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March 2009
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
ISSN 1071-1023
EISSN 1520-8567
In this Issue
Regular Articles
Thermionic electron emission from chemical vapor deposition diamond by nanosecond laser heating
J. Vac. Sci. Technol. B 27, 557–561 (2009)
https://doi.org/10.1116/1.3077486
Electron emission from ultralarge area metal-oxide-semiconductor electron emitters
J. Vac. Sci. Technol. B 27, 562–567 (2009)
https://doi.org/10.1116/1.3079649
Fabrication of annular photonic crystals by atomic layer deposition and sacrificial etching
Junbo Feng; Yao Chen; John Blair; Hamza Kurt; Ran Hao; D. S. Citrin; Christopher J. Summers; Zhiping Zhou
J. Vac. Sci. Technol. B 27, 568–572 (2009)
https://doi.org/10.1116/1.3079662
Step and flash imprint lithography for manufacturing patterned media
Gerard M. Schmid; Mike Miller; Cynthia Brooks; Niyaz Khusnatdinov; Dwayne LaBrake; Douglas J. Resnick; S. V. Sreenivasan; Gene Gauzner; Kim Lee; David Kuo; Dieter Weller; XiaoMin Yang
J. Vac. Sci. Technol. B 27, 573–580 (2009)
https://doi.org/10.1116/1.3081981
Improved etch resistance of ZEP 520A in reactive ion etching through heat and ultraviolet light treatment
J. Vac. Sci. Technol. B 27, 581–584 (2009)
https://doi.org/10.1116/1.3086721
Dependence of fiber texture on composition in metal-insulator composite thin films
J. Vac. Sci. Technol. B 27, 585–589 (2009)
https://doi.org/10.1116/1.3086722
Impact of slip and contact angle on imprinting pressure in nanoimprint lithography
J. Vac. Sci. Technol. B 27, 590–596 (2009)
https://doi.org/10.1116/1.3089324
Improved performance of pentacene field-effect transistors using a nanocomposite gate dielectric
J. Vac. Sci. Technol. B 27, 601–605 (2009)
https://doi.org/10.1116/1.3093881
high-electron mobility transistor with channel grown by metal-organic chemical vapor deposition
J. Vac. Sci. Technol. B 27, 606–611 (2009)
https://doi.org/10.1116/1.3093883
Indium oxides by reactive ion beam assisted evaporation: From material study to device application
J. Vac. Sci. Technol. B 27, 612–617 (2009)
https://doi.org/10.1116/1.3093887
Enhanced ultraviolet electroluminescence from nanorod array heterojunction
J. Vac. Sci. Technol. B 27, 618–621 (2009)
https://doi.org/10.1116/1.3079657
Transfer characteristics and bias-stress stability of amorphous indium zinc oxide thin-film transistors
Jun Hyuk Choi; Un Bin Han; Ki Chang Lee; Joon-Hyung Lee; Jeong-Joo Kim; In-Tak Cho; Jong-Ho Lee; Young-Woo Heo
J. Vac. Sci. Technol. B 27, 622–625 (2009)
https://doi.org/10.1116/1.3097852
Double layer-coated carbon nanotubes: Field emission and secondary-electron emission properties under presence of intense electric field
J. Vac. Sci. Technol. B 27, 626–630 (2009)
https://doi.org/10.1116/1.3093886
Passivation of GaAs by octadecanethiol self-assembled monolayers deposited from liquid and vapor phases
J. Vac. Sci. Technol. B 27, 637–648 (2009)
https://doi.org/10.1116/1.3100266
Reduction effect of line edge roughness on time-dependent dielectric breakdown lifetime of Cu/low- interconnects by using etching
J. Vac. Sci. Technol. B 27, 649–653 (2009)
https://doi.org/10.1116/1.3100268
Quantification of outgassing of C-, Si-, and S-containing products during exposure of photoresists
J. Vac. Sci. Technol. B 27, 654–664 (2009)
https://doi.org/10.1116/1.3100269
Deposition of tungsten oxynitride nanowires through simple evaporation and subsequent annealing
J. Vac. Sci. Technol. B 27, 671–676 (2009)
https://doi.org/10.1116/1.3100267
Brief Reports and Comments
Mesa sample preparation for secondary ion mass spectrometry depth profiling using an automated dicing saw
J. Vac. Sci. Technol. B 27, 677–680 (2009)
https://doi.org/10.1116/1.3079652
Dry etching of GaAs in high pressure, capacitively coupled plasmas
J. Vac. Sci. Technol. B 27, 681–683 (2009)
https://doi.org/10.1116/1.3079665
PAPERS FROM THE 21ST INTERNATIONAL VACUUM NANOELECTRONIC CONFERENCE
Preface
PAPERS FROM THE 21ST INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE
Theory and Simulation
Investigation of the reentrant linear magnetron using particle-in-cell simulation
J. Vac. Sci. Technol. B 27, 687–691 (2009)
https://doi.org/10.1116/1.3072885
Theoretical analysis of the energy exchange and cooling in field emission from the conduction band of the -type semiconductor
J. Vac. Sci. Technol. B 27, 692–697 (2009)
https://doi.org/10.1116/1.3093897
PAPERS FROM THE 21st INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE
Characterization
Emission and focusing characteristics of volcano-structured double-gated field emitter arrays
Yoichiro Neo; Masafumi Takeda; Takashi Soda; Masayoshi Nagao; Tomoya Yoshida; Seigo Kanemaru; Toshikatsu Sakai; Kei Hagiwara; Nobuo Saito; Toru Aoki; Hidenori Mimura
J. Vac. Sci. Technol. B 27, 701–704 (2009)
https://doi.org/10.1116/1.3093891
Field emission microscopy study of zinc oxide nanowires on tungsten tip
J. Vac. Sci. Technol. B 27, 705–710 (2009)
https://doi.org/10.1116/1.3079650
Background analysis of field-induced electron emission from nanometer-scale heterostructured emitters
J. Vac. Sci. Technol. B 27, 711–718 (2009)
https://doi.org/10.1116/1.3100657
Work function of W(100) field emitter modified with lutetium oxide and measured with photoemission electron microscope
J. Vac. Sci. Technol. B 27, 719–720 (2009)
https://doi.org/10.1116/1.3058726
Arrays
CdTe x-ray image sensor using a field emitter array
Masashi Nakagawa; Yuichiro Hanawa; Takuya Sakata; Hisashi Morii; Masayoshi Nagao; Tomoya Yoshida; Seigo Kanemaru; Yoichiro Neo; Toru Aoki; Hidenori Mimura
J. Vac. Sci. Technol. B 27, 725–728 (2009)
https://doi.org/10.1116/1.3079651
Simple fabrication of a gated field-electron emitter with a vertical thin film formed by ion-beam irradiation
J. Vac. Sci. Technol. B 27, 729–734 (2009)
https://doi.org/10.1116/1.3100220
Enhanced output current density of an active-matrix high-efficiency electron emission device array with
Tomonari Nakada; Takanobu Sato; Yohei Matsuba; Ryota Tanaka; Kazuto Sakemura; Nobuyasu Negishi; Yoshiyuki Okuda; Atsushi Watanabe; Takamasa Yoshikawa; Kiyohide Ogasawara; Masakazu Nanba; Kenkichi Tanioka; Norifumi Egami; Nobuyoshi Koshida
J. Vac. Sci. Technol. B 27, 735–739 (2009)
https://doi.org/10.1116/1.3079653
Design and fabrication of an ultrahigh-luminance field-emission display
J. Vac. Sci. Technol. B 27, 740–743 (2009)
https://doi.org/10.1116/1.3066759
Carbon Nanotubes
Stable electron emission from BCN/carbon nanotube field emitter
J. Vac. Sci. Technol. B 27, 744–748 (2009)
https://doi.org/10.1116/1.3093893
Comparison of field-electron emission from different carbon nanotube array structures
J. Vac. Sci. Technol. B 27, 749–752 (2009)
https://doi.org/10.1116/1.3097850
Field-electron emission from flexible carbon nanotube array cathodes
Nguyen Tuan Hong; Kim Sang Yong; Ken Ha Koh; Soonil Lee; Ngo Thi Thanh Tam; Phan Ngoc Minh; Phan Hong Khoi
J. Vac. Sci. Technol. B 27, 753–756 (2009)
https://doi.org/10.1116/1.3072831
Field-emission light sources utilizing carbon nanotubes and composite phosphor made of nanospheres covered with
J. Vac. Sci. Technol. B 27, 757–760 (2009)
https://doi.org/10.1116/1.3070654
Effect of aging on field emission lifetime for carbon nanotube cathodes
J. Vac. Sci. Technol. B 27, 761–765 (2009)
https://doi.org/10.1116/1.3100222
Field emission pattern of carbon nanotubes and phase distribution of wave function in the end cap structure
J. Vac. Sci. Technol. B 27, 766–771 (2009)
https://doi.org/10.1116/1.3058723
Novel Materials
Vacuum-ultraviolet light emission from xenon directly excited by ballistic output electrons of nanocrystalline silicon planar cathode
J. Vac. Sci. Technol. B 27, 772–774 (2009)
https://doi.org/10.1116/1.3070655
Field enhanced surface treatment of needle-shaped cathode for improvement in field emission
J. Vac. Sci. Technol. B 27, 775–777 (2009)
https://doi.org/10.1116/1.3070652
2008 INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY
Preface
Molecular and Nanoelectronics
Visualization of bias-dependent potential barriers using scanning gate microscopy in copper-phthalocyanine field-effect transistor
J. Vac. Sci. Technol. B 27, 785–788 (2009)
https://doi.org/10.1116/1.3013853
Nanoscale current transport through Schottky contacts on wide bandgap semiconductors
J. Vac. Sci. Technol. B 27, 789–794 (2009)
https://doi.org/10.1116/1.3043453
Formation of single electron transistors in single-walled carbon nanotubes with low energy Ar ion irradiation technique
Takahiro Mori; Shunsuke Sato; Kazuo Omura; Shota Yajima; Yasuhiro Tsuruoka; Yohji Achiba; Koji Ishibashi
J. Vac. Sci. Technol. B 27, 795–798 (2009)
https://doi.org/10.1116/1.3002388
Adsorption and conformation of porphyrins on metallic surfaces
Jens Brede; Mathieu Linares; Roy Lensen; Alan E. Rowan; Markus Funk; Martin Bröring; Germar Hoffmann; Roland Wiesendanger
J. Vac. Sci. Technol. B 27, 799–804 (2009)
https://doi.org/10.1116/1.3010722
Control of channel resistance on metal nanowires by electromigration patterning method
J. Vac. Sci. Technol. B 27, 805–809 (2009)
https://doi.org/10.1116/1.3070651
First-principles calculation of electron transport in Si atom wire
J. Vac. Sci. Technol. B 27, 810–812 (2009)
https://doi.org/10.1116/1.3065484
Fabrication of nanogap electrodes by field-emission-induced electromigration
J. Vac. Sci. Technol. B 27, 813–816 (2009)
https://doi.org/10.1116/1.3039683
Molecular conductance switching via controlled alteration of electron delocalization: Quinone-modified oligo(phenylenevinylene)
J. Vac. Sci. Technol. B 27, 817–820 (2009)
https://doi.org/10.1116/1.3056177
Toward surround gates on vertical single-walled carbon nanotube devices
J. Vac. Sci. Technol. B 27, 821–826 (2009)
https://doi.org/10.1116/1.3054266
Strain distributions in lattice-mismatched semiconductor core-shell nanowires
J. Vac. Sci. Technol. B 27, 827–830 (2009)
https://doi.org/10.1116/1.3054200
Self-assembled organic nanowires: A structural and electronic study
J. Vac. Sci. Technol. B 27, 831–835 (2009)
https://doi.org/10.1116/1.3054198
Nanobiology, Nanomedicine, and Nanofluidics
Photoluminescence of bioconjugated core-shell quantum dots
J. Vac. Sci. Technol. B 27, 836–838 (2009)
https://doi.org/10.1116/1.3032904
Visualizing the surface structure of immunochromatography test strips using dynamic force microscopy
S. P. Yarkov; I. V. Shilenko; H. H. Valiev; Yu. N. Karnet; G. N. Kovalev; N. S. Snegireva; Yu. G. Yanovsky; E. V. Bogdanov
J. Vac. Sci. Technol. B 27, 839–841 (2009)
https://doi.org/10.1116/1.3093911
-dependent conductance behaviors of layer-by-layer self-assembled carboxylated carbon nanotube multilayer thin-film sensors
J. Vac. Sci. Technol. B 27, 842–848 (2009)
https://doi.org/10.1116/1.3002386
Nanoscale Measurements of Novel Materials
X-ray diffraction and electron paramagnetic resonance study of porous
J. Vac. Sci. Technol. B 27, 849–853 (2009)
https://doi.org/10.1116/1.3043462
Diameter dependence of the interactions between single-walled carbon nanotubes and Ti(0001) surface
J. Vac. Sci. Technol. B 27, 854–857 (2009)
https://doi.org/10.1116/1.3093902
Soft processing for formation of self-assembled monolayer on hydrogen-terminated silicon surface based on visible-light excitation
J. Vac. Sci. Technol. B 27, 858–862 (2009)
https://doi.org/10.1116/1.3065485
Ordered structures of pentacene on Cu(110)
J. Vac. Sci. Technol. B 27, 863–867 (2009)
https://doi.org/10.1116/1.3013855
Dielectric thickness dependence of capacitive behavior in graphene deposited on silicon dioxide
J. Vac. Sci. Technol. B 27, 868–873 (2009)
https://doi.org/10.1116/1.3081890
Nanostructure fabrication on an Al surface by chemical and electrochemical multiprocess and nanoscale molecular patterning on the nanostructured Al surface
Y. Watanabe; H. Kato; S. Takemura; S. Kusama; G. Iimura; T. Sugiyama; T. Hiramatsu; N. Nanba; O. Nishikawa; M. Taniguchi
J. Vac. Sci. Technol. B 27, 874–881 (2009)
https://doi.org/10.1116/1.3098495
Quantum electron transport through carbon nanotubes with electron-phonon coupling
J. Vac. Sci. Technol. B 27, 882–886 (2009)
https://doi.org/10.1116/1.3100658
Tunneling spectroscopy of ultrathin insulating films, and single Co adatoms
J. Vac. Sci. Technol. B 27, 887–890 (2009)
https://doi.org/10.1116/1.3010720
Low temperature scanning tunneling microscopy wave-function imaging of cleaved quantum dots with similar height
J. Vac. Sci. Technol. B 27, 891–894 (2009)
https://doi.org/10.1116/1.3013854
Spectroscopic scanning tunnel microscopy of : Determination of Cl–Si resonance line shape
J. Vac. Sci. Technol. B 27, 895–902 (2009)
https://doi.org/10.1116/1.3066737
Topography and surface potential in Kelvin force microscopy of perfluoroalkyl alkanes self-assemblies
J. Vac. Sci. Technol. B 27, 903–911 (2009)
https://doi.org/10.1116/1.3079675
X-ray investigation of buried SiGe islands for devices with strain-enhanced mobility
N. Hrauda; J. J. Zhang; J. Stangl; A. Rehman-Khan; G. Bauer; M. Stoffel; O. G. Schmidt; V. Jovanovich; L. K. Nanver
J. Vac. Sci. Technol. B 27, 912–918 (2009)
https://doi.org/10.1116/1.3056178
Photoluminescence variation in dot-in-a-well structures with different InAs quantum dot densities
J. Vac. Sci. Technol. B 27, 919–922 (2009)
https://doi.org/10.1116/1.3010718
Nanosystems, Nanomechanics and Nano-optics
Scanning probe anodization patterning of Si substrates covered with a self-assembled monolayer dependent on surface hydrophilicity
J. Vac. Sci. Technol. B 27, 928–933 (2009)
https://doi.org/10.1116/1.3043454
Direct-to-indirect transition observed in quantum dot photoluminescence with nanoprobe indentation
J. Vac. Sci. Technol. B 27, 934–938 (2009)
https://doi.org/10.1116/1.3010731
Scanning probe microscopy investigation of nanostructured surfaces induced by swift heavy ions
J. Vac. Sci. Technol. B 27, 944–947 (2009)
https://doi.org/10.1116/1.3054199
Improvement of scanning probe microscopy local oxidation nanolithography
J. Vac. Sci. Technol. B 27, 948–952 (2009)
https://doi.org/10.1116/1.3093907
Nanoscale patterning of NiFe surface by scanning probe microscopy scratch nanolithography
J. Vac. Sci. Technol. B 27, 953–957 (2009)
https://doi.org/10.1116/1.3077488
Scanning Probe Microscopy and Instrumentation
Flexural-torsional resonance mode of a chip cantilever system: Applications to nanomachining
J. Vac. Sci. Technol. B 27, 958–963 (2009)
https://doi.org/10.1116/1.3054265
Photothermal excitation of a single-crystalline silicon cantilever for higher vibration modes in liquid
J. Vac. Sci. Technol. B 27, 964–968 (2009)
https://doi.org/10.1116/1.3077487
Wafer-scale production of carbon nanofiber probes
J. Vac. Sci. Technol. B 27, 975–979 (2009)
https://doi.org/10.1116/1.3043464
Application of ion-induced carbon nanocomposite fibers to magnetic force microscope probes
J. Vac. Sci. Technol. B 27, 980–983 (2009)
https://doi.org/10.1116/1.3010730
Parametrization of atomic force microscopy tip shape models for quantitative nanomechanical measurements
Sergey Belikov; Natalia Erina; Lin Huang; Chanmin Su; Craig Prater; Sergei Magonov; Valeriy Ginzburg; Bob McIntyre; Hamed Lakrout; Gregory Meyers
J. Vac. Sci. Technol. B 27, 984–992 (2009)
https://doi.org/10.1116/1.3071852
Strain imaging of a magnetic layer formed on an air bearing surface of a hard disk drive head for perpendicular recording
J. Vac. Sci. Technol. B 27, 997–1000 (2009)
https://doi.org/10.1116/1.3043457
Noncontact lateral-force gradient measurement on surface with small-amplitude off-resonance atomic force microscopy
J. Vac. Sci. Technol. B 27, 1001–1005 (2009)
https://doi.org/10.1116/1.3097857
Imaging capability of pseudomorphic high electron mobility transistors, , and Si micro-Hall probes for scanning Hall probe microscopy between 25 and
J. Vac. Sci. Technol. B 27, 1006–1010 (2009)
https://doi.org/10.1116/1.3056172
Single ferroelectric domain nucleation and growth monitored by high speed piezoforce microscopy
J. Vac. Sci. Technol. B 27, 1011–1013 (2009)
https://doi.org/10.1116/1.3077485
Letters
High-aspect-ratio germanium zone plates fabricated by reactive ion etching in chlorine
Magnus Lindblom; Julia Reinspach; Olov von Hofsten; Michael Bertilson; Hans M. Hertz; Anders Holmberg
J. Vac. Sci. Technol. B 27, L1–L3 (2009)
https://doi.org/10.1116/1.3089371
Future of plasma etching for microelectronics: Challenges and opportunities
Gottlieb S. Oehrlein, Stephan M. Brandstadter, et al.
Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning
Yasser Pordeli, Céline Steenge, et al.
Heating of photocathode via field emission and radiofrequency pulsed heating: Implication toward breakdown
Ryo Shinohara, Soumendu Bagchi, et al.