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J. Vac. Sci. Technol. B 16, 2915–2927 (1998) https://doi.org/10.1116/1.590368
J. Vac. Sci. Technol. B 16, 2928–2933 (1998) https://doi.org/10.1116/1.590320
J. Vac. Sci. Technol. B 16, 2934–2937 (1998) https://doi.org/10.1116/1.590321
J. Vac. Sci. Technol. B 16, 2938–2941 (1998) https://doi.org/10.1116/1.590322
J. Vac. Sci. Technol. B 16, 2942–2946 (1998) https://doi.org/10.1116/1.590323
J. Vac. Sci. Technol. B 16, 2947–2951 (1998) https://doi.org/10.1116/1.590324
J. Vac. Sci. Technol. B 16, 2952–2956 (1998) https://doi.org/10.1116/1.590325
J. Vac. Sci. Technol. B 16, 2957–2967 (1998) https://doi.org/10.1116/1.590326
J. Vac. Sci. Technol. B 16, 2968–2973 (1998) https://doi.org/10.1116/1.590327
J. Vac. Sci. Technol. B 16, 2974–2976 (1998) https://doi.org/10.1116/1.590328
J. Vac. Sci. Technol. B 16, 2977–2981 (1998) https://doi.org/10.1116/1.590329
J. Vac. Sci. Technol. B 16, 2982–2985 (1998) https://doi.org/10.1116/1.590330
J. Vac. Sci. Technol. B 16, 2986–2995 (1998) https://doi.org/10.1116/1.590331
J. Vac. Sci. Technol. B 16, 2996–3002 (1998) https://doi.org/10.1116/1.590332
J. Vac. Sci. Technol. B 16, 3003–3007 (1998) https://doi.org/10.1116/1.590369
J. Vac. Sci. Technol. B 16, 3008–3012 (1998) https://doi.org/10.1116/1.590333
J. Vac. Sci. Technol. B 16, 3013–3014 (1998) https://doi.org/10.1116/1.590334
J. Vac. Sci. Technol. B 16, 3015–3020 (1998) https://doi.org/10.1116/1.590335
J. Vac. Sci. Technol. B 16, 3021–3026 (1998) https://doi.org/10.1116/1.590336
J. Vac. Sci. Technol. B 16, 3027–3031 (1998) https://doi.org/10.1116/1.590337
J. Vac. Sci. Technol. B 16, 3032–3040 (1998) https://doi.org/10.1116/1.590338
J. Vac. Sci. Technol. B 16, 3041–3047 (1998) https://doi.org/10.1116/1.590339
J. Vac. Sci. Technol. B 16, 3048–3054 (1998) https://doi.org/10.1116/1.590340
J. Vac. Sci. Technol. B 16, 3055–3058 (1998) https://doi.org/10.1116/1.590341
J. Vac. Sci. Technol. B 16, 3059–3064 (1998) https://doi.org/10.1116/1.590342
J. Vac. Sci. Technol. B 16, 3065–3068 (1998) https://doi.org/10.1116/1.590343
J. Vac. Sci. Technol. B 16, 3069–3072 (1998) https://doi.org/10.1116/1.590344
J. Vac. Sci. Technol. B 16, 3073–3076 (1998) https://doi.org/10.1116/1.590444
J. Vac. Sci. Technol. B 16, 3077–3081 (1998) https://doi.org/10.1116/1.590445
J. Vac. Sci. Technol. B 16, 3082–3085 (1998) https://doi.org/10.1116/1.590495
J. Vac. Sci. Technol. B 16, 3086–3096 (1998) https://doi.org/10.1116/1.590446
J. Vac. Sci. Technol. B 16, 3097–3098 (1998) https://doi.org/10.1116/1.590447
J. Vac. Sci. Technol. B 16, 3099–3104 (1998) https://doi.org/10.1116/1.590370
J. Vac. Sci. Technol. B 16, 3105–3107 (1998) https://doi.org/10.1116/1.590448
J. Vac. Sci. Technol. B 16, 3108–3111 (1998) https://doi.org/10.1116/1.590449
J. Vac. Sci. Technol. B 16, 3112–3114 (1998) https://doi.org/10.1116/1.590496
J. Vac. Sci. Technol. B 16, 3127–3131 (1998) https://doi.org/10.1116/1.590450
J. Vac. Sci. Technol. B 16, 3132–3136 (1998) https://doi.org/10.1116/1.590451
J. Vac. Sci. Technol. B 16, 3137–3141 (1998) https://doi.org/10.1116/1.590452
J. Vac. Sci. Technol. B 16, 3142–3149 (1998) https://doi.org/10.1116/1.590453
J. Vac. Sci. Technol. B 16, 3150–3153 (1998) https://doi.org/10.1116/1.590454
J. Vac. Sci. Technol. B 16, 3154–3157 (1998) https://doi.org/10.1116/1.590455
J. Vac. Sci. Technol. B 16, 3158–3163 (1998) https://doi.org/10.1116/1.590456
J. Vac. Sci. Technol. B 16, 3164–3167 (1998) https://doi.org/10.1116/1.590457
J. Vac. Sci. Technol. B 16, 3168–3173 (1998) https://doi.org/10.1116/1.590458
J. Vac. Sci. Technol. B 16, 3174–3176 (1998) https://doi.org/10.1116/1.590345
J. Vac. Sci. Technol. B 16, 3177–3180 (1998) https://doi.org/10.1116/1.590346
J. Vac. Sci. Technol. B 16, 3181–3184 (1998) https://doi.org/10.1116/1.590347
J. Vac. Sci. Technol. B 16, 3185–3191 (1998) https://doi.org/10.1116/1.590348
J. Vac. Sci. Technol. B 16, 3192–3196 (1998) https://doi.org/10.1116/1.590349
J. Vac. Sci. Technol. B 16, 3197–3201 (1998) https://doi.org/10.1116/1.590350
J. Vac. Sci. Technol. B 16, 3202–3205 (1998) https://doi.org/10.1116/1.590351
J. Vac. Sci. Technol. B 16, 3206–3210 (1998) https://doi.org/10.1116/1.590352
J. Vac. Sci. Technol. B 16, 3211–3214 (1998) https://doi.org/10.1116/1.590353
J. Vac. Sci. Technol. B 16, 3215–3220 (1998) https://doi.org/10.1116/1.590354
J. Vac. Sci. Technol. B 16, 3221–3226 (1998) https://doi.org/10.1116/1.590355
J. Vac. Sci. Technol. B 16, 3227–3231 (1998) https://doi.org/10.1116/1.590356
J. Vac. Sci. Technol. B 16, 3232–3236 (1998) https://doi.org/10.1116/1.590357
J. Vac. Sci. Technol. B 16, 3237–3240 (1998) https://doi.org/10.1116/1.590358
J. Vac. Sci. Technol. B 16, 3241–3247 (1998) https://doi.org/10.1116/1.590359
J. Vac. Sci. Technol. B 16, 3248–3255 (1998) https://doi.org/10.1116/1.590371
J. Vac. Sci. Technol. B 16, 3256–3261 (1998) https://doi.org/10.1116/1.590360
J. Vac. Sci. Technol. B 16, 3262–3268 (1998) https://doi.org/10.1116/1.590361
J. Vac. Sci. Technol. B 16, 3269–3274 (1998) https://doi.org/10.1116/1.590362
J. Vac. Sci. Technol. B 16, 3275–3278 (1998) https://doi.org/10.1116/1.590363
J. Vac. Sci. Technol. B 16, 3279–3283 (1998) https://doi.org/10.1116/1.590364
J. Vac. Sci. Technol. B 16, 3284–3288 (1998) https://doi.org/10.1116/1.590365
J. Vac. Sci. Technol. B 16, 3289–3293 (1998) https://doi.org/10.1116/1.590366
J. Vac. Sci. Technol. B 16, 3294–3297 (1998) https://doi.org/10.1116/1.590367
J. Vac. Sci. Technol. B 16, 3298–3300 (1998) https://doi.org/10.1116/1.590372
J. Vac. Sci. Technol. B 16, 3301–3304 (1998) https://doi.org/10.1116/1.590373
J. Vac. Sci. Technol. B 16, 3305–3310 (1998) https://doi.org/10.1116/1.590374
J. Vac. Sci. Technol. B 16, 3311–3314 (1998) https://doi.org/10.1116/1.590497
J. Vac. Sci. Technol. B 16, 3315–3321 (1998) https://doi.org/10.1116/1.590375
J. Vac. Sci. Technol. B 16, 3322–3333 (1998) https://doi.org/10.1116/1.590376
J. Vac. Sci. Technol. B 16, 3334–3338 (1998) https://doi.org/10.1116/1.590377
J. Vac. Sci. Technol. B 16, 3339–3343 (1998) https://doi.org/10.1116/1.590378
J. Vac. Sci. Technol. B 16, 3344–3348 (1998) https://doi.org/10.1116/1.590379
J. Vac. Sci. Technol. B 16, 3349–3353 (1998) https://doi.org/10.1116/1.590380
J. Vac. Sci. Technol. B 16, 3354–3358 (1998) https://doi.org/10.1116/1.590381
J. Vac. Sci. Technol. B 16, 3359–3363 (1998) https://doi.org/10.1116/1.590459
J. Vac. Sci. Technol. B 16, 3364–3366 (1998) https://doi.org/10.1116/1.590304
J. Vac. Sci. Technol. B 16, 3367–3369 (1998) https://doi.org/10.1116/1.590460
J. Vac. Sci. Technol. B 16, 3370–3373 (1998) https://doi.org/10.1116/1.590461
J. Vac. Sci. Technol. B 16, 3374–3379 (1998) https://doi.org/10.1116/1.590462
J. Vac. Sci. Technol. B 16, 3380–3384 (1998) https://doi.org/10.1116/1.590463
J. Vac. Sci. Technol. B 16, 3385–3391 (1998) https://doi.org/10.1116/1.590464
J. Vac. Sci. Technol. B 16, 3392–3397 (1998) https://doi.org/10.1116/1.590465
J. Vac. Sci. Technol. B 16, 3398–3404 (1998) https://doi.org/10.1116/1.590466
J. Vac. Sci. Technol. B 16, 3405–3410 (1998) https://doi.org/10.1116/1.590467
J. Vac. Sci. Technol. B 16, 3411–3414 (1998) https://doi.org/10.1116/1.590468
J. Vac. Sci. Technol. B 16, 3415–3418 (1998) https://doi.org/10.1116/1.590469
J. Vac. Sci. Technol. B 16, 3419–3421 (1998) https://doi.org/10.1116/1.590470
J. Vac. Sci. Technol. B 16, 3422–3425 (1998) https://doi.org/10.1116/1.590471
J. Vac. Sci. Technol. B 16, 3426–3429 (1998) https://doi.org/10.1116/1.590472
J. Vac. Sci. Technol. B 16, 3430–3434 (1998) https://doi.org/10.1116/1.590473
J. Vac. Sci. Technol. B 16, 3435–3439 (1998) https://doi.org/10.1116/1.590498
J. Vac. Sci. Technol. B 16, 3440–3443 (1998) https://doi.org/10.1116/1.590474
J. Vac. Sci. Technol. B 16, 3444–3448 (1998) https://doi.org/10.1116/1.590475
J. Vac. Sci. Technol. B 16, 3449–3455 (1998) https://doi.org/10.1116/1.590476
J. Vac. Sci. Technol. B 16, 3456–3461 (1998) https://doi.org/10.1116/1.590477
J. Vac. Sci. Technol. B 16, 3462–3465 (1998) https://doi.org/10.1116/1.590382
J. Vac. Sci. Technol. B 16, 3466–3470 (1998) https://doi.org/10.1116/1.590478
J. Vac. Sci. Technol. B 16, 3471–3475 (1998) https://doi.org/10.1116/1.590479
J. Vac. Sci. Technol. B 16, 3476–3479 (1998) https://doi.org/10.1116/1.590480
J. Vac. Sci. Technol. B 16, 3480–3484 (1998) https://doi.org/10.1116/1.590481
J. Vac. Sci. Technol. B 16, 3485–3490 (1998) https://doi.org/10.1116/1.590482
J. Vac. Sci. Technol. B 16, 3491–3494 (1998) https://doi.org/10.1116/1.590483
J. Vac. Sci. Technol. B 16, 3495–3499 (1998) https://doi.org/10.1116/1.590484
J. Vac. Sci. Technol. B 16, 3500–3503 (1998) https://doi.org/10.1116/1.590485
J. Vac. Sci. Technol. B 16, 3504–3508 (1998) https://doi.org/10.1116/1.590486
J. Vac. Sci. Technol. B 16, 3509–3514 (1998) https://doi.org/10.1116/1.590487
J. Vac. Sci. Technol. B 16, 3515–3520 (1998) https://doi.org/10.1116/1.590488
J. Vac. Sci. Technol. B 16, 3521–3525 (1998) https://doi.org/10.1116/1.590489
J. Vac. Sci. Technol. B 16, 3526–3534 (1998) https://doi.org/10.1116/1.590490
J. Vac. Sci. Technol. B 16, 3535–3538 (1998) https://doi.org/10.1116/1.590491
J. Vac. Sci. Technol. B 16, 3539–3542 (1998) https://doi.org/10.1116/1.590492
J. Vac. Sci. Technol. B 16, 3543–3546 (1998) https://doi.org/10.1116/1.590493
J. Vac. Sci. Technol. B 16, 3547–3551 (1998) https://doi.org/10.1116/1.590494
J. Vac. Sci. Technol. B 16, 3552–3557 (1998) https://doi.org/10.1116/1.590305
J. Vac. Sci. Technol. B 16, 3558–3562 (1998) https://doi.org/10.1116/1.590306
J. Vac. Sci. Technol. B 16, 3563–3566 (1998) https://doi.org/10.1116/1.590307
J. Vac. Sci. Technol. B 16, 3567–3571 (1998) https://doi.org/10.1116/1.590499
J. Vac. Sci. Technol. B 16, 3572–3576 (1998) https://doi.org/10.1116/1.590308
J. Vac. Sci. Technol. B 16, 3577–3581 (1998) https://doi.org/10.1116/1.590309
J. Vac. Sci. Technol. B 16, 3582–3586 (1998) https://doi.org/10.1116/1.590310
J. Vac. Sci. Technol. B 16, 3587–3591 (1998) https://doi.org/10.1116/1.590311
J. Vac. Sci. Technol. B 16, 3592–3598 (1998) https://doi.org/10.1116/1.590500
J. Vac. Sci. Technol. B 16, 3599–3601 (1998) https://doi.org/10.1116/1.590385
J. Vac. Sci. Technol. B 16, 3602–3605 (1998) https://doi.org/10.1116/1.590312
J. Vac. Sci. Technol. B 16, 3606–3611 (1998) https://doi.org/10.1116/1.590313
J. Vac. Sci. Technol. B 16, 3612–3617 (1998) https://doi.org/10.1116/1.590314
J. Vac. Sci. Technol. B 16, 3618–3624 (1998) https://doi.org/10.1116/1.590315
J. Vac. Sci. Technol. B 16, 3625–3630 (1998) https://doi.org/10.1116/1.590316
J. Vac. Sci. Technol. B 16, 3631–3636 (1998) https://doi.org/10.1116/1.590317
J. Vac. Sci. Technol. B 16, 3637–3641 (1998) https://doi.org/10.1116/1.590318
J. Vac. Sci. Technol. B 16, 3642–3646 (1998) https://doi.org/10.1116/1.590319
J. Vac. Sci. Technol. B 16, 3647–3650 (1998) https://doi.org/10.1116/1.590383
J. Vac. Sci. Technol. B 16, 3651–3654 (1998) https://doi.org/10.1116/1.590384
J. Vac. Sci. Technol. B 16, 3655–3660 (1998) https://doi.org/10.1116/1.590386
J. Vac. Sci. Technol. B 16, 3661–3667 (1998) https://doi.org/10.1116/1.590387
J. Vac. Sci. Technol. B 16, 3668–3671 (1998) https://doi.org/10.1116/1.590388
J. Vac. Sci. Technol. B 16, 3672–3675 (1998) https://doi.org/10.1116/1.590389
J. Vac. Sci. Technol. B 16, 3676–3683 (1998) https://doi.org/10.1116/1.590390
J. Vac. Sci. Technol. B 16, 3684–3688 (1998) https://doi.org/10.1116/1.590391
J. Vac. Sci. Technol. B 16, 3689–3694 (1998) https://doi.org/10.1116/1.590392
J. Vac. Sci. Technol. B 16, 3695–3700 (1998) https://doi.org/10.1116/1.590501
J. Vac. Sci. Technol. B 16, 3701–3704 (1998) https://doi.org/10.1116/1.590393
J. Vac. Sci. Technol. B 16, 3705–3708 (1998) https://doi.org/10.1116/1.590394
J. Vac. Sci. Technol. B 16, 3709–3715 (1998) https://doi.org/10.1116/1.590395
J. Vac. Sci. Technol. B 16, 3716–3721 (1998) https://doi.org/10.1116/1.590396
J. Vac. Sci. Technol. B 16, 3722–3725 (1998) https://doi.org/10.1116/1.590397
J. Vac. Sci. Technol. B 16, 3726–3729 (1998) https://doi.org/10.1116/1.590502
J. Vac. Sci. Technol. B 16, 3730–3733 (1998) https://doi.org/10.1116/1.590398
J. Vac. Sci. Technol. B 16, 3734–3738 (1998) https://doi.org/10.1116/1.590399
J. Vac. Sci. Technol. B 16, 3739–3743 (1998) https://doi.org/10.1116/1.590409
J. Vac. Sci. Technol. B 16, 3744–3747 (1998) https://doi.org/10.1116/1.590400
J. Vac. Sci. Technol. B 16, 3748–3751 (1998) https://doi.org/10.1116/1.590401
J. Vac. Sci. Technol. B 16, 3752–3758 (1998) https://doi.org/10.1116/1.590402
J. Vac. Sci. Technol. B 16, 3759–3766 (1998) https://doi.org/10.1116/1.590403
J. Vac. Sci. Technol. B 16, 3767–3772 (1998) https://doi.org/10.1116/1.590404
J. Vac. Sci. Technol. B 16, 3773–3778 (1998) https://doi.org/10.1116/1.590405
J. Vac. Sci. Technol. B 16, 3779–3783 (1998) https://doi.org/10.1116/1.590406
J. Vac. Sci. Technol. B 16, 3784–3788 (1998) https://doi.org/10.1116/1.590407
J. Vac. Sci. Technol. B 16, 3789–3794 (1998) https://doi.org/10.1116/1.590408
J. Vac. Sci. Technol. B 16, 3795–3799 (1998) https://doi.org/10.1116/1.590410
J. Vac. Sci. Technol. B 16, 3800–3803 (1998) https://doi.org/10.1116/1.590411
J. Vac. Sci. Technol. B 16, 3804–3807 (1998) https://doi.org/10.1116/1.590412