Skip Nav Destination

Issues

Select Year

Issue

March 1997

This content was originally published in

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

ISSN 1071-1023

EISSN 1520-8567

Identification and visualization of questionable regions in atomic force microscope images

Edward C. W. Leung; Peter Markiewicz; M. Cynthia Goh

J. Vac. Sci. Technol. B 15, 181–185 (1997) https://doi.org/10.1116/1.589261

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Surface process and interaction of Mo clusters on highly oriented pyrolytic graphite observed by scanning tunneling microscopy

H. Xu; K. Y. S. Ng

J. Vac. Sci. Technol. B 15, 186–191 (1997) https://doi.org/10.1116/1.589262

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Atomic force microscopic observation at initial growth stage of vacuum-deposited thin film of polyvinylidenefluoride

Hideo Seyama; Kunisuke Maki; Nobuhiro Yamazaki

J. Vac. Sci. Technol. B 15, 192–197 (1997) https://doi.org/10.1116/1.589263

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Thin film interference effects in an off-axis illumination system

T. Azuma; T. Sato

J. Vac. Sci. Technol. B 15, 198–201 (1997) https://doi.org/10.1116/1.589264

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Optical emission spectroscopy of high density metal plasma formed during magnetron sputtering

Z. J. Radzimski; O. E. Hankins; J. J. Cuomo; W. P. Posadowski; S. Shingubara

J. Vac. Sci. Technol. B 15, 202–208 (1997) https://doi.org/10.1116/1.589265

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Effect of annealing temperature on electrical stability of radio frequency magnetron sputtered silicon oxides

Emil V. Jelenkovic; K. Y. Tong

J. Vac. Sci. Technol. B 15, 209–213 (1997) https://doi.org/10.1116/1.589266

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Chemical challenge of submicron oxide etching

S. C. McNevin; K. V. Guinn; J. Ashley Taylor

J. Vac. Sci. Technol. B 15, 214–220 (1997) https://doi.org/10.1116/1.589267

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Pattern profile control of polysilicon in magnetron reactive ion etching

Masakatsu Kimizuka; Yoshiharu Ozaki

J. Vac. Sci. Technol. B 15, 221–225 (1997) https://doi.org/10.1116/1.589268

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Thermal anneal activation of near-surface deep level defects in electron cyclotron resonance hydrogen plasma-exposed silicon

C. W. Nam; S. Ashok; T. Sekiguchi

J. Vac. Sci. Technol. B 15, 226–231 (1997) https://doi.org/10.1116/1.589269

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Influence of plasma gas and postcleaning on the electrical characteristics of plasma-exposed $Al /n- Si$ Schottky diodes

Tsukasa Kuroda; Zhangda Lin; Hiroaki Iwakuro; Shinji Sato

J. Vac. Sci. Technol. B 15, 232–236 (1997) https://doi.org/10.1116/1.589270

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Copper dry etching with precise wafer-temperature control using Cl₂ gas as a single reactant

H. Miyazaki; K. Takeda; N. Sakuma; S. Kondo; Y. Homma; K. Hinode

J. Vac. Sci. Technol. B 15, 237–240 (1997) https://doi.org/10.1116/1.589271

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Electrical and structural characterization of $PtSi /p- {Si}_{1−x} {Ge}_{x}$ low Schottky barrier junctions prepared by co-sputtering

O. Nur; M. Willander; R. Turan; M. R. Sardela, Jr.; H. H. Radamson; G. V. Hansson

J. Vac. Sci. Technol. B 15, 241–246 (1997) https://doi.org/10.1116/1.589272

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Structural characterization of thin Ni films deposited on (001) ZnSe

Sergei Ruvimov; Zuzanna Liliental-Weber; Edith D. Bourret; Wendy Swider; Jack Washburn; Kristin J. Duxstad; E. E. Haller

J. Vac. Sci. Technol. B 15, 247–251 (1997) https://doi.org/10.1116/1.589273

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Metal–insulator–semiconductor structure on GaAs using a pseudomorphic Si/GaP interlayer

Dae-Gyu Park; S. Noor Mohammad; Zhi Chen; Hadis Morkoç

J. Vac. Sci. Technol. B 15, 252–258 (1997) https://doi.org/10.1116/1.589274

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Physical properties and microelectronic applications of low permittivity fluoromethylene cyanate ester resins

Leonard J. Buckley; Arthur W. Snow

J. Vac. Sci. Technol. B 15, 259–266 (1997) https://doi.org/10.1116/1.589275

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Etching and boron diffusion of high aspect ratio Si trenches for released resonators

J. W. Weigold; W. H. Juan; S. W. Pang

J. Vac. Sci. Technol. B 15, 267–272 (1997) https://doi.org/10.1116/1.589276

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Lateral range spread of MeV phosphorus ions implanted in silicon measured by time-of-flight secondary ion mass spectrometry

Bo-Rong Shi; Nelson Cue; Terry L. Smith; Tian-Bing Xu

J. Vac. Sci. Technol. B 15, 273–276 (1997) https://doi.org/10.1116/1.589277

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Thermal desorption spectroscopy and molecular beam time-of-flight studies of silicon wafer ultraviolet/ozone cleaning

K. Yamaguchi; Y. Uematsu; Y. Ikoma; F. Watanabe; T. Motooka; T. Igarashi

J. Vac. Sci. Technol. B 15, 277–281 (1997) https://doi.org/10.1116/1.589278

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Spark-gap atomic emission microscopy. II. Improvements in resolution

P. G. Van Patten; J. D. Noll; M. L. Myrick

J. Vac. Sci. Technol. B 15, 282–286 (1997) https://doi.org/10.1116/1.589279

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Generation of diffraction-free beams for applications in optical microlithography

M. Erdélyi; Z. L. Horváth; G. Szabó; Zs. Bor; F. K. Tittel; J. R. Cavallaro; M. C. Smayling

J. Vac. Sci. Technol. B 15, 287–292 (1997) https://doi.org/10.1116/1.589280

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Fabrication and analysis of extreme ultraviolet reflection masks with patterned W/C absorber bilayers

H.-J. Voorma; E. Louis; N. B. Koster; F. Bijkerk; T. Zijlstra; L. E. M. de Groot; B. A. C. Rousseeuw; J. Romijn; E. W. J. M. van der Drift; J. Friedrich

J. Vac. Sci. Technol. B 15, 293–298 (1997) https://doi.org/10.1116/1.589309

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

New deep-ultraviolet positive photoresists. II. Copolymers of $p$ -trimethylsilylstyrenes and acrylics

Wen-Yen Chiang; Hwai-Der Shann

J. Vac. Sci. Technol. B 15, 299–305 (1997) https://doi.org/10.1116/1.589310

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Novel electron beam lithography technique for submicron T-gate fabrication

M. M. Ahmed; H. Ahmed

J. Vac. Sci. Technol. B 15, 306–310 (1997) https://doi.org/10.1116/1.589311

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Quantitative measurement of the resist heating in a variable shaped electron lithography

Sergey Babin; Peter Hudek; Ivan Kostic

J. Vac. Sci. Technol. B 15, 311–315 (1997) https://doi.org/10.1116/1.589312

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Molecular beam epitaxy of highly mismatched ${In}_{0.73} {Ga}_{0.27} As$ on InP for near-infrared photodetectors

R. Kochhar; W.-Y. Hwang; M. Micovic; T. S. Mayer; D. L. Miller; S. M. Lord

J. Vac. Sci. Technol. B 15, 316–320 (1997) https://doi.org/10.1116/1.589313

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

InAs room temperature infrared photoconductive detectors grown by molecular-beam epitaxy

Biing-Der Liu; Ray-Ming Lin; Si-Chen Lee; Tai-Ping Sun

J. Vac. Sci. Technol. B 15, 321–324 (1997) https://doi.org/10.1116/1.589314

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Surface decontamination of patterned GaAs substrates for molecular beam epitaxy regrowth using a hydrogen radical source

T. M. Burke; M. A. Quierin; M. P. Grimshaw; D. A. Ritchie; M. Pepper; J. H. Burroughes

J. Vac. Sci. Technol. B 15, 325–328 (1997) https://doi.org/10.1116/1.589315

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Substrate temperature measurement by absorption-edge spectroscopy during molecular beam epitaxy of narrow-band gap semiconductor films

T. J. de Lyon; J. A. Roth; D. H. Chow

J. Vac. Sci. Technol. B 15, 329–336 (1997) https://doi.org/10.1116/1.589316

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Theoretical analysis of field emission from a metal diamond cold cathode emitter

Peter Lerner; P. H. Cutler; N. M. Miskovsky

J. Vac. Sci. Technol. B 15, 337–342 (1997) https://doi.org/10.1116/1.589317

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Fabrication of arrayed glassy carbon field emitters

Yasunari Sohda; David M. Tanenbaum; Stephen W. Turner; Harold G. Craighead

J. Vac. Sci. Technol. B 15, 343–348 (1997) https://doi.org/10.1116/1.589318

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Sensor nanofabrication, performance, and conduction mechanisms in scanning thermal microscopy

K. Luo; Z. Shi; J. Varesi; A. Majumdar

J. Vac. Sci. Technol. B 15, 349–360 (1997) https://doi.org/10.1116/1.589319

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Multiparameter grating metrology using optical scatterometry

Christopher J. Raymond; Michael R. Murnane; Steven L. Prins; S. Sohail; H. Naqvi; John R. McNeil; Jimmy W. Hosch

J. Vac. Sci. Technol. B 15, 361–368 (1997) https://doi.org/10.1116/1.589320

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

A simple fabrication method for nanometer-scale thin-metal stencils

Neil M. Zimmerman

J. Vac. Sci. Technol. B 15, 369–372 (1997) https://doi.org/10.1116/1.589321

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Erratum: Scaling of Si and GaAs trench etch rates with aspect ratio, feature width, and substrate temperature [J. Vac. Sci. Technol. B 13, 92 (1995)]

A. D. Bailey, III; M. C. M. van de Sanden; J. A. Gregus; R. A. Gottscho

J. Vac. Sci. Technol. B 15, 373 (1997) https://doi.org/10.1116/1.589761

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Microtips and resistive sheet: A theoretical description of the emissive properties of this system

R. Baptist; F. Bachelet; C. Constancias

J. Vac. Sci. Technol. B 15, 385–390 (1997) https://doi.org/10.1116/1.589322

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Simulation of field emission and electrodynamic characteristics for triode near-cathode modulators with edge field emitter arrays

Yu. F. Zakharchenko; N. L. Sinitsyn; Yu. V. Gulyaev

J. Vac. Sci. Technol. B 15, 391–393 (1997) https://doi.org/10.1116/1.589323

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Numerical modeling of the disk-edge field emitter triode

Chen Wang; Baoping Wang; Hongwei Zhao; Johnny K. O. Sin; M. C. Poon

J. Vac. Sci. Technol. B 15, 394–397 (1997) https://doi.org/10.1116/1.589324

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Hot electron and quasiballistic transport of nonequilibrium electrons in diamond thin films

P. Lerner; P. H. Cutler; N. Miskovsky

J. Vac. Sci. Technol. B 15, 398–400 (1997) https://doi.org/10.1116/1.589325

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Effects of vacuum conditions on low frequency noise in silicon field emission devices

Johann T. Trujillo; Andrei G. Chakhovskoi; Charles E. Hunt

J. Vac. Sci. Technol. B 15, 401–404 (1997) https://doi.org/10.1116/1.589326

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Modulation of the current in a field emitter caused by a continuous wave or pulsed laser: Simulations and experimental results

Mark J. Hagmann; Manuel Brugat

J. Vac. Sci. Technol. B 15, 405–409 (1997) https://doi.org/10.1116/1.589327

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Field-emission processes from a liquid–metal surface

G. N. Fursey; L. A. Shirochin; L. M. Baskin

J. Vac. Sci. Technol. B 15, 410–421 (1997) https://doi.org/10.1116/1.589328

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Work function estimate for electrons emitted from nanotube carbon cluster films

Yu. V. Gulyaev; N. I. Sinitsyn; G. V. Torgashov; Sh. T. Mevlyut; A. I. Zhbanov; Yu. F. Zakharchenko; Z. Ya. Kosakovskaya; L. A. Chernozatonskii; O. E. Glukhova; I. G. Torgashov

J. Vac. Sci. Technol. B 15, 422–424 (1997) https://doi.org/10.1116/1.589329

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Fabrication and field emission study of gated diamondlike-carbon-coated silicon tips

Sanjo Lee; Byeong Kwon Ju; Yun Hi Lee; D. Jeon; Myung Hwan Oh

J. Vac. Sci. Technol. B 15, 425–427 (1997) https://doi.org/10.1116/1.589330

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Relationship between field emission characteristics and hydrogen content in diamondlike carbon deposited by the layer-by-layer technique using plasma enhanced chemical vapor deposition

Kyu Chang Park; Jong Hyun Moon; Suk Jae Chung; Myung Hwan Oh; W. I. Milne; Jin Jang

J. Vac. Sci. Technol. B 15, 428–430 (1997) https://doi.org/10.1116/1.589331

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Field emission properties of ta-C films with nitrogen doping

Kyu Chang Park; Jong Hyun Moon; Suk Jae Chung; Jae Hoon Jung; Byeong Kwon Ju; Myung Hwan Oh; W. I. Milne; Min Koo Han; Jin Jang

J. Vac. Sci. Technol. B 15, 431–433 (1997) https://doi.org/10.1116/1.589332

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Low temperature reactive ion etching of silicon with ${SF}_{6} {/O}_{2}$ plasmas

T. Wells; M. M. El-Gomati; J. Wood

J. Vac. Sci. Technol. B 15, 434–438 (1997) https://doi.org/10.1116/1.589333

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Layered structures with delta-doped layers for enhancement of field emission

A. A. Evtukh; V. G. Litovchenko; R. I. Marchenko; S. Yu. Kydzinovski

J. Vac. Sci. Technol. B 15, 439–441 (1997) https://doi.org/10.1116/1.589334

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Diamond cold cathodes for electron guns

E. I. Givargizov; V. V. Zhirnov; N. N. Chubun; A. B. Voronin

J. Vac. Sci. Technol. B 15, 442–445 (1997) https://doi.org/10.1116/1.589335

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Emission characterization of diamond-coated Si field emission arrays

V. V. Zhirnov; E. I. Givargizov; A. V. Kandidov; B. V. Seleznev; A. N. Alimova

J. Vac. Sci. Technol. B 15, 446–449 (1997) https://doi.org/10.1116/1.589595

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Fabrication of field emission display prototype based on Si field emission arrays with diamond coating

E. I. Givargizov; V. V. Zhirnov; N. N. Chubun; A. N. Stepanova

J. Vac. Sci. Technol. B 15, 450–453 (1997) https://doi.org/10.1116/1.589596

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Field emission of nitrogen doped diamondlike carbon films deposited by plasma enhanced chemical vapor deposition

Kyu Chang Park; Jong Hyun Moon; Suk Jae Chung; Jin Jang

J. Vac. Sci. Technol. B 15, 454–456 (1997) https://doi.org/10.1116/1.589597

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Self-aligned silicon tips coated with diamondlike carbon

Sanjo Lee; Sunnup Lee; Sungwoon Lee; D. Jeon; Kwang-Ryeol Lee

J. Vac. Sci. Technol. B 15, 457–459 (1997) https://doi.org/10.1116/1.589598

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Physical characterization of diamond pyramidal microtip emitters

W. P. Kang; J. L. Davidson; M. A. George; I. Milosavljevic; Q. Li; J. F. Xu; D. V. Kerns

J. Vac. Sci. Technol. B 15, 460–463 (1997) https://doi.org/10.1116/1.589599

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Fabrication and characterization of volcano-shaped field emitters surrounded by planar gates

Chun Gyoo Lee; Byung Gook Park; Jong Duk Lee

J. Vac. Sci. Technol. B 15, 464–467 (1997) https://doi.org/10.1116/1.589600

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Fabrication of metal field emitter arrays on polycrystalline silicon

II Hwan Kim; Chun Gyoo Lee; Yeo Hwan Kim; Byung Gook Park; Jong Duk Lee

J. Vac. Sci. Technol. B 15, 468–471 (1997) https://doi.org/10.1116/1.589601

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Process design and emission properties of gated $n^{+}$ polycrystalline silicon field emitter arrays for flat-panel display applications

Hyung Soo Uh; Sang Jik Kwon; Jong Duk Lee

J. Vac. Sci. Technol. B 15, 472–476 (1997) https://doi.org/10.1116/1.589602

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Anodic bonding technique under low temperature and low voltage using evaporated glass

Woo-Beom Choi; Byeong-Kwon Ju; Yun-Hi Lee; M. R. Haskard; Man-Young Sung; Myung-Hwan Oh

J. Vac. Sci. Technol. B 15, 477–481 (1997) https://doi.org/10.1116/1.589603

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Surface modification by the voltage pulse in a scanning tunneling microscope

G. G. Vladimirov; A. V. Drozdov

J. Vac. Sci. Technol. B 15, 482–487 (1997) https://doi.org/10.1116/1.589604

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Fully large-scale integration-process-compatible Si field emitter technology with high controllability of emitter height and sharpness

Hisashi Takemura; Naoya Furutake; Miyo Nisimura; Shunji Tsuida; Masayuki Yoshiki; Akihiko Okamoto; Soichiro Miyano

J. Vac. Sci. Technol. B 15, 488–490 (1997) https://doi.org/10.1116/1.589605

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Dual scanning tunneling microscope mode of the surface diffusion metal ion source: Li transfer and scanning

M. S. Gupalo; I. L. Yarish; V. M. Zlupko; Yu. Suchorski

J. Vac. Sci. Technol. B 15, 491–494 (1997) https://doi.org/10.1116/1.589606

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Atom probe determination of the multicomponent material thermo-field microprotrusion parameters

E. L. Kontorovich; M. V. Loginov; V. N. Shrednik

J. Vac. Sci. Technol. B 15, 495–498 (1997) https://doi.org/10.1116/1.589607

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Emission characteristic of diamond-tip field emitter arrays fabricated by transfer mold technique

Seongjin Kim; Byeong Kwon Ju; Yun Hi Lee; Beom Soo Park; Young-Joon Baik; Sungkyoo Lim; Myung Hwan Oh

J. Vac. Sci. Technol. B 15, 499–502 (1997) https://doi.org/10.1116/1.589608

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Experimental study of matrix carbon field-emission cathodes and computer aided design of electron guns for microwave power devices, exploring these cathodes

Y. A. Grigoriev; A. I. Petrosyan; V. V. Penzyakov; V. G. Pimenov; V. I. Rogovin; V. I. Shesterkin; V. P. Kudryashov; V. C. Semyonov

J. Vac. Sci. Technol. B 15, 503–506 (1997) https://doi.org/10.1116/1.589609

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Characterization of novel powder and thin film RGB phosphors for field emission display application

A. G. Chakhovskoi; C. E. Hunt; M. E. Malinowski; T. E. Felter; A. A. Talin

J. Vac. Sci. Technol. B 15, 507–511 (1997) https://doi.org/10.1116/1.589281

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Thin film phosphor prepared by physical vapor deposition for field emission display application

Yun Hi Lee; Man Ho Song; Byeong Kwon Ju; Dong Ki Shin; Myung Hwan Oh

J. Vac. Sci. Technol. B 15, 512–515 (1997) https://doi.org/10.1116/1.589282

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Phosphor challenge for field-emission flat-panel displays

Charles E. Hunt; Andrei G. Chakhovskoi

J. Vac. Sci. Technol. B 15, 516–519 (1997) https://doi.org/10.1116/1.589283

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Optical characteristics of the phosphor screen in field-emission environments

Sang Won Kang; Byung Soo Jeon; Jae Soo Yoo; Jong Duk Lee

J. Vac. Sci. Technol. B 15, 520–523 (1997) https://doi.org/10.1116/1.589284

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Development of 4 in. field-emission displays

Boris Gorfinkel; Jong Min Kim

J. Vac. Sci. Technol. B 15, 524–527 (1997) https://doi.org/10.1116/1.589285

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Reliability analysis of 4 in. field-emission display

J. M. Kim; J. P. Hong; J. W. Kim; J. H. Choi; N. S. Park; J. H. Kang; J. E. Jang; Y. S. Ryu; H. C. Yang; B. I. Gorfinkel; E. V. Roussina

J. Vac. Sci. Technol. B 15, 528–532 (1997) https://doi.org/10.1116/1.589286

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Distributed generator with extended interaction on field emitter arrays

Yu. F. Zakharchenko; N. I. Sinitsyn; Yu. V. Gulyaev

J. Vac. Sci. Technol. B 15, 533–534 (1997) https://doi.org/10.1116/1.589287

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Characterization of lateral thin-film-edge field emitter arrays

B. R. Johnson; A. I. Akinwande; D. Murphy

J. Vac. Sci. Technol. B 15, 535–538 (1997) https://doi.org/10.1116/1.589288

Abstract

View articletitled, SCM.SharedControls.Infrastructure.TitleDisplayModel?.Text

Open the PDF for in another window

Issues

RSS

Resources

Explore

pubs.aip.org

Connect with AIP Publishing

This Feature Is Available To Subscribers Only