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J. Vac. Sci. Technol. B 12, 3069–3074 (1994) https://doi.org/10.1116/1.587562
J. Vac. Sci. Technol. B 12, 3075–3083 (1994) https://doi.org/10.1116/1.587563
J. Vac. Sci. Technol. B 12, 3084–3089 (1994) https://doi.org/10.1116/1.587564
J. Vac. Sci. Technol. B 12, 3090–3094 (1994) https://doi.org/10.1116/1.587483
J. Vac. Sci. Technol. B 12, 3095–3102 (1994) https://doi.org/10.1116/1.587484
J. Vac. Sci. Technol. B 12, 3103–3106 (1994) https://doi.org/10.1116/1.587485
J. Vac. Sci. Technol. B 12, 3107–3111 (1994) https://doi.org/10.1116/1.587486
J. Vac. Sci. Technol. B 12, 3112–3117 (1994) https://doi.org/10.1116/1.587487
J. Vac. Sci. Technol. B 12, 3118–3137 (1994) https://doi.org/10.1116/1.587488
J. Vac. Sci. Technol. B 12, 3138–3144 (1994) https://doi.org/10.1116/1.587489
J. Vac. Sci. Technol. B 12, 3145–3148 (1994) https://doi.org/10.1116/1.587490
J. Vac. Sci. Technol. B 12, 3149–3159 (1994) https://doi.org/10.1116/1.587491
J. Vac. Sci. Technol. B 12, 3160–3165 (1994) https://doi.org/10.1116/1.587492
J. Vac. Sci. Technol. B 12, 3166–3170 (1994) https://doi.org/10.1116/1.587493
J. Vac. Sci. Technol. B 12, 3171–3175 (1994) https://doi.org/10.1116/1.587494
J. Vac. Sci. Technol. B 12, 3176–3181 (1994) https://doi.org/10.1116/1.587495
J. Vac. Sci. Technol. B 12, 3182–3186 (1994) https://doi.org/10.1116/1.587496
J. Vac. Sci. Technol. B 12, 3187–3190 (1994) https://doi.org/10.1116/1.587497
J. Vac. Sci. Technol. B 12, 3191–3195 (1994) https://doi.org/10.1116/1.587498
J. Vac. Sci. Technol. B 12, 3196–3201 (1994) https://doi.org/10.1116/1.587499
J. Vac. Sci. Technol. B 12, 3202–3207 (1994) https://doi.org/10.1116/1.587500
J. Vac. Sci. Technol. B 12, 3208–3213 (1994) https://doi.org/10.1116/1.587501
J. Vac. Sci. Technol. B 12, 3214–3217 (1994) https://doi.org/10.1116/1.587502
J. Vac. Sci. Technol. B 12, 3218–3219 (1994) https://doi.org/10.1116/1.587503
J. Vac. Sci. Technol. B 12, 3220–3222 (1994) https://doi.org/10.1116/1.587504
J. Vac. Sci. Technol. B 12, 3237–3241 (1994) https://doi.org/10.1116/1.587505
J. Vac. Sci. Technol. B 12, 3242–3246 (1994) https://doi.org/10.1116/1.587506
J. Vac. Sci. Technol. B 12, 3247–3250 (1994) https://doi.org/10.1116/1.587507
J. Vac. Sci. Technol. B 12, 3251–3255 (1994) https://doi.org/10.1116/1.587508
J. Vac. Sci. Technol. B 12, 3256–3260 (1994) https://doi.org/10.1116/1.587509
J. Vac. Sci. Technol. B 12, 3261–3264 (1994) https://doi.org/10.1116/1.587608
J. Vac. Sci. Technol. B 12, 3265–3269 (1994) https://doi.org/10.1116/1.587609
J. Vac. Sci. Technol. B 12, 3270–3274 (1994) https://doi.org/10.1116/1.587610
J. Vac. Sci. Technol. B 12, 3275–3279 (1994) https://doi.org/10.1116/1.587611
J. Vac. Sci. Technol. B 12, 3280–3284 (1994) https://doi.org/10.1116/1.587612
J. Vac. Sci. Technol. B 12, 3285–3288 (1994) https://doi.org/10.1116/1.587613
J. Vac. Sci. Technol. B 12, 3289–3293 (1994) https://doi.org/10.1116/1.587614
J. Vac. Sci. Technol. B 12, 3294–3299 (1994) https://doi.org/10.1116/1.587615
J. Vac. Sci. Technol. B 12, 3300–3305 (1994) https://doi.org/10.1116/1.587616
J. Vac. Sci. Technol. B 12, 3306–3310 (1994) https://doi.org/10.1116/1.587617
J. Vac. Sci. Technol. B 12, 3311–3316 (1994) https://doi.org/10.1116/1.587618
J. Vac. Sci. Technol. B 12, 3317–3321 (1994) https://doi.org/10.1116/1.587619
J. Vac. Sci. Technol. B 12, 3322–3326 (1994) https://doi.org/10.1116/1.587620
J. Vac. Sci. Technol. B 12, 3327–3331 (1994) https://doi.org/10.1116/1.587621
J. Vac. Sci. Technol. B 12, 3332–3336 (1994) https://doi.org/10.1116/1.587622
J. Vac. Sci. Technol. B 12, 3337–3341 (1994) https://doi.org/10.1116/1.587623
J. Vac. Sci. Technol. B 12, 3342–3346 (1994) https://doi.org/10.1116/1.587624
J. Vac. Sci. Technol. B 12, 3347–3350 (1994) https://doi.org/10.1116/1.587510
J. Vac. Sci. Technol. B 12, 3351–3355 (1994) https://doi.org/10.1116/1.587511
J. Vac. Sci. Technol. B 12, 3356–3362 (1994) https://doi.org/10.1116/1.587512
J. Vac. Sci. Technol. B 12, 3363–3368 (1994) https://doi.org/10.1116/1.587513
J. Vac. Sci. Technol. B 12, 3369–3373 (1994) https://doi.org/10.1116/1.587514
J. Vac. Sci. Technol. B 12, 3374–3377 (1994) https://doi.org/10.1116/1.587515
J. Vac. Sci. Technol. B 12, 3378–3381 (1994) https://doi.org/10.1116/1.587516
J. Vac. Sci. Technol. B 12, 3382–3387 (1994) https://doi.org/10.1116/1.587517
J. Vac. Sci. Technol. B 12, 3388–3392 (1994) https://doi.org/10.1116/1.587518
J. Vac. Sci. Technol. B 12, 3393–3398 (1994) https://doi.org/10.1116/1.587519
J. Vac. Sci. Technol. B 12, 3399–3403 (1994) https://doi.org/10.1116/1.587520
J. Vac. Sci. Technol. B 12, 3404–3408 (1994) https://doi.org/10.1116/1.587521
J. Vac. Sci. Technol. B 12, 3409–3412 (1994) https://doi.org/10.1116/1.587522
J. Vac. Sci. Technol. B 12, 3413–3417 (1994) https://doi.org/10.1116/1.587523
J. Vac. Sci. Technol. B 12, 3418–3424 (1994) https://doi.org/10.1116/1.587524
J. Vac. Sci. Technol. B 12, 3425–3430 (1994) https://doi.org/10.1116/1.587525
J. Vac. Sci. Technol. B 12, 3431–3435 (1994) https://doi.org/10.1116/1.587526
J. Vac. Sci. Technol. B 12, 3436–3439 (1994) https://doi.org/10.1116/1.587527
J. Vac. Sci. Technol. B 12, 3440–3443 (1994) https://doi.org/10.1116/1.587528
J. Vac. Sci. Technol. B 12, 3444–3448 (1994) https://doi.org/10.1116/1.587529
J. Vac. Sci. Technol. B 12, 3449–3454 (1994) https://doi.org/10.1116/1.587530
J. Vac. Sci. Technol. B 12, 3455–3459 (1994) https://doi.org/10.1116/1.587531
J. Vac. Sci. Technol. B 12, 3460–3464 (1994) https://doi.org/10.1116/1.587532
J. Vac. Sci. Technol. B 12, 3465–3472 (1994) https://doi.org/10.1116/1.587533
J. Vac. Sci. Technol. B 12, 3473–3477 (1994) https://doi.org/10.1116/1.587534
J. Vac. Sci. Technol. B 12, 3478–3482 (1994) https://doi.org/10.1116/1.587535
J. Vac. Sci. Technol. B 12, 3483–3488 (1994) https://doi.org/10.1116/1.587536
J. Vac. Sci. Technol. B 12, 3489–3493 (1994) https://doi.org/10.1116/1.587456
J. Vac. Sci. Technol. B 12, 3494–3497 (1994) https://doi.org/10.1116/1.587457
J. Vac. Sci. Technol. B 12, 3498–3502 (1994) https://doi.org/10.1116/1.587458
J. Vac. Sci. Technol. B 12, 3503–3507 (1994) https://doi.org/10.1116/1.587459
J. Vac. Sci. Technol. B 12, 3508–3512 (1994) https://doi.org/10.1116/1.587460
J. Vac. Sci. Technol. B 12, 3513–3517 (1994) https://doi.org/10.1116/1.587461
J. Vac. Sci. Technol. B 12, 3518–3522 (1994) https://doi.org/10.1116/1.587462
J. Vac. Sci. Technol. B 12, 3523–3527 (1994) https://doi.org/10.1116/1.587463
J. Vac. Sci. Technol. B 12, 3528–3532 (1994) https://doi.org/10.1116/1.587464
J. Vac. Sci. Technol. B 12, 3533–3538 (1994) https://doi.org/10.1116/1.587465
J. Vac. Sci. Technol. B 12, 3539–3542 (1994) https://doi.org/10.1116/1.587466
J. Vac. Sci. Technol. B 12, 3543–3546 (1994) https://doi.org/10.1116/1.587467
J. Vac. Sci. Technol. B 12, 3547–3549 (1994) https://doi.org/10.1116/1.587468
J. Vac. Sci. Technol. B 12, 3550–3554 (1994) https://doi.org/10.1116/1.587469
J. Vac. Sci. Technol. B 12, 3555–3560 (1994) https://doi.org/10.1116/1.587470
J. Vac. Sci. Technol. B 12, 3561–3566 (1994) https://doi.org/10.1116/1.587471
J. Vac. Sci. Technol. B 12, 3567–3570 (1994) https://doi.org/10.1116/1.587472
J. Vac. Sci. Technol. B 12, 3571–3575 (1994) https://doi.org/10.1116/1.587473
J. Vac. Sci. Technol. B 12, 3576–3579 (1994) https://doi.org/10.1116/1.587474
J. Vac. Sci. Technol. B 12, 3580–3584 (1994) https://doi.org/10.1116/1.587475
J. Vac. Sci. Technol. B 12, 3585–3590 (1994) https://doi.org/10.1116/1.587476
J. Vac. Sci. Technol. B 12, 3591–3594 (1994) https://doi.org/10.1116/1.587477
J. Vac. Sci. Technol. B 12, 3595–3599 (1994) https://doi.org/10.1116/1.587478
J. Vac. Sci. Technol. B 12, 3600–3606 (1994) https://doi.org/10.1116/1.587479
J. Vac. Sci. Technol. B 12, 3607–3610 (1994) https://doi.org/10.1116/1.587480
J. Vac. Sci. Technol. B 12, 3611–3613 (1994) https://doi.org/10.1116/1.587481
J. Vac. Sci. Technol. B 12, 3614–3618 (1994) https://doi.org/10.1116/1.587482
J. Vac. Sci. Technol. B 12, 3619–3622 (1994) https://doi.org/10.1116/1.587625
J. Vac. Sci. Technol. B 12, 3623–3625 (1994) https://doi.org/10.1116/1.587626
J. Vac. Sci. Technol. B 12, 3626–3630 (1994) https://doi.org/10.1116/1.587627
J. Vac. Sci. Technol. B 12, 3631–3634 (1994) https://doi.org/10.1116/1.587628
J. Vac. Sci. Technol. B 12, 3635–3638 (1994) https://doi.org/10.1116/1.587629
J. Vac. Sci. Technol. B 12, 3639–3642 (1994) https://doi.org/10.1116/1.587630
J. Vac. Sci. Technol. B 12, 3643–3647 (1994) https://doi.org/10.1116/1.587631
J. Vac. Sci. Technol. B 12, 3648–3652 (1994) https://doi.org/10.1116/1.587632
J. Vac. Sci. Technol. B 12, 3653–3657 (1994) https://doi.org/10.1116/1.587633
J. Vac. Sci. Technol. B 12, 3658–3662 (1994) https://doi.org/10.1116/1.587634
J. Vac. Sci. Technol. B 12, 3663–3667 (1994) https://doi.org/10.1116/1.587635
J. Vac. Sci. Technol. B 12, 3668–3672 (1994) https://doi.org/10.1116/1.587636
J. Vac. Sci. Technol. B 12, 3673–3676 (1994) https://doi.org/10.1116/1.587637
J. Vac. Sci. Technol. B 12, 3677–3680 (1994) https://doi.org/10.1116/1.587638
J. Vac. Sci. Technol. B 12, 3681–3684 (1994) https://doi.org/10.1116/1.587639
J. Vac. Sci. Technol. B 12, 3685–3688 (1994) https://doi.org/10.1116/1.587640
J. Vac. Sci. Technol. B 12, 3689–3694 (1994) https://doi.org/10.1116/1.587641
J. Vac. Sci. Technol. B 12, 3695–3698 (1994) https://doi.org/10.1116/1.587642
J. Vac. Sci. Technol. B 12, 3699–3703 (1994) https://doi.org/10.1116/1.587643
J. Vac. Sci. Technol. B 12, 3704–3707 (1994) https://doi.org/10.1116/1.587644
J. Vac. Sci. Technol. B 12, 3708–3711 (1994) https://doi.org/10.1116/1.587645
J. Vac. Sci. Technol. B 12, 3712–3715 (1994) https://doi.org/10.1116/1.587646
J. Vac. Sci. Technol. B 12, 3716–3719 (1994) https://doi.org/10.1116/1.587429
J. Vac. Sci. Technol. B 12, 3720–3724 (1994) https://doi.org/10.1116/1.587430
J. Vac. Sci. Technol. B 12, 3725–3730 (1994) https://doi.org/10.1116/1.587431
J. Vac. Sci. Technol. B 12, 3731–3734 (1994) https://doi.org/10.1116/1.587432
J. Vac. Sci. Technol. B 12, 3735–3740 (1994) https://doi.org/10.1116/1.587433
J. Vac. Sci. Technol. B 12, 3741–3745 (1994) https://doi.org/10.1116/1.587434
J. Vac. Sci. Technol. B 12, 3746–3749 (1994) https://doi.org/10.1116/1.587435
J. Vac. Sci. Technol. B 12, 3750–3754 (1994) https://doi.org/10.1116/1.587436
J. Vac. Sci. Technol. B 12, 3755–3759 (1994) https://doi.org/10.1116/1.587437
J. Vac. Sci. Technol. B 12, 3760–3764 (1994) https://doi.org/10.1116/1.587438
J. Vac. Sci. Technol. B 12, 3765–3772 (1994) https://doi.org/10.1116/1.587439
J. Vac. Sci. Technol. B 12, 3773–3777 (1994) https://doi.org/10.1116/1.587440
J. Vac. Sci. Technol. B 12, 3778–3782 (1994) https://doi.org/10.1116/1.587441
J. Vac. Sci. Technol. B 12, 3783–3792 (1994) https://doi.org/10.1116/1.587442
J. Vac. Sci. Technol. B 12, 3793–3798 (1994) https://doi.org/10.1116/1.587443
J. Vac. Sci. Technol. B 12, 3799–3803 (1994) https://doi.org/10.1116/1.587444
J. Vac. Sci. Technol. B 12, 3804–3808 (1994) https://doi.org/10.1116/1.587445
J. Vac. Sci. Technol. B 12, 3809–3813 (1994) https://doi.org/10.1116/1.587446
J. Vac. Sci. Technol. B 12, 3814–3819 (1994) https://doi.org/10.1116/1.587447
J. Vac. Sci. Technol. B 12, 3820–3825 (1994) https://doi.org/10.1116/1.587448
J. Vac. Sci. Technol. B 12, 3826–3832 (1994) https://doi.org/10.1116/1.587449
J. Vac. Sci. Technol. B 12, 3833–3840 (1994) https://doi.org/10.1116/1.587450
J. Vac. Sci. Technol. B 12, 3841–3845 (1994) https://doi.org/10.1116/1.587451
J. Vac. Sci. Technol. B 12, 3846–3850 (1994) https://doi.org/10.1116/1.587452
J. Vac. Sci. Technol. B 12, 3851–3856 (1994) https://doi.org/10.1116/1.587453
J. Vac. Sci. Technol. B 12, 3857–3862 (1994) https://doi.org/10.1116/1.587454
J. Vac. Sci. Technol. B 12, 3863–3867 (1994) https://doi.org/10.1116/1.587455
J. Vac. Sci. Technol. B 12, 3868–3873 (1994) https://doi.org/10.1116/1.587565
J. Vac. Sci. Technol. B 12, 3874–3878 (1994) https://doi.org/10.1116/1.587566
J. Vac. Sci. Technol. B 12, 3879–3883 (1994) https://doi.org/10.1116/1.587567
J. Vac. Sci. Technol. B 12, 3884–3887 (1994) https://doi.org/10.1116/1.587568
J. Vac. Sci. Technol. B 12, 3888–3894 (1994) https://doi.org/10.1116/1.587569
J. Vac. Sci. Technol. B 12, 3895–3899 (1994) https://doi.org/10.1116/1.587570
J. Vac. Sci. Technol. B 12, 3900–3904 (1994) https://doi.org/10.1116/1.587571
J. Vac. Sci. Technol. B 12, 3905–3908 (1994) https://doi.org/10.1116/1.587572
J. Vac. Sci. Technol. B 12, 3909–3913 (1994) https://doi.org/10.1116/1.587573
J. Vac. Sci. Technol. B 12, 3914–3918 (1994) https://doi.org/10.1116/1.587574
J. Vac. Sci. Technol. B 12, 3919–3924 (1994) https://doi.org/10.1116/1.587575
J. Vac. Sci. Technol. B 12, 3925–3929 (1994) https://doi.org/10.1116/1.587576
J. Vac. Sci. Technol. B 12, 3930–3935 (1994) https://doi.org/10.1116/1.587577
J. Vac. Sci. Technol. B 12, 3936–3942 (1994) https://doi.org/10.1116/1.587578
J. Vac. Sci. Technol. B 12, 3943–3948 (1994) https://doi.org/10.1116/1.587579
J. Vac. Sci. Technol. B 12, 3949–3953 (1994) https://doi.org/10.1116/1.587580
J. Vac. Sci. Technol. B 12, 3954–3958 (1994) https://doi.org/10.1116/1.587409
J. Vac. Sci. Technol. B 12, 3959–3964 (1994) https://doi.org/10.1116/1.587410
J. Vac. Sci. Technol. B 12, 3965–3969 (1994) https://doi.org/10.1116/1.587411
J. Vac. Sci. Technol. B 12, 3970–3974 (1994) https://doi.org/10.1116/1.587412
J. Vac. Sci. Technol. B 12, 3975–3978 (1994) https://doi.org/10.1116/1.587413