Recent experiments on the formation of Schottky barriers reveal a temperature‐dependent pinning of the Fermi level (EF) which cannot be explained in terms of the current published models. Al, Au, Ag, In, and Sn are evaporated on room temperature (RT) and low temperature (LT=80 K) cleaved n‐ and p‐GaAs(110). We find a substantial decrease in surface metal clustering at LT, leading to more homogeneous films, especially with Al, In, and Sn. Interface mixing and chemical reaction are also partly inhibited. Cancellation of the semiconductor surface relaxation is observed for Al and Sn. From the electronic point of view, low temperature has opposite effects on the pinning rate of EF on n‐ and p‐GaAs. Pinning on n‐GaAs as a function of coverage is dramatically retarded. Pinning on p‐GaAs remains faster than on n‐GaAs, as fast as at RT, faster for Al and In. These asymmetric rates make it impossible to explain the initial stages of Schottky barrier formation for all substrates with a single mechanism. They suggest that several independent but concomitant mechanisms might be at work in the pinning process.
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July 1987
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
Research Article|
July 01 1987
Initial stages of Schottky barrier formation: Temperature effects
K. Stiles;
K. Stiles
Department of Electrical Engineering, Princeton University, Princeton, New Jersey 08544
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A. Kahn;
A. Kahn
Department of Electrical Engineering, Princeton University, Princeton, New Jersey 08544
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D. G. Kilday;
D. G. Kilday
Department of Physics and Synchrotron Radiation Center, University of Wisconsin, Madison, Wisconsin 53706
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G. Margaritondo
G. Margaritondo
Department of Physics and Synchrotron Radiation Center, University of Wisconsin, Madison, Wisconsin 53706
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J. Vac. Sci. Technol. B 5, 987–991 (1987)
Article history
Received:
February 10 1987
Accepted:
April 02 1987
Citation
K. Stiles, A. Kahn, D. G. Kilday, G. Margaritondo; Initial stages of Schottky barrier formation: Temperature effects. J. Vac. Sci. Technol. B 1 July 1987; 5 (4): 987–991. https://doi.org/10.1116/1.583833
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