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J. Vac. Sci. Technol. B 11, 1955–1961 (1993) https://doi.org/10.1116/1.586527
J. Vac. Sci. Technol. B 11, 1962–1967 (1993) https://doi.org/10.1116/1.586528
J. Vac. Sci. Technol. B 11, 1968–1981 (1993) https://doi.org/10.1116/1.586529
J. Vac. Sci. Technol. B 11, 1982–1986 (1993) https://doi.org/10.1116/1.586530
J. Vac. Sci. Technol. B 11, 1987–1991 (1993) https://doi.org/10.1116/1.586531
J. Vac. Sci. Technol. B 11, 1992–1999 (1993) https://doi.org/10.1116/1.586532
J. Vac. Sci. Technol. B 11, 2000–2005 (1993) https://doi.org/10.1116/1.586533
J. Vac. Sci. Technol. B 11, 2006–2011 (1993) https://doi.org/10.1116/1.586534
J. Vac. Sci. Technol. B 11, 2012–2015 (1993) https://doi.org/10.1116/1.586535
J. Vac. Sci. Technol. B 11, 2016–2020 (1993) https://doi.org/10.1116/1.586536
J. Vac. Sci. Technol. B 11, 2021–2024 (1993) https://doi.org/10.1116/1.586537
J. Vac. Sci. Technol. B 11, 2025–2032 (1993) https://doi.org/10.1116/1.586538
J. Vac. Sci. Technol. B 11, 2033–2037 (1993) https://doi.org/10.1116/1.586539
J. Vac. Sci. Technol. B 11, 2038–2045 (1993) https://doi.org/10.1116/1.586540
J. Vac. Sci. Technol. B 11, 2046–2056 (1993) https://doi.org/10.1116/1.586541
J. Vac. Sci. Technol. B 11, 2057–2061 (1993) https://doi.org/10.1116/1.586542
J. Vac. Sci. Technol. B 11, 2062–2066 (1993) https://doi.org/10.1116/1.586543
J. Vac. Sci. Technol. B 11, 2067–2070 (1993) https://doi.org/10.1116/1.586544
J. Vac. Sci. Technol. B 11, 2071–2080 (1993) https://doi.org/10.1116/1.586545
J. Vac. Sci. Technol. B 11, 2081–2089 (1993) https://doi.org/10.1116/1.586546
J. Vac. Sci. Technol. B 11, 2090–2095 (1993) https://doi.org/10.1116/1.586547
J. Vac. Sci. Technol. B 11, 2096–2101 (1993) https://doi.org/10.1116/1.586548
J. Vac. Sci. Technol. B 11, 2102–2106 (1993) https://doi.org/10.1116/1.586549
J. Vac. Sci. Technol. B 11, 2107–2113 (1993) https://doi.org/10.1116/1.586550
J. Vac. Sci. Technol. B 11, 2114–2120 (1993) https://doi.org/10.1116/1.586551
J. Vac. Sci. Technol. B 11, 2121–2122 (1993) https://doi.org/10.1116/1.586552
J. Vac. Sci. Technol. B 11, 2123–2126 (1993) https://doi.org/10.1116/1.586553
J. Vac. Sci. Technol. B 11, 2127–2129 (1993) https://doi.org/10.1116/1.586554
J. Vac. Sci. Technol. B 11, 2130–2131 (1993) https://doi.org/10.1116/1.586555
J. Vac. Sci. Technol. B 11, 2132–2136 (1993) https://doi.org/10.1116/1.586447
J. Vac. Sci. Technol. B 11, 2137–2138 (1993) https://doi.org/10.1116/1.586448
J. Vac. Sci. Technol. B 11, 2155–2163 (1993) https://doi.org/10.1116/1.586449
J. Vac. Sci. Technol. B 11, 2164–2174 (1993) https://doi.org/10.1116/1.586450
J. Vac. Sci. Technol. B 11, 2175–2178 (1993) https://doi.org/10.1116/1.586451
J. Vac. Sci. Technol. B 11, 2179–2182 (1993) https://doi.org/10.1116/1.586452
J. Vac. Sci. Technol. B 11, 2183–2190 (1993) https://doi.org/10.1116/1.586453
J. Vac. Sci. Technol. B 11, 2191–2194 (1993) https://doi.org/10.1116/1.586454
J. Vac. Sci. Technol. B 11, 2195–2199 (1993) https://doi.org/10.1116/1.586455
J. Vac. Sci. Technol. B 11, 2200–2203 (1993) https://doi.org/10.1116/1.586456
J. Vac. Sci. Technol. B 11, 2204–2209 (1993) https://doi.org/10.1116/1.586457
J. Vac. Sci. Technol. B 11, 2210–2213 (1993) https://doi.org/10.1116/1.586458
J. Vac. Sci. Technol. B 11, 2214–2218 (1993) https://doi.org/10.1116/1.586459
J. Vac. Sci. Technol. B 11, 2219–2223 (1993) https://doi.org/10.1116/1.586460
J. Vac. Sci. Technol. B 11, 2224–2228 (1993) https://doi.org/10.1116/1.586461
J. Vac. Sci. Technol. B 11, 2229–2232 (1993) https://doi.org/10.1116/1.586462
J. Vac. Sci. Technol. B 11, 2233–2236 (1993) https://doi.org/10.1116/1.586463
J. Vac. Sci. Technol. B 11, 2237–2243 (1993) https://doi.org/10.1116/1.586464
J. Vac. Sci. Technol. B 11, 2244–2248 (1993) https://doi.org/10.1116/1.586465
J. Vac. Sci. Technol. B 11, 2249–2253 (1993) https://doi.org/10.1116/1.586466
J. Vac. Sci. Technol. B 11, 2254–2257 (1993) https://doi.org/10.1116/1.586467
J. Vac. Sci. Technol. B 11, 2258–2261 (1993) https://doi.org/10.1116/1.586468
J. Vac. Sci. Technol. B 11, 2262–2265 (1993) https://doi.org/10.1116/1.586886
J. Vac. Sci. Technol. B 11, 2266–2269 (1993) https://doi.org/10.1116/1.586887
J. Vac. Sci. Technol. B 11, 2270–2274 (1993) https://doi.org/10.1116/1.586888
J. Vac. Sci. Technol. B 11, 2275–2279 (1993) https://doi.org/10.1116/1.586889
J. Vac. Sci. Technol. B 11, 2280–2283 (1993) https://doi.org/10.1116/1.586890
J. Vac. Sci. Technol. B 11, 2284–2287 (1993) https://doi.org/10.1116/1.586891
J. Vac. Sci. Technol. B 11, 2288–2293 (1993) https://doi.org/10.1116/1.586892
J. Vac. Sci. Technol. B 11, 2294–2298 (1993) https://doi.org/10.1116/1.586893
J. Vac. Sci. Technol. B 11, 2299–2303 (1993) https://doi.org/10.1116/1.586894
J. Vac. Sci. Technol. B 11, 2304–2308 (1993) https://doi.org/10.1116/1.586895
J. Vac. Sci. Technol. B 11, 2309–2314 (1993) https://doi.org/10.1116/1.586896
J. Vac. Sci. Technol. B 11, 2315–2318 (1993) https://doi.org/10.1116/1.586897
J. Vac. Sci. Technol. B 11, 2319–2322 (1993) https://doi.org/10.1116/1.586898
J. Vac. Sci. Technol. B 11, 2323–2326 (1993) https://doi.org/10.1116/1.586980
J. Vac. Sci. Technol. B 11, 2327–2331 (1993) https://doi.org/10.1116/1.586981
J. Vac. Sci. Technol. B 11, 2332–2341 (1993) https://doi.org/10.1116/1.586982
J. Vac. Sci. Technol. B 11, 2342–2345 (1993) https://doi.org/10.1116/1.586983
J. Vac. Sci. Technol. B 11, 2346–2351 (1993) https://doi.org/10.1116/1.586984
J. Vac. Sci. Technol. B 11, 2352–2356 (1993) https://doi.org/10.1116/1.586985
J. Vac. Sci. Technol. B 11, 2357–2361 (1993) https://doi.org/10.1116/1.586986
J. Vac. Sci. Technol. B 11, 2362–2366 (1993) https://doi.org/10.1116/1.586987
J. Vac. Sci. Technol. B 11, 2367–2372 (1993) https://doi.org/10.1116/1.586988
J. Vac. Sci. Technol. B 11, 2373–2377 (1993) https://doi.org/10.1116/1.586989
J. Vac. Sci. Technol. B 11, 2378–2385 (1993) https://doi.org/10.1116/1.586990
J. Vac. Sci. Technol. B 11, 2386–2389 (1993) https://doi.org/10.1116/1.586991
J. Vac. Sci. Technol. B 11, 2390–2396 (1993) https://doi.org/10.1116/1.586992
J. Vac. Sci. Technol. B 11, 2397–2399 (1993) https://doi.org/10.1116/1.586993
J. Vac. Sci. Technol. B 11, 2400–2403 (1993) https://doi.org/10.1116/1.586994
J. Vac. Sci. Technol. B 11, 2404–2408 (1993) https://doi.org/10.1116/1.586995
J. Vac. Sci. Technol. B 11, 2409–2415 (1993) https://doi.org/10.1116/1.586996
J. Vac. Sci. Technol. B 11, 2416–2419 (1993) https://doi.org/10.1116/1.586997
J. Vac. Sci. Technol. B 11, 2420–2426 (1993) https://doi.org/10.1116/1.586998
J. Vac. Sci. Technol. B 11, 2427–2431 (1993) https://doi.org/10.1116/1.586999
J. Vac. Sci. Technol. B 11, 2432–2435 (1993) https://doi.org/10.1116/1.587000
J. Vac. Sci. Technol. B 11, 2436–2440 (1993) https://doi.org/10.1116/1.587001
J. Vac. Sci. Technol. B 11, 2441–2445 (1993) https://doi.org/10.1116/1.586643
J. Vac. Sci. Technol. B 11, 2446–2451 (1993) https://doi.org/10.1116/1.586644
J. Vac. Sci. Technol. B 11, 2452–2455 (1993) https://doi.org/10.1116/1.586645
J. Vac. Sci. Technol. B 11, 2456–2462 (1993) https://doi.org/10.1116/1.586646
J. Vac. Sci. Technol. B 11, 2463–2467 (1993) https://doi.org/10.1116/1.586647
J. Vac. Sci. Technol. B 11, 2468–2472 (1993) https://doi.org/10.1116/1.586648
J. Vac. Sci. Technol. B 11, 2473–2476 (1993) https://doi.org/10.1116/1.586649
J. Vac. Sci. Technol. B 11, 2477–2481 (1993) https://doi.org/10.1116/1.586650
J. Vac. Sci. Technol. B 11, 2482–2486 (1993) https://doi.org/10.1116/1.586651
J. Vac. Sci. Technol. B 11, 2487–2492 (1993) https://doi.org/10.1116/1.586652
J. Vac. Sci. Technol. B 11, 2493–2496 (1993) https://doi.org/10.1116/1.586653
J. Vac. Sci. Technol. B 11, 2497–2501 (1993) https://doi.org/10.1116/1.586654
J. Vac. Sci. Technol. B 11, 2502–2508 (1993) https://doi.org/10.1116/1.586655
J. Vac. Sci. Technol. B 11, 2509–2513 (1993) https://doi.org/10.1116/1.586656
J. Vac. Sci. Technol. B 11, 2514–2518 (1993) https://doi.org/10.1116/1.586657
J. Vac. Sci. Technol. B 11, 2519–2523 (1993) https://doi.org/10.1116/1.586658
J. Vac. Sci. Technol. B 11, 2524–2527 (1993) https://doi.org/10.1116/1.586659
J. Vac. Sci. Technol. B 11, 2528–2531 (1993) https://doi.org/10.1116/1.586660
J. Vac. Sci. Technol. B 11, 2532–2537 (1993) https://doi.org/10.1116/1.586661
J. Vac. Sci. Technol. B 11, 2538–2543 (1993) https://doi.org/10.1116/1.586662
J. Vac. Sci. Technol. B 11, 2544–2547 (1993) https://doi.org/10.1116/1.586663
J. Vac. Sci. Technol. B 11, 2548–2551 (1993) https://doi.org/10.1116/1.586621
J. Vac. Sci. Technol. B 11, 2552–2555 (1993) https://doi.org/10.1116/1.586622
J. Vac. Sci. Technol. B 11, 2556–2559 (1993) https://doi.org/10.1116/1.586623
J. Vac. Sci. Technol. B 11, 2560–2564 (1993) https://doi.org/10.1116/1.586624
J. Vac. Sci. Technol. B 11, 2565–2569 (1993) https://doi.org/10.1116/1.586625
J. Vac. Sci. Technol. B 11, 2570–2573 (1993) https://doi.org/10.1116/1.586626
J. Vac. Sci. Technol. B 11, 2574–2578 (1993) https://doi.org/10.1116/1.586627
J. Vac. Sci. Technol. B 11, 2579–2583 (1993) https://doi.org/10.1116/1.586628
J. Vac. Sci. Technol. B 11, 2584–2587 (1993) https://doi.org/10.1116/1.586629
J. Vac. Sci. Technol. B 11, 2588–2591 (1993) https://doi.org/10.1116/1.586630
J. Vac. Sci. Technol. B 11, 2592–2596 (1993) https://doi.org/10.1116/1.586631
J. Vac. Sci. Technol. B 11, 2597–2602 (1993) https://doi.org/10.1116/1.586632
J. Vac. Sci. Technol. B 11, 2603–2606 (1993) https://doi.org/10.1116/1.586633
J. Vac. Sci. Technol. B 11, 2607–2611 (1993) https://doi.org/10.1116/1.586634
J. Vac. Sci. Technol. B 11, 2612–2614 (1993) https://doi.org/10.1116/1.586635
J. Vac. Sci. Technol. B 11, 2615–2620 (1993) https://doi.org/10.1116/1.586636
J. Vac. Sci. Technol. B 11, 2621–2624 (1993) https://doi.org/10.1116/1.586637
J. Vac. Sci. Technol. B 11, 2625–2628 (1993) https://doi.org/10.1116/1.586638
J. Vac. Sci. Technol. B 11, 2629–2632 (1993) https://doi.org/10.1116/1.586639
J. Vac. Sci. Technol. B 11, 2633–2636 (1993) https://doi.org/10.1116/1.586640
J. Vac. Sci. Technol. B 11, 2637–2640 (1993) https://doi.org/10.1116/1.586641
J. Vac. Sci. Technol. B 11, 2641–2644 (1993) https://doi.org/10.1116/1.586642
J. Vac. Sci. Technol. B 11, 2645–2650 (1993) https://doi.org/10.1116/1.586578
J. Vac. Sci. Technol. B 11, 2651–2658 (1993) https://doi.org/10.1116/1.586579
J. Vac. Sci. Technol. B 11, 2659–2664 (1993) https://doi.org/10.1116/1.586580
J. Vac. Sci. Technol. B 11, 2665–2668 (1993) https://doi.org/10.1116/1.586581
J. Vac. Sci. Technol. B 11, 2669–2674 (1993) https://doi.org/10.1116/1.586582
J. Vac. Sci. Technol. B 11, 2675–2679 (1993) https://doi.org/10.1116/1.586583
J. Vac. Sci. Technol. B 11, 2680–2685 (1993) https://doi.org/10.1116/1.586584
J. Vac. Sci. Technol. B 11, 2686–2691 (1993) https://doi.org/10.1116/1.586585
J. Vac. Sci. Technol. B 11, 2692–2696 (1993) https://doi.org/10.1116/1.586586
J. Vac. Sci. Technol. B 11, 2697–2699 (1993) https://doi.org/10.1116/1.586587
J. Vac. Sci. Technol. B 11, 2700–2704 (1993) https://doi.org/10.1116/1.586588
J. Vac. Sci. Technol. B 11, 2705–2713 (1993) https://doi.org/10.1116/1.586589
J. Vac. Sci. Technol. B 11, 2714–2719 (1993) https://doi.org/10.1116/1.586590
J. Vac. Sci. Technol. B 11, 2720–2724 (1993) https://doi.org/10.1116/1.586591
J. Vac. Sci. Technol. B 11, 2725–2732 (1993) https://doi.org/10.1116/1.586592
J. Vac. Sci. Technol. B 11, 2733–2740 (1993) https://doi.org/10.1116/1.586593
J. Vac. Sci. Technol. B 11, 2741–2745 (1993) https://doi.org/10.1116/1.586594
J. Vac. Sci. Technol. B 11, 2746–2753 (1993) https://doi.org/10.1116/1.586595
J. Vac. Sci. Technol. B 11, 2754–2757 (1993) https://doi.org/10.1116/1.586596
J. Vac. Sci. Technol. B 11, 2758–2761 (1993) https://doi.org/10.1116/1.586597
J. Vac. Sci. Technol. B 11, 2762–2767 (1993) https://doi.org/10.1116/1.586598
J. Vac. Sci. Technol. B 11, 2768–2772 (1993) https://doi.org/10.1116/1.586599
J. Vac. Sci. Technol. B 11, 2773–2778 (1993) https://doi.org/10.1116/1.586600
J. Vac. Sci. Technol. B 11, 2779–2782 (1993) https://doi.org/10.1116/1.586601
J. Vac. Sci. Technol. B 11, 2783–2788 (1993) https://doi.org/10.1116/1.586602
J. Vac. Sci. Technol. B 11, 2789–2793 (1993) https://doi.org/10.1116/1.586603
J. Vac. Sci. Technol. B 11, 2794–2797 (1993) https://doi.org/10.1116/1.586604
J. Vac. Sci. Technol. B 11, 2798–2806 (1993) https://doi.org/10.1116/1.586605
J. Vac. Sci. Technol. B 11, 2807–2811 (1993) https://doi.org/10.1116/1.586606
J. Vac. Sci. Technol. B 11, 2812–2817 (1993) https://doi.org/10.1116/1.586607
J. Vac. Sci. Technol. B 11, 2818–2822 (1993) https://doi.org/10.1116/1.586608
J. Vac. Sci. Technol. B 11, 2823–2828 (1993) https://doi.org/10.1116/1.586609
J. Vac. Sci. Technol. B 11, 2829–2833 (1993) https://doi.org/10.1116/1.586610
J. Vac. Sci. Technol. B 11, 2834–2838 (1993) https://doi.org/10.1116/1.586611
J. Vac. Sci. Technol. B 11, 2839–2844 (1993) https://doi.org/10.1116/1.586612
J. Vac. Sci. Technol. B 11, 2845–2849 (1993) https://doi.org/10.1116/1.586613
J. Vac. Sci. Technol. B 11, 2850–2854 (1993) https://doi.org/10.1116/1.586614
J. Vac. Sci. Technol. B 11, 2855–2861 (1993) https://doi.org/10.1116/1.586615
J. Vac. Sci. Technol. B 11, 2862–2866 (1993) https://doi.org/10.1116/1.586616
J. Vac. Sci. Technol. B 11, 2867–2871 (1993) https://doi.org/10.1116/1.586617
J. Vac. Sci. Technol. B 11, 2872–2875 (1993) https://doi.org/10.1116/1.586618
J. Vac. Sci. Technol. B 11, 2876–2880 (1993) https://doi.org/10.1116/1.586619
J. Vac. Sci. Technol. B 11, 2881–2887 (1993) https://doi.org/10.1116/1.586620
J. Vac. Sci. Technol. B 11, 2888–2896 (1993) https://doi.org/10.1116/1.586556