A systematic kinetics study of the initial stage band bending of metal/GaAs(110) has been done. At low temperature, independent of metals, enhanced band bending for p‐GaAs and attenuated band bending for n‐GaAs as a function of metal coverage has been observed. For p‐type GaAs the band bending increases very rapidly to a value larger than that for any coverage at room temperature and then returns to the room temperature position at high coverages. It is found that this excess band bending strongly depends on the work functions of the metal deposited on GaAs. In gives 0.4 eV, Al 0.3 eV, Ag 0.2 eV, and Au only shows small excess band bending. Temperature dependence of GaAs initial stage band bending will also be discussed in this paper. The results strongly suggest that there exists another mechanism which appears to be dominant in the initial stage band bending at low temperature where the defect formation is negligible. The transition from this mechanism to the defect mechanism could be observed by increasing either system temperature or metal coverage, or more generally, disturbance to semiconductor surfaces.
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July 1987
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
Research Article|
July 01 1987
Kinetics study of initial stage band bending at metal GaAs(110) interfaces
Renyu Cao;
Renyu Cao
Stanford Electronics Laboratory, Stanford, California 94305
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Ken Miyano;
Ken Miyano
Stanford Electronics Laboratory, Stanford, California 94305
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Tom Kendelewicz;
Tom Kendelewicz
Stanford Electronics Laboratory, Stanford, California 94305
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Ken K. Chin;
Ken K. Chin
Stanford Electronics Laboratory, Stanford, California 94305
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Ingolf Lindau;
Ingolf Lindau
Stanford Electronics Laboratory, Stanford, California 94305
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William E. Spicer
William E. Spicer
Stanford Electronics Laboratory, Stanford, California 94305
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J. Vac. Sci. Technol. B 5, 998–1002 (1987)
Article history
Received:
January 27 1987
Accepted:
April 20 1987
Citation
Renyu Cao, Ken Miyano, Tom Kendelewicz, Ken K. Chin, Ingolf Lindau, William E. Spicer; Kinetics study of initial stage band bending at metal GaAs(110) interfaces. J. Vac. Sci. Technol. B 1 July 1987; 5 (4): 998–1002. https://doi.org/10.1116/1.583835
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