Skip Nav Destination

Issues

Select Year

Issue

Review Article

Long-term stability of Ru-based protection layers in extreme ultraviolet lithography: A surface science approach

H. Over; Y. B. He; A. Farkas; G. Mellau; C. Korte; M. Knapp; M. Chandhok; M. Fang

J. Vac. Sci. Technol. B 25, 1123–1138 (2007) https://doi.org/10.1116/1.2743648

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Regular Articles

Etching $Si O_{2}$ with HF/pyridine-supercritical carbon dioxide solutions and resultant interfacial electronic properties

Y. X. Li; D. Yang; C. A. Jones, III; J. M. DeSimone; E. A. Irene

J. Vac. Sci. Technol. B 25, 1139–1142 (2007) https://doi.org/10.1116/1.2743651

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Adsorption mechanism of aligned single wall carbon nanotubes at well defined metal surfaces

Sylvain Clair; Caroline Rabot; Yousoo Kim; Maki Kawai

J. Vac. Sci. Technol. B 25, 1143–1146 (2007) https://doi.org/10.1116/1.2743652

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Ultrahigh-resolution pattern using electron-beam lithography HF wet etching

R. Tiron; L. Mollard; O. Louveau; E. Lajoinie

J. Vac. Sci. Technol. B 25, 1147–1151 (2007) https://doi.org/10.1116/1.2743653

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Influence of substrate morphology on growth mode of thin organic films: An atomic force microscopy study

Primož Rebernik Ribič; Gvido Bratina

J. Vac. Sci. Technol. B 25, 1152–1155 (2007) https://doi.org/10.1116/1.2743654

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Direct-write trilayer technology for $Al - {Al}_{2} O_{3} - Cu$ superconductor-insulator-normal metal tunnel junction fabrication

Ernst Otto; Mikhail Tarasov; Leonid Kuzmin

J. Vac. Sci. Technol. B 25, 1156–1160 (2007) https://doi.org/10.1116/1.2743655

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Proton exchange and diffusion in $Li Nb O_{3}$ using inductance coupled high density plasma

Z. Ren; P. J. Heard; S. Yu

J. Vac. Sci. Technol. B 25, 1161–1165 (2007) https://doi.org/10.1116/1.2746052

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Deposition of sacrificial silicon oxide layers by electron cyclotron resonance plasma

C. Biasotto; A. M. Daltrini; R. C. Teixeira; F. A. Boscoli; J. A. Diniz; S. A. Moshkalev; I. Doi

J. Vac. Sci. Technol. B 25, 1166–1170 (2007) https://doi.org/10.1116/1.2746331

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Microfluidic encapsulated nanoelectromechanical resonators

Keith L. Aubin; Jingqing Huang; Seung-Min Park; Yanou Yang; Marianna Kondratovich; Harold G. Craighead; Bojan R. Ilic

J. Vac. Sci. Technol. B 25, 1171–1174 (2007) https://doi.org/10.1116/1.2746333

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Influence of field emission on agglomerated carbon nanotubes in pastes

Yang Doo Lee; Hyeon Jae Lee; Yun-Hi Lee; Byeong-Kwon Ju

J. Vac. Sci. Technol. B 25, 1175–1178 (2007) https://doi.org/10.1116/1.2746335

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Adhesion between template materials and UV-cured nanoimprint resists

F. A. Houle; Eric Guyer; D. C. Miller; Reinhold Dauskardt

J. Vac. Sci. Technol. B 25, 1179–1185 (2007) https://doi.org/10.1116/1.2746336

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Resonant cavity enhanced $In As ∕ {In}_{0.15} {Ga}_{0.85} As$ dots-in-a-well quantum dot infrared photodetector

R. S. Attaluri; J. Shao; K. T. Posani; S. J. Lee; J. S. Brown; A. Stintz; S. Krishna

J. Vac. Sci. Technol. B 25, 1186–1190 (2007) https://doi.org/10.1116/1.2746054

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Synthesis of carbon nanotubes: Controlled fabrication of intraconnects

D. Katz; S. W. Lee; D. Lopez; A. Kornblit; H. Grebel

J. Vac. Sci. Technol. B 25, 1191–1196 (2007) https://doi.org/10.1116/1.2746332

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Focused ion beam etching for the fabrication of micropillar microcavities made of III-V semiconductor materials

Y.-L. D. Ho; R. Gibson; C. Y. Hu; M. J. Cryan; J. G. Rarity; P. J. Heard; J. A. Timpson; A. M. Fox; M. S. Skolnick; M. Hopkinson; A. Tahraoui

J. Vac. Sci. Technol. B 25, 1197–1202 (2007) https://doi.org/10.1116/1.2749528

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Thermal stability of rare-earth based ultrathin ${Lu}_{2} O_{3}$ for high- $k$ dielectrics

P. Darmawan; P. S. Lee; Y. Setiawan; J. C. Lai; P. Yang

J. Vac. Sci. Technol. B 25, 1203–1206 (2007) https://doi.org/10.1116/1.2749526

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in Si (110)

R. M. Tiggelaar; J. W. Berenschot; M. C. Elwenspoek; J. G. E. Gardeniers; R. Dorsman; C. R. Kleijn

J. Vac. Sci. Technol. B 25, 1207–1216 (2007) https://doi.org/10.1116/1.2747629

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Epitaxial growth of ${(Fe Co)}_{x} {Ge}_{1 - x} (001)$

L. He; B. A. Collins; F. Tsui; Y. Zhong; S. Vogt; Y. S. Chu

J. Vac. Sci. Technol. B 25, 1217–1220 (2007) https://doi.org/10.1116/1.2748409

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Conducting properties of suspended carbon nanotubes grown by thermal chemical vapor deposition

Tsung-Lung Li; Jyh-Hua Ting; Bo-Zhi Yang

J. Vac. Sci. Technol. B 25, 1221–1226 (2007) https://doi.org/10.1116/1.2749525

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Conformal metal thin-film coatings in high-aspect-ratio trenches using a self-sputtered rf-driven plasma source

L. Ji; J.-K. Kim; Q. Ji; K.-N. Leung; Y. Chen; R. A. Gough

J. Vac. Sci. Technol. B 25, 1227–1230 (2007) https://doi.org/10.1116/1.2749527

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Electrical characterization of $Pt ∕ Al Ga N ∕ Ga N$ Schottky diodes grown using AlN template and their application to hydrogen gas sensors

Makoto Miyoshi; Yoshitaka Kuraoka; Keiichiro Asai; Tomohiko Shibata; Mitsuhiro Tanaka; Takashi Egawa

J. Vac. Sci. Technol. B 25, 1231–1235 (2007) https://doi.org/10.1116/1.2749530

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

${Ar}^{+}$ bombardment of $193 nm$ photoresist: Morphological effects

E. Pargon; D. Nest; D. B. Graves

J. Vac. Sci. Technol. B 25, 1236–1243 (2007) https://doi.org/10.1116/1.2747630

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Low power and high speed phase-change memory devices with silicon-germanium heating layers

Seung-Yun Lee; Sung-Min Yoon; Young-Sam Park; Byoung-Gon Yu; Sang-Hoon Kim; Sang-Heung Lee

J. Vac. Sci. Technol. B 25, 1244–1248 (2007) https://doi.org/10.1116/1.2752515

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Field emission from randomly oriented ZnO nanowires

Yong-Qin Chang; Xi-Hong Chen; Hong-Zhou Zhang; Wen-Jiang Qiang; Yi Long

J. Vac. Sci. Technol. B 25, 1249–1252 (2007) https://doi.org/10.1116/1.2752517

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Capacitive and analytical approaches for the analysis of field emission from carbon nanotubes in a sphere-to-plane diode

I. Boscolo; S. Cialdi; A. Fiori; S. Orlanducci; V. Sessa; M. L. Terranova; A. Ciorba; M. Rossi

J. Vac. Sci. Technol. B 25, 1253–1260 (2007) https://doi.org/10.1116/1.2749524

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Growth of carbon nanotubes with resist-assisted patterning process

Kyu Chang Park; Je Hwang Ryu; Ki Seo Kim; Yi Yin Yu; Jin Jang

J. Vac. Sci. Technol. B 25, 1261–1264 (2007) https://doi.org/10.1116/1.2752513

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Dual-metal-gate-integration complementary metal oxide semiconductor process scheme using Ru positive-channel metal oxide semiconductor and TaC negative-channel metal oxide semiconductor gate electrodes

Wen-Tung Chang; Tsung-Eong Hsieh; Chung-Ju Lee

J. Vac. Sci. Technol. B 25, 1265–1269 (2007) https://doi.org/10.1116/1.2752516

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Fermi gas energetics in low-dimensional metals of special geometry

Avto Tavkhelidze; Vasiko Svanidze; Irakli Noselidze

J. Vac. Sci. Technol. B 25, 1270–1275 (2007) https://doi.org/10.1116/1.2753852

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Instability of junctions formed by low energy B implant and low temperature solid phase epitaxy growth

Lei Zhu; M. Martin; M. Hollander; Y. Q. Wang; Q. Chen; K. Ma; X. K. Yu; J. R. Liu; Wei-Kan Chu; Lin Shao

J. Vac. Sci. Technol. B 25, 1276–1279 (2007) https://doi.org/10.1116/1.2749529

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Current spreading of III-nitride light-emitting diodes using plasma treatment

Hsin-Ying Lee; Ke-Hao Pan; Chih-Chien Lin; Yun-Chorng Chang; Fu-Jen Kao; Ching-Ting Lee

J. Vac. Sci. Technol. B 25, 1280–1283 (2007) https://doi.org/10.1116/1.2753853

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

High-performance, low-noise enhancement-mode pseudomorphic high-electron-mobility transistor with gate recession by citric acid/hydrogen peroxide selective etching

Chih-Cheng Wang; Yu-Ju Lin; Hou-Kuei Huang; Chang-Luen Wu; Chian-Sern Chang; Yeong-Her Wang

J. Vac. Sci. Technol. B 25, 1284–1287 (2007) https://doi.org/10.1116/1.2753848

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Multiplexed mass spectrometry for real-time sensing in a spatially programmable chemical vapor deposition reactor

Yuhong Cai; Laurent Henn-Lecordier; Gary W. Rubloff; Ramaswamy Sreenivasan; Jae-Ouk Choo; Raymond A. Adomaitis

J. Vac. Sci. Technol. B 25, 1288–1297 (2007) https://doi.org/10.1116/1.2753851

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Ultrathin decoupled plasma nitridation SiON gate dielectrics prepared with various rf powers

Chan-Yuan Hu; Shih-Chih Chen; Jone F. Chen; Shoou-Jinn Chang; Min-Hong Wang; Vita Yeh; Jung-Che Chen

J. Vac. Sci. Technol. B 25, 1298–1304 (2007) https://doi.org/10.1116/1.2756545

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Enhanced electrical and structural properties of stacked $Al O N ∕ Hf O_{2}$ gate oxides on $p$ -type Si substrates

Wonjoon Choi; Jonghyun Lee; Jungyup Yang; Juhyung Kim; Jinpyo Hong

J. Vac. Sci. Technol. B 25, 1305–1309 (2007) https://doi.org/10.1116/1.2756546

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Observation of fringelike electron-emission pattern in field emission from Pt field emitter fabricated by electron-beam-induced deposition

K. Murakami; F. Wakaya; M. Takai

J. Vac. Sci. Technol. B 25, 1310–1314 (2007) https://doi.org/10.1116/1.2756550

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Fabrication of complementary metal-oxide-semiconductor compatible semiconducting yttrium barium copper oxide uncooled infrared microbolometer arrays

Sandeep Kumar; Murali M. Chitteboyina; Donald P. Butler

J. Vac. Sci. Technol. B 25, 1315–1320 (2007) https://doi.org/10.1116/1.2756551

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Microstructuring by microcontact printing and selective surface dewetting

Amare Benor; Veit Wagner; Dietmar Knipp

J. Vac. Sci. Technol. B 25, 1321–1326 (2007) https://doi.org/10.1116/1.2756552

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Fabrication and characterization of Si nanocrystals in SiC matrix produced by magnetron cosputtering

Dengyuan Song; Eun-Chel Cho; Gavin Conibeer; Young-Hyun Cho; Yidan Huang; Shujuan Huang; Chris Flynn; Martin A. Green

J. Vac. Sci. Technol. B 25, 1327–1335 (2007) https://doi.org/10.1116/1.2756556

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Evaluation of new materials for plasmonic imaging lithography at $476 nm$ using near field scanning optical microscopy

Scott A. Backer; Itai Suez; Zachary M. Fresco; Jean M. J. Fréchet; Josh A. Conway; Shantha Vedantam; Hyojune Lee; Eli Yablonovitch

J. Vac. Sci. Technol. B 25, 1336–1339 (2007) https://doi.org/10.1116/1.2757184

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Analytic description of scanning capacitance microscopy

Hugues Murray; Rosine Germanicus; Aziz Doukkali; Patrick Martin; Bernadette Domenges; Philippe Descamps

J. Vac. Sci. Technol. B 25, 1340–1352 (2007) https://doi.org/10.1116/1.2759218

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Plasma-surface interactions of model polymers for advanced photoresists using $C_{4} F_{8} ∕ Ar$ discharges and energetic ion beams

S. Engelmann; R. L. Bruce; T. Kwon; R. Phaneuf; G. S. Oehrlein; Y. C. Bae; C. Andes; D. Graves; D. Nest; E. A. Hudson; P. Lazzeri; E. Iacob; M. Anderle

J. Vac. Sci. Technol. B 25, 1353–1364 (2007) https://doi.org/10.1116/1.2759935

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Development of certified reference materials of ion-implanted dopants in silicon for calibration of secondary ion mass spectrometers

D. S. Simons; R. G. Downing; G. P. Lamaze; R. M. Lindstrom; R. R. Greenberg; R. L. Paul; S. B. Schiller; W. F. Guthrie

J. Vac. Sci. Technol. B 25, 1365–1375 (2007) https://doi.org/10.1116/1.2759937

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

High aspect ratio Bosch etching of sub- $0.25 μ m$ trenches for hyperintegration applications

Xiaodong Wang; Wanxue Zeng; Guoping Lu; Onofrio L. Russo; Eric Eisenbraun

J. Vac. Sci. Technol. B 25, 1376–1381 (2007) https://doi.org/10.1116/1.2756554

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

$1.3 μ m$ ${Ga}_{0.11} {In}_{0.89} {As}_{0.24} P_{0.76} ∕ {Ga}_{0.27} {In}_{0.73} {As}_{0.67} P_{0.33}$ compressive-strain multiple quantum well with $n$ -type modulation-doped GaInP intermediate-barrier laser diodes

Po-Hsun Lei

J. Vac. Sci. Technol. B 25, 1382–1388 (2007) https://doi.org/10.1116/1.2757183

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Investigation of heteroepitaxial growth of magnetite thin films

G. E. Sterbinsky; J. Cheng; P. T. Chiu; B. W. Wessels; D. J. Keavney

J. Vac. Sci. Technol. B 25, 1389–1392 (2007) https://doi.org/10.1116/1.2757185

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Precise patterning of $Si O_{2}$ -based glass by low-temperature nanoimprint lithography assisted by UV irradiation on both faces using Glasia® as a precursor

Motoki Okinaka; Hiroshi Tsushima; Yoshifumi Ichinose; Emi Watanabe; Keiichi Yanagisawa; Kazuhito Tsukagoshi; Yoshinobu Aoyagi

J. Vac. Sci. Technol. B 25, 1393–1397 (2007) https://doi.org/10.1116/1.2759936

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Real-time in situ flux monitoring in molecular beam epitaxy by wavelength-modulated atomic absorption spectroscopy

D. Vignaud

J. Vac. Sci. Technol. B 25, 1398–1404 (2007) https://doi.org/10.1116/1.2759948

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Role of subsurface defects in metal- $Zn O (000 \bar{1})$ Schottky barrier formation

H. L. Mosbacker; S. El Hage; M. Gonzalez; S. A. Ringel; M. Hetzer; D. C. Look; G. Cantwell; J. Zhang; J. J. Song; L. J. Brillson

J. Vac. Sci. Technol. B 25, 1405–1411 (2007) https://doi.org/10.1116/1.2756543

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Brief Reports and Comments

Simple “solutal” method for preparing Teflon nanostructures and molds

M. Joon Kim; Jeong-Eun Park; Seokyong Song; Hong H. Lee

J. Vac. Sci. Technol. B 25, 1412–1415 (2007) https://doi.org/10.1116/1.2752511

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Highly selective isotropic dry etch based nanofabrication

Muhammad Mustafa Hussain; Gabriel Gebara; Barry Sassman; Sidi Lanee; Larry Larson

J. Vac. Sci. Technol. B 25, 1416–1419 (2007) https://doi.org/10.1116/1.2756544

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Extreme high vacuum field emission microscope for study on the inherent fluctuation of field emission

B. Cho; T. Itagaki; T. Ishikawa; E. Rokuta; C. Oshima

J. Vac. Sci. Technol. B 25, 1420–1423 (2007) https://doi.org/10.1116/1.2757182

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

PAPERS FROM THE 34th ANNUAL CONFERENCE ON THE PHYSICS AND CHEMISTRY OF SEMICONDUCTOR INTERFACES

Nanostructures

Analysis of local carrier modulation in InAs semiconductor nanowire transistors

X. Zhou; S. A. Dayeh; D. Wang; E. T. Yu

J. Vac. Sci. Technol. B 25, 1427–1431 (2007) https://doi.org/10.1116/1.2746355

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Transport properties of InAs nanowire field effect transistors: The effects of surface states

Shadi A. Dayeh; Cesare Soci; Paul K. L. Yu; Edward T. Yu; Deli Wang

J. Vac. Sci. Technol. B 25, 1432–1436 (2007) https://doi.org/10.1116/1.2748410

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Influence of interface roughness on quantum transport in nanoscale FinFET

H. Khan; D. Mamaluy; D. Vasileska

J. Vac. Sci. Technol. B 25, 1437–1440 (2007) https://doi.org/10.1116/1.2748414

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Binding energy, vapor pressure, and melting point of semiconductor nanoparticles

H. H. Farrell; C. D. Van Siclen

J. Vac. Sci. Technol. B 25, 1441–1447 (2007) https://doi.org/10.1116/1.2748415

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Initial stages of GaP heteroepitaxy on nanoscopically roughened (001)Si

X. Liu; I. K. Kim; D. E. Aspnes

J. Vac. Sci. Technol. B 25, 1448–1452 (2007) https://doi.org/10.1116/1.2750345

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Spintronics

Atomic ordering and interlayer diffusion of ${Co}_{2} Fe Si$ films grown on GaAs(001) studied by transmission electron microscopy

M. Hashimoto; A. Trampert; J. Herfort; K. H. Ploog

J. Vac. Sci. Technol. B 25, 1453–1459 (2007) https://doi.org/10.1116/1.2748413

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Structural, optical, and magnetic properties of $(Ga, Mn) As ∕ Al As$ multiple quantum well structures

K. H. Ploog; A. Trampert; O Brandt; V. F. Sapega

J. Vac. Sci. Technol. B 25, 1460–1466 (2007) https://doi.org/10.1116/1.2746344

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Growth of and optical emission from GaMnAs thin films grown by molecular beam epitaxy

J. F. Xu; S. W. Liu; Min Xiao; P. M. Thibado

J. Vac. Sci. Technol. B 25, 1467–1469 (2007) https://doi.org/10.1116/1.2746349

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Magnetostructure of MnAs on GaAs revisited

E. Bauer; R. Belkhou; S. Cherifi; A. Locatelli; A. Pavlovska; N. Rougemaille

J. Vac. Sci. Technol. B 25, 1470–1475 (2007) https://doi.org/10.1116/1.2746353

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Anomalous Mn depth profiles for $Ga Mn As ∕ Ga As (001)$ thin films grown by molecular beam epitaxy

J. F. Xu; P. M. Thibado; C. Awo-Affouda; F. Ramos; V. P. LaBella

J. Vac. Sci. Technol. B 25, 1476–1480 (2007) https://doi.org/10.1116/1.2746351

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Surfaces and Interfaces, including Passivation

Formation of ultrathin $Si N_{x} ∕ Si$ interface control double layer on (001) and (111) GaAs surfaces for ex situ deposition of high- $k$ dielectrics

Masamichi Akazawa; Hideki Hasegawa

J. Vac. Sci. Technol. B 25, 1481–1490 (2007) https://doi.org/10.1116/1.2750344

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Metal gate $Hf O_{2}$ metal-oxide-semiconductor structures on InGaAs substrate with varying Si interface passivation layer and postdeposition anneal condition

InJo Ok; H. Kim; M. Zhang; F. Zhu; S. Park; J. Yum; S. Koveshnikov; W. Tsai; V. Tokranov; M. Yakimov; S. Oktyabrsky; Jack C. Lee

J. Vac. Sci. Technol. B 25, 1491–1494 (2007) https://doi.org/10.1116/1.2746348

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Hydrogen sensing characteristics and mechanism of $Pd ∕ Al Ga N ∕ Ga N$ Schottky diodes subjected to oxygen gettering

Hideki Hasegawa; Masamichi Akazawa

J. Vac. Sci. Technol. B 25, 1495–1503 (2007) https://doi.org/10.1116/1.2750343

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Functionalization and characterization of InAs and InP surfaces with hemin

Michael A. Garcia; Maria Losurdo; Scott D. Wolter; Tong-Ho Kim; W. V. Lampert; Joseph Bonaventura; Giovanni Bruno; Maria Giangregorio; April Brown

J. Vac. Sci. Technol. B 25, 1504–1510 (2007) https://doi.org/10.1116/1.2746337

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Atomic structure of $Si (5 5 12) ‐ 2 \times 1$ ⁠: Confirmation of the structural model having two kinds of chains through homoepitaxy at $550 ° C$

Hidong Kim; Huiting Li; Jae M. Seo

J. Vac. Sci. Technol. B 25, 1511–1515 (2007) https://doi.org/10.1116/1.2746345

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Complex Oxides

Selective growth of iron oxide thin films using the combined method of metal-organic chemical vapor deposition and microcontact printing

J.-Y. Lee; B.-C. Kang; D.-Y. Jung; J.-H. Boo

J. Vac. Sci. Technol. B 25, 1516–1519 (2007) https://doi.org/10.1116/1.2746338

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Epitaxial ${Fe}_{3} O_{4}$ on $Sr Ti O_{3}$ characterized by transmission electron microscopy

J. G. Zheng; G. E. Sterbinsky; J. Cheng; B. W. Wessels

J. Vac. Sci. Technol. B 25, 1520–1523 (2007) https://doi.org/10.1116/1.2748412

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Radiative and nonradiative lifetimes in nonpolar $m$ -plane ${In}_{x} {Ga}_{1 - x} N ∕ Ga N$ multiple quantum wells grown on GaN templates prepared by lateral epitaxial overgrowth

T. Onuma; T. Koyama; A. Chakraborty; M. McLaurin; B. A. Haskell; P. T. Fini; S. Keller; S. P. DenBaars; J. S. Speck; S. Nakamura; U. K. Mishra; T. Sota; S. F. Chichibu

J. Vac. Sci. Technol. B 25, 1524–1528 (2007) https://doi.org/10.1116/1.2746354

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Nitrides

Fabrication of GaN-based metal-oxide-semiconductor light-emitting diodes operating in ultraviolet spectral region

T. Honda; T. Kobayashi; S. Komiyama; Y. Mashiyama

J. Vac. Sci. Technol. B 25, 1529–1532 (2007) https://doi.org/10.1116/1.2746343

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Interface and optical properties of $In Ga As N Sb ∕ Ga As$ quantum wells on GaAs (411) substrates by molecular beam epitaxy

W. Li; C. Pei; A. Torfi; D. Moscicka; W. I. Wang

J. Vac. Sci. Technol. B 25, 1533–1535 (2007) https://doi.org/10.1116/1.2748411

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Formation of (Zn,Co)O by annealing of Co overlayers on ZnO

J. Dumont; M. Mugumaoderha C.; T. Seldrum; F. Frising; C. Moisson; D. Turover; R. Sporken

J. Vac. Sci. Technol. B 25, 1536–1541 (2007) https://doi.org/10.1116/1.2746339

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Letters

Band gap narrowing of ZnO:N films by varying rf sputtering power in $O_{2} ∕ N_{2}$ mixtures

Kwang-Soon Ahn; Yanfa Yan; Mowafak Al-Jassim

J. Vac. Sci. Technol. B 25, L23–L26 (2007) https://doi.org/10.1116/1.2746053

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Glass nanostructures fabricated by soft thermal nanoimprint

C. Peroz; C. Heitz; E. Barthel; E. Søndergård; V. Goletto

J. Vac. Sci. Technol. B 25, L27–L30 (2007) https://doi.org/10.1116/1.2748791

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Nanoimprint fabrication of polymer cell substrates with combined microscale and nanoscale topography

Marcus T. Eliason; Joseph L. Charest; Blake A. Simmons; Andrés J. García; William P. King

J. Vac. Sci. Technol. B 25, L31–L34 (2007) https://doi.org/10.1116/1.2748792

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Polymer through-hole membrane fabricated by nanoimprinting using metal molds with high aspect ratios

Takashi Yanagishita; Kazuyuki Nishio; Hideki Masuda

J. Vac. Sci. Technol. B 25, L35–L38 (2007) https://doi.org/10.1116/1.2753847

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Issues

Review Article

Regular Articles

Brief Reports and Comments

PAPERS FROM THE 34th ANNUAL CONFERENCE ON THE PHYSICS AND CHEMISTRY OF SEMICONDUCTOR INTERFACES

Nanostructures

Spintronics

Surfaces and Interfaces, including Passivation

Complex Oxides

Nitrides

Letters

RSS

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

This Feature Is Available To Subscribers Only