The authors report the compositional dependence of the direct and indirect band gaps of pseudomorphic Ge1−xySixSny alloys on Ge and GaAs with (001) surface orientation determined from deformation potential theory and spectroscopic ellipsometry measurements. The effects of alloying Ge with Si and Sn and the strain dependence of the band gaps at the Γ, Δ, and L conduction band minima are discussed. Deformation potential theory predicts an indirect to direct crossover in pseudomorphic Ge1−yxSixSny alloys on Ge or GaAs only for very high Sn concentrations between 15% and 20%. No indirect to direct cross-over in pseudomorphic Ge1−ySny alloys (x = 0) on Ge or GaAs was found for practically approachable Sn compositions (y < 25%). The predictions for the compositional dependence of the E0, E1, and E1 + Δ1 band gaps were validated for pseudomorphic Ge1−ySny alloys on Ge using spectroscopic ellipsometry. The complex pseudodielectric functions of pseudomorphic Ge1−ySny alloys grown on Ge by molecular beam epitaxy were determined from Fourier transform infrared and ultraviolet-visible ellipsometry in the 0.1–6.6 eV energy range of Sn contents up to 11%, to investigate the compositional dependence of the band gaps. Critical point energies and related parameters were obtained by analyzing the second derivative spectra of the dielectric function of the Ge1−ySny epilayers. Sn composition, thickness, and strain of the Ge1−ySny epilayers on Ge were characterized by high resolution x-ray diffraction. The E0, E1, and E1 + Δ1 band gaps of pseudomorphic Ge1−ySny alloys on Ge obtained from ellipsometry are in good agreement with the theoretical predictions.

Germanium-tin alloys are attractive as an electronic and optoelectronic material, because they are compatible with silicon and form a direct band gap at sufficiently large tin concentrations between 6% and 10%.1 Adding silicon to this alloy to form the ternary compound Ge1−xySixSny has the added advantage that the lattice constant and band gap are tunable independently.2 Such alloys find applications as photodetectors3 and semiconductor lasers.4 

Most Ge1−xySixSny alloys for device applications have been grown as relaxed epilayers, usually on Si substrates.1,3,4 In such relaxed epilayers, the strain is relieved at the substrate/epilayer interface by the formation of misfit dislocations. These dislocations also form a cross-hatched network leading to rough surfaces and tilted crystal mosaics.1 The dislocations are expected to form nonradiative recombination centers reducing the carrier lifetimes, increasing dark currents, and reducing light emission efficiency.

It is therefore interesting to ask, if similar beneficial electronic properties can also be achieved using pseudomorphic Ge1−xySixSny alloys. A few such studies have been performed on epitaxial layers grown using molecular beam epitaxy (MBE)5 and chemical vapor deposition.6 Unfortunately, band structure calculations based on deformation potentials indicate that such pseudomorphic alloys cannot become direct.7,8

In this manuscript, we explore the Si-Ge-Sn parameter space with deformation potential calculations to determine if a suitable alloy composition and substrate can be found to yield a direct band gap for a pseudomorphic Ge1−xySixSny. Using detailed band structure charts, we show that this is not the case. Even for very high Sn content (>20%), the direct gap is never significantly lower than the indirect gap. We confirm our results for binary Ge1−ySny alloys with spectroscopic ellipsometry measurements to determine the critical-point energies of E0, E1, and E1 + Δ1 transitions. We expand on prior work by others5 to discuss the impact of alloy disorder on the excitonic effects contributing to the E1 transitions.

Several groups have reported the compositional dependence of the various band gaps of relaxed Ge1−xySixSny alloys at room temperature.2,9–14E0Γ is the direct band gap at the Γ-point. EiL and EiΔ are the indirect band gaps between the valence band (VB) maximum at Γ and the conduction band (CB) minima at the L-point and along Δ. E1 and E1 + Δ1 are the direct band gaps at or near the L-point split by spin–orbit interactions of the VB. The compositional dependence of the various room temperature band gaps of the relaxed (unstrained) Ge1−xySixSny alloys can be expressed as

EGe1xySixSny(x,y)=EGe(1xy)+ESix+ESnybGeSny(1xy)bGeSix(1xy)bSiSnxy,
(1)

where Ej are the corresponding band gaps of the elements and bjk (j, k = Si, Ge, Sn) the bowing parameters defining the deviation of the band gap from the linear interpolation. Gaps and bowing parameters are given in Table I for the various gaps.

Table I.

Deformation potentials, band gaps, and bowing parameters for Ge, Si, and Sn and their alloys used in the model, in units of eV. Deformation potential parameters a, b, [Ξd+(1/3)Ξu]L,ΞuΔ, and [Ξd+(1/3)Ξu]Δ were taken from Refs. 22, and 25–27. The band gaps E0Γ,EiL,EiΔ and related parameters were taken from Refs. 2, 9, 10, and 28–31. The E1, E1 + Δ1 band gaps and related parameters were taken from Refs. 9 and 11. The asterisk indicates that the value of Ge was used for our calculations. Elastic constants Cij are in units of GPa from Ref. 11.

GeSiSnbGeSibGeSnbSiSn
a −9.75 −10.12 −9.75* — — — 
b −2.3 −2.2 −2.3* — — — 
[Ξd+13Ξu]L −3.6 −3.6* −3.6* — — — 
ΞuΔ 9.0 8.6 9.0* — — — 
[Ξd+13Ξu]Δ 1.31 1.5 1.31* — — — 
E0Γ 0.796 4.090 −0.413 0.210 2.46 13.2 
EiL 0.655 1.930 0.006 0.0 1.03 0.0 
EiΔ 0.900 1.120 0.900 0.21 0.21 0.0 
E1 2.120 — 1.270 — 1.650 — 
E1 + Δ1 2.310 — 1.770 — 1.050 — 
Δ0 0.300 0.043 0.800 — — — 
C11 128.5 166.0 69.0 — — — 
C12 48.3 63.9 29.3 — — — 
GeSiSnbGeSibGeSnbSiSn
a −9.75 −10.12 −9.75* — — — 
b −2.3 −2.2 −2.3* — — — 
[Ξd+13Ξu]L −3.6 −3.6* −3.6* — — — 
ΞuΔ 9.0 8.6 9.0* — — — 
[Ξd+13Ξu]Δ 1.31 1.5 1.31* — — — 
E0Γ 0.796 4.090 −0.413 0.210 2.46 13.2 
EiL 0.655 1.930 0.006 0.0 1.03 0.0 
EiΔ 0.900 1.120 0.900 0.21 0.21 0.0 
E1 2.120 — 1.270 — 1.650 — 
E1 + Δ1 2.310 — 1.770 — 1.050 — 
Δ0 0.300 0.043 0.800 — — — 
C11 128.5 166.0 69.0 — — — 
C12 48.3 63.9 29.3 — — — 

By convention, our figures always use the VB maximum as our zero energy level. Under hydrostatic strain, this choice implies that the absolute deformation potential for the VB aVB is zero. Theory shows that aVB is small and its sign is not known.15 Under shear strain, when the VB splits, our figures still use the highest VB maximum as our energy reference level, which leads to an unphysical value of aVB. The actual value of aVB does not matter for our results, since we only report band gaps and splittings.

The compositional dependence of the CBs can then be obtained from the dependence of the corresponding band gaps of the alloys. To take into account how these bands and band gaps are changed in pseudomorphic alloys, we must first calculate the strain tensor caused by the lattice mismatch using continuum elasticity theory. Then, we calculate band gap shifts and splittings using deformation potentials.

The lattice parameters of relaxed Ge1−xySixSny alloys were calculated using a linear interpolation (Vegard's law) from the lattice parameters aj of the elements

aGe1xySixSnyrel=xaSi+yaSn+(1xy)aGe+θGeSn(1xy)y+θGeSi(1xy)x+θSiSnxy,
(2)

with small quadratic deviations from linearity described by the bowing parameters θjk. Although extensive work has been done to characterize the compositional dependence of the lattice parameters of Ge1−ySny alloys, a discrepancy exists in the literature over the value of θGeSn.3,16–18 According to most recent findings,16,17,19,20 the bowing parameter θGeSn is very small and Vegard's Law (θGeSn = 0) can be used to accurately calculate the lattice parameters of Ge1−ySny alloys. The bowing parameter for the lattice constant of Ge1−xSix alloys θGeSi = –0.026 (see Ref. 21); and θSiSn was assumed to be zero, justified by the low Si and Sn content.

Depending on composition, the lattice parameter of relaxed Ge1−xySixSny will be larger, equal to (lattice matched to Ge), or smaller than the lattice parameter of the Ge substrate. Under pseudomorphic growth conditions, Ge1−xySixSny on Ge experiences a biaxial stress along the interface due to the lattice mismatch between the alloy layer and the Ge substrate, creating an in-plane strain given by

ϵ(x,y)=aGeaGe1xySixSnyrelaGe1xySixSnyrel.
(3)

Within continuum elasticity theory and for (001) surface orientation, the pseudomorphic alloy layer is tetragonally deformed on the Ge substrate and the out-of-plane strain

ϵ(x,y)=2(C12C11)Ge1xySixSnyϵ(x,y)
(4)

is related to ϵ(x,y) through the ratio of the elastic constants C12/C11. For the elements, the elastic constants Cmn were taken from the literature,22–24 see Table I, and scaled linearly with composition

CmnGe1xySixSny=xCmnSi+yCmnSn+(1xy)CmnGe.
(5)

The strain resulting from biaxial stress in the (001) surface has two components: The hydrostatic strain ϵH shifts the CB positions and the [001] shear strain ϵS lifts the degeneracy of some electronic bands. They are related to the in-plane and out-of-plane strain through22 

ϵH(x,y)=[ϵ(x,y)+2ϵ(x,y)]/3,
(6)
ϵS(x,y)=[ϵ(x,y)ϵ(x,y)]/3.
(7)

In the absence of shear strain, the heavy (v1) and light hole (v2) bands are degenerate at the Γ point. Spin-orbit interactions separate them from the split-off band (v3). The [001] shear strain lifts the degeneracy of the VB edge, leading to an additional splitting. The energy positions of the top three VBs at the Γ point can be expressed as22,32–34

Ev1=Δ02+32bϵS+12Δ02+6Δ0bϵS+(9bϵS)2,
(8)
Ev2=3bϵS,
(9)
Ev3=Δ02+32bϵS12Δ02+6Δ0bϵS+(9bϵS)2.
(10)

The sign of the shear strain ϵS determines whether v1 or v2 is the highest VB. Note that the [001] shear deformation potential b for the VB has a negative value. Δ0 is the spin-orbit splitting of the VB at the Γ point. Its compositional dependence was obtained by linearly interpolating the elemental end values, see Table I 

Δ0Ge1xySixSny=xΔ0Si+yΔ0Sn+(1xy)Δ0Ge.
(11)

The energy shifts of the CB at the Γ and L points due to the hydrostatic deformation can be calculated using25,26,35,36

ΔEcΓ=3aϵHandΔEcL=3[Ξd+13Ξu]LϵH,
(12)

where a and [Ξd+(1/3)Ξu]L are the hydrostatic deformation potentials for the CB at the Γ and L points, respectively. The [001] shear strain does not split the CB at Γ (because it is nondegenerate) or at the L-point.

At the Δ-minimum, however, we have to consider both hydrostatic and shear contributions. The [001] shear strain splits the CB at the six Δ minima into a doublet and a quadruplet, in addition to the hydrostatic strain shift. The energies can be expressed as25,26,35,36

ΔEcΔ2=2ϵSΞuΔ+3[Ξd+13Ξu]ΔϵH,
(13)
ΔEcΔ4=ϵSΞuΔ+3[Ξd+13Ξu]ΔϵH,
(14)

where ΞuΔ is the [001] shear deformation potential and [Ξd+(1/3)Ξu]Δ the hydrostatic deformation potential of the CB at the Δ minima.

Combining the compositional dependence of the band gaps of the relaxed (unstrained) ternary alloys, given by Eq. (1), with the energy shifts and splittings of the CBs and VBs under strain using deformation potential theory, the compositional dependence of the band gaps of pseudomorphic Ge1−xySixSny on Ge at the Γ, L, and Δ CB minima can be obtained. All parameters used for the calculation are listed in Table I. Results are shown in Fig. 1.

Fig. 1.

(Color online) Band structure maps (energy in eV vs composition) of pseudomorphic Ge1−xySixSny alloys on Ge for band gaps at the (a) Γ, (b) L, and (c) Δ CB minima.

Fig. 1.

(Color online) Band structure maps (energy in eV vs composition) of pseudomorphic Ge1−xySixSny alloys on Ge for band gaps at the (a) Γ, (b) L, and (c) Δ CB minima.

Close modal

The band gaps at the Γ, L, and Δ minima as a function of Si and Sn compositions show a similar qualitative behavior: The band gaps are widening with increasing Si and narrowing with increasing Sn content, as expected. In Fig. 1, the thick solid line, y = 0.3x, indicates the lattice matched compositions of Ge1−xySixSny on Ge, reasonably consistent with the previously reported value y = 0.27x (see Ref. 2). The small discrepancy is caused by slightly different bowing parameters used in the calculation of the lattice parameters. This line separates a positively strained (tensile) region from a negatively strained (compressive) region. A Ge-like band gap between 0.66 and 0.82 eV can be obtained for unstrained Ge1−xySixSny by varying the Si and Sn content.

A first-order singularity (kink) of the band gap at L is observed in Fig. 1(b) as the sign of the in-plane strain changes from tensile to compressive. As mentioned earlier, the sign of the in-plane strain determines whether v1 or v2 is the highest VB. The light hole v2, given by Eq. (9), is the highest VB for compressively strained pseudomorphic Ge1−xySixSny alloys on Ge, while the heavy hole v1, given by Eq. (8), becomes the highest VB under tensile in-plane strain. Also, the Δ4 quadruplet is lower in energy than the Δ2 doublet in the compressively strained region, while tensile strain makes the Δ2 energy lower. Therefore, the band gap EiΔ at the Δ minimum is associated with the Δ4 quadruplet under compressive strain, while the Δ2 doublet determines EiΔ in tensile pseudomorphic Ge1−xySixSny on Ge. Hence, the behaviors of the highest VB and the lowest CB at the Δ minimum with respect to strain explain the singularity in the predicted band gaps when the sign of the strain changes.

The smallest band gap, either direct or indirect, of pseudomorphic Ge1−xySixSny alloys on Ge is shown in Fig. 2. The dashed-dotted curve between 15% and 20% tin represents an indirect to direct band gap crossover: Above this line, pseudomorphic Ge1−xySixSny on Ge becomes a direct band gap material. This condition requires a very large Sn content, which has not yet been achieved experimentally due to the low solubility of Sn in Ge and Si. The dashed line, y = 0.71x – 0.12, shows a transition of the smallest band gap from the L valley (Ge like) to the Δ valley of the CB (Si like). The smallest band gap is associated with the L-valley of the CB (Ge like) in the region bounded by the dashed-dotted and dashed lines.

Fig. 2.

(Color online) Compositional dependence of the lowest band gap (either direct or indirect) of pseudomorphic Ge1−xySixSny alloys on Ge. (Contour lines: Energy in eV).

Fig. 2.

(Color online) Compositional dependence of the lowest band gap (either direct or indirect) of pseudomorphic Ge1−xySixSny alloys on Ge. (Contour lines: Energy in eV).

Close modal

As a special case, we consider pseudomorphic Ge1−ySny alloys grown on Ge (x = 0), see Fig. 3. This figure shows the position of the top three VB maxima calculated from Eqs. (8)–(10) and the various band gaps E0Γ,EiL,EiΔ2, and EiΔ4 from Eqs. (1) and (12)–(14) versus Sn content We clearly see that the indirect gap EiL is lower than the direct gap E0Γ for y < 25%, indicating that pseudomorphic Ge1−ySny alloys on Ge will not become a direct band gap material for practically achievable Sn compositions, which is consistent with the models recently reported.31,37

Fig. 3.

(Color online) Energies of the three top valence bands at the Γ point (v1, v2, v3); conduction band minima at Γ (E0Γsolid), L(EiLdashed), and Δ (EiΔdotted) in pseudomorphic Ge1−ySny alloys on Ge as a function of Sn content calculated using Eqs. (8)–(14). The reference energy (0 eV) was chosen as the valence band maximum for any composition and shear strain.

Fig. 3.

(Color online) Energies of the three top valence bands at the Γ point (v1, v2, v3); conduction band minima at Γ (E0Γsolid), L(EiLdashed), and Δ (EiΔdotted) in pseudomorphic Ge1−ySny alloys on Ge as a function of Sn content calculated using Eqs. (8)–(14). The reference energy (0 eV) was chosen as the valence band maximum for any composition and shear strain.

Close modal

There is strong interest in growing Ge1−xySixSny alloys on Ge buffered Si substrates instead of directly on a Ge substrate.38 The Ge buffer on Si is under tensile biaxial stress because of the different thermal expansion coefficients of Si and Ge,39 which can be accurately modeled, assuming full relaxation of the Ge buffer at the growth temperature Tg (of the buffer) and no additional relaxation while cooling down.40 The thermal strain increases the in-plane lattice parameter of the Ge buffer, which in turn affects the strain of the pseudomorphic Ge1−xySixSny alloy layer grown on top of the Ge buffer. This reduces the compressive strain in the pseudomorphic Ge1−xySixSny on the Ge buffer and thus lowers the critical Si and Sn contents needed to achieve a direct band gap material. Increasing the growth temperature of the Ge buffer increases its tensile strain, which reduces the critical Sn content more, but even the highest possible growth temperature of the Ge buffer (melting point of Ge, Tg= 1200 K) reduces the critical Sn content for the indirect to direct transition by only 1%. In Figs. S1 and S2 of the supplementary material,60 we show the band gaps of Ge1−xySixSny alloys grown pseudomorphically on Ge buffered Si substrates, where the Ge buffer was grown at Tg = 770 K. For such alloys, the strain-free condition for the alloy composition becomes y = 0.3x + 0.01.

For a sample with 19% Si and 6% Sn grown on a Ge virtual substrate, our calculations predict a direct gap E0 of about 1.02 eV, somewhat larger than photoluminescence results by Wendav et al.,41 shown by the symbol in Fig. S1. Effects of residual strain, errors in composition (obtained by Rutherford backscattering), and nonuniform composition are probably too small to explain this discrepancy. However, we note that the photoluminescence peak in Ref. 41 is quite broad. Due to microscopic statistical alloy fluctuations, one expects a redshift of the photoluminescence peak relative to the onset of absorption measured by ellipsometry. Indeed, our calculations agree well with the high-energy shoulder of the photoluminescence peak, see Figs. 3 and 4 in Ref. 41. We therefore believe that our calculations are not in conflict with the results of Ref. 41.

Fig. 4.

(Color online) Real (dashed) and imaginary (solid) parts of the complex dielectric function of pseudomorphic Ge1−ySny on Ge vs photon energy determined from ellipsometry.

Fig. 4.

(Color online) Real (dashed) and imaginary (solid) parts of the complex dielectric function of pseudomorphic Ge1−ySny on Ge vs photon energy determined from ellipsometry.

Close modal

Similarly, one can also grow Ge1−xySixSny alloys pseudomorphically on a bulk GaAs substrate.42 Since the GaAs lattice constant is slightly smaller than that of Ge, growth on GaAs reduces the tensile strain or increases the compressive strain of Ge1−xySixSny alloys compared to growth on bulk Ge. For such alloys on GaAs, the strain-free condition for the alloy composition becomes y = 0.3x – 0.01. In Figs. S3 and S4 of the supplementary material, we show the band gaps of Ge1−xySixSny alloys grown pseudomorphically on bulk GaAs. To achieve a direct band gap in pseudomorphic Ge1−xySixSny alloys on GaAs, a slightly higher tin content is required than for similar pseudomorphic alloys grown on bulk Ge.

Finally, we also discuss the compositional dependence of the E1 and E1 + Δ1 interband transitions in pseudomorphic Ge1−ySny alloys (x = 0) on Ge. These transitions occur at the L-point of the Brillouin zone and along the Λ direction. They are easily observed in the optical constants of Ge and related materials using spectroscopic ellipsometry measurements.40 The strain dependence of these transitions is given by5,6,11,22

E1s=E10+Δ12+ΔEH(Δ1)24+(ΔES)2,
(15)
(E1+Δ1)s=(E1+Δ1)0Δ12+ΔEH+(Δ1)24+(ΔES)2,
(16)

where the superscripts s and 0 denote the band gaps of the strained and relaxed alloys, respectively. The spin-orbit splitting Δ1 of the VB at the L point is taken as the difference between the E1 and E1 + Δ1 energies with parameters in Table I. Note the negative bowing for the spin-orbit splitting Δ1, which is common for semiconductor alloys.9,43 ΔEH and ΔES are the energy shifts due to hydrostatic and shear strain, respectively, calculated using

ΔEH=3D11ϵHandΔES=6D33ϵS,
(17)

where D11=5.4eV and D33=3.8eV are the hydrostatic and shear deformation potentials for Ge1−ySny alloys taken from Ref. 11 (significantly lower than for bulk Ge). The sign of D33 affects the intensities of the two critical points (CPs)22 (as discussed below) and therefore we follow the sign convention from Ref. 22. The band gaps of the relaxed alloys and other parameters were taken from the literature and are listed in Table I. As explained below, our own experimental values for these deformation potentials are slightly different, but agree within the errors, and therefore we used the parameters established in Ref. 11 for our calculations.

To avoid the complexity of the ternary Ge1−xySixSny system with too many compositional parameters to be determined precisely, pseudomorphic Ge1−ySny binary alloy layers on Ge were prepared by MBE to validate the theory described in Sec. II. These epilayers were grown using a modified EPI 620 MBE system with a base pressure of 1.3 × 10−8 Pa and utilizing Knudsen thermal effusion cells with pyrolytic BN crucibles for both Ge and Sn. Intrinsic (001) Ge substrates were prepared by wet chemical cleaning44 before quickly being loaded into the MBE introduction chamber and taken to ultrahigh vacuum. The substrates were slowly heated to 450 °C overnight, then taken to 650 °C for one hour before individually being transferred into the main MBE growth chamber. Each wafer was flash heated to 850 °C for 10 min, then cooled to the growth temperature between 150 and 250 °C (as measured via thermocouple) prior to opening the Ge and Sn cell shutters for growth. The Sn composition was varied by changing the Sn effusion cell temperature while keeping the Ge cell temperature constant across all growths, achieving a growth rate of 0.6 to 0.7 nm/min.

A PANalytical Empyrean diffractometer, operated at 45 kV and 40 mA, was used for the high resolution x-ray diffraction analysis of Ge1−ySny epitaxial layers. Our high resolution configuration consists of a two-bounce Ge(220) hybrid monochromator, which offers a high-intensity well-collimated beam of monochromatic Cu Kα1 radiation (1.5406 Å) and a three-bounce Ge (220) analyzer in front of the Xe proportional detector. We acquired symmetric (004) ω – 2θ diffraction curves and 2θ/ω – 2θ reciprocal space maps (RSMs) for symmetric (004) and asymmetric (2¯2¯4) grazing exit reflections at room temperature to investigate the pseudomorphic nature, crystalline quality, lattice parameters, and thicknesses of the layers.

The optical properties of the Ge1−ySny alloys were characterized using spectroscopic ellipsometry with two ellipsometers for different spectral ranges. The ellipsometric angles ψ and Δ were acquired from 0.5 to 6.6 eV with 0.01 eV steps at four angles of incidence (60°, 65°, 70°, 75°) on a J.A. Woollam vertical variable angle-of-incidence rotating-analyzer ellipsometer45 with a computer-controlled Berek waveplate compensator, as described elsewhere.46 To reduce experimental errors, all data were obtained by averaging two-zone measurements with equal and opposite polarizer angles. In the infrared spectral range from 250 to 7000 cm−1, we measured on a Woollam FTIR-VASE ellipsometer, which is based on a fixed analyzer (0° and 180°) and polarizer (±45°) and a rotating compensator, at the same four angles of incidence. In the FTIR experiments, the spectral resolution was set to 16 cm−1 with long signal averaging (three measurement cycles, each with 15 spectra per compensator revolution, and 20 scans per spectrum) to improve the signal to noise ratio. The ellipsometric angles (ψ and Δ) and the Fresnel reflectance ratio ρ=eiΔtanψ are related to the pseudorefractive index n̂ and the pseudodielectric function ϵ̂=n̂2 of the sample through

ρ=(n̂cosϕ0cosϕ1)(cosϕ0+n̂cosϕ1)(n̂cosϕ0+cosϕ1)(cosϕ0n̂cosϕ1),
(18)

where ϕ0 is the angle of incidence and ϕ1 the angle of refraction.

The dielectric functions ϵ(ω) of pseudomorphic Ge1−ySny alloys on Ge were obtained by analyzing the ellipsometric angles with a multilayer model (GeO2/Ge1−ySny/Ge). ϵ(ω) for GeO2 and Ge was used in tabulated form.47 The dielectric functions of Ge1−ySny were described with a parametric oscillator model,48 which imposes Kramers–Kronig consistency between the real and imaginary parts of ϵ. In the first step of the fit, the oxide and Ge1−ySny layer thicknesses and all parameters in the parametric oscillator model for Ge1−ySny were adjusted. In the second step, all parameters were kept fixed at the values obtained in the first step, and the data were fitted again at each measured photon energy by taking the values of ϵ1 and ϵ2 for Ge1−ySny as adjustable parameters (known as point-by-point fit) to obtain the final tabulated dielectric function of Ge1−ySny. We confirmed that the results from the second step, shown in Fig. 4, were still Kramers-Kronig consistent. Redshifting of the dielectric function and broadened CPs with respect to bulk Ge with increasing Sn percentage indicates the alloying and strain effects of Sn on the Ge band structure.

Our main focus here was to investigate the compositional dependence of the CPs associated with the E0, E1, and E1 + Δ1 optical transitions. The E1 and E1 + Δ1 CPs can be described using an expression for a mixture of a two-dimensional minimum and a saddle point49,50

ϵ(ω)=CAln(ωEgiΓ)eiϕ,
(19)

where ω is the photon energy, A the amplitude, Eg the CP energy, Γ the broadening parameter, and ϕ the excitonic phase angle, which describes the amount of mixing. The contribution of the CPs to the dielectric function can be enhanced by analyzing the second derivatives of ϵ. The real and imaginary parts of the tabulated dielectric function obtained by point-by-point fitting were numerically differentiated and smoothed using ten Savitzky–Golay coefficients for second-order derivatives with a polynomial degree of three to obtain a good signal to noise ratio without distorting the line shape.51 The second derivative spectra of the dielectric function for the Ge1−ySny were fitted using Eq. (19). Both E1 and E1 + Δ1 were fitted simultaneously and the excitonic phase angle ϕ was forced to take the same value for both CPs.

Fig. 5.

(Color online) Experimental data (solid) and model (dashed) of the ellipsometric angles Ψ and Δ for pseudomorphic Ge0.89Sn0.11 on Ge vs photon energy in the infrared region obtained by merging data from two instruments. The same data are also shown as a pseudodielectric function in supplementary material, Fig. S5.

Fig. 5.

(Color online) Experimental data (solid) and model (dashed) of the ellipsometric angles Ψ and Δ for pseudomorphic Ge0.89Sn0.11 on Ge vs photon energy in the infrared region obtained by merging data from two instruments. The same data are also shown as a pseudodielectric function in supplementary material, Fig. S5.

Close modal

The poor signal to noise ratio of the ellipsometric angles ψ and Δ obtained from FTIR ellipsometry between 0.1 and 0.9 eV makes the second derivative analysis of the tabulated dielectric function impractical. A different approach has to be followed to extract the compositional dependence of the E0 band gap: We calculated the second derivatives of the parametric dielectric function as D'Costa et al.9 For a given sample, two data sets from 0.5 to 3 eV and from 0.1 to 0.9 eV, taken on two instruments under slightly different conditions (Fig. 5), were fitted simultaneously using a single model to obtain the parametric dielectric function of the Ge1−ySny alloy layer, assuming two slightly different surface oxide thicknesses. This parametric dielectric function was then used for the second derivative line shape analysis and fitted with a three dimensional critical point9 

ϵ(ω)=CAeiϕ(ωEg+iΓ)1/2.
(20)

High resolution x-ray diffraction was used to characterize the crystalline quality, composition, strain, and thickness of the Ge1−ySny epilayers on Ge. ω – 2θ scans of symmetric (004) reflections showed two peaks, see the inset in Fig. 6(a). The sharp peak near 33.0° arises from the Ge substrate. The broader peak corresponding to the Ge1−ySny epilayer is shifted to lower angles (away from the Ge peak) as the Sn composition increases, as a result of the increased out-of-plane lattice constant a of the epilayer due to composition and biaxial compressive stress. The peak separation δθ is related to the ratio aGe/a. Assuming that the epilayer is not tilted relative to the Ge substrate, which we confirmed by (004) symmetric RSMs, a can be calculated from Ref. 52: aGe/a=1+δθcotθ, where θ is the Bragg angle of bulk Ge. From the out-of-plane lattice constant a and the in-plane lattice constant a=aGe (pseudomorphic condition), we calculated the in-plane strain

ϵ=aaa+2(C12C11)Ge1ySnya,
(21)

and the relaxed lattice constant

aGe1ySnyrel=aϵ+1,
(22)

from which the tin content y could be determined using Vegard's law, see Eq. (2) and the solid line in Fig. 7. The resulting value y is plotted along the horizontal axis in our figures showing experimental results and also listed in Table II.

Fig. 6.

(Color online) (a) High-resolution x-ray diffraction (2¯2¯4) grazing exit reciprocal space map showing contours of equal intensity of a Ge0.904Sn0.096 layer on Ge. The Ge substrate and the Ge1−ySny layer peaks have the same Q indicating that the epilayer is fully strained. Inset: Logarithmic intensity vs diffraction angle for the symmetric (004) ω-2θ x-ray reflections. (b) Atomic force microscopy image of the Ge1−ySny surface showing an RMS roughness of 1.6 nm.

Fig. 6.

(Color online) (a) High-resolution x-ray diffraction (2¯2¯4) grazing exit reciprocal space map showing contours of equal intensity of a Ge0.904Sn0.096 layer on Ge. The Ge substrate and the Ge1−ySny layer peaks have the same Q indicating that the epilayer is fully strained. Inset: Logarithmic intensity vs diffraction angle for the symmetric (004) ω-2θ x-ray reflections. (b) Atomic force microscopy image of the Ge1−ySny surface showing an RMS roughness of 1.6 nm.

Close modal
Fig. 7.

(Color online) Compositional dependence of the lattice parameter of relaxed Ge1−ySny alloys calculated from Vegard's law shown in Eq. (2) (solid) and out-of-plane lattice parameter a of pseudomorphic Ge1−ySny alloys on Ge (dashed) from Eqs. (2)–(4). The dotted line shows the Ge lattice constant. Symbols show the in-plane and out-of-plane lattice constants a and a determined from (2¯2¯4) grazing exit reciprocal space maps and the relaxed lattice constant from Eqs. (21)–(22).

Fig. 7.

(Color online) Compositional dependence of the lattice parameter of relaxed Ge1−ySny alloys calculated from Vegard's law shown in Eq. (2) (solid) and out-of-plane lattice parameter a of pseudomorphic Ge1−ySny alloys on Ge (dashed) from Eqs. (2)–(4). The dotted line shows the Ge lattice constant. Symbols show the in-plane and out-of-plane lattice constants a and a determined from (2¯2¯4) grazing exit reciprocal space maps and the relaxed lattice constant from Eqs. (21)–(22).

Close modal
Table II.

Sn composition y and thickness t from (004) x-ray diffraction; in-plane (ϵ) and out-of-plane strain (ϵ) from (2¯2¯4) reciprocal space maps. Band gaps E0Γ, E1, E1 + Δ1, and thickness from spectroscopic ellipsometry. Also growth temperature Tg.

y (%)Tg (°C)t (nm)ϵ(%)ϵ (%)E0Γ(eV)E1 (eV)E1 + Δ1 (eV)t (nm)
0.0 (Ge) — — — — 0.803 2.116 2.314 — 
1.9 ± 0.1 250  −0.26 ± 0.02 0.19 ± 0.02 0.749 2.080 2.295 344 ± 2 
5.7 ± 0.1 200 150 ± 10 −0.81 ± 0.02 0.61 ± 0.02 0.679 2.011 2.272 146 ± 4 
7.3 ± 0.1 200 91 ± 4 −1.05 ± 0.04 0.79 ± 0.03 0.639 1.956 2.251 92 ± 3 
7.4 ± 0.1 175 100 ± 10 −1.04 ± 0.04 0.79 ± 0.03 0.634 1.962 2.254  
7.5 ± 0.1 150 82 ± 2 −1.05 ± 0.05 0.79 ± 0.04 0.638 1.956 2.252 84 ± 2 
7.6 ± 0.1 250 80 ± 4 –1.10 ± 0.03 0.83 ± 0.02 0.632 1.957 2.252 90 ± 1 
8.4 ± 0.1 150 54 ± 3 −1.20 ± 0.05 0.90 ± 0.04 0.626 1.950 2.263 54 ± 1 
9.6 ± 0.1 150 97 ± 3 −1.38 ± 0.04 1.04 ± 0.03 0.596 1.934 2.244 104 ± 1 
11.0 ± 0.1 150 110 ± 10 −1.64 ± 0.03 1.24 ± 0.02 0.575 1.879 2.233 109 ± 1 
y (%)Tg (°C)t (nm)ϵ(%)ϵ (%)E0Γ(eV)E1 (eV)E1 + Δ1 (eV)t (nm)
0.0 (Ge) — — — — 0.803 2.116 2.314 — 
1.9 ± 0.1 250  −0.26 ± 0.02 0.19 ± 0.02 0.749 2.080 2.295 344 ± 2 
5.7 ± 0.1 200 150 ± 10 −0.81 ± 0.02 0.61 ± 0.02 0.679 2.011 2.272 146 ± 4 
7.3 ± 0.1 200 91 ± 4 −1.05 ± 0.04 0.79 ± 0.03 0.639 1.956 2.251 92 ± 3 
7.4 ± 0.1 175 100 ± 10 −1.04 ± 0.04 0.79 ± 0.03 0.634 1.962 2.254  
7.5 ± 0.1 150 82 ± 2 −1.05 ± 0.05 0.79 ± 0.04 0.638 1.956 2.252 84 ± 2 
7.6 ± 0.1 250 80 ± 4 –1.10 ± 0.03 0.83 ± 0.02 0.632 1.957 2.252 90 ± 1 
8.4 ± 0.1 150 54 ± 3 −1.20 ± 0.05 0.90 ± 0.04 0.626 1.950 2.263 54 ± 1 
9.6 ± 0.1 150 97 ± 3 −1.38 ± 0.04 1.04 ± 0.03 0.596 1.934 2.244 104 ± 1 
11.0 ± 0.1 150 110 ± 10 −1.64 ± 0.03 1.24 ± 0.02 0.575 1.879 2.233 109 ± 1 

All samples showed (004) Pendellösung fringes around the epilayer peak, indicating a uniform thickness of a high quality (coherent) Ge1−ySny epilayer. The spacing between the fringes can be used to extract the thickness of the epilayer,17,52,53 in good agreement with spectroscopic ellipsometry, see Table II.

Asymmetric (2¯2¯4) grazing exit ω – 2θ/2θ RSMs, shown in Fig. 6(a) for a Ge1−ySny sample with y = 0.096, were also acquired to extract the reciprocal lattice coordinates Q and Q along the [110] and [001] directions of the Ge1−ySny epilayers and to investigate the degree of relaxation of the epilayer on Ge.54 The Ge substrate and the epilayer peaks have the same Q, indicating that the Ge1−ySny epilayer is fully strained to the Ge substrate. Our layers are near the critical thickness reported by Wang et al.,55 but nevertheless fully strained. The AFM characterization of the surface roughness for the same sample is shown in Fig. 6(b). The sample has an RMS roughness of 1.6 nm, indicating the reliability of the optical characterization techniques used in this paper.56 

The Q and Q maxima in the (2¯2¯4) RSMs are related to the out-of-plane

a=QGeQGeSnQGeSnaGe+aGe=aGeQGeQGeSn,
(23)

and in-plane lattice parameters57 

a=QGeQGeSnQGeSnaGe+aGe=aGeQGeQGeSn,
(24)

which are shown by symbols in Fig. 7. The pseudomorphic condition (a=aGe) is satisfied very well. Overall, the (2¯2¯4) XRD results are consistent with the (004) XRD results, which we used to determine composition. Therefore, the relaxed lattice constants calculated from Eqs. (21) and (22) shown by symbols agree well with Vegard's law (solid line).

The sign and magnitude of the in-plane, out-of-plane, hydrostatic, and shear strain calculated from Eqs. (2)–(4), (6), and (7) are shown by lines in Fig. 8. Strains determined from the in-plane and out-of-plane lattice parameters measured by (2¯2¯4) XRD are also shown (symbols). These pseudomorphic Ge1−ySny alloys are described well by continuum elasticity theory with the elastic constants given by Eq. (5).

Fig. 8.

(Color online) Lines show the compositional dependence of the in-plane ϵ, out-of-plane ϵ, hydrostatic ϵH, and shear strain ϵS for pseudomorphic Ge1−ySny alloys on Ge calculated using Eqs. (3), (4), (6), and (7). Symbols indicate the strain derived from (2¯2¯4) XRD.

Fig. 8.

(Color online) Lines show the compositional dependence of the in-plane ϵ, out-of-plane ϵ, hydrostatic ϵH, and shear strain ϵS for pseudomorphic Ge1−ySny alloys on Ge calculated using Eqs. (3), (4), (6), and (7). Symbols indicate the strain derived from (2¯2¯4) XRD.

Close modal

The measured Sn composition and thickness from (004) XRD and the in-plane strain ϵ and out-of-plane strain ϵ from (2¯2¯4) RSMs for pseudomorphic Ge1−ySny alloys on Ge samples are summarized in Table II.

The compositional dependence of the direct and indirect band gaps derived from the bands (in Fig. 3) is shown in Fig. 9 (lines). The E0 band gaps measured by FTIR ellipsometry (•, ) are in excellent agreement with the theoretical predictions. The slight discrepancy with the values reported in Ref. 6 (+), where Ge1−ySny is grown on a Ge buffer layer on Si, may be due in part to the tensile stress caused by the thermal expansion mismatch between the Ge buffer and the Si substrate.40 The resulting strain affects the lattice parameter of the Ge buffer and reduces the compressive strain of the pseudomorphic Ge1−ySny epilayer (dotted). This buffer also is very defective and cannot be described as a single layer with uniform optical constants.6 Finally, while our work used second derivatives to calculate critical point energies, Ref. 6 used a third derivative analysis, which is expected to yield a small systematic shift compared to our second-derivative results.58 

Fig. 9.

(Color online) Compositional dependence of the direct (solid) and indirect (dashed) band gaps of pseudomorphic Ge1−ySny alloys grown on bulk Ge at 300 K, calculated from Eqs. (9) and (12), derived from Fig. 3. Our ellipsometry results (●) and those of Ref. 7 (). The dotted line shows the direct gap for Ge1−ySny grown on a Ge buffer on Si, see Fig. S1(a). +: Direct band gap of pseudomorphic Ge1−ySny grown on relaxed Ge on Si from ellipsometry (Ref. 6).

Fig. 9.

(Color online) Compositional dependence of the direct (solid) and indirect (dashed) band gaps of pseudomorphic Ge1−ySny alloys grown on bulk Ge at 300 K, calculated from Eqs. (9) and (12), derived from Fig. 3. Our ellipsometry results (●) and those of Ref. 7 (). The dotted line shows the direct gap for Ge1−ySny grown on a Ge buffer on Si, see Fig. S1(a). +: Direct band gap of pseudomorphic Ge1−ySny grown on relaxed Ge on Si from ellipsometry (Ref. 6).

Close modal

The compositional dependence of the E1 and E1 + Δ1 energies of pseudomorphic Ge1−ySny alloys on Ge, predicted from Eqs. (15) and (16), is shown in Fig. 10 (dashed). Both are blue shifted compared to relaxed Ge1−ySny alloys (solid); the blue shift is larger for the E1 + Δ1 critical point (CP). Our experimental results from ellipsometry are shown by symbols and also listed in Table II. The agreement is good if the deformation potentials from Ref. 11 are used in the calculation (dashed), but it can be improved slightly with revised values of D11=5.1±0.3eV and D33=4.5±0.1eV (dotted lines in Fig. 10). Within the errors, our deformation potentials are the same as those in Ref. 11.

Fig. 10.

(Color online) Compositional dependence of the E1 (○) and E1 + Δ1 (◇) critical point energies of pseudomorphic Ge1−ySny alloys grown on Ge from ellipsometry (derivative analysis). The solid lines are E1 and E1 + Δ1 for relaxed Ge1−ySny alloys. The dashed lines are for E1 and E1 + Δ1 of pseudomorphically strained Ge1−ySny alloys grown on Ge calculated using deformation potential theory with values from Ref. 11. The dotted lines show the best fit to our energies with the slightly revised deformation potentials listed in the text.

Fig. 10.

(Color online) Compositional dependence of the E1 (○) and E1 + Δ1 (◇) critical point energies of pseudomorphic Ge1−ySny alloys grown on Ge from ellipsometry (derivative analysis). The solid lines are E1 and E1 + Δ1 for relaxed Ge1−ySny alloys. The dashed lines are for E1 and E1 + Δ1 of pseudomorphically strained Ge1−ySny alloys grown on Ge calculated using deformation potential theory with values from Ref. 11. The dotted lines show the best fit to our energies with the slightly revised deformation potentials listed in the text.

Close modal

The small deviation of the E1 CP of the 11% Sn sample from the prediction may be caused by a thickness interference fringe in the pseudodielectric function, which could be removed only partially by our data analysis techniques. It therefore influences the second derivative spectrum of the dielectric function used to determine the CP energies.

Our data analysis also determines the other CP parameters (amplitude, broadening, and phase angle), which are shown in Figs. 11, S6, and S7. The broadenings (see Fig. S6) increase nearly linearly with composition (with small quadratic corrections) due to alloy scattering and statistical or macroscopic compositional fluctuations, which is common in semiconductor alloys.9,43,59 The broadenings for E1 are only slightly smaller than for E1 + Δ1. The phase angle ϕ (see Fig. S7) decreases slightly with increasing Sn content, similar to AlxGa1−xAs alloys,43 where a phase angle below 90 ° indicates a decreasing contribution of excitonic effects to the E1 and E1 + Δ1 transitions due to alloy disorder.43 

Fig. 11.

(Color online) Compositional dependence of amplitudes (A) for E1 and E1 + Δ1 in pseudomorphic Ge1−ySny alloys on Ge, compare Eq. (20). The dashed (E1) and solid (E1 + Δ1) lines are from Fig. 6 in Ref. 5. Trends due to strain and reduction of the excitonic enhancement because of alloy scattering are discussed in the text.

Fig. 11.

(Color online) Compositional dependence of amplitudes (A) for E1 and E1 + Δ1 in pseudomorphic Ge1−ySny alloys on Ge, compare Eq. (20). The dashed (E1) and solid (E1 + Δ1) lines are from Fig. 6 in Ref. 5. Trends due to strain and reduction of the excitonic enhancement because of alloy scattering are discussed in the text.

Close modal

Finally, the amplitudes of the critical points (shown in Fig. 11) show interesting trends. While the E1 + Δ1 amplitude decreases monotonically, the E1 amplitude appears to first increase, and then decrease for y > 0.07. The same trends were also seen (but not discussed) in Ref. 5. The decrease of the E1 amplitudes seen for larger Sn contents is attributed to the decreased enhancement of the transition by excitonic effects, as mentioned above. For low Sn contents, the relative change in amplitudes is driven by strain and given by22ΔA(ϵS)/A0=±6D33ϵS/Δ1 from k·p theory, where the – (+) sign is for the E1 (E1 + Δ1) amplitude. For ϵS = 0.005 (compare Fig. 8) and D33=3.8eV (note the sign), we indeed find a 25% increase in the E1 amplitude for y = 0.07, in agreement with our data. The inline equation also predicts a more rapid initial decrease of the E1 + Δ1 amplitudes for small y, consistent with our data.

In summary, the compositional dependence of the band gaps of pseudomorphic Ge1−xySixSny alloys on Ge and GaAs was calculated using deformation potential theory. We predict an indirect to direct band gap transition only for very large Sn compositions. Specifically, no indirect to direct cross-over can be achieved for pseudomorphic Ge1−ySny on Ge or GaAs with practically approachable Sn (y < 25%) compositions.

Our predictions were confirmed for Ge1−ySny alloys (x = 0) using spectroscopic ellipsometry. The complex pseudodielectric functions of pseudomorphic Ge1−ySny alloys grown on Ge by MBE were measured using FTIR and UV-visible ellipsometry in the 0.1–6.6 eV energy range for Sn contents up to 11%, to investigate the compositional dependence of the band gaps. Critical point energies and related parameters were obtained by analyzing the second derivative spectrum of the dielectric function. The E0Γ, E1, and E1 + Δ1 band gaps of pseudomorphic Ge1−ySny alloys measured from ellipsometry were in good agreement with the theoretical predictions from continuum-elasticity theory and deformation potentials. The broadenings and phase angles versus composition indicate a decrease in the importance of excitonic contributions to E1 for larger tin contents. The critical-point amplitudes are dominated by strain effects for lower tin content and by the decrease of excitonic effects for y > 0.07.

This work was supported by the Air Force Office of Scientific Research (Nos. FA9550-13-1-00222 and FA9550-14-1-0207) and by the Army Research Office (Nos. W911NF-14-1-0072 and W911NF-12-1-0380). Support since 2016 has been provided by the National Science Foundation (No. DMR-1505172).

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See supplementary material at https://doi.org/10.1116/1.5001948 for figures showing the band structure of pseudomorphic Si1-x-yGexSny alloys on Ge buffers and on bulk GaAs substrates. Also for figures showing the pseudo-dielectric function near the direct band gap of a Ge1-ySny alloy with 11% Sn and the broadenings and phase angles of the E1 critical points versus composition for pseudomorphic Ge1-ySny alloys on Ge.

Supplementary Material