We have studied the stability of the anodic oxide/Hg1−xCdxTe interface upon annealing with the aid of electrical capacitance–voltage (C–V) measurements, the thermodynamic properties of the Hg–Cd–Te–O system, and Auger sputter profiles. The C–V measurements on metal–insulator–semiconductor (MIS) devices showed a large increase in the positive fixed charge and slow interface traps as well as a conversion from p type to n type upon annealing at 100 °C. The equilibrium phase diagram predicted that any oxide containing Hg and a Te:Cd>1 at the interface will be unstable and react with the Hg1−xCdxTe substrate to form HgTe, Hg, Te, as well as lower x value Hg1−xCdxTe with subsequent degradation of electrical device characteristics. The Auger sputter profiles of thermally stressed oxide films (170 to 220 °C) gave support for these interface reactions with measurements of an enhanced Cd layer (∼150 Å) in the oxide and an enhanced Hg and depleted Cd layer (∼240 Å) in the substrate near the interface.
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July 1987
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
Research Article|
July 01 1987
Thermal stability of the anodic oxide/Hg1−xCdxTe interface Available to Purchase
C. M. Stahle;
C. M. Stahle
Stanford Electronics Laboratories, Stanford, California 94305
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C. R. Helms;
C. R. Helms
Stanford Electronics Laboratories, Stanford, California 94305
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A. Simmons
A. Simmons
Central Research Laboratories, Texas Instruments, Dallas, Texas 75265
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C. M. Stahle
Stanford Electronics Laboratories, Stanford, California 94305
C. R. Helms
Stanford Electronics Laboratories, Stanford, California 94305
A. Simmons
Central Research Laboratories, Texas Instruments, Dallas, Texas 75265
J. Vac. Sci. Technol. B 5, 1092–1096 (1987)
Article history
Received:
February 10 1987
Accepted:
April 07 1987
Citation
C. M. Stahle, C. R. Helms, A. Simmons; Thermal stability of the anodic oxide/Hg1−xCdxTe interface. J. Vac. Sci. Technol. B 1 July 1987; 5 (4): 1092–1096. https://doi.org/10.1116/1.583735
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