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J. Vac. Sci. Technol. B 14, 3413–3419 (1996) https://doi.org/10.1116/1.588772
J. Vac. Sci. Technol. B 14, 3420–3424 (1996) https://doi.org/10.1116/1.588773
J. Vac. Sci. Technol. B 14, 3425–3430 (1996) https://doi.org/10.1116/1.588774
J. Vac. Sci. Technol. B 14, 3431–3435 (1996) https://doi.org/10.1116/1.588775
J. Vac. Sci. Technol. B 14, 3436–3444 (1996) https://doi.org/10.1116/1.588776
J. Vac. Sci. Technol. B 14, 3445–3451 (1996) https://doi.org/10.1116/1.588777
J. Vac. Sci. Technol. B 14, 3452–3454 (1996) https://doi.org/10.1116/1.588778
J. Vac. Sci. Technol. B 14, 3455–3459 (1996) https://doi.org/10.1116/1.588779
J. Vac. Sci. Technol. B 14, 3460–3464 (1996) https://doi.org/10.1116/1.588780
J. Vac. Sci. Technol. B 14, 3465–3469 (1996) https://doi.org/10.1116/1.588781
J. Vac. Sci. Technol. B 14, 3470–3472 (1996) https://doi.org/10.1116/1.588782
J. Vac. Sci. Technol. B 14, 3473–3482 (1996) https://doi.org/10.1116/1.588783
J. Vac. Sci. Technol. B 14, 3483–3488 (1996) https://doi.org/10.1116/1.588784
J. Vac. Sci. Technol. B 14, 3489–3491 (1996) https://doi.org/10.1116/1.588785
J. Vac. Sci. Technol. B 14, 3492–3496 (1996) https://doi.org/10.1116/1.588786
J. Vac. Sci. Technol. B 14, 3497–3501 (1996) https://doi.org/10.1116/1.588787
J. Vac. Sci. Technol. B 14, 3502–3508 (1996) https://doi.org/10.1116/1.588788
J. Vac. Sci. Technol. B 14, 3509–3513 (1996) https://doi.org/10.1116/1.588789
J. Vac. Sci. Technol. B 14, 3514–3519 (1996) https://doi.org/10.1116/1.588790
J. Vac. Sci. Technol. B 14, 3520–3522 (1996) https://doi.org/10.1116/1.588791
J. Vac. Sci. Technol. B 14, 3523–3531 (1996) https://doi.org/10.1116/1.588792
J. Vac. Sci. Technol. B 14, 3532–3542 (1996) https://doi.org/10.1116/1.588793
J. Vac. Sci. Technol. B 14, 3543–3549 (1996) https://doi.org/10.1116/1.588794
J. Vac. Sci. Technol. B 14, 3550–3554 (1996) https://doi.org/10.1116/1.588795
J. Vac. Sci. Technol. B 14, 3555–3558 (1996) https://doi.org/10.1116/1.588796
J. Vac. Sci. Technol. B 14, 3559–3562 (1996) https://doi.org/10.1116/1.588797
J. Vac. Sci. Technol. B 14, 3563–3574 (1996) https://doi.org/10.1116/1.588798
J. Vac. Sci. Technol. B 14, 3575–3581 (1996) https://doi.org/10.1116/1.588545
J. Vac. Sci. Technol. B 14, 3582–3587 (1996) https://doi.org/10.1116/1.588546
J. Vac. Sci. Technol. B 14, 3588–3592 (1996) https://doi.org/10.1116/1.588730
J. Vac. Sci. Technol. B 14, 3593–3595 (1996) https://doi.org/10.1116/1.588731
J. Vac. Sci. Technol. B 14, 3596–3598 (1996) https://doi.org/10.1116/1.588732
J. Vac. Sci. Technol. B 14, 3599–3602 (1996) https://doi.org/10.1116/1.588733
J. Vac. Sci. Technol. B 14, 3603 (1996) https://doi.org/10.1116/1.588734
J. Vac. Sci. Technol. B 14, 3604 (1996) https://doi.org/10.1116/1.588735
J. Vac. Sci. Technol. B 14, 3605 (1996) https://doi.org/10.1116/1.588736
J. Vac. Sci. Technol. B 14, 3620–3624 (1996) https://doi.org/10.1116/1.588737
J. Vac. Sci. Technol. B 14, 3625–3631 (1996) https://doi.org/10.1116/1.588738
J. Vac. Sci. Technol. B 14, 3632–3636 (1996) https://doi.org/10.1116/1.588739
J. Vac. Sci. Technol. B 14, 3637–3640 (1996) https://doi.org/10.1116/1.588740
J. Vac. Sci. Technol. B 14, 3641–3645 (1996) https://doi.org/10.1116/1.588741
J. Vac. Sci. Technol. B 14, 3646–3649 (1996) https://doi.org/10.1116/1.588742
J. Vac. Sci. Technol. B 14, 3650–3653 (1996) https://doi.org/10.1116/1.588743
J. Vac. Sci. Technol. B 14, 3654–3657 (1996) https://doi.org/10.1116/1.588744
J. Vac. Sci. Technol. B 14, 3658–3662 (1996) https://doi.org/10.1116/1.588745
J. Vac. Sci. Technol. B 14, 3663–3667 (1996) https://doi.org/10.1116/1.588746
J. Vac. Sci. Technol. B 14, 3668–3673 (1996) https://doi.org/10.1116/1.588747
J. Vac. Sci. Technol. B 14, 3674–3678 (1996) https://doi.org/10.1116/1.588748
J. Vac. Sci. Technol. B 14, 3679–3683 (1996) https://doi.org/10.1116/1.588749
J. Vac. Sci. Technol. B 14, 3684–3687 (1996) https://doi.org/10.1116/1.588750
J. Vac. Sci. Technol. B 14, 3688–3691 (1996) https://doi.org/10.1116/1.588648
J. Vac. Sci. Technol. B 14, 3692–3696 (1996) https://doi.org/10.1116/1.588649
J. Vac. Sci. Technol. B 14, 3697–3701 (1996) https://doi.org/10.1116/1.588650
J. Vac. Sci. Technol. B 14, 3702–3705 (1996) https://doi.org/10.1116/1.588651
J. Vac. Sci. Technol. B 14, 3706–3708 (1996) https://doi.org/10.1116/1.588652
J. Vac. Sci. Technol. B 14, 3709–3713 (1996) https://doi.org/10.1116/1.588653
J. Vac. Sci. Technol. B 14, 3714–3718 (1996) https://doi.org/10.1116/1.588654
J. Vac. Sci. Technol. B 14, 3719–3723 (1996) https://doi.org/10.1116/1.588655
J. Vac. Sci. Technol. B 14, 3724–3729 (1996) https://doi.org/10.1116/1.588656
J. Vac. Sci. Technol. B 14, 3730–3733 (1996) https://doi.org/10.1116/1.588657
J. Vac. Sci. Technol. B 14, 3734–3737 (1996) https://doi.org/10.1116/1.588658
J. Vac. Sci. Technol. B 14, 3738–3741 (1996) https://doi.org/10.1116/1.588659
J. Vac. Sci. Technol. B 14, 3742–3746 (1996) https://doi.org/10.1116/1.588660
J. Vac. Sci. Technol. B 14, 3747–3752 (1996) https://doi.org/10.1116/1.588661
J. Vac. Sci. Technol. B 14, 3753–3758 (1996) https://doi.org/10.1116/1.588662
J. Vac. Sci. Technol. B 14, 3759–3763 (1996) https://doi.org/10.1116/1.588663
J. Vac. Sci. Technol. B 14, 3764–3769 (1996) https://doi.org/10.1116/1.588664
J. Vac. Sci. Technol. B 14, 3770–3773 (1996) https://doi.org/10.1116/1.588665
J. Vac. Sci. Technol. B 14, 3774–3781 (1996) https://doi.org/10.1116/1.588666
J. Vac. Sci. Technol. B 14, 3782–3786 (1996) https://doi.org/10.1116/1.588667
J. Vac. Sci. Technol. B 14, 3787–3791 (1996) https://doi.org/10.1116/1.588668
J. Vac. Sci. Technol. B 14, 3792–3796 (1996) https://doi.org/10.1116/1.588669
J. Vac. Sci. Technol. B 14, 3797–3801 (1996) https://doi.org/10.1116/1.588670
J. Vac. Sci. Technol. B 14, 3802–3807 (1996) https://doi.org/10.1116/1.588671
J. Vac. Sci. Technol. B 14, 3808–3812 (1996) https://doi.org/10.1116/1.588672
J. Vac. Sci. Technol. B 14, 3813–3820 (1996) https://doi.org/10.1116/1.588673
J. Vac. Sci. Technol. B 14, 3821–3824 (1996) https://doi.org/10.1116/1.588674
J. Vac. Sci. Technol. B 14, 3825–3828 (1996) https://doi.org/10.1116/1.588675
J. Vac. Sci. Technol. B 14, 3829–3833 (1996) https://doi.org/10.1116/1.588676
J. Vac. Sci. Technol. B 14, 3834–3838 (1996) https://doi.org/10.1116/1.588677
J. Vac. Sci. Technol. B 14, 3839–3844 (1996) https://doi.org/10.1116/1.588678
J. Vac. Sci. Technol. B 14, 3845–3849 (1996) https://doi.org/10.1116/1.588679
J. Vac. Sci. Technol. B 14, 3850–3854 (1996) https://doi.org/10.1116/1.588680
J. Vac. Sci. Technol. B 14, 3855–3859 (1996) https://doi.org/10.1116/1.588681
J. Vac. Sci. Technol. B 14, 3860–3863 (1996) https://doi.org/10.1116/1.588682
J. Vac. Sci. Technol. B 14, 3864–3869 (1996) https://doi.org/10.1116/1.588683
J. Vac. Sci. Technol. B 14, 3870–3873 (1996) https://doi.org/10.1116/1.588684
J. Vac. Sci. Technol. B 14, 3874–3879 (1996) https://doi.org/10.1116/1.588685
J. Vac. Sci. Technol. B 14, 3880–3886 (1996) https://doi.org/10.1116/1.588686
J. Vac. Sci. Technol. B 14, 3887–3891 (1996) https://doi.org/10.1116/1.588687
J. Vac. Sci. Technol. B 14, 3892–3895 (1996) https://doi.org/10.1116/1.588688
J. Vac. Sci. Technol. B 14, 3896–3899 (1996) https://doi.org/10.1116/1.588689
J. Vac. Sci. Technol. B 14, 3900–3902 (1996) https://doi.org/10.1116/1.588690
J. Vac. Sci. Technol. B 14, 3903–3906 (1996) https://doi.org/10.1116/1.588691
J. Vac. Sci. Technol. B 14, 3907–3910 (1996) https://doi.org/10.1116/1.588692
J. Vac. Sci. Technol. B 14, 3911–3915 (1996) https://doi.org/10.1116/1.588693
J. Vac. Sci. Technol. B 14, 3916–3919 (1996) https://doi.org/10.1116/1.588694
J. Vac. Sci. Technol. B 14, 3920–3923 (1996) https://doi.org/10.1116/1.588695
J. Vac. Sci. Technol. B 14, 3924–3927 (1996) https://doi.org/10.1116/1.588696
J. Vac. Sci. Technol. B 14, 3928–3932 (1996) https://doi.org/10.1116/1.588697
J. Vac. Sci. Technol. B 14, 3933–3937 (1996) https://doi.org/10.1116/1.588698
J. Vac. Sci. Technol. B 14, 3938–3941 (1996) https://doi.org/10.1116/1.588699
J. Vac. Sci. Technol. B 14, 3942–3946 (1996) https://doi.org/10.1116/1.588700
J. Vac. Sci. Technol. B 14, 3947–3950 (1996) https://doi.org/10.1116/1.588701
J. Vac. Sci. Technol. B 14, 3951–3954 (1996) https://doi.org/10.1116/1.588621
J. Vac. Sci. Technol. B 14, 3955–3959 (1996) https://doi.org/10.1116/1.588622
J. Vac. Sci. Technol. B 14, 3960–3963 (1996) https://doi.org/10.1116/1.588623
J. Vac. Sci. Technol. B 14, 3964–3968 (1996) https://doi.org/10.1116/1.588624
J. Vac. Sci. Technol. B 14, 3969–3973 (1996) https://doi.org/10.1116/1.588625
J. Vac. Sci. Technol. B 14, 3974–3979 (1996) https://doi.org/10.1116/1.588626
J. Vac. Sci. Technol. B 14, 3980–3984 (1996) https://doi.org/10.1116/1.588627
J. Vac. Sci. Technol. B 14, 3985–3989 (1996) https://doi.org/10.1116/1.588628
J. Vac. Sci. Technol. B 14, 3990–3995 (1996) https://doi.org/10.1116/1.588629
J. Vac. Sci. Technol. B 14, 3996–3999 (1996) https://doi.org/10.1116/1.588630
J. Vac. Sci. Technol. B 14, 4000–4003 (1996) https://doi.org/10.1116/1.588631
J. Vac. Sci. Technol. B 14, 4004–4008 (1996) https://doi.org/10.1116/1.588632
J. Vac. Sci. Technol. B 14, 4009–4013 (1996) https://doi.org/10.1116/1.588633
J. Vac. Sci. Technol. B 14, 4014–4019 (1996) https://doi.org/10.1116/1.588634
J. Vac. Sci. Technol. B 14, 4020–4023 (1996) https://doi.org/10.1116/1.588635
J. Vac. Sci. Technol. B 14, 4024–4028 (1996) https://doi.org/10.1116/1.588636
J. Vac. Sci. Technol. B 14, 4029–4033 (1996) https://doi.org/10.1116/1.588637
J. Vac. Sci. Technol. B 14, 4034–4037 (1996) https://doi.org/10.1116/1.588638
J. Vac. Sci. Technol. B 14, 4038–4041 (1996) https://doi.org/10.1116/1.588639
J. Vac. Sci. Technol. B 14, 4042–4045 (1996) https://doi.org/10.1116/1.588640
J. Vac. Sci. Technol. B 14, 4046–4050 (1996) https://doi.org/10.1116/1.588641
J. Vac. Sci. Technol. B 14, 4051–4054 (1996) https://doi.org/10.1116/1.588642
J. Vac. Sci. Technol. B 14, 4055–4057 (1996) https://doi.org/10.1116/1.588643
J. Vac. Sci. Technol. B 14, 4058–4061 (1996) https://doi.org/10.1116/1.588644
J. Vac. Sci. Technol. B 14, 4062–4067 (1996) https://doi.org/10.1116/1.588645
J. Vac. Sci. Technol. B 14, 4068–4071 (1996) https://doi.org/10.1116/1.588646
J. Vac. Sci. Technol. B 14, 4072–4075 (1996) https://doi.org/10.1116/1.588647
J. Vac. Sci. Technol. B 14, 4076–4079 (1996) https://doi.org/10.1116/1.588594
J. Vac. Sci. Technol. B 14, 4080–4084 (1996) https://doi.org/10.1116/1.588595
J. Vac. Sci. Technol. B 14, 4085–4090 (1996) https://doi.org/10.1116/1.588596
J. Vac. Sci. Technol. B 14, 4091–4095 (1996) https://doi.org/10.1116/1.588597
J. Vac. Sci. Technol. B 14, 4096–4099 (1996) https://doi.org/10.1116/1.588598
J. Vac. Sci. Technol. B 14, 4100–4104 (1996) https://doi.org/10.1116/1.588599
J. Vac. Sci. Technol. B 14, 4105–4109 (1996) https://doi.org/10.1116/1.588600
J. Vac. Sci. Technol. B 14, 4110–4114 (1996) https://doi.org/10.1116/1.588601
J. Vac. Sci. Technol. B 14, 4115–4118 (1996) https://doi.org/10.1116/1.588602
J. Vac. Sci. Technol. B 14, 4119–4123 (1996) https://doi.org/10.1116/1.588603
J. Vac. Sci. Technol. B 14, 4124–4128 (1996) https://doi.org/10.1116/1.588604
J. Vac. Sci. Technol. B 14, 4129–4133 (1996) https://doi.org/10.1116/1.588605
J. Vac. Sci. Technol. B 14, 4134–4139 (1996) https://doi.org/10.1116/1.588606
J. Vac. Sci. Technol. B 14, 4140–4143 (1996) https://doi.org/10.1116/1.588607
J. Vac. Sci. Technol. B 14, 4144–4147 (1996) https://doi.org/10.1116/1.588608
J. Vac. Sci. Technol. B 14, 4148–4152 (1996) https://doi.org/10.1116/1.588609
J. Vac. Sci. Technol. B 14, 4153–4156 (1996) https://doi.org/10.1116/1.588610
J. Vac. Sci. Technol. B 14, 4157–4161 (1996) https://doi.org/10.1116/1.588611
J. Vac. Sci. Technol. B 14, 4162–4166 (1996) https://doi.org/10.1116/1.588612
J. Vac. Sci. Technol. B 14, 4167–4170 (1996) https://doi.org/10.1116/1.588613
J. Vac. Sci. Technol. B 14, 4171–4174 (1996) https://doi.org/10.1116/1.588614
J. Vac. Sci. Technol. B 14, 4175–4178 (1996) https://doi.org/10.1116/1.588615
J. Vac. Sci. Technol. B 14, 4179–4183 (1996) https://doi.org/10.1116/1.588616
J. Vac. Sci. Technol. B 14, 4184–4187 (1996) https://doi.org/10.1116/1.588617
J. Vac. Sci. Technol. B 14, 4188–4192 (1996) https://doi.org/10.1116/1.588618
J. Vac. Sci. Technol. B 14, 4193–4198 (1996) https://doi.org/10.1116/1.588619
J. Vac. Sci. Technol. B 14, 4199–4202 (1996) https://doi.org/10.1116/1.588620
J. Vac. Sci. Technol. B 14, 4203–4206 (1996) https://doi.org/10.1116/1.588575
J. Vac. Sci. Technol. B 14, 4207–4211 (1996) https://doi.org/10.1116/1.588576
J. Vac. Sci. Technol. B 14, 4212–4215 (1996) https://doi.org/10.1116/1.588577
J. Vac. Sci. Technol. B 14, 4216–4220 (1996) https://doi.org/10.1116/1.588578
J. Vac. Sci. Technol. B 14, 4221–4225 (1996) https://doi.org/10.1116/1.588579
J. Vac. Sci. Technol. B 14, 4226–4228 (1996) https://doi.org/10.1116/1.588580
J. Vac. Sci. Technol. B 14, 4229–4233 (1996) https://doi.org/10.1116/1.588581
J. Vac. Sci. Technol. B 14, 4234–4238 (1996) https://doi.org/10.1116/1.588582
J. Vac. Sci. Technol. B 14, 4239–4245 (1996) https://doi.org/10.1116/1.588583
J. Vac. Sci. Technol. B 14, 4246–4251 (1996) https://doi.org/10.1116/1.588584
J. Vac. Sci. Technol. B 14, 4252–4256 (1996) https://doi.org/10.1116/1.588585
J. Vac. Sci. Technol. B 14, 4257–4261 (1996) https://doi.org/10.1116/1.588586