macrogate structure for carbon nanotube based field emission display

Jin-Woo Jeong; Dae-Jun Kim; Kyung-Ik Cho; Yoon-Ho Song

J. Vac. Sci. Technol. B 27, 1097–1100 (2009) https://doi.org/10.1116/1.3125278

Abstract

View articletitled, Novel tapered macrogate structure for carbon nanotube based field emission display

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Aperture-edge scattering in MeV ion-beam lithography. I. Scattering from a straight Ta aperture edge

S. Gorelick; T. Sajavaara; Harry J. Whitlow

J. Vac. Sci. Technol. B 27, 1101–1108 (2009) https://doi.org/10.1116/1.3117257

Abstract

View articletitled, Aperture-edge scattering in MeV ion-beam lithography. I. Scattering from a straight Ta aperture edge

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Aperture-edge scattering in MeV ion-beam lithography. II. Scattering from a rectangular aperture

S. Gorelick; T. Sajavaara; Harry J. Whitlow

J. Vac. Sci. Technol. B 27, 1109–1115 (2009) https://doi.org/10.1116/1.3117281

Abstract

View articletitled, Aperture-edge scattering in MeV ion-beam lithography. II. Scattering from a rectangular aperture

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Effect of nanocomposite gate dielectric roughness on pentacene field-effect transistor

Wen-Hsi Lee; C. C. Wang

J. Vac. Sci. Technol. B 27, 1116–1121 (2009) https://doi.org/10.1116/1.3117360

Abstract

View articletitled, Effect of nanocomposite gate dielectric roughness on pentacene field-effect transistor

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Stochastic approach to modeling photoresist development

Chris Mack

J. Vac. Sci. Technol. B 27, 1122–1128 (2009) https://doi.org/10.1116/1.3117346

Abstract

View articletitled, Stochastic approach to modeling photoresist development

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dc and low frequency noise analysis of Fowler–Nordheim stress of $n$ -channel metal-oxide semiconductor field-effect transistors processed in a $65 nm$ technology

J. Armand; F. Martinez; P. Benoit; M. Valenza; E. Vincent; V. Huard; K. Rochereau

J. Vac. Sci. Technol. B 27, 1129–1131 (2009) https://doi.org/10.1116/1.3130166

Abstract

View articletitled, dc and low frequency noise analysis of Fowler–Nordheim stress of <math xmlns="http://www.w3.org/1998/Math/MathML"><mi xmlns="">n</mi></math>-channel metal-oxide semiconductor field-effect transistors processed in a <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mn>65</mn><mspace width="0.3em"></mspace><mi>nm</mi></mrow></math> technology

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Theory of space charge limited regime of thermionic energy converter with negative electron affinity emitter

Joshua Ryan Smith; Griff L. Bilbro; Robert J. Nemanich

J. Vac. Sci. Technol. B 27, 1132–1141 (2009) https://doi.org/10.1116/1.3125282

Abstract

View articletitled, Theory of space charge limited regime of thermionic energy converter with negative electron affinity emitter

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Study of ion and vacuum ultraviolet-induced effects on styrene- and ester-based polymers exposed to argon plasma

R. L. Bruce; S. Engelmann; T. Lin; T. Kwon; R. J. Phaneuf; G. S. Oehrlein; B. K. Long; C. G. Willson; J. J. Végh; D. Nest; D. B. Graves; A. Alizadeh

J. Vac. Sci. Technol. B 27, 1142–1155 (2009) https://doi.org/10.1116/1.3136864

Abstract

View articletitled, Study of ion and vacuum ultraviolet-induced effects on styrene- and ester-based polymers exposed to argon plasma

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Fabrication of crystalline Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation system

Shih-Che Hung; Shu-Chia Shiu; Cha-Hsin Chao; Ching-Fuh Lin

J. Vac. Sci. Technol. B 27, 1156–1160 (2009) https://doi.org/10.1116/1.3137963

Abstract

View articletitled, Fabrication of crystalline Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation system

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Low-resistance, highly transparent, and thermally stable Ti/ITO Ohmic contacts to $n - Ga N$

H. Guo; K. Brown; D. Korakakis; X. A. Cao

J. Vac. Sci. Technol. B 27, 1161–1164 (2009) https://doi.org/10.1116/1.3136922

Abstract

View articletitled, Low-resistance, highly transparent, and thermally stable Ti/ITO Ohmic contacts to <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mi>n</mi><mtext>-</mtext><mi mathvariant="normal">Ga</mi><mi mathvariant="normal">N</mi></mrow></math>

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Dependence of photoresist surface modifications during plasma-based pattern transfer on choice of feedgas composition: Comparison of $C_{4} F_{8}$ - and $C F_{4}$ -based discharges

S. Engelmann; R. L. Bruce; F. Weilnboeck; M. Sumiya; T. Kwon; R. Phaneuf; G. S. Oehrlein; C. Andes; D. Graves; D. Nest; E. A. Hudson

J. Vac. Sci. Technol. B 27, 1165–1179 (2009) https://doi.org/10.1116/1.3137012

Abstract

View articletitled, Dependence of photoresist surface modifications during plasma-based pattern transfer on choice of feedgas composition: Comparison of <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><msub><mi mathvariant="normal">C</mi><mn>4</mn></msub><msub><mi mathvariant="normal">F</mi><mn>8</mn></msub></mrow></math>- and <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mi mathvariant="normal">C</mi><msub><mi mathvariant="normal">F</mi><mn>4</mn></msub></mrow></math>-based discharges

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Ion beam sputtering of ${Ta}_{2} O_{5}$ films on thermoplast substrates as waveguides for biosensors

W. Kulisch; D. Gilliland; G. Ceccone; L. Sirghi; H. Rauscher; P. N. Gibson; M. Zürn; F. Bretagnol; F. Rossi

J. Vac. Sci. Technol. B 27, 1180–1190 (2009) https://doi.org/10.1116/1.3137965

Abstract

View articletitled, Ion beam sputtering of <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><msub><mi mathvariant="normal">Ta</mi><mn>2</mn></msub><msub><mi mathvariant="normal">O</mi><mn>5</mn></msub></mrow></math> films on thermoplast substrates as waveguides for biosensors

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Thermal imprint into thin polymer layers below the critical molecular weight

Nicolas Bogdanski; Matthias Wissen; Saskia Möllenbeck; Hella-Christin Scheer

J. Vac. Sci. Technol. B 27, 1191–1194 (2009) https://doi.org/10.1116/1.3112630

Abstract

View articletitled, Thermal imprint into thin polymer layers below the critical molecular weight

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Commercial molecular beam epitaxy production of high quality $Sr Ti O_{3}$ on large diameter Si substrates

X. Gu; D. Lubyshev; J. Batzel; J. M. Fastenau; W. K. Liu; R. Pelzel; J. F. Magana; Q. Ma; L. P. Wang; P. Zhang; V. R. Rao

J. Vac. Sci. Technol. B 27, 1195–1199 (2009) https://doi.org/10.1116/1.3130165

Abstract

View articletitled, Commercial molecular beam epitaxy production of high quality <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mi mathvariant="normal">Sr</mi><mi mathvariant="normal">Ti</mi><msub><mi mathvariant="normal">O</mi><mn>3</mn></msub></mrow></math> on large diameter Si substrates

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Use of the concept “area efficiency of emission” in equations describing field emission from large-area electron sources

Richard G. Forbes

J. Vac. Sci. Technol. B 27, 1200–1203 (2009) https://doi.org/10.1116/1.3137964

Abstract

View articletitled, Use of the concept “area efficiency of emission” in equations describing field emission from large-area electron sources

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Brief Reports and Comments

Multi- ${WO}_{3}$ nanowire based gas detector

Sungmu Kang; Jugdersuren Battogtokh; David A. McKeown; Andrew C. Buechele; Ian L. Pegg; John Philip

J. Vac. Sci. Technol. B 27, 1204–1206 (2009) https://doi.org/10.1116/1.3112653

Abstract

View articletitled, Multi-<math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><msub><mrow><mtext>WO</mtext></mrow><mn>3</mn></msub></mrow></math> nanowire based gas detector

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$3 ω$ thermal conductivity measurements of thin film dielectrics on silicon for use in cantilever-based IR imaging

C. D. W. Jones; F. Pardo; C.-S. Pai; J. E. Bower; J. F. Miner; F. P. Klemens; R. A. Cirelli; E. J. Ferry; J. A. Taylor; M. R. Baker; B. S. Dennis; W. M. Mansfield; A. Kornblit; R. C. Keller; J. V. Gates; A. P. Ramirez

J. Vac. Sci. Technol. B 27, 1207–1210 (2009) https://doi.org/10.1116/1.3137962

Extract

View articletitled, <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mn>3</mn><mi>ω</mi></mrow></math> thermal conductivity measurements of thin film dielectrics on silicon for use in cantilever-based IR imaging

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Shop Notes

Integrated bake/chill system for across-wafer temperature uniformity control in photoresist processing

Hui Tong Chua; Arthur Tay; Yuheng Wang

J. Vac. Sci. Technol. B 27, 1211–1214 (2009) https://doi.org/10.1116/1.3117354

Abstract

View articletitled, Integrated bake/chill system for across-wafer temperature uniformity control in photoresist processing

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Dip-pen nanolithography on etched InAs(100) using homogeneous and mixed ink solutions

John W. J. Slavin; Albena Ivanisevic

J. Vac. Sci. Technol. B 27, 1215–1217 (2009) https://doi.org/10.1116/1.3138003

Extract

View articletitled, Dip-pen nanolithography on etched InAs(100) using homogeneous and mixed ink solutions

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Papers from the 1st International Conference on NanoManufacturing (NanoMan 2008)

Preface

Fengzhou Fang; Jack Luo

J. Vac. Sci. Technol. B 27, 1220 (2009) https://doi.org/10.1116/1.3054327

Extract

View articletitled, Preface

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Freeform Machining

Design of a magnetic-assistance superfinish module for freeform machining

P. S. Pa

J. Vac. Sci. Technol. B 27, 1221–1225 (2009) https://doi.org/10.1116/1.3072887

Abstract

View articletitled, Design of a magnetic-assistance superfinish module for freeform machining

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Fast tool servo control for diamond-cutting microstructured optical components

H. J. Zhang; S. J. Chen; M. Zhou; Y. H. Yang

J. Vac. Sci. Technol. B 27, 1226–1229 (2009) https://doi.org/10.1116/1.3086651

Abstract

View articletitled, Fast tool servo control for diamond-cutting microstructured optical components

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Prediction and simulation of surface topomorphy in ultraprecision milling for optical freeform surface

Zhong-Cheng Luo; Fang-Yu Peng; Xu-Bing Chen; Li-Feng Wei

J. Vac. Sci. Technol. B 27, 1230–1237 (2009) https://doi.org/10.1116/1.3081984

Abstract

View articletitled, Prediction and simulation of surface topomorphy in ultraprecision milling for optical freeform surface

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Diamond milling of nitrided steels for optical mold making

J. Osmer; R. Gläbe; O. Riemer; E. Brinksmeier; S. Bütepage; F. Hoffmann

J. Vac. Sci. Technol. B 27, 1238–1240 (2009) https://doi.org/10.1116/1.3049512

Abstract

View articletitled, Diamond milling of nitrided steels for optical mold making

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Enhancing the performance of polycrystalline diamond tools for machining WC by ultrasonic elliptical vibration cutting method

Chandra Nath; Mustafizur Rahman; Ken Soon Neo

J. Vac. Sci. Technol. B 27, 1241–1246 (2009) https://doi.org/10.1116/1.3125276

Abstract

View articletitled, Enhancing the performance of polycrystalline diamond tools for machining WC by ultrasonic elliptical vibration cutting method

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Nano and Micro Device and Systems

Controlled monolayer self-assembly process based on the atomic force microscopy nanoscratching method

Y. D. Yan; T. Sun; B. Pan; J. W. Zhao; S. Dong

J. Vac. Sci. Technol. B 27, 1247–1250 (2009) https://doi.org/10.1116/1.3072886

Abstract

View articletitled, Controlled monolayer self-assembly process based on the atomic force microscopy nanoscratching method

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Microelectromechanical systems motion measurement and modal analysis based on Doppler interferometry

G. X. Zhang; Y. Zhong; X. Hong; C. L. Leng

J. Vac. Sci. Technol. B 27, 1251–1255 (2009) https://doi.org/10.1116/1.3081999

Abstract

View articletitled, Microelectromechanical systems motion measurement and modal analysis based on Doppler interferometry

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Impact of channel width and dummy length on performance enhancement in $p$ -type metal oxide semiconductor field effect transistor with a silicon-germanium alloy stressor

Chang-Chun Lee; Jacky Huang; Shu-Tong Chang; Wei-Ching Wang

J. Vac. Sci. Technol. B 27, 1256–1260 (2009) https://doi.org/10.1116/1.3071858

Abstract

View articletitled, Impact of channel width and dummy length on performance enhancement in <math xmlns="http://www.w3.org/1998/Math/MathML"><mi xmlns="">p</mi></math>-type metal oxide semiconductor field effect transistor with a silicon-germanium alloy stressor

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Carrier backscattering characteristics of nanoscale strained complementary metal-oxide-semiconductor devices featuring the optimal stress engineering

Shu-Tong Chang; Ming-Han Liao; Chang-Chun Lee; Jacky Huang; Wei-Ching Wang; Bing-Fong Hsieh

J. Vac. Sci. Technol. B 27, 1261–1266 (2009) https://doi.org/10.1116/1.3125275

Abstract

View articletitled, Carrier backscattering characteristics of nanoscale strained complementary metal-oxide-semiconductor devices featuring the optimal stress engineering

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Design and optimization of wafer bonding packaged microelectromechanical systems thermoelectric power generators with heat dissipation path

Chengkuo Lee; Jin Xie

J. Vac. Sci. Technol. B 27, 1267–1271 (2009) https://doi.org/10.1116/1.3046155

Abstract

View articletitled, Design and optimization of wafer bonding packaged microelectromechanical systems thermoelectric power generators with heat dissipation path

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Development of a fine tool servo with force monitoring system for nanomachining applications

S. W. Gan; M. Rahman; H. S. Lim

J. Vac. Sci. Technol. B 27, 1272–1277 (2009) https://doi.org/10.1116/1.3049514

Abstract

View articletitled, Development of a fine tool servo with force monitoring system for nanomachining applications

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Development of three-axis desktop milling machine

Q. Y. Wang; F. Z. Fang; X. T. Hu

J. Vac. Sci. Technol. B 27, 1278–1284 (2009) https://doi.org/10.1116/1.3056173

Abstract

View articletitled, Development of three-axis desktop milling machine

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Development of the control system for three-axis ultraprecision compact micromilling machine

Bo Wang; Peng Zhang; Yingchun Liang; Shen Dong

J. Vac. Sci. Technol. B 27, 1285–1287 (2009) https://doi.org/10.1116/1.3110007

Abstract

View articletitled, Development of the control system for three-axis ultraprecision compact micromilling machine

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Study on structure optimization of a piezoelectric cantilever with a proof mass for vibration-powered energy harvesting system

Yanning Li; Wen Li; Tong Guo; Zhidan Yan; Xing Fu; Xiaotang Hu

J. Vac. Sci. Technol. B 27, 1288–1290 (2009) https://doi.org/10.1116/1.3119677

Abstract

View articletitled, Study on structure optimization of a piezoelectric cantilever with a proof mass for vibration-powered energy harvesting system

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Silicon-on-insulation-based deformable mirror array for adaptive optics

D. J. Wang; J. Yao; C. K. Qiu; F. R. Hu; T. Q. Fan

J. Vac. Sci. Technol. B 27, 1291–1294 (2009) https://doi.org/10.1116/1.3066004

Abstract

View articletitled, Silicon-on-insulation-based deformable mirror array for adaptive optics

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Development of microfluidic device and system for breast cancer cell fluorescence detection

J. H. He; J. Reboud; H. M. Ji; C. Lee; Y. Long

J. Vac. Sci. Technol. B 27, 1295–1298 (2009) https://doi.org/10.1116/1.3049529

Abstract

View articletitled, Development of microfluidic device and system for breast cancer cell fluorescence detection

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Focused Ion Beam and Laser Fabrication

Low-cost x-ray mask based on micropattern sputtered lead film for x-ray lithography

S. Mongpraneet; A. Wisitsora-at; R. Phatthanakun; N. Chomnawang; A. Tuantranont

J. Vac. Sci. Technol. B 27, 1299–1303 (2009) https://doi.org/10.1116/1.3117259

Abstract

View articletitled, Low-cost x-ray mask based on micropattern sputtered lead film for x-ray lithography

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Controlled morphology of microtools shaped using focused ion beam milling technique

S. J. Zhang; F. Z. Fang; Z. W. Xu; X. T. Hu

J. Vac. Sci. Technol. B 27, 1304–1309 (2009) https://doi.org/10.1116/1.3054294

Abstract

View articletitled, Controlled morphology of microtools shaped using focused ion beam milling technique

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Micro-electron-beam welding with a modified scanning electron microscopy: Findings and prospects

U. Reisgen; T. Dorfmüller

J. Vac. Sci. Technol. B 27, 1310–1314 (2009) https://doi.org/10.1116/1.3137026

Abstract

View articletitled, Micro-electron-beam welding with a modified scanning electron microscopy: Findings and prospects

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Design and calibration method for microvision three-dimensional laser scanner

Changku Sun; Bin Liu; Peng Wang

J. Vac. Sci. Technol. B 27, 1315–1318 (2009) https://doi.org/10.1116/1.3081982

Abstract

View articletitled, Design and calibration method for microvision three-dimensional laser scanner

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Realization of nanosecond pulse laser micromachining system

Chunyang Liu; Xing Fu; Yong Wu; Yi Li; Fengming Sun; Xiaotang Hu

J. Vac. Sci. Technol. B 27, 1319–1322 (2009) https://doi.org/10.1116/1.3119676

Abstract

View articletitled, Realization of nanosecond pulse laser micromachining system

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Development of a system for laser-assisted molding of micro- and nanostructures

Walter Michaeli; Fritz Klaiber

J. Vac. Sci. Technol. B 27, 1323–1326 (2009) https://doi.org/10.1116/1.3079764

Abstract

View articletitled, Development of a system for laser-assisted molding of micro- and nanostructures

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Hybrid machining of microstructures using a combination of electrical discharge machining milling and laser ablation

Patricia Weber; Sebastian Haupt; Volker Schulze

J. Vac. Sci. Technol. B 27, 1327–1329 (2009) https://doi.org/10.1116/1.3086652

Abstract

View articletitled, Hybrid machining of microstructures using a combination of electrical discharge machining milling and laser ablation

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Ultra-precision Machining

Investigation of finish cut of microelectrodischarge milling for nanosurface finish

M. Y. Ali; R. Mehfuz

J. Vac. Sci. Technol. B 27, 1330–1334 (2009) https://doi.org/10.1116/1.3079701

Abstract

View articletitled, Investigation of finish cut of microelectrodischarge milling for nanosurface finish

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Tool wear study in diamond turning of steels

T. F. Dai; F. Z. Fang; X. T. Hu

J. Vac. Sci. Technol. B 27, 1335–1339 (2009) https://doi.org/10.1116/1.3049516

Abstract

View articletitled, Tool wear study in diamond turning of steels

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Three-dimensional molecular dynamics modeling of nanocutting

Z. G. Zhang; F. Z. Fang; X. T. Hu; C. K. Sun

J. Vac. Sci. Technol. B 27, 1340–1344 (2009) https://doi.org/10.1116/1.3079760

Abstract

View articletitled, Three-dimensional molecular dynamics modeling of nanocutting

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Diamond cutting of a large off-axis Fresnel lens Mold

Jianqiang Guo; Hitoshi Ohmori; Yoshihiro Uehara; Shinya Morita; Kazutoshi Katahira

J. Vac. Sci. Technol. B 27, 1345–1350 (2009) https://doi.org/10.1116/1.3093926

Abstract

View articletitled, Diamond cutting of a large off-axis Fresnel lens Mold

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Investigation on feedback control of linear motors in ultraprecision-machine feed-drive systems

Chao-Liang Guan; Yi-Fan Dai; Xu-Hui Xie; Zi-Qiang Yin

J. Vac. Sci. Technol. B 27, 1351–1354 (2009) https://doi.org/10.1116/1.3137966

Abstract

View articletitled, Investigation on feedback control of linear motors in ultraprecision-machine feed-drive systems

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Molecular dynamics study on various nanometric cutting boundary conditions

Z. G. Zhang; F. Z. Fang; X. T. Hu; C. K. Sun

J. Vac. Sci. Technol. B 27, 1355–1360 (2009) https://doi.org/10.1116/1.3049513

Abstract

View articletitled, Molecular dynamics study on various nanometric cutting boundary conditions

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Nanometric ductile cutting characteristics of silicon wafer using single crystal diamond tools

Kui Liu; Dunwen Zuo; X. P. Li; M. Rahman

J. Vac. Sci. Technol. B 27, 1361–1366 (2009) https://doi.org/10.1116/1.3071855

Abstract

View articletitled, Nanometric ductile cutting characteristics of silicon wafer using single crystal diamond tools

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Fabrication of cutting tools for ultraprecision machining of tantalum and their cutting characteristics

M. Mizutani; T. Naruse; Y. Kameyama; Y. Koma; H. Ohmori; C. Sasaki

J. Vac. Sci. Technol. B 27, 1367–1369 (2009) https://doi.org/10.1116/1.3066028

Abstract

View articletitled, Fabrication of cutting tools for ultraprecision machining of tantalum and their cutting characteristics

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Nano Metrology and Characterization/Optics and Interferometry

Morphological observation and adhesive property measurement on human ovary carcinoma cells by atomic force microscopy

Yimin Han; Jing Wang; Yongda Yan; Tao Sun; Dong Shen

J. Vac. Sci. Technol. B 27, 1370–1373 (2009) https://doi.org/10.1116/1.3066057

Abstract

View articletitled, Morphological observation and adhesive property measurement on human ovary carcinoma cells by atomic force microscopy

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Nanoscratch-induced deformation of single crystal silicon

Y. Q. Wu; H. Huang; J. Zou; J. M. Dell

J. Vac. Sci. Technol. B 27, 1374–1377 (2009) https://doi.org/10.1116/1.3049517

Abstract

View articletitled, Nanoscratch-induced deformation of single crystal silicon

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Nanostructure and optical properties of $Si O_{2}$ films prepared by reactive midfrenquency magnetron sputtering

Yongzhi Cao; Shen Dong; Tao Sun; Yongda Yan; Qingliang Zhao

J. Vac. Sci. Technol. B 27, 1378–1380 (2009) https://doi.org/10.1116/1.3065993

Abstract

View articletitled, Nanostructure and optical properties of <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mi mathvariant="normal">Si</mi><msub><mi mathvariant="normal">O</mi><mn>2</mn></msub></mrow></math> films prepared by reactive midfrenquency magnetron sputtering

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Characterization of the $Ag ∕ Fe$ nanocomposite fluid

Ho Chang; Yan-Chyuan Wu; Mu-Jung Kao; Tung-Jung Shieh; Ching-Song Jwo

J. Vac. Sci. Technol. B 27, 1381–1384 (2009) https://doi.org/10.1116/1.3065995

Abstract

View articletitled, Characterization of the <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mi mathvariant="normal">Ag</mi><mo>∕</mo><mi mathvariant="normal">Fe</mi></mrow></math> nanocomposite fluid

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Fe-modified ${TiO}_{2}$ nanocatalyst under blue-light irradiation

Y. L. Wei; K. W. Chen; H. P. Wang

J. Vac. Sci. Technol. B 27, 1385–1387 (2009) https://doi.org/10.1116/1.3079700

Abstract

View articletitled, Fe-modified <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><msub><mrow><mtext>TiO</mtext></mrow><mn>2</mn></msub></mrow></math> nanocatalyst under blue-light irradiation

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Configuration control of carbon nanotube probe in atomic force microscopy

Z. W. Xu; F. Z. Fang

J. Vac. Sci. Technol. B 27, 1388–1393 (2009) https://doi.org/10.1116/1.3054297

Abstract

View articletitled, Configuration control of carbon nanotube probe in atomic force microscopy

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Measuring the nose roundness of diamond cutting tools based on atomic force microscopy

Z. Q. Li; T. Sun; P. Li; X. S. Zhao; S. Dong

J. Vac. Sci. Technol. B 27, 1394–1398 (2009) https://doi.org/10.1116/1.3110011

Abstract

View articletitled, Measuring the nose roundness of diamond cutting tools based on atomic force microscopy

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Fabrication of functional structures at Si (100) surface by mechanical scribing in the presence of aryl diazonium salts

Liqiu Shi; Tao Sun; Yongda Yan; Jianwei Zhao; Shen Dong

J. Vac. Sci. Technol. B 27, 1399–1402 (2009) https://doi.org/10.1116/1.3137025

Abstract

View articletitled, Fabrication of functional structures at Si (100) surface by mechanical scribing in the presence of aryl diazonium salts

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Long-working-distance Linnik microscopic interferometry for measuring the surface profile of microstructures

Xiaodong Hu; Shujuan Deng; Wenan Wang; Xiaotang Hu

J. Vac. Sci. Technol. B 27, 1403–1407 (2009) https://doi.org/10.1116/1.3046154

Abstract

View articletitled, Long-working-distance Linnik microscopic interferometry for measuring the surface profile of microstructures

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Integrated microactuation scanning probe microscopy system

Xing Chen; Dong-Weon Lee

J. Vac. Sci. Technol. B 27, 1408–1412 (2009) https://doi.org/10.1116/1.3093930

Abstract

View articletitled, Integrated microactuation scanning probe microscopy system

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Analysis on vibration rejection ratio of scanning probe microscope

Jinping Chen; Tong Guo; Xiaodong Hu; Xiaotang Hu

J. Vac. Sci. Technol. B 27, 1413–1417 (2009) https://doi.org/10.1116/1.3112626

Abstract

View articletitled, Analysis on vibration rejection ratio of scanning probe microscope

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Framework for adaptive three-dimensional acquisition using structured light vision system

Peng Wang; Zimiao Zhang; Changku Sun

J. Vac. Sci. Technol. B 27, 1418–1421 (2009) https://doi.org/10.1116/1.3049530

Abstract

View articletitled, Framework for adaptive three-dimensional acquisition using structured light vision system

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Development of an integral optics system for a slim optical mouse in a slim portable electric device

Do-Kyun Woo; Kazuhiro Hane; Seong-Cheon Cho; Sun-Kyu Lee

J. Vac. Sci. Technol. B 27, 1422–1427 (2009) https://doi.org/10.1116/1.3046151

Abstract

View articletitled, Development of an integral optics system for a slim optical mouse in a slim portable electric device

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Research on the influence of membrane on the performance of vibration sensor

Rui Li; Wen Xiao; Xiaosu Yi; Bingshi Xu; Junlei Chang

J. Vac. Sci. Technol. B 27, 1428–1430 (2009) https://doi.org/10.1116/1.3123303

Abstract

View articletitled, Research on the influence of membrane on the performance of vibration sensor

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Micro Injection and Molding Technologies

Micro-ink-jetting of silver nanoparticles on low temperature cofired ceramic substrates for drop-on-demand metallization

Y. N. Liang; Xuechuan Shan; P. W. Gian; B. K. Lok; C. W. Lu

J. Vac. Sci. Technol. B 27, 1431–1436 (2009) https://doi.org/10.1116/1.3093921

Abstract

View articletitled, Micro-ink-jetting of silver nanoparticles on low temperature cofired ceramic substrates for drop-on-demand metallization

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Experimental study of influential process parameters in hot embossing for micropattern formation on low temperature cofirable ceramic green substrates

Xuechuan Shan; Y. C. Lam; C. H. Chua; S. H. Ling; C. W. Lu

J. Vac. Sci. Technol. B 27, 1437–1441 (2009) https://doi.org/10.1116/1.3056175

Abstract

View articletitled, Experimental study of influential process parameters in hot embossing for micropattern formation on low temperature cofirable ceramic green substrates

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Analysis of different compression-molding techniques regarding the quality of optical lenses

Walter Michaeli; Sebastian Hessner; Fritz Klaiber

J. Vac. Sci. Technol. B 27, 1442–1444 (2009) https://doi.org/10.1116/1.3079765

Abstract

View articletitled, Analysis of different compression-molding techniques regarding the quality of optical lenses

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Efficient mold manufacturing for precision glass molding

Olaf Dambon; Fei Wang; Fritz Klocke; Guido Pongs; Bernd Bresseler; Yang Chen; Allen Y. Yi

J. Vac. Sci. Technol. B 27, 1445–1449 (2009) https://doi.org/10.1116/1.3056171

Abstract

View articletitled, Efficient mold manufacturing for precision glass molding

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Nanomaterial Fabrication and Application

Low temperature plasma-initiated copolymerization of styrene and maleic anhydride

Da Yan; Xu-Bo Yuan; Gui-Qiu Ma; Jing Sheng

J. Vac. Sci. Technol. B 27, 1450–1453 (2009) https://doi.org/10.1116/1.3058728

Abstract

View articletitled, Low temperature plasma-initiated copolymerization of styrene and maleic anhydride

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Light-scattering study of the morphology, structure, and mechanical properties of high impact polystyrene alloys with poly(cis-butadiene) rubber

Gui-Qiu Ma; Xu-Bo Yuan; Yun-Ping Han; Li-Li Cui; Jing Sheng

J. Vac. Sci. Technol. B 27, 1454–1461 (2009) https://doi.org/10.1116/1.3086654

Abstract

View articletitled, Light-scattering study of the morphology, structure, and mechanical properties of high impact polystyrene alloys with poly(cis-butadiene) rubber

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Ion sensitivity of the flowerlike ZnO nanorods synthesized by the hydrothermal process

Jung-Lung Chiang; Jung-Fu Hsu; Shih-Fong Lee; Li-Ying Lee; Han-Ying Liu

J. Vac. Sci. Technol. B 27, 1462–1465 (2009) https://doi.org/10.1116/1.3079766

Abstract

View articletitled, Ion sensitivity of the flowerlike ZnO nanorods synthesized by the hydrothermal process

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Modeling and fabrication of thin film thermopile sensor

Jung-Kyun Kim; Tae-Hwa Kim; Sung-Cheon Cho; Sang-Mo Shin; Sun-Kyu Lee

J. Vac. Sci. Technol. B 27, 1466–1472 (2009) https://doi.org/10.1116/1.3046152

Abstract

View articletitled, Modeling and fabrication of thin film thermopile sensor

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Effects of nanolubricant on performance of hydrocarbon refrigerant system

Ching-Song Jwo; Lung-Yue Jeng; Tun-Ping Teng; Ho Chang

J. Vac. Sci. Technol. B 27, 1473–1477 (2009) https://doi.org/10.1116/1.3089373

Abstract

View articletitled, Effects of nanolubricant on performance of hydrocarbon refrigerant system

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Surfactant assisted solution spray synthesis of stabilized prussian blue and iron oxide for preparation of nanolatex composites

R. D. Kulkarni; N. Ghosh; U. D. Patil; S. Mishra

J. Vac. Sci. Technol. B 27, 1478–1483 (2009) https://doi.org/10.1116/1.3110014

Abstract

View articletitled, Surfactant assisted solution spray synthesis of stabilized prussian blue and iron oxide for preparation of nanolatex composites

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Fabrication of $Ti O_{2}$ and Ag wires and arrays using opal polystyrene crystal templates

Montree Sawangphruk; John S. Foord

J. Vac. Sci. Technol. B 27, 1484–1488 (2009) https://doi.org/10.1116/1.3054299

Abstract

View articletitled, Fabrication of <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mi mathvariant="normal">Ti</mi><msub><mi mathvariant="normal">O</mi><mn>2</mn></msub></mrow></math> and Ag wires and arrays using opal polystyrene crystal templates

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Grinding and Polishing

Investigation of surface and subsurface damage in diamond grinding of optical glass using hybrid copper-resin-bonded diamond wheel

Qingliang Zhao; Junyun Chen; Jun Yao; Shangli Zhou

J. Vac. Sci. Technol. B 27, 1489–1495 (2009) https://doi.org/10.1116/1.3137024

Abstract

View articletitled, Investigation of surface and subsurface damage in diamond grinding of optical glass using hybrid copper-resin-bonded diamond wheel

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Study on reaction mechanism of Si and pure $Ce O_{2}$ for chemical-mechanical-grinding process

Sumio Kamiya; Hisao Iwase; Keisuke Kishita; Libo Zhou; Hiroshi Eda; Yuji Yoshida

J. Vac. Sci. Technol. B 27, 1496–1502 (2009) https://doi.org/10.1116/1.3046145

Abstract

View articletitled, Study on reaction mechanism of Si and pure <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mi mathvariant="normal">Ce</mi><msub><mi mathvariant="normal">O</mi><mn>2</mn></msub></mrow></math> for chemical-mechanical-grinding process

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Micromachining of aluminum pipes using magnetic abrasive finishing

Mehrdad Vahdati; Nader Vahdati

J. Vac. Sci. Technol. B 27, 1503–1505 (2009) https://doi.org/10.1116/1.3125270

Abstract

View articletitled, Micromachining of aluminum pipes using magnetic abrasive finishing

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New technology for the trueing of microgrinding wheels

H.-W. Hoffmeister; M. Hlavac; C. Schnell

J. Vac. Sci. Technol. B 27, 1506–1508 (2009) https://doi.org/10.1116/1.3117258

Abstract

View articletitled, New technology for the trueing of microgrinding wheels

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Research on NC interpolation algorithm for rotary symmetric aspheric ultrasonic-magnetorheological compound finishing

Yong Zhang; Feihu Zhang; Guangyu Zhang; Dianrong Luan

J. Vac. Sci. Technol. B 27, 1509–1513 (2009) https://doi.org/10.1116/1.3117260

Abstract

View articletitled, Research on NC interpolation algorithm for rotary symmetric aspheric ultrasonic-magnetorheological compound finishing

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Basic research on polishing with ice bonded nanoabrasive pad

Dunwen Zuo; Yuli Sun; Yufei Zhao; Yongwei Zhu

J. Vac. Sci. Technol. B 27, 1514–1519 (2009) https://doi.org/10.1116/1.3125272

Abstract

View articletitled, Basic research on polishing with ice bonded nanoabrasive pad

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Other Technologies Associated with Nanomanufacturing

Deep reactive ion etching as a tool for nanostructure fabrication

Y. Q. Fu; A. Colli; A. Fasoli; J. K. Luo; A. J. Flewitt; A. C. Ferrari; W. I. Milne

J. Vac. Sci. Technol. B 27, 1520–1526 (2009) https://doi.org/10.1116/1.3065991

Abstract

View articletitled, Deep reactive ion etching as a tool for nanostructure fabrication

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Applying the conjugation of the nanoscale core-shell structure with optical magnetic properties to DNA hybridization

Ho Chang; Wei-Cheng Tzeng; Mu-Jung Kao

J. Vac. Sci. Technol. B 27, 1527–1530 (2009) https://doi.org/10.1116/1.3079722

Abstract

View articletitled, Applying the conjugation of the nanoscale core-shell structure with optical magnetic properties to DNA hybridization

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Modeling and experimental analysis of microburr formation considering tool edge radius and tool-tip breakage in microend milling

Y. C. Liang; K. Yang; Q. S. Bai; J. X. Chen; B. Wang

J. Vac. Sci. Technol. B 27, 1531–1535 (2009) https://doi.org/10.1116/1.3046147

Abstract

View articletitled, Modeling and experimental analysis of microburr formation considering tool edge radius and tool-tip breakage in microend milling

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Three-dimensional molecular dynamics simulation of nanostructure for reciprocating nanomachining process

Ying-Chun Liang; Jia-Xuan Chen; Ming-Jun Chen; Dai-Ping Song; Qing-Shun Bai

J. Vac. Sci. Technol. B 27, 1536–1542 (2009) https://doi.org/10.1116/1.3110027

Abstract

View articletitled, Three-dimensional molecular dynamics simulation of nanostructure for reciprocating nanomachining process

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Representation of product model in collaborative design based on semantic web technology

Xiangzhong Feng

J. Vac. Sci. Technol. B 27, 1543–1547 (2009) https://doi.org/10.1116/1.3054296

Abstract

View articletitled, Representation of product model in collaborative design based on semantic web technology

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Adsorption mechanism of arg-gly-asp on rutile ${TiO}_{2}$ (110) surface in aqueous solution

Ying-Chun Liang; Dai-Ping Song; Ming-Jun Chen; Qing-Shun Bai

J. Vac. Sci. Technol. B 27, 1548–1554 (2009) https://doi.org/10.1116/1.3046149

Abstract

View articletitled, Adsorption mechanism of arg-gly-asp on rutile <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><msub><mrow><mtext>TiO</mtext></mrow><mn>2</mn></msub></mrow></math> (110) surface in aqueous solution

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Finite-element analysis of aerostatic lubrication with porous restrictors based on HYPERMESH

Xiaofeng Zhang; Bin Lin; Taiyong Wang

J. Vac. Sci. Technol. B 27, 1555–1558 (2009) https://doi.org/10.1116/1.3082013

Abstract

View articletitled, Finite-element analysis of aerostatic lubrication with porous restrictors based on HYPERMESH

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Enhancement of hemocompatibility on titanium implant with titanium-doped diamond-like carbon film evaluated by cellular reactions using bone marrow cell cultures in vitro

Wen-Chung Feng; Chau-Hsiang Wang; Hsin-Chung Cheng; Shi-Yung Chiou; Chin-Sung Chen; Keng-Liang Ou

J. Vac. Sci. Technol. B 27, 1559–1565 (2009) https://doi.org/10.1116/1.3077271

Abstract

View articletitled, Enhancement of hemocompatibility on titanium implant with titanium-doped diamond-like carbon film evaluated by cellular reactions using bone marrow cell cultures in vitro

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Tool runout effects on wear and mechanics behavior in microend milling

Q. S. Bai; K. Yang; Y. C. Liang; C. L. Yang; B. Wang

J. Vac. Sci. Technol. B 27, 1566–1572 (2009) https://doi.org/10.1116/1.3058729

Abstract

View articletitled, Tool runout effects on wear and mechanics behavior in microend milling

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Formulation and characterization of doxorubicin nanovesicles

S. Honary; P. Ebrahimi; M. Tabbakhian; F. Zahir

J. Vac. Sci. Technol. B 27, 1573–1577 (2009) https://doi.org/10.1116/1.3127504

Abstract

View articletitled, Formulation and characterization of doxorubicin nanovesicles

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Efficient and smooth grinding characteristics of monocrystalline $4 H - Si C$ wafer

Hiroshi Kasuga; Hitoshi Ohmori; Weimin Lin; Yutaka Watanabe; Taketoshi Mishima; Toshiro Doi

J. Vac. Sci. Technol. B 27, 1578–1582 (2009) https://doi.org/10.1116/1.3056170

Abstract

View articletitled, Efficient and smooth grinding characteristics of monocrystalline <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mn>4</mn><mi>H</mi><mtext>-</mtext><mi mathvariant="normal">Si</mi><mi mathvariant="normal">C</mi></mrow></math> wafer

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Nanodispersion of quercetin and ferulic acid

F. Pourmorad; S. Honari; M. A. Ebrahimzadeh; F. Hosseinikhah

J. Vac. Sci. Technol. B 27, 1583–1585 (2009) https://doi.org/10.1116/1.3049515

Abstract

View articletitled, Nanodispersion of quercetin and ferulic acid

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Conference Brief Reports

New approach of dispersing silver nanopowder in water using ultrasonic atomizer $1.63 MHz$

Manh Toan Nguyen; Tsing Tshih Tsung; Ho Chang

J. Vac. Sci. Technol. B 27, 1586–1589 (2009) https://doi.org/10.1116/1.3098500

Abstract

View articletitled, New approach of dispersing silver nanopowder in water using ultrasonic atomizer <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mn>1.63</mn><mspace width="0.3em"></mspace><mi>MHz</mi></mrow></math>

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PAPERS FROM THE 5TH INTERNATIONAL CONFERENCE ON ZnO

Preface

Steven M. Durbin

J. Vac. Sci. Technol. B 27, 1592 (2009) https://doi.org/10.1116/1.3141736

Extract

View articletitled, Preface

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In-implanted ZnO: Controlled degenerate surface layer

D. C. Look; G. C. Farlow; F. Yaqoob; L. H. Vanamurthy; M. Huang

J. Vac. Sci. Technol. B 27, 1593–1596 (2009) https://doi.org/10.1116/1.3089375

Abstract

View articletitled, In-implanted ZnO: Controlled degenerate surface layer

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Defects in zinc-implanted ZnO thin films

Matthias Schmidt; Martin Ellguth; Christian Czekalla; Holger v. Wenckstern; Rainer Pickenhain; Marius Grundmann; Gerhard Brauer; Wolfgang Skorupa; Manfred Helm; Qilin Gu; Chi Chung Ling

J. Vac. Sci. Technol. B 27, 1597–1600 (2009) https://doi.org/10.1116/1.3086659

Abstract

View articletitled, Defects in zinc-implanted ZnO thin films

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Unexpected Coulomb binding between Ca and $H^{+}$ in ZnO

Xian-Bin Li; Sukit Limpijumnong; Wei Quan Tian; S. B. Zhang

J. Vac. Sci. Technol. B 27, 1601–1603 (2009) https://doi.org/10.1116/1.3119679

Abstract

View articletitled, Unexpected Coulomb binding between Ca and <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><msup><mtext>H</mtext><mo>+</mo></msup></mrow></math> in ZnO

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Dopant activation in homoepitaxial MgZnO:P thin films

Matthias Brandt; Holger von Wenckstern; Christoph Meinecke; Tilman Butz; Holger Hochmuth; Michael Lorenz; Marius Grundmann

J. Vac. Sci. Technol. B 27, 1604–1608 (2009) https://doi.org/10.1116/1.3086657

Abstract

View articletitled, Dopant activation in homoepitaxial MgZnO:P thin films

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Comparative study on structural and optical properties of ZnO films grown by metalorganic molecular beam deposition and metalorganic chemical vapor deposition

Tomoaki Terasako; Shinichiro Yura; Suguru Azuma; Satoshi Shimomura; Sho Shirakata; Masakazu Yagi

J. Vac. Sci. Technol. B 27, 1609–1614 (2009) https://doi.org/10.1116/1.3130155

Abstract

View articletitled, Comparative study on structural and optical properties of ZnO films grown by metalorganic molecular beam deposition and metalorganic chemical vapor deposition

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Homoepitaxy of ZnO on bulk and thin film substrates by low temperature metal organic chemical vapor deposition using tert-butanol

C. Sartel; V. Sallet; A. Lusson; N. Haneche; J. M. Laroche; P. Galtier; D. J. Rogers; F. Hosseini Teherani

J. Vac. Sci. Technol. B 27, 1615–1619 (2009) https://doi.org/10.1116/1.3137016

Abstract

View articletitled, Homoepitaxy of ZnO on bulk and thin film substrates by low temperature metal organic chemical vapor deposition using tert-butanol

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Structural anisotropy in $a {-Mg}_{x} {Zn}_{1 - x} O$ $(\leq x \leq 0.33)$ films on $r$ -sapphire

Gaurav Saraf; Theo Siegrist; Yicheng Lu

J. Vac. Sci. Technol. B 27, 1620–1624 (2009) https://doi.org/10.1116/1.3137013

Abstract

View articletitled, Structural anisotropy in <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mi>a</mi><msub><mrow><mtext>-Mg</mtext></mrow><mi>x</mi></msub><msub><mrow><mtext>Zn</mtext></mrow><mrow><mn>1</mn><mo>−</mo><mi>x</mi></mrow></msub><mtext>O</mtext></mrow></math> <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mrow><mo>(</mo><mrow><mn></mn><mo>≤</mo><mi>x</mi><mo>≤</mo><mn>0.33</mn></mrow><mo>)</mo></mrow></mrow></math> films on <math xmlns="http://www.w3.org/1998/Math/MathML"><mi xmlns="">r</mi></math>-sapphire

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Growth and structural properties of ZnO films on $(10 - 10)$ $m$ -plane sapphire substrates by plasma-assisted molecular beam epitaxy

Jung-Hyun Kim; Seok Kyu Han; Sun Ig Hong; Soon-Ku Hong; Jae Wook Lee; Jeong Yong Lee; Jung-Hoon Song; Jin Sub Park; Takafumi Yao

J. Vac. Sci. Technol. B 27, 1625–1630 (2009) https://doi.org/10.1116/1.3119682

Abstract

View articletitled, Growth and structural properties of ZnO films on <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mo>(</mo><mn>10</mn><mo>−</mo><mn>10</mn><mo>)</mo></mrow></math> <math xmlns="http://www.w3.org/1998/Math/MathML"><mi xmlns="">m</mi></math>-plane sapphire substrates by plasma-assisted molecular beam epitaxy

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Structural, electrical, and piezoelectric properties of ZnO films on $Si C - 6 H$ substrates

Ying Chen; Gaurav Saraf; Pavel Ivanoff Reyes; Ziqing Duan; Jian Zhong; Yicheng Lu

J. Vac. Sci. Technol. B 27, 1631–1634 (2009) https://doi.org/10.1116/1.3137014

Abstract

View articletitled, Structural, electrical, and piezoelectric properties of ZnO films on <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mi mathvariant="normal">Si</mi><mi mathvariant="normal">C</mi><mtext>-</mtext><mn>6</mn><mi>H</mi></mrow></math> substrates

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Effects of two-step growth by employing Zn-rich and O-rich growth conditions on properties of $(11 \bar{2})$ ZnO films grown by plasma-assisted molecular beam epitaxy on sapphire

Seok Kyu Han; Jae Goo Kim; Jung-Hyun Kim; Soon-Ku Hong; Jae Wook Lee; Jeong Yong Lee; Jung-Hoon Song; Yoon Sung Nam; Soo-Kyung Chang; Takafumi Yao

J. Vac. Sci. Technol. B 27, 1635–1640 (2009) https://doi.org/10.1116/1.3130153

Abstract

View articletitled, Effects of two-step growth by employing Zn-rich and O-rich growth conditions on properties of <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mo>(</mo><mn>11</mn><mover accent="true"><mn>2</mn><mo stretchy="false">¯</mo></mover><mn></mn><mo>)</mo></mrow></math> ZnO films grown by plasma-assisted molecular beam epitaxy on sapphire

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Effects of annealing in $N_{2}$ on sputtered Al-doped ZnO thin films

C. Lennon; R. Kodama; Y. Chang; S. Sivananthan; M. Deshpande

J. Vac. Sci. Technol. B 27, 1641–1645 (2009) https://doi.org/10.1116/1.3110020

Abstract

View articletitled, Effects of annealing in <math xmlns="http://www.w3.org/1998/Math/MathML"><msub xmlns=""><mi mathvariant="normal">N</mi><mn>2</mn></msub></math> on sputtered Al-doped ZnO thin films

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Growth of ZnO films on $R$ -plane sapphire substrates by atmospheric-pressure chemical vapor deposition using Zn powder and $H_{2} O$ as source materials

Tomoaki Terasako; Yosuke Shigematsu; Masanori Hiji; Tomoya Yamaguchi; Sho Shirakata

J. Vac. Sci. Technol. B 27, 1646–1651 (2009) https://doi.org/10.1116/1.3130157

Abstract

View articletitled, Growth of ZnO films on <math xmlns="http://www.w3.org/1998/Math/MathML"><mi xmlns="">R</mi></math>-plane sapphire substrates by atmospheric-pressure chemical vapor deposition using Zn powder and <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><msub><mi mathvariant="normal">H</mi><mn>2</mn></msub><mi mathvariant="normal">O</mi></mrow></math> as source materials

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Growth of ZnO by cold-wall chemical vapor transport

Koji Abe; Yuta Banno; Tomonari Sasayama; Kazuya Koizumi

J. Vac. Sci. Technol. B 27, 1652–1654 (2009) https://doi.org/10.1116/1.3089374

Abstract

View articletitled, Growth of ZnO by cold-wall chemical vapor transport

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Microstructural compositional, and optical characterization of GaN grown by metal organic vapor phase epitaxy on ZnO epilayers

D. J. Rogers; F. Hosseini Teherani; T. Moudakir; S. Gautier; F. Jomard; M. Molinari; M. Troyon; D. McGrouther; J. N. Chapman; M. Razeghi; A. Ougazzaden

J. Vac. Sci. Technol. B 27, 1655–1657 (2009) https://doi.org/10.1116/1.3137967

Abstract

View articletitled, Microstructural compositional, and optical characterization of GaN grown by metal organic vapor phase epitaxy on ZnO epilayers

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Fabrication of one-dimensional and two-dimensional periodically polarity inverted ZnO structures using the patterned CrN buffer layers

J. S. Park; T. Minegishi; S. H. Lee; I. H. Im; S. H. Park; T. Goto; M. W. Cho; T. Yao; S. K. Hong; J. W. Lee; J. Y. Lee; S. Ahn; H. Jeon; W. Lee; M. N. Jung; J. H. Chang

J. Vac. Sci. Technol. B 27, 1658–1661 (2009) https://doi.org/10.1116/1.3119678

Abstract

View articletitled, Fabrication of one-dimensional and two-dimensional periodically polarity inverted ZnO structures using the patterned CrN buffer layers

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Metal organic chemical vapor deposition growth and luminescence of ZnO micro- and nanowires

Farid Falyouni; Lotfi Benmamas; Coumba Thiandoume; Julien Barjon; Alain Lusson; Pierre Galtier; Vincent Sallet

J. Vac. Sci. Technol. B 27, 1662–1666 (2009) https://doi.org/10.1116/1.3137017

Abstract

View articletitled, Metal organic chemical vapor deposition growth and luminescence of ZnO micro- and nanowires

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ZnO nanowires prepared by hydrothermal growth followed by chemical vapor deposition for gas sensors

Dong-Suk Kang; Seok Kyu Han; Jung-Hyun Kim; Sang Mo Yang; Jae Goo Kim; Soon-Ku Hong; Dojin Kim; Hyojin Kim; Jung-Hoon Song

J. Vac. Sci. Technol. B 27, 1667–1672 (2009) https://doi.org/10.1116/1.3137020

Abstract

View articletitled, ZnO nanowires prepared by hydrothermal growth followed by chemical vapor deposition for gas sensors

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Electrochemical growth and characterization of Ag-doped ZnO nanostructures

M. A. Thomas; J. B. Cui

J. Vac. Sci. Technol. B 27, 1673–1677 (2009) https://doi.org/10.1116/1.3130158

Abstract

View articletitled, Electrochemical growth and characterization of Ag-doped ZnO nanostructures

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Comparison of ZnO nanostructures grown using pulsed laser deposition, metal organic chemical vapor deposition, and physical vapor transport

V. E. Sandana; D. J. Rogers; F. Hosseini Teherani; R. McClintock; C. Bayram; M. Razeghi; H.-J. Drouhin; M. C. Clochard; V. Sallet; G. Garry; F. Falyouni

J. Vac. Sci. Technol. B 27, 1678–1683 (2009) https://doi.org/10.1116/1.3137990

Abstract

View articletitled, Comparison of ZnO nanostructures grown using pulsed laser deposition, metal organic chemical vapor deposition, and physical vapor transport

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ZnO nanorod arrays on $n$ -type Si(111) substrates for $p H$ measurements

Ken-ichi Ogata; Kazuto Koike; Shigehiko Sasa; Masataka Inoue; Mitsuaki Yano

J. Vac. Sci. Technol. B 27, 1684–1687 (2009) https://doi.org/10.1116/1.3098503

Abstract

View articletitled, ZnO nanorod arrays on <math xmlns="http://www.w3.org/1998/Math/MathML"><mi xmlns="">n</mi></math>-type Si(111) substrates for <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mi>p</mi><mi mathvariant="normal">H</mi></mrow></math> measurements

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Photoluminescence from ZnO nanowires

Michael A. Reshchikov; A. Behrends; A. Bakin; A. Waag

J. Vac. Sci. Technol. B 27, 1688–1692 (2009) https://doi.org/10.1116/1.3130159

Abstract

View articletitled, Photoluminescence from ZnO nanowires

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Stable $p$ -type ZnO:P nanowire/ $n$ -type ZnO:Ga film junctions, reproducibly grown by two-step pulsed laser deposition

Michael Lorenz; Bingqiang Cao; Gregor Zimmermann; Gisela Biehne; Christian Czekalla; Heiko Frenzel; Matthias Brandt; Holger von Wenckstern; Marius Grundmann

J. Vac. Sci. Technol. B 27, 1693–1697 (2009) https://doi.org/10.1116/1.3086719

Abstract

View articletitled, Stable <math xmlns="http://www.w3.org/1998/Math/MathML"><mi xmlns="">p</mi></math>-type ZnO:P nanowire/<math xmlns="http://www.w3.org/1998/Math/MathML"><mi xmlns="">n</mi></math>-type ZnO:Ga film junctions, reproducibly grown by two-step pulsed laser deposition

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Unique photoluminescence from ZnO grown by eclipse pulsed laser deposition

R. J. Mendelsberg; J. V. Kennedy; S. M. Durbin; R. J. Reeves

J. Vac. Sci. Technol. B 27, 1698–1704 (2009) https://doi.org/10.1116/1.3137968

Abstract

View articletitled, Unique photoluminescence from ZnO grown by eclipse pulsed laser deposition

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Electrical and optical studies of metal organic chemical vapor deposition grown N-doped ZnO films

A. Marzouki; J. Mimila; M. Oueslati; J. M. Laroche; F. Jomard; A. Lusson; P. Galtier; V. Sallet

J. Vac. Sci. Technol. B 27, 1705–1709 (2009) https://doi.org/10.1116/1.3110018

Abstract

View articletitled, Electrical and optical studies of metal organic chemical vapor deposition grown N-doped ZnO films

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Polarity-related asymetry at ZnO surfaces and metal interfaces

Yufeng Dong; Z.-Q. Fang; D. C. Look; D. R. Doutt; M. J. Hetzer; L. J. Brillson

J. Vac. Sci. Technol. B 27, 1710–1716 (2009) https://doi.org/10.1116/1.3119681

Abstract

View articletitled, Polarity-related asymetry at ZnO surfaces and metal interfaces

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Bond lengths, phase stability, and band gaps in ${Mg}_{x} {Zn}_{1 - x} O$ alloys

Adisak Boonchun; Walter R. L. Lambrecht

J. Vac. Sci. Technol. B 27, 1717–1721 (2009) https://doi.org/10.1116/1.3089376

Abstract

View articletitled, Bond lengths, phase stability, and band gaps in <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><msub><mi mathvariant="normal">Mg</mi><mi>x</mi></msub><msub><mi mathvariant="normal">Zn</mi><mrow><mn>1</mn><mo>−</mo><mi>x</mi></mrow></msub><mi mathvariant="normal">O</mi></mrow></math> alloys

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UV light-induced changes to the surface conduction in hydrothermal ZnO

B. Claflin; D. C. Look

J. Vac. Sci. Technol. B 27, 1722–1725 (2009) https://doi.org/10.1116/1.3119680

Abstract

View articletitled, UV light-induced changes to the surface conduction in hydrothermal ZnO

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Strong exciton-photon coupling in ZnO based resonators

C. Sturm; H. Hilmer; R. Schmidt-Grund; C. Czekalla; J. Sellmann; J. Lenzner; M. Lorenz; M. Grundmann

J. Vac. Sci. Technol. B 27, 1726–1730 (2009) https://doi.org/10.1116/1.3086661

Abstract

View articletitled, Strong exciton-photon coupling in ZnO based resonators

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Photoconductivity of the two polar surfaces of ZnO

Hiroyuki Yamaguchi; Takao Komiyama; Yasunori Chonan; Takashi Aoyama

J. Vac. Sci. Technol. B 27, 1731–1734 (2009) https://doi.org/10.1116/1.3137023

Abstract

View articletitled, Photoconductivity of the two polar surfaces of ZnO

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Electronic coupling in ${Mg}_{x} {Zn}_{1 - x} O / ZnO$ double quantum wells

Jan Zippel; J. Lenzner; G. Benndorf; M. Lange; H. Hochmuth; M. Lorenz; M. Grundmann

J. Vac. Sci. Technol. B 27, 1735–1740 (2009) https://doi.org/10.1116/1.3125269

Abstract

View articletitled, Electronic coupling in <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><msub><mrow><mtext>Mg</mtext></mrow><mi>x</mi></msub><msub><mrow><mtext>Zn</mtext></mrow><mrow><mn>1</mn><mo>−</mo><mi>x</mi></mrow></msub><mtext>O</mtext><mo>/</mo><mtext>ZnO</mtext></mrow></math> double quantum wells

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Temperature dependence of localization effects of excitons in $Zn O ∕ {Cd}_{x} {Zn}_{1 - x} O ∕ Zn O$ double heterostructures

M. Lange; J. Zippel; G. Benndorf; C. Czekalla; H. Hochmuth; M. Lorenz; M. Grundmann

J. Vac. Sci. Technol. B 27, 1741–1745 (2009) https://doi.org/10.1116/1.3138002

Abstract

View articletitled, Temperature dependence of localization effects of excitons in <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mi mathvariant="normal">Zn</mi><mi mathvariant="normal">O</mi><mo>∕</mo><msub><mi mathvariant="normal">Cd</mi><mi>x</mi></msub><msub><mi mathvariant="normal">Zn</mi><mrow><mn>1</mn><mo>−</mo><mi>x</mi></mrow></msub><mi mathvariant="normal">O</mi><mo>∕</mo><mi mathvariant="normal">Zn</mi><mi mathvariant="normal">O</mi></mrow></math> double heterostructures

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Optical and electrical properties of amorphous InGaZnO

Norihiko Yamaguchi; Satoshi Taniguchi; Takao Miyajima; Masao Ikeda

J. Vac. Sci. Technol. B 27, 1746–1748 (2009) https://doi.org/10.1116/1.3110022

Abstract

View articletitled, Optical and electrical properties of amorphous InGaZnO

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About the Cu-related green luminescence band in ZnO

Michael A. Reshchikov; V. Avrutin; N. Izyumskaya; R. Shimada; H. Morkoç; S. W. Novak

J. Vac. Sci. Technol. B 27, 1749–1754 (2009) https://doi.org/10.1116/1.3110023

Abstract

View articletitled, About the Cu-related green luminescence band in ZnO

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Optical study of $Zn O ∕ Zn Mg O$ quantum wells grown by metal organic vapor phase epitaxy on ZnO substrates

A. Lusson; N. Hanèche; C. Thiandoume; V. Sallet; P. Galtier

J. Vac. Sci. Technol. B 27, 1755–1759 (2009) https://doi.org/10.1116/1.3130164

Abstract

View articletitled, Optical study of <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mi mathvariant="normal">Zn</mi><mi mathvariant="normal">O</mi><mo>∕</mo><mi mathvariant="normal">Zn</mi><mi mathvariant="normal">Mg</mi><mi mathvariant="normal">O</mi></mrow></math> quantum wells grown by metal organic vapor phase epitaxy on ZnO substrates

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Electron transport properties of ${Zn}_{0.88} {Mn}_{0.12} O ∕ Zn O$ modulation-doped heterostructures

K. Masuko; A. Ashida; T. Yoshimura; N. Fujimura

J. Vac. Sci. Technol. B 27, 1760–1764 (2009) https://doi.org/10.1116/1.3093916

Abstract

View articletitled, Electron transport properties of <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><msub><mi mathvariant="normal">Zn</mi><mn>0.88</mn></msub><msub><mi mathvariant="normal">Mn</mi><mn>0.12</mn></msub><mi mathvariant="normal">O</mi><mo>∕</mo><mi mathvariant="normal">Zn</mi><mi mathvariant="normal">O</mi></mrow></math> modulation-doped heterostructures

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Ultraviolet photodetector fabricated from atomic-layer-deposited ZnO films

C. X. Shan; J. Y. Zhang; B. Yao; D. Z. Shen; X. W. Fan; K. L. Choy

J. Vac. Sci. Technol. B 27, 1765–1768 (2009) https://doi.org/10.1116/1.3098502

Abstract

View articletitled, Ultraviolet photodetector fabricated from atomic-layer-deposited ZnO films

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Properties of reactively sputtered Ag, Au, Pd, and Pt Schottky contacts on $n$ -type ZnO

A. Lajn; H. v. Wenckstern; Z. Zhang; C. Czekalla; G. Biehne; J. Lenzner; H. Hochmuth; M. Lorenz; M. Grundmann; S. Wickert; C. Vogt; R. Denecke

J. Vac. Sci. Technol. B 27, 1769–1773 (2009) https://doi.org/10.1116/1.3086718

Abstract

View articletitled, Properties of reactively sputtered Ag, Au, Pd, and Pt Schottky contacts on <math xmlns="http://www.w3.org/1998/Math/MathML"><mi xmlns="">n</mi></math>-type ZnO

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Metal contacts on bulk ZnO crystal treated with remote oxygen plasma

Z.-Q. Fang; B. Claflin; D. C. Look; Y.-F. Dong; L. Brillson

J. Vac. Sci. Technol. B 27, 1774–1779 (2009) https://doi.org/10.1116/1.3095814

Abstract

View articletitled, Metal contacts on bulk ZnO crystal treated with remote oxygen plasma

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Optical characterization of zinc oxide microlasers and microwire core-shell heterostructures

Christian Czekalla; Chris Sturm; Rüdiger Schmidt-Grund; Bingqiang Cao; Jesús Zúñiga Pérez; Michael Lorenz; Marius Grundmann

J. Vac. Sci. Technol. B 27, 1780–1783 (2009) https://doi.org/10.1116/1.3112625

Abstract

View articletitled, Optical characterization of zinc oxide microlasers and microwire core-shell heterostructures

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Fabrication and characterization of novel hybrid green light emitting diodes based on substituting $n$ -type ZnO for $n$ -type GaN in an inverted $p - n$ junction

C. Bayram; M. Razeghi; D. J. Rogers; F. Hosseini Teherani

J. Vac. Sci. Technol. B 27, 1784–1788 (2009) https://doi.org/10.1116/1.3116590

Abstract

View articletitled, Fabrication and characterization of novel hybrid green light emitting diodes based on substituting <math xmlns="http://www.w3.org/1998/Math/MathML"><mi xmlns="">n</mi></math>-type ZnO for <math xmlns="http://www.w3.org/1998/Math/MathML"><mi xmlns="">n</mi></math>-type GaN in an inverted <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mi>p</mi><mtext>-</mtext><mi>n</mi></mrow></math> junction

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Ferroelectric thin film field-effect transistors based on $ZnO / {BaTiO}_{3}$ heterostructures

Matthias Brandt; Heiko Frenzel; Holger Hochmuth; Michael Lorenz; Marius Grundmann; Jürgen Schubert

J. Vac. Sci. Technol. B 27, 1789–1793 (2009) https://doi.org/10.1116/1.3086720

Abstract

View articletitled, Ferroelectric thin film field-effect transistors based on <math xmlns="http://www.w3.org/1998/Math/MathML"><mrow xmlns=""><mtext>ZnO</mtext><mo>/</mo><msub><mrow><mtext>BaTiO</mtext></mrow><mn>3</mn></msub></mrow></math> heterostructures

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Letters

Nickel-germanium soft x-ray zone plates

Magnus Lindblom; Julia Reinspach; Olov von Hofsten; Michael Bertilson; Hans M. Hertz; Anders Holmberg

J. Vac. Sci. Technol. B 27, L5–L7 (2009) https://doi.org/10.1116/1.3117256

Abstract

View articletitled, Nickel-germanium soft x-ray zone plates

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Pd-catalyzed hydrogen sensing with InN nanobelts

J. S. Wright; Wantae Lim; B. P. Gila; S. J. Pearton; F. Ren; Wei-Ta Lai; Li-Chyong Chen; Ming-Shien Hu; Kuei-Hsien Chen

J. Vac. Sci. Technol. B 27, L8–L10 (2009) https://doi.org/10.1116/1.3125267

Abstract

View articletitled, Pd-catalyzed hydrogen sensing with InN nanobelts

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